ВЫСОКОВОЛЬТНЫЙ ЭЛЕКТРОСТАТИЧЕСКИЙ ГЕНЕРАТОР

... 1. Высоковольтный электростатический генератор, содержащий узел концентрических электропроводящих полуоболочек (10), разделенных экваториальным зазором (14), по существу с цилиндрической симметрией относительно оси (А-А),отличающийся тем, что вблизи экваториального зазора (14) краевые области (16), по меньшей мере, выбранного поднабора полуоболочек (20) выполнены определенной формы, при которой краевые области радиально внешних полуоболочек (106, 116) поднабора расширяются радиально в сторону от оси, а краевые области (16) радиально внутренних полуоболочек (101, 111) поднабора расширяются радиально внутрь таким образом, что расширяющиеся краевые области расположены, по существу, параллельно линиям (18), равным электростатическим потенциалам вблизи этих краевых областей (16), благодаря чему минимизируется электростатическое напряжение в окрестности расширяющейся краевой области или каждой расширяющейся краевой области.2. Высоковольтный электростатический генератор по п. 1, в котором выбранный ...

ЭЛЕКТРОСТАТИЧЕСКИЙ МИКРОЭЛЕКТРОМЕХАНИЧЕСКИЙ ГЕНЕРАТОР ДЛЯ ПОДЗАРЯДА ХИМИЧЕСКОГО ИСТОЧНИКА ТОКА

Предлагаемое изобретение относится к электротехнике, в частности к микроэлектромеханическим генераторам, преобразующим энергию механических колебаний в электрическую энергию, и может быть использовано для подзаряда химического источника тока. Техническим результатом предлагаемого электростатического микроэлектромеханического генератора для подзаряда химического источника тока является расширение диапазона амплитуд внешних механических колебаний, при которых устройство подзаряжает химический источник тока, а также исключение фазы разряда химического источника тока в процессе работы генератора. Электростатический микроэлектромеханический генератор для подзаряда химического источника тока содержит постоянный конденсатор, первый диод, первый переменный конденсатор, соединенный с катодом первого диода и постоянным конденсатором, а вторым электродом подключенный к отрицательному полюсу источника напряжения, второй диод, подключенный анодом к положительному полюсу источника напряжения, а катодом ...

Elektrische Maschine (Generator oder Motor) fuer statische Elektrizitaet

PROCEDURE AND DEVICE FOR ENERGY EXTRACTION

Selbsterregende Influenzmaschine.

Dispositif de connexion disposé entre une génératrice électrostatique et un appareil devant être alimenté par cette génératrice.

Elektrischer Nichtleiter zur Erzeugung statischer Elektrizität.

GENERATING DEVICE OF VARIABLE CAPACITY FOR the GENERATION Of ELECTRICAL ENERGY AND DEVICE Of ASSISTANCE TO the MOVEMENT OF the Roll of the dice TYPE, INCLUDING It

GENERATING DEVICE OF VARIABLE CAPACITY FOR the GENERATION Of ELECTRICAL ENERGY AND DEVICE Of ASSISTANCE TO the MOVEMENT OF the Roll of the dice TYPE, INCLUDING It

Un dispositif (10) d'assistance au mouvement relatif de deux parties d'un système mécanique, par exemple un roulement à billes ou un dispositif à pignon, est adapté pour former un dispositif à capacité variable, et ainsi permettre la récupération de l'énergie mécanique et la conversion en énergie électrique. A cette fin, l'un au moins parmi les éléments d'entraînement (12, 14) et entraîné (18) du dispositif comprend une zone conductrice (32) séparée d'une distance variable lors du mouvement relatif des éléments (12, 14, 18) l'un par rapport à l'autre des parties conductrices du dispositif, la zone conductrice (32) et les parties conductrices (12, 14, 18, 36) étant couplées à des équipotentiels différents (V1, V).

VIBRATING ELEMENT AND METHOD FOR PRODUCING VIBRATING ELEMENT

... [Problem] To provide a vibrating element that comprises a substrate-side electrode provided on one surface of an insulating substrate and an opposing plate having an opposing electrode arranged in opposition to the substrate-side electrode, the vibrating element performing functions such as impedance reduction, capacitance conversion, and signal amplification while the element itself can be reduced in size. Also provided is a method for producing the vibrating element. [Solution] An upper plate (1) made of silicon monocrystals is arranged in opposition to a substrate-side electrode (2). The upper plate (1) is provided with an integrated circuit part (5) that is formed, for example, by a thermal diffusion method or an ion implantation method, the integrated circuit part being an impurity region of an IC circuit. Thus, with this vibrating element (10), conversion efficiency and productivity are improved and the mounting system is reduced in size.

OUT-OF-PLANE TRAVEL RESTRICTION STRUCTURES

The present disclosure includes structures and methods of forming structures for restricting out-of-plane travel. One example of forming such structures includes providing a first wafer (100, 220) comprising a bond layer of a particular thickness (101, 221) on a surface of a substrate material (105, 225), removing the bond layer (101, 221) in a first area (103-1, 103-2, 223) to expose the surface of the substrate material (105, 225), applying a mask to at least a portion of a remaining bond layer (109-1, 109-4, 229-1, 229-3) and a portion of the exposed surface of the substrate material in the first area (109-2, 109-3, 229-2) to form a second area exposed on the surface of the substrate material (105, 225), etching the second area to form a cavity (110, 230) in the substrate material (105, 225) and the bond layer (101, 221), and forming by the etching, in the cavity (110, 230), a structure (113-1, 113-2, 233 for restricting out-of-plane travel, where the structure (113-1, 113-2, 233) has ...

FIELD CONVERTER FOR THRUST GENERATION

An apparatus for generating an inhomogeneous electric field that can produce thrust having a first electrode constructed of a first conducting material, a second electrode constructed of a second conducting material separated from but in proximity of the first electrode and a first and second dielectric material interposed between the first and second electrodes, the first and second dielectric materials having a high and low mass density, respectively.

Electret element, electromechanical converter and method for manufacturing electret element

An electret element includes: an Si layer, an SiO2 layer formed at a surface of the Si layer; and an electret formed at the SiO2 layer near an interface of the SiO2 layer and the Si layer.

Paste and polymer transducer including coating film formed from same as electrolyte film or electrode films

Paste which is prepared by any solid concentration and is excellent in terms of handleability, applicability, and storage stability; an electrolyte film or electrode film which is an even and highly flexible coating film formed in a desired thickness from the paste through a few repetitions of an application/drying step; and a polymer transducer which can be industrially and economically produced and shows excellent performance. The paste comprises: a solid polyelectrolyte (A) consisting of a block copolymer containing; a polymer block (a-1) which is represented by chemical formula (1) and a polymer block (a-2) which has substantially no ionic group and is rubbery at room temperature; an organic solvent (B) having a boiling point at 150° C. or higher; and non-dissociable particles (C) which are insoluble in the organic solvent (B) and have a major-axis length of 1-100 m and an aspect ratio of 5 or less. The polymer transducer comprises an electrolyte film and a pair of electrode films between ...

