27-12-2018 дата публикации
Номер: US20180374816A1
Принадлежит:
The present invention has as its object the provision of a bonding wire for semiconductor devices mainly comprised of Ag, in which bonding wire for semiconductor devices, the bond reliability demanded for high density mounting is secured and simultaneously a sufficient, stable bond strength is realized at a ball bond, no neck damage occurs even in a low loop, the leaning characteristic is excellent, and the FAB shape is excellent. To solve this problem, the bonding wire for semiconductor devices according to the present invention contains one or more of Be, B, P, Ca, Y, La, and Ce in a total of 0.031 at % to obtain a 0.180 at %, further contains one or more of In, Ga, and Cd in a total of 0.05 at % to 5.00 at %, and has a balance of Ag and unavoidable impurities. Due to this, it is possible to obtain a bonding wire for semiconductor devices sufficiently forming an intermetallic compound layer at a ball bond interface to secure the bond strength of the ball bond, not causing neck damage even in a low loop, having a good leaning characteristic, and having a good FAB shape. 17-. (canceled)8. Bonding wire for semiconductor devices containing either P of 0.060 at % to 0.180 at % or one or more of Be , B , Ca , Y , La , and Ce , and P in a total of 0.060 at % to 0.180 at % , further containing one or more of In , Ga , and Cd in a total of 0.05 at % to 5.00 at % , and having a balance of Ag and unavoidable impurities.9. The bonding wire for semiconductor devices according to further containing one or more of Ni claim 8 , Cu claim 8 , Rh claim 8 , Pd claim 8 , Pt claim 8 , and Au in a total of 0.01 at % to 5.00 at %.10. The bonding wire for semiconductor devices according to wherein when defining the ratio of the total of the number of atoms of In claim 8 , Ga claim 8 , and Cd with respect to the number of atoms of the metal elements as the second element atomic ratio claim 8 , the second element atomic ratio at a region from the wire surface to 1 nm from the wire surface ...
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