13-05-2021 дата публикации
Номер: US20210142975A1
Принадлежит:
Electron emitters and method of fabricating the electron emitters are disclosed. According to certain embodiments, an electron emitter includes a tip with a planar region having a diameter in a range of approximately (0.05-10) micrometers. The electron emitter tip is configured to release field emission electrons. The electron emitter further includes a work-function-lowering material coated on the tip. 116.-. (canceled)17. An electron emitter comprising:a tip having a planar region with a diameter in a range of 1 micrometer to <10 micrometers; anda work-function-lowering material coated on the tip.18. The electron emitter of claim 17 , wherein the tip comprises single crystal.19. The electron emitter of claim 18 , wherein the single crystal has a crystal orientation of <100>.20. The electron emitter of claim 18 , wherein the single crystal is one of tungsten claim 18 , molybdenum claim 18 , iridium claim 18 , and rhenium.21. The electron emitter of claim 17 , wherein the tip comprises at least one of a transition-metal-carbide compound or a transition-metal-boride compound claim 17 , wherein the transition-metal-carbide compound is a carbide compound of hafnium claim 17 , zirconium claim 17 , tantalum claim 17 , titanium claim 17 , tungsten claim 17 , molybdenum claim 17 , or niobium claim 17 , and claim 17 , wherein the transition-metal-boride compound is a boride compound of hafnium claim 17 , zirconium claim 17 , tantalum claim 17 , titanium claim 17 , tungsten claim 17 , molybdenum claim 17 , niobium claim 17 , or lanthanum.22. The electron emitter of claim 17 , wherein the work-function-lowering material comprises:at least one of an oxide compound of zirconium, hafnium, titanium, scandium, yttrium, vanadium, lanthanum, praseodymium, neodymium, samarium, europium, gadolinium, terbium, dysprosium, holmium, erbium, ytterbium, lutetium, or thorium, orat least one of a nitride compound of zirconium, titanium, niobium, scandium, vanadium, or lanthanum, orat least ...
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