Electromechanical transducer device and analyte information acquiring apparatus

To suggest an electromechanical transducer device with a high S/N ratio, an electromechanical transducer device includes a first substrate; electromechanical transducer elements two-dimensionally arrayed on a front surface of the first substrate and configured to provide conversion between acoustic waves and electric signals; an electric wiring substrate that is a second substrate electrically connected with a back surface of the first substrate; a first acoustic matching layer provided between the first substrate and the second substrate; an acoustic attenuating member arranged on a back surface of the second substrate; and a second acoustic matching layer provided between the second substrate and the acoustic attenuating member.

POWER GENERATING ELEMENT AND POWER GENERATOR

An energy harvesting element (10) capable of efficiently generating power is provided. The energy harvesting element generates power by vibration, and includes a first electrode (16a) and a second electrode (16b), a member (12) having a third electrode (13a) electrically connected to the second electrode, and facing the first electrode, and a fourth electrode (13b) relatively fixed to the third electrode without being electrically connected to the third electrode, and electrically connected to the first electrode and facing the second electrode, the member being provided between the first electrode and the second electrode, and an electret provided in one of the first electrode and the third electrode, and one of the second electrode and the fourth electrode.

Универсальное колесо-тренажёр для животных

Изобретение относится к техническим средствам по обеспечению подвижного образа жизни животных в стесненных условиях, например собак в питомниках и приютах. Заряды, образующиеся на диэлектрических выступах и пластинах вследствие трибоэлектрического эффекта, разряжаясь через металлические пластины, синхронно с вращением внутреннего кольца управляют устройствами, подключенными к выходам усилителей. Эти устройства могут синхронно с вращением внутреннего кольца производить различные световые и/или звуковые эффекты, тем самым стимулируя животных к движению. Технический результат заключается в создании дополнительного стимулирующего эффекта с целью повышения подвижности животных в стесненных условиях питомников и приютов. 1 ил.

ЭЛЕКТРОСТАТИЧЕСКИЙ МИКРОЭЛЕКТРОМЕХАНИЧЕСКИЙ ГЕНЕРАТОР ДЛЯ ПОДЗАРЯДА ХИМИЧЕСКОГО ИСТОЧНИКА ТОКА

Изобретение относится к электротехнике. Техническим результатом является упрощение конструкции генератора, уменьшение потерь энергии, а также возможность подзаряда химического источника тока на протяжении всего цикла преобразования энергии. Для этого электростатический микроэлектромеханический генератор для подзаряда химического источника тока содержит первый переменный конденсатор, соединенный с катодом первого диода, а вторым электродом подключенный к отрицательному полюсу источника напряжения, второй диод, подключенный анодом к положительному полюсу источника напряжения, второй переменный конденсатор, соединенный с анодом второго диода и подключенный к положительному полюсу источника напряжения, третий диод, соединенный катодом со вторым электродом второго переменного конденсатора и анодом первого диода. Катод второго диода соединен с катодом пятого диода и подключен к положительному полюсу химического источника тока, анод третьего диода соединен с анодом четвертого диода и подключен ...

MICROELECTROMECHANICAL COMPONENT AND METHOD OF MAKING SAME

Composant micro-électromécanique comprenant un premier substrat électro-conducteur (10), et un second substrat électroconducteur (20) écarté du premier substrat électro-conducteur (10), une première couche diélectrique (11) sur le côté du premier substrat électroconducteur (10) tourné vers le second substrat électro-conducteur (520), une couche d'accumulation de charges (10) sur la première couche diélectrique (11), et une seconde couche diélectrique (13) sur la couche d'accumulation de charges (12).

METHOD FOR PRODUCING CHARGE RETENTION MEDIUM

To provide a process for producing a charge retention medium, with which a coating film (precursor of a charge retention medium) containing a fluorinated copolymer having repeating units based on tetrafluoroethylene and repeating units based on ethylene can easily be formed on the surface of a substrate, even in a case where the surface of the substrate has a complicated shape. A process for producing a charge retention medium (electret 30), which comprises a step of applying a coating composition containing a fluorinated copolymer (A) having repeating units based on tetrafluoroethylene and repeating units based on ethylene, and an organic solvent (C), to a substrate (first substrate 10) to form a coating film.

ПРИБОР С ЭЛЕКТРОДОМ, ПОДКЛЮЧЕННЫМ К СКВОЗНОМУ ПРОВОДУ, И СПОСОБ ЕГО ИЗГОТОВЛЕНИЯ

ЭЛЕКТРОСТАТИЧЕСКИЙ МИКРОЭЛЕКТРОМЕХАНИЧЕСКИЙ ГЕНЕРАТОР ДЛЯ ПОДЗАРЯДА ХИМИЧЕСКОГО ИСТОЧНИКА ТОКА

Изобретение относится к электротехнике, в частности, к микроэлектромеханическим генераторам, преобразующим энергию механических колебаний в электрическую энергию, и может быть использовано для подзаряда химического источника тока. Техническим результатом является усовершенствование конструкции, позволяющее генератору осуществлять подзаряд химического источника тока на протяжении всего цикла преобразования энергии. Электростатический микроэлектромеханический генератор для подзаряда химического источника тока содержит первый диод, первый переменный конденсатор, соединенный первым электродом с катодом первого диода, а вторым электродом подключенный к отрицательному полюсу источника напряжения. Также содержит второй диод, подключенный анодом к положительному полюсу источника напряжения, второй переменный конденсатор, соединенный первым электродом с анодом второго диода и подключенный первым электродом к положительному полюсу источника напряжения. Также содержит третий диод, соединенный катодом ...

ГИБРИДНЫЙ АККУМУЛЯТОР - ТРАНСФОРМАТОР ВОЗОБНОВЛЯЕМОЙ ЭНЕРГИИ (ГАТВЭ) И СПОСОБ ФУНКЦИОНИРОВАНИЯ ГАТВЭ

Изобретение относится к области альтернативной электроэнергетики, использующей возобновляемые источники энергии, и представляет собой гибридный аккумулятор - трансформатор возобновляемой энергии, способный достаточно просто и надежно аккумулировать и трансформировать возобновляемую энергию источников альтернативной электроэнергетики в стандартную электроэнергию переменного тока промышленной частоты с помощью уже существующих электроустановок в составе существующих энергосистем, работающих по диспетчерскому графику нагрузки и потребления для удовлетворения нужд потребителей электроэнергии в любое время суток. 2 н.п. ф-лы, 1 ил.

