05-01-2017 дата публикации
Номер: US20170003602A1
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The present invention provides a method for multiscale patterning of a sample. The method includes: placing the sample in an apparatus having both thermo-optical lithography capability and thermal scanning probe lithography capability; and patterning two patterns onto the sample, respectively by: thermo-optical lithography, wherein light is emitted from a light source onto the sample to heat the latter and thereby write a first pattern that is the largest of the two patterns; and thermal scanning probe lithography, wherein the sample and a heated probe tip are brought in contact for writing a second pattern that has substantially smaller critical dimensions than the first pattern. There is also provided an apparatus for multiscale patterning of a sample. 19. A method for multiscale patterning of a sample () , the method comprising:{'b': 10', '9', '10', '20', '30, 'placing (S) the sample () in an apparatus () having both thermo-optical lithography capability () and thermal scanning probe lithography capability (); and'}{'b': 20', '30', '200', '300', '9, 'patterning (S, S) two patterns (, ) onto the sample (), respectively by{'b': 20', '20', '22', '2', '9', '28', '200', '200', '300, 'sub': 1', '3, 'thermo-optical lithography (, S), wherein light (l, l) is emitted (S) from a light source () onto the sample () to heat the latter and thereby write (S) a first pattern () that is the largest of the two patterns (, ); and'}{'b': 30', '30', '9', '34', '38', '300', '200, 'thermal scanning probe lithography (, S), wherein the sample () and a heated probe tip are brought in contact (S) for writing (S) a second pattern () that has substantially smaller critical dimensions than the first pattern ().'}2202020232434143634349b. The method according to claim 1 , wherein patterning (S) by thermo-optical lithography ( claim 1 , S) comprises adjusting and/or modulating (S claim 1 , S) the light (l claim 1 , l claim 1 , l) according to a signal acquired via the probe tip () claim 1 , ...
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