23-04-2020 дата публикации
Номер: US20200126934A1
Принадлежит:
A thin-film capacitor structure () is joined to an electrode pad surface (S) of an area array integrated circuit () having a plurality of electrode pads (G, P, S) arranged in an area array on the electrode pad surface (S). The thin-film capacitor structure () includes a thin-film capacitor () including a first sheet electrode (), a second sheet electrode (), and a thin-film dielectric layer () formed between the first sheet electrode () and the second sheet electrode (), a first insulating film (), a second insulating film (), and a plurality of through holes (P, G, S). The plurality of through holes (P, G, S) are bored from the first insulating film () to the second insulating film () through the thin-film capacitor () and formed in positions corresponding to the plurality of electrode pads (G, P, S). 1. A thin-film capacitor structure that is joined to an electrode pad surface of an area array integrated circuit having a plurality of electrode pads , arranged in an area array in the electrode pad surface , that include power supply pads , ground pads , and signal pads ,the thin-film capacitor structure comprising:a thin-film capacitor including a first sheet electrode, a second sheet electrode, and a thin-film dielectric layer formed between the first sheet electrode and the second sheet electrode;a first insulating film that insulated the first sheet electrode;a second insulating film that insulates the second sheet electrode; anda plurality of through holes, bored from the first insulating film to the second insulating film through the thin-film capacitor and formed in positions corresponding to the plurality of electrode pads, that include power supply through holes formed in positions corresponding to the power supply pads, ground through holes formed in positions corresponding to the ground pads, and signal through holes formed in positions corresponding to the signal pads.2. The thin-film capacitor structure according to claim 1 , wherein first overhangs ...
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