STROMERZEUGUNGSGERÄT UND STROMERZEUGUNGSMODUL

Eine Stromerzeugungsvorrichtung (1) weist Folgendes auf: eine photoelektrische Umwandlungseinheit (2) mit einer photoelektrischen Umwandlungsschicht (10); eine Elektretschicht (200) zum Halten elektrischer Ladungen; einen Elektret-Leistungsgenerator (3), der aus einem lichtdurchlässigen Material gebildet ist; und eine Isolierschicht (12), die die photoelektrischen Umwandlungsschicht bedeckt und Licht in allen oder in einigen für die photoelektrische Umwandlungsschicht verfügbaren Wellenlängenbändern durchlässt. Die Elektretschicht (200) ist auf der Isolierschicht (12) aufgestapelt.

Electric motor for robot, has rotor plates connected with each other and stator plates connected with each other, where motor is encapsulated using dielectric fluid provided between plates

The motor has rotor and stator plates connected with a shaft and a housing, respectively, where conductor paths are arranged in the plates. The paths form a wheel shape with a core hole and are connected with each other in a conductive manner. The rotor plates are connected with each other and each of the paths is connected with the rotor plates. The stator plates are connected with each other and each of the paths is connected with the stator plates. The paths lie on top of each other in the plates, where the motor is encapsulated using a dielectric fluid provided between the plates.

Improvements relating to apparatus for treating ailments in human beings and animalsby physical energy rays and treatment of liquids for internal or external application for treatment of such ailments

... 517,287. Brushes combined with apparatus for producing radiations. WHALE, J. July 18, 1938, No. 21227. [Class 19] [Also in Groups VI, III and XXXV] An appliance -for treating ailments in living beings and for treating liquids, e.g., wine, to communicate to them therapeutic properties comprises a vessel 1, preferably of glass containing an inert gas, a loose globule of mercury 2 and a collector 3 conductively connected to a metal plate 4 and so mounted that it is at all times out of contact with the mercury globule. Agitation of the appliance is stated to produce radiations of electrical nature. A number of such devices may be mounted by their stem.portions 9 at points 1 on discs 13 rotated from a gear 11. In an apparatus for treating liquids shown in Fig. 6 a device is rotatably mounted within a vessel 16 and is caused to rotate by means of a stream of liquid impinging on vanes 21. In an alternative construction the vessel containing a mercury globule may be in the form of an annulus having ...

Electrostatic group

DEVICE HAVING ELECTRODE CONNECTED TO THROUGH WIRE AND MANUFACTURING METHOD THEREOF

A capacitive transducer comprises: a substrate which has a first surface and a second surface opposite to the first surface and a through wire penetrating the gap between the first and second surfaces; and a cell which is installed on the first surface and has a first electrode and a second electrode installed to be separated from the first electrode. A conductive protective film is arranged on the surface of the through wire in the first and second surfaces. COPYRIGHT KIPO 2016 ...

STATIC INDUCTION-TYPE VIBRATION POWER GENERATION DEVICE AND METHOD FOR PRODUCING SAME

... [Problem] To provide a static induction-type vibration power generation device, and a method for producing the same, in which the amount of power generated can be enhanced and, in particular, an external electric field can be efficiently extracted from a spontaneous polarization electret. [Solution] In the present invention, two electroconductive plates are arranged spaced apart from each other. A charged body composed of a spontaneous polarization electret (6) having a predetermined thickness is positively charged on a lower surface (3) and negatively charged on an upper surface (2), and is provided between the electroconductive plates so as to be in contact with one of the electroconductive plates. The configuration is such that displacement of the interval between the electroconductive plates in a direction perpendicular to each of the surfaces of the spontaneous polarization electret (6) causes the electrostatic capacitance to change and thereby generates power. The absolute value of ...

MEMS device comprising an under bump metallization

The present invention concerns a MEMS device comprising an under bump metallization (4)UBMto contact the device via flip-chip bonding with a substrate. The UBM (4) is placed on the surface of the MEMS device and close to the corners of the surface. Further, the shape of the UBM (4) is adapted to the shape of the corners.

ACTUATOR AND ACTUATOR MANUFACTURING METHOD

There is provided an actuator including a displacement unit made of a mixture of a silicone-containing elastomer and an ionic liquid; and multiple electrodes provided to apply an electric field to a part or whole of the displacement unit. Here, the displacement unit is deformed by applying a voltage between the multiple electrodes.

IMPACT PRODUCING ACTUATOR AND TOUCH PANEL

An impact producing actuator can vary energy to be applied to a shape memory alloy, depending on, for example, an ambient temperature. The impact producing actuator has a drive signal generation unit that generates a drive signal based on a single pulse signal generated in response to an input operation and outputs the drive signal, a switching element whose switching operation is controlled by the drive signal, and a shape memory alloy through which electric current passes for a period of time during which the switching element is turned on or off. The impact producing actuator is configured such that the period of time during which the switching element is turned on or off varies depending on the ambient temperature.

ЭЛЕКТРОСТАТИЧЕСКИЙ МИКРОЭЛЕКТРОМЕХАНИЧЕСКИЙ ГЕНЕРАТОР ДЛЯ ПОДЗАРЯДА ХИМИЧЕСКОГО ИСТОЧНИКА ТОКА

Предлагаемое изобретение относится к электротехнике, в частности к микроэлектромеханическим генераторам, преобразующим энергию механических колебаний в электрическую энергию, и может быть использовано для подзаряда химического источника тока. Техническим результатом предлагаемого электростатического микроэлектромеханического генератора для подзаряда химического источника тока является расширение диапазона амплитуд внешних механических колебаний, при которых устройство подзаряжает химический источник тока. Технический результат достигается за счет того, что электростатический микроэлектромеханический генератор для подзаряда химического источника тока содержит постоянный конденсатор, первый диод, первый переменный конденсатор, соединенный с катодом первого диода и постоянным конденсатором, а вторым электродом подключенный к отрицательному полюсу источника напряжения, второй диод, подключенный анодом к положительному полюсу источника напряжения, а катодом подключенный к отрицательному полюсу ...

ЭЛЕКТРОСТАТИЧЕСКИЙ МИКРОЭЛЕКТРОМЕХАНИЧЕСКИЙ ГЕНЕРАТОР ДЛЯ ПОДЗАРЯДА ХИМИЧЕСКОГО ИСТОЧНИКА ТОКА

Предлагаемое изобретение относится к электротехнике, в частности к микроэлектромеханическим генераторам, преобразующим энергию механических колебаний в электрическую энергию, и может быть использовано для подзаряда химического источника тока. Техническим результатом предлагаемого электростатического микроэлектромеханического генератора для подзаряда химического источника тока является расширение диапазона амплитуд внешних механических колебаний, при которых устройство подзаряжает химический источник тока, а также исключение фазы разряда химического источника тока в процессе работы генератора. Электростатический микроэлектромеханический генератор для подзаряда химического источника тока содержит постоянный конденсатор, первый диод, первый переменный конденсатор, соединенный с катодом первого диода и постоянным конденсатором, а вторым электродом подключенный к отрицательному полюсу источника напряжения, второй диод, подключенный анодом к отрицательному полюсу химического источника тока, а ...

СПОСОБ ЭЛЕКТРОМЕХАНИЧЕСКОГО ПРЕОБРАЗОВАНИЯ ЭНЕРГИИ И ЭЛЕКТРОПОЛЕВОЙ ДВИЖИТЕЛЬ НА ЕГО ОСНОВЕ

... 1. Способ электромеханического преобразования энергии путем взаимодействия тел, являющихся источником электрического поля, отличающийся тем, что преобразуют энергию электрического поля, действующего между механически связанными между собой заряженными подвижными обкладками электрического конденсатора, в механическую энергию их взаимного вращательного или поступательного движения, для чего указанные обкладки располагают в диэлектрической среде и разворачивают друг относительно друга таким образом, чтобы образующаяся при этом между обкладками результирующая сила электростатического взаимодействия была ориентирована в направлении требуемого их перемещения.2. Способ по п.1, отличающийся тем, что силу взаимодействия обкладок регулируют изменением величины их заряда.3. Способ по п.1, отличающийся тем, что все или некоторые обкладки являются моноэлектретами или выполнены из отдельных одинаково заряженных изолированных проводящих участков.4. Способ по любому из пп.1-3, отличающийся тем, что внешние ...

Improvements in and relating to electrostatic charging devices

... 673,794. Electrostatic generators. CHADFIELD, C. R. A. Nov. 13, 1950, No. 27722/50. Class 35. In a reciprocating electrostatic generator operated by depressing a spring - loaded plunger 2, an initial charge is obtained by friction between an insulating section 11 of the plunger and a metal guide bush 8 which also serves as the fixed electrode of a variable condenser whose movable electrode 12 is mounted on the insulation section. The potential of the charge is increased by separation of the condenser electrodes and, at the end of the plunger stroke, it is transferred through a pin 16 to a cup-shaped output terminal 13 mounted on an insulating body 14. The charge may be regulated by axial adjustment of a cylindrical earthed screen 18 by means of a spiral cam groove 21 in the body of the device.

CONTROL PROCEDURE FOR ELECTROSTATIC ACTUATORS

Field converter

FIELD CONVERTER

Methods and devices for producing inhomogeneous electrical fields are disclosed.

ACTUATOR

A motion producing device comprising an output member with a contact surface and a reference member. An actuator member is attached to the reference member, the actuator member having a traction surface and comprising actuator zones, each actuator zone being energizable to move a corresponding portion of the traction surface to change a contact state of the traction surface with the contact surface depending on an energized state of the actuator zone. An energy source is operatively coupled to the actuator zones for sequentially changing the energized state of the actuator zones. The actuator member provides a torque transmission path between the reference member and the output member.

Method for producing charge retention medium

Provided is a method for producing a charge retention medium, with which it is easy to form a coating containing a fluorine-containing copolymer (precursor for a charge retention medium) having recurring units based on tetrafluoroethylene and recurring units based on ethylene on the surface of a base material, even if the surface of the base material has a complex shape. The method for producing a charge retention medium (electret (30)) includes a step wherein a coating composition containing a fluorine-containing copolymer (A) having recurring units based on tetrafluoroethylene and recurring units based on ethylene and an organic solvent (C) is applied to a base material (first base material (10)), thus forming a coating.

CONTAINER OF SOURCE OF HIGH VOLTAGE

Revolving electric machines

Micro-electromechanical generator and electric apparatus using same

Disclosed is a highly reliable inductive vibration power generator wherein mechanical damping caused by the phenomenon of electrostatic pulling-in (stiction) and the like is suppressed even if the potential of an electret is increased and/or the gap between an electrode and the electret is reduced in order to increase the amount of power generation. The two surfaces of a movable substrate are respectively provided with first electrets and second electrets. By means of providing first electrodes and second electrodes to a lower substrate and an upper substrate and facing the respective electrets with a predetermined gap therebetween, electrostatic force is caused to arise on both sides of the movable substrate, and the pulling of the movable substrate in only one direction is prevented.

Power generating element and power generating device utilizing vibration energy

A power generating element is provided. The power generating element includes an electrode pair and an intermediate layer. The electrode pair includes a first electrode and a second electrode. The intermediate layer is disposed between the first electrode and the second electrode. The intermediate layer is insulating and has a first side facing the first electrode and a second side facing the second electrode. The first electrode and the intermediate layer together operate as a contact/separation mechanism configured to perform a contact/separation operation, when an external force is applied to the power generating element to generate power. In the contact/separation operation, the contact/separation mechanism transitions between a contact or close state in which the first electrode and the first side are brought into contact with each other or close to each other, and a separation state in which the first electrode and the first side are separated from each other.

Method for energy extraction - II

In some embodiments, the illustrative method defines an engine cycle comprising several state changes that allow for a net gain of energy from an underlying source force field. The potential for a net energy gain via the method results from the discovery that a Casimir force system can be rendered non-conservative. This is done by appropriately altering one or more of a variety of physical factors that affect the Casimir force, or by altering any of a variety of environmental factors that affect such physical factors. In various embodiments, the extracted energy is stored, used to power energy-consuming devices or used to actuate a micromechanical device. In one embodiment, the method is implemented using an energy extraction apparatus that comprises two spaced Casimir force-generating boundaries that are operatively coupled to an energy transformation system. The energy transformation system includes a first device that is operable to alter at least one physical factor of the system. The ...

PASTE AND POLYMER TRANSDUCER INCLUDING COATING FILM FORMED FROM SAME AS ELECTROLYTE FILM OR ELECTRODE FILMS

Paste which is prepared by any solid concentration and is excellent in terms of handleability, applicability, and storage stability; an electrolyte film or electrode film which is an even and highly flexible coating film formed in a desired thickness from the paste through a few repetitions of an application/drying step; and a polymer transducer which can be industrially and economically produced and shows excellent performance. The paste comprises: a solid polyelectrolyte (A) consisting of a block copolymer containing; a polymer block (a-1) which is represented by chemical formula (1) and a polymer block (a-2) which has substantially no ionic group and is rubbery at room temperature; an organic solvent (B) having a boiling point at 150°C or higher; and non-dissociable particles (C) which are insoluble in the organic solvent (B) and have a major-axis length of 1 - 100µm and an aspect ratio of 5 or less. The polymer transducer comprises an electrolyte film and a pair of electrode films between ...

СПОСОБ ЭЛЕКТРОМЕХАНИЧЕСКОГО ПРЕОБРАЗОВАНИЯ ЭНЕРГИИ И ЭЛЕКТРОПОЛЕВОЙ ДВИЖИТЕЛЬ НА ЕГО ОСНОВЕ

Способ электромеханического преобразования энергии и электрополевой движитель на его основе относятся к электромашиностроению, в частности к способам и устройствам электромеханического преобразования электрической энергии в механическую и могут найти широкое применение в промышленности, транспорте, бытовой технике, воздухоплавании, космонавтике и других областях человеческой деятельности, заменить существующие неэкономичные двигатели внутреннего сгорания и электрические машины электромагнитной индукции. Согласно изобретению преобразуют энергию электрического поля, действующего между механически связанными между собой заряженными подвижными обкладками электрического конденсатора, в механическую энергию их взаимного вращательного или поступательного движения, для чего указанные обкладки располагают в диэлектрической среде и разворачивают друг относительно друга таким образом, чтобы образующаяся при этом между обкладками результирующая сила электростатического взаимодействия была ориентирована ...

ЭЛЕКТРОСТАТИЧЕСКИЙ МИКРОЭЛЕКТРОМЕХАНИЧЕСКИЙ ГЕНЕРАТОР ДЛЯ ПОДЗАРЯДА ХИМИЧЕСКОГО ИСТОЧНИКА ТОКА

Изобретение относится к области электротехники, а именно к микроэлектромеханическим генераторам, преобразующим энергию механических колебаний в электрическую энергию, и может быть использовано для подзаряда химического источника тока. Повышение надежности работы микроэлектромеханического генератора является техническим результатом изобретения, который достигается за счет того, что электростатический микроэлектромеханический генератор содержит постоянный конденсатор, первый диод, первый переменный конденсатор, соединенный с катодом первого диода и постоянным конденсатором, а вторым электродом подключенный к отрицательному полюсу источника напряжения, второй диод, подключенный анодом к положительному полюсу источника напряжения, а катодом подключенный к отрицательному полюсу химического источника тока, второй переменный конденсатор, соединенный с анодом второго диода и подключенный к положительному полюсу источника напряжения, третий диод, соединенный катодом со вторым электродом второго ...

ЭЛЕКТРОСТАТИЧЕСКИЙ МИКРОЭЛЕКТРОМЕХАНИЧЕСКИЙ ГЕНЕРАТОР ДЛЯ ПОДЗАРЯДА ХИМИЧЕСКОГО ИСТОЧНИКА ТОКА

Изобретение относится к электротехнике, в частности к микроэлектромеханическим генераторам, преобразующим энергию механических колебаний в электрическую энергию, и может быть использовано для подзаряда химического источника тока. Техническим результатом является расширение диапазона амплитуд внешних механических колебаний, при которых устройство подзаряжает химический источник тока, а также исключение фазы разряда химического источника тока в процессе работы генератора. Электростатический микроэлектромеханический генератор для подзаряда химического источника тока содержит постоянный конденсатор, первый диод, подключенный анодом к отрицательному полюсу химического источника тока, первый переменный конденсатор, соединенный с катодом первого диода и постоянным конденсатором, а вторым электродом подключенный к отрицательному полюсу источника напряжения, второй диод, подключенный анодом к положительному полюсу источника напряжения, а катодом соединенный со вторым электродом постоянного конденсатора ...

ЭЛЕКТРОСТАТИЧЕСКИЙ ДВИГАТЕЛЬ

Изобретение относится к области машиностроения и может быть использовано в тех областях промышленности, где требуется малошумный мотор. Электростатический двигатель состоит из ротора, выполненного из лопаток, размещенных на валу двигателя. В корпусе лопаток размещен механизм движения, воздействующий на лопатки, выполненный в виде толкателя, составленный из основания и штока. Толкатель сопряжен с лопатками пружинами и снабжен пластинами с отрицательным зарядом, выполненными в виде моноэлектрета. При этом пластины, моноэлектреты, в работе контактируют и взаимодействуют с пластинами лопаток, выполненными из металла, соединенными с источником высокого напряжения, размещенным в корпусе лопаток. 2 ил.

ПРЕОБРАЗОВАТЕЛЬ ПОЛЯ ДЛЯ ГЕНЕРИРОВАНИЯ ТЯГИ

... 1. Устройство для генерирования неоднородного электрического поля, которое может создавать тягу, содержащее:первый электрод, выполненный из первого проводящего материала;второй электрод, выполненный из второго проводящего материала, отделенный от, но расположенный вблизи первого электрода; ипервый и второй диэлектрический материал, вставленный между первым и вторым электродами, причем первый и второй диэлектрические материалы имеют высокую и низкую плотность, соответственно.2. Устройство по п.1, в котором первый и второй диэлектрические материалы имеют, по существу, одинаковую диэлектрическую постоянную.3. Устройство по п.1, в котором первый и второй диэлектрические материалы имеют диэлектрическую постоянную 5000 или более.4. Устройство по п.1, в котором первый и второй диэлектрические материалы имеют диэлектрическую постоянную 10000 или более.5. Устройство по п.1, в котором первый и второй диэлектрические материалы имеют диэлектрическую постоянную 50000 или более.6. Устройство по п.1, ...

Mechanischer Resonator

Ein mechanischer Resonator (1) hat einen elastisch verformbaren Biegekörper (2) auf, der an einer Befestigungsstelle (5) mit einer Halterung (6) verbunden ist und eine von der Befestigungsstelle (5) beabstandete, relativ zu dieser durch elastische Biegeverformung des Biegekörpers (2) auslenkbare Auslenkstelle (7) aufweist. Der Resonator (1) hat mindestens einen Aktor, der wenigstens zwei relativ zueinander verstellbare Aktorstellen hat, die derart mit dem Biegekörper (2) verbunden sind, dass dieser durch Betätigen des Aktors um eine Biegeachse (9) elastisch biegbar ist. Der Biegekörper (2) hat mindestens zwei Biegekörperabschnitte (3a, 3b), die mittels einer Schwenklagerung um eine Schwenkachse (4) relativ zueinander verschwenkbar miteinander verbunden sind. Die Schwenkachse (4) ist derart quer zur Biegeachse (9) angeordnet, dass die Schwenklagerung durch Verschwenken der Biegekörperabschnitte (3a, 3b) relativ zueinander mit von der Biegeverformung abhängigen Zug- und/oder Druckkärften ...

Elektrostatische Mikromotorvorrichtung.

ANSTEUERUNGSVERFAHREN FÜR ELEKTROSTATISCHE BETÄTIGER

High voltage spherical electrostatic electrode - is formed by helium filled balloon covered by metal tape network

DEVICES FOR STORING ENERGY IN THE MECHANICAL DEFORMATION OF NANOTUBE MOLECULES AND RECOVERING THE ENERGY FROM MECHANICALLY DEFORMED NANOTUBE MOLECULES

An energy storage device includes at least one nanotube. An energy storage mechanism converts energy external to the device into the appropriate levels of strain on the at least one nanotube to produce stored energy, and an energy recovery mechanism converts the energy released by relaxing the at least one nanotube back to energy external to the device.

MECHANICAL META-MATERIALS

The present invention provides meta-materials 60 with an actively controllable mechanical property. The meta-material includes a deformable structure 65 and a set of activation elements 66. The activation elements are controllable between multiple states. The meta- material 60 includes a first value for a mechanical property when one or more of the activation elements is in the first activation state and includes a second value for the mechanical property when the activation elements have been activated to the second activation state. In one aspect, the meta-material 60 resembles a composite material where the connectivity between the component materials or shape and arrangement of the component materials is dynamically controllable so as to affect a mechanical property of the meta-material 60.

OUT-OF-PLANE TRAVEL RESTRICTION STRUCTURES

The present disclosure includes structures and methods of forming structures for restricting out-of-plane travel. One example of forming such structures includes providing a first wafer 100, 220 comprising a bond layer of a particular thickness 101, 221 on a surface of a substrate material 105, 225, removing the bond layer 101, 221 in a first area 103-1, 103-2, 223 to expose the surface of the substrate material 105, 225, applying a mask to at least a portion of a remaining bond layer 109-1, 109-4, 229-1, 229-3 and a portion of the exposed surface of the substrate material in the first area 109-2, 109-3, 229-2 to form a second area exposed on the surface of the substrate material 105, 225, etching the second area to form a cavity 110, 230 in the substrate material 105, 225 and the bond layer 101, 221, and forming by the etching, in the cavity 110, 230, a structure 113-1, 113-2, 233 for restricting out-of-plane travel, where the structure 113-1, 113-2, 233 has a particular height from a ...

MECHANICAL META-MATERIALS

The present invention provides meta-materials with an actively controllable mechanical property. The meta-material includes a deformable structure and a set of activation elements. The activation elements are controllable between multiple states. The meta-material includes a first value for a mechanical property when one or more of the activation elements is in the first activation state and includes a second value for the mechanical property when the activation elements have been activated to the second activation state. In one aspect, the meta-material resembles a composite material where the connectivity between the component materials or shape and arrangement of the component materials is dynamically controllable so as to affect a mechanical property of the meta-material.

Flexible conductive material and transducer, flexible wiring board, and electromagnetic shield using the same

A flexible conductive material includes an elastomer, a conductive agent filled in the elastomer, and an adsorbent fixed inside the elastomer and able to adsorb ionic material. With the flexible conductive material, ionized impurities are unlikely to transfer to an adherend such as a dielectric film. Thus, leakage current during application of voltage decreases. Accordingly, by forming an electrode and a wiring with the flexible conductive material, leakage current can be reduced, and a transducer and a flexible wiring board having excellent durability can be produced. In addition, using the flexible conductive material, an electromagnetic shield can be produced having a small leakage current.

SOFT-BODIED FLUIDIC ACTUATOR

An actuator includes a first enclosure, a dielectric fluid in the first enclosure, and a second enclosure in fluid communication with the first enclosure. An elastic membrane defines at least a portion of the second enclosure. A first electrical conductor is positioned along a first side of the first enclosure. A second electrical conductor is positioned along a second side of the first enclosure opposite the first side. The second conductor is spaced apart from the first conductor. The conductors are connected to a power source. Application of electrical energy to the first and second conductors produces an attractive force between the conductors. Motion of the conductors toward each other pressurizes the dielectric fluid so as to force the dielectric fluid to flow from the first enclosure into the second enclosure. The flow of the dielectric fluid exerts a force on the elastic membrane which expands the elastic membrane.

ELECTROSTATIC ACTUATOR

The present invention is directed to providing an electrostatic actuator that can generate a large electrostatic force even if composed of a ribbon-shaped electrode film. In an electrostatic actuator 10, 20 including a ribbon-shaped first electrode film 11 and a ribbon-shaped second electrode film 12, a plurality of first electrodes 1 formed of the first electrode film 11 and a plurality of second electrodes 2 formed of the second electrode film 12 are folded and laminated between one end 13 and the other end 14 of the electrostatic actuator 10, 20, and the plurality of first electrodes 1 include a pair of end electrodes 1a that are adjacent to each other in a direction in which the first electrode film 11 extends in a ribbon shape and are respectively positioned at the one end 13 and the other end 14 when laminated and at least one intermediate electrode 1b that is positioned between the end electrodes 1a when laminated.

ВЫСОКОВОЛЬТНЫЙ ЭЛЕКТРОСТАТИЧЕСКИЙ ГЕНЕРАТОР

Изобретение относится к области высоковольтных электростатических ускорителей частиц. Высоковольтный электростатический генератор содержит узел концентрических электропроводящих полуоболочек (10), разделенных экваториальным зазором (14), по существу с цилиндрической симметрией относительно оси (А-А). Вблизи экваториального зазора (14) краевые области (16), по меньшей мере, выбранного поднабора полуоболочек (20) выполнены определенной формы, при которой краевые области радиально внешних полуоболочек (106, 116) поднабора расширяются радиально в сторону от оси, а краевые области (16) радиально внутренних полуоболочек (101, 111) поднабора расширяются радиально внутрь таким образом, что расширяющиеся краевые области являются по существу выровненными параллельно линиям (18) равных электростатических потенциалов вблизи этих краевых областей (16). Технический результат - снижение электростатического напряжения в окрестности расширяющейся краевой области. 2 н. и 11 з.п. ф-лы, 10 ил.

ЭЛЕКТРОСТАТИЧЕСКИЙ ГЕНЕРАТОР ВЫСОКОГО НАПРЯЖЕНИЯ

Электростатический генератор высокого напряжения (ЭГВН) относится к устройствам, предназначенным для генерации высокого напряжения или высоковольтных электрических разрядов и может использоваться для генерации импульсов тока высокого напряжения в системах зажигания двигателей внутреннего сгорания. В настоящем изобретении в качестве ЭГВН используется электрический конденсатор переменной емкости (ЭКПЕ), емкость которого зависит от расстояния между электродами ЭКПЕ, главным отличием которого от аналогов является дополнительное использование диэлектрического материала с повышенной электрической прочностью, специально помещаемого в пространство, образующееся между электродами ЭКПЕ при увеличении расстояния между ними в процессе работы ЭКПЕ. Это необходимо для того, чтобы уменьшить величину напряжения электрического пробоя между электродами ЭКПЕ и тем самым во много раз увеличить рабочее напряжение и мощность ЭГВН. Наиболее перспективным является использование для этих целей жидкого диэлектрика ...

Reactionless electric-field thruster

The invention consists of a reaction-less thrust engine (or thruster) which can be built into any vehicle for land, sea, air, or space transport. Construction is based on a plurality of pairs of concentric cylindrical electrode sectors 1,2 embedded in high dielectric strength insulators and combined into layers, as indicated in Fig 4. It has no moving parts, produces no noise and does not require any propellant to be ejected, but is propelled solely by shaped electric fields 4 assisted by choice of different dielectrics 5,6.. The power requirement is a DC or low frequency AC voltage supply in the range of thousands to tens of thousands of volts to produce a high thrust force and low current to compensate leakage current of the insulating dielectric materials and perhaps to provide accelerating power. Fig 5 shows a further layered arrangement comprising semi-circular section assembled in a sinusoidal manner.

HIGH-VOLTAGE ELECTROSTATIC GENERATOR

A high-voltage electrostatic generator comprising an assembly of concentric electrically conductive half-shells (10) separated by an equatorial gap (14), essentially with cylindrical symmetry about an axis (A-A). Adjacent to the equatorial gap (14), edge regions (16) of at least a selected subset of the half-shells (20) are shaped.

Electret and electrostatic induction conversion device

Generating electricity by the air friction

Electric field generating appts. - generates field whose vector is always vertical proving electrical-gravitational fields correlation

ELECTRET AND ELECTROSTATIC INDUCTION CONVERSION DEVICE

To provide an electret having high stability with time and thermal stability of retained electric charge and having excellent charge retention performance, and an electrostatic induction conversion device comprising such an electret. An electret obtained from a composition comprising a compound (A) having a molecular weight of from 50 to 2000 and having at least two polar functional groups, and a polymer (B) having a number average molecular weight of more than 2000 and having reactive functional groups reactive with the above polar functional groups. An electrostatic induction conversion device comprising such an electret.

Switch assisted diode-clamped energy harvesting system for variable capacitance transducers

An electrical energy harvesting system includes at least one variable capacitor, preferably of electro-active polymer, two voltage sources, and a half-bridge network. The voltage sources are arranged in series with an interconnecting node between a first polarity terminal of the first voltage source and a second opposite polarity terminal of the second voltage source. For each variable capacitor the half-bridge network includes a pair of diodes in series with a common node therebetween, connected in parallel with the first voltage source, an inductor connected between the common node and a first terminal of the variable capacitor, a first switch in parallel with the first diode, and a second switch in parallel with the second diode. The second terminal of the variable capacitor is connected to the first polarity terminal of the second voltage source.

Elektrophor

Elektrostatische Maschine

APPARATUS FOR THE PRODUCTION OF ELECTRICITY

... 1509540 Electricity generators F O'SULLIVAN F O'SULLIVAN and C O'SULLIVAN 26 Nov 1975 [26 Nov 1974] 51090/74 Heading H2A An electricity generator comprises an electrically charged fluid jet impinging on electrodes 2 on a member 1, the jet and the member being relatively rotatable, the jet issuing from a nozzle 5 which consitutes another electrode or contacting during its passage to the member 1 an electrically conductive member forming another electrode.

HIGH-VOLTAGE ELECTROSTATIC GENERATOR

A high-voltage electrostatic generator comprising an assembly of concentric electrically conductive half-shells (10) separated by an equatorial gap (14), essentially with cylindrical symmetry about an axis (A-A). Adjacent to the equatorial gap (14), edge regions (16) of at least a selected subset of the half-shells (20) are shaped.

METHOD OF PRODUCING THERMOELECTRIC MODULE

A method of producing a thermoelectric conversion device, provided with: a step of disposing electrodes (4) respectively to opposing surfaces of a pair of current-pressure applying members (2) which face each other; a step of interposing a plurality of members of thermoelectric conversion material (3) between the electrodes (4); and a step of bonding the electrodes (4) to the thermoelectric conversion material (3) by applying pressure to the electrodes (4) and thermoelectric conversion material (3) with the current-pressure applying member (2) while applying current to the electrodes (4) and the thermoelectric conversion material (3). The method of producing a thermoelectric conversion device is further provided with a step of forming intermediate layers (5), which include conductive metal powder and have plasticity, between the electrodes (4) and the thermoelectric conversion material (3).

High voltage spherical electrostatic electrode - is formed by helium filled balloon covered by metal tape network

Method of induction for the actuation controlled of static electricity

PROCEDE ET DISPOSITIF PERMETTANT DE REALISER UN CHAMP ELECTRIQUE

La présente invention a pour objet de présenter un procédé et dispositif permettant de réaliser un champ électrique équipotentiel dont le vecteur champ électrique est dirigé verticalement quelque soit l'orientation du générateur de champ de telle sorte que toute masse plongée ans ce champ équipotentiel est soumise à une accélération de valeur différente de celle produite par la gravité terrestre l'une des conséquences principales de cette propriété étant de pouvoir provoquer à volonté l'allègement ou l'alourdissement des masses plongées dans un tel champ. L'application préférée d'un champ équipotentiel étant l'allègement de masse beaucoup d'autres domaines s'ouvrent à son utilisation comme par exemple aéronautique, manutention, triage, calibrage, stabilisation et concentration axiale d'un champ uniforme, concentration d'énergie à l'intérieur d'une sphère, réduction ou annulation des effets d'inertie ainsi qu'en mécanique, en électronique enregistrement d'effets physiologiques, alarme, détection ...

FIELD CONVERTER

Methods and devices for producing inhomogeneous electrical fields are disclosed.

ELECTROSTATIC INDUCTION POWER GENERATOR

An electrostatic induction generator has a first substrate and a second substrate that can move relative to each other while remaining opposed to each other, an electret provided in the first substrate, and a first electrode and a second electrode provided on a surface side opposed to the electret in the second substrate. A positional relationship between the electret and the first electrode and a positional relationship between the electret and the second electrode change in association with a change of relative positions between the first substrate and the second substrate, whereby an electrostatic capacitance between the electret and the first electrode and an electrostatic capacitance between the electret and the second electrode change to output an electric power. A structure that decreases the electrostatic capacitance between the first electrode and the second electrode is provided between the first electrode and the second electrode.

Electret and electrostatic induction conversion device

To provide an electret having high stability with time and thermal stability of retained electric charge and having excellent charge retention performance, and an electrostatic induction conversion device comprising such an electret. This has been done by providing an electret obtained from a composition comprising a compound (A) having a molecular weight of from 50 to 2000 and having at least two polar functional groups, and a polymer (B) having a number average molecular weight of more than 2000 and having reactive functional groups reactive with the above polar functional groups and an electrostatic induction conversion device comprising such an electret.

Electrostatic actuator and method of driving the same

A first stator is provided with stator electrodes sequentially arranged in a predetermined direction. An extended electrode is mounted on a second stator arranged to face the first stator. A slider is movably arranged between the first and second stators. The slider is provided with a large number of slider electrodes arranged to face the stator electrodes and a second slider electrode facing the extended electrode. The slider electrodes are maintained at the ground potential. A first and second driving voltage are periodically applied to the stator electrodes and to the extended electrode, respectively, which are opposite to each other in phase and are periodically switched between the ground potential and the positive driving voltage. Thus, the slider is moved in a direction while being vibrated.

Concentric wire and tube electrostatic generator

A Static Electrostatic Generator (SEG) is disclosed which produces static charges at high voltage and low current. The SEG is capable of generating positive or negative charges on a metal sphere by reversing the polarity of a DC source. The conversion efficiency of the system is about 47% and its design is simple, lightweight, and easy to manufacture. The SEG is a static device and no mechanical movement is required to produce charges. Also, the design is easily scalable.

LINEARSOLENOID UND HERSTELLUNGSVERFAHREN DAFÜR

Ein Innendurchmesser (a) eines dritten Statorkerns (6) ist größer als ein Innendurchmesser (b) eines zweiten Statorkerns (5). Wenn ein erster Statorkern (4), der zweite Statorkern (5) und der dritte Statorkern (6) in einem inneren Rand einer Spule (2) platziert sind, wird eine Matrize (15) von einer Innenrandöffnung einer ersten Endseite des dritten Statorkerns (6) in den dritten Statorkern (6) eingefügt, um den ersten Statorkern (4), den zweiten Statorkern (5) und den dritten Statorkern (6) in einer radialen Richtung direkt zu positionieren. Deswegen kann eine durch eine Achsenabweichung zwischen dem ersten Statorkern (4), dem zweiten Statorkern (5) und dem dritten Statorkern (6) erzeugte Seitenkraft reduziert werden.

Verfahren zur Erzeugung statischer Elektrizitaet mittels zweier Kondensatoren

Erreger- und Regelanordnung fuer elektrostatische Generatoren

ENERGY CONVERSION DEVICE OF ELECTROSTATIC INDUCTION TYPE

A plurality of strip-shaped base electrodes (27) are arranged in parallel to one another on the upper surface of a fixed substrate (22) and an electret (28) is formed on each of the base electrodes (27). The electret (28) has a width greater than that of the base electrode (27). The electret (28) covers the exposed surface of the base electrode (27). A movable substrate (23) is arranged to oppose to and in parallel to the surface of the fixed substrate (22) on which the electret (28) is arranged. The movable substrate (23) can be moved relative to the fixed substrate (22). The movable substrate (23) has an opposing surface on which strip-shaped opposing electrodes (32) are formed to oppose to the base electrodes (27), respectively.

FIELD CONVERTER FOR THRUST GENERATION

SUSPENDED PASSIVE ELEMENT FOR MEMS DEVICES

A technique decouples a MEMS device from sources of strain by forming a MEMS structure with suspended electrodes that are mechanically anchored in a manner that reduces or eliminates transfer of strain from the substrate into the structure, or transfers strain to electrodes and body so that a transducer is strain-tolerant. The technique includes using an electrically insulating material embedded in a conductive structural material for mechanical coupling and electrical isolation. An apparatus includes a MEMS device including a first electrode and a second electrode, and a body suspended from a substrate of the MEMS device. The body and the first electrode form a first electrostatic transducer. The body and the second electrode form a second electrostatic transducer. The apparatus includes a suspended passive element mechanically coupled to the body and electrically isolated from the body.

CONTENEUR DE SOURCE DE HAUTE TENSION

L'invention concerne un conteneur pour source de haute tension électrostatique. Il comporte deux parties 2, 3 qui portent des anneaux concentriques 2a, 3a qui, lorsque les deux parties sont assemblées, établissent, entre la surface extérieure de la source 1 et une masse 4, un trajet 6 d'une longueur très supérieure à celle mesurée en ligne droite entre la source 1 et la masse 4. Domaine d'application : sources de haute tension pour barrières électrostatiques. (CF DESSIN DANS BOPI) ...

충격발생 액추에이터 및 터치패널

... (과제) 본 발명은, 예를 들면 주위온도에 따라 형상기억합금에 공급하는 에너지를 변화시킨다. (해결수단) 충격발생 액추에이터는, 입력조작에 따라 발생하는 단일 펄스신호에 의거하는 구동신호를 생성하여 출력하는 구동신호발생부와, 구동신호에 의하여 스위칭 동작이 제어되는 스위칭 소자와, 스위칭 소자가 온 또는 오프 되는 기간에 통전되는 형상기억합금을 구비하고, 주위온도에 따라 스위칭 소자가 온 또는 오프 되는 기간이 변화되도록 구성된다.

DEVICE FOR ASSISTING THE VARIABLE CAPACITY GENERATING MOVEMENT

The invention concerns a device (10) for assisting a relative movement of two parts of a mechanical system for example a ball bearing or a gear device, adapted to form a device with variable capacity, thereby enabling the mechanical energy to be recovered and converted into electrical energy. Therefor, at least one among the driving (12, 14) and driven (18) elements of the device comprises a conductive zone (32) separated by a variable distance during the relative movements of the elements (12, 14, 18) with respect to each other of the conductive parts of the device, the conductive zone (32) and the conductive parts (12, 14, 18, 36) being coupled to different equipotentials (VI, V).

ELECTROMECHANICAL ASSEMBLIES USING MOLECULAR-SCALE ELECTRICALLY CONDUCTIVE AND MECHANICALLY FLEXIBLE BEAMS AND METHODS FOR APPLICATION OF THE SAME

Electromechanical systems utilizing suspended conducting nanometer-scale beams are provided and may be used in applications, such as, motors, generators, pumps, fans, compressors, propulsion systems, transmitters, receivers, heat Ingines, heat pumps, magnetic field sensors, kinetic energy storage devices and accelerometers. Such nanometer-scale beams may be provided as, for example, single molecules, single crystal filaments, or nanotubes. When suspended by both ends, these nanometer-scale beams may be caused to rotate about their une of suspension, similar to the motion of a jumprope (or a rotating whip), via electromagnetic or electrostatic forces. This motion may be used, for example, to accelerate molecules of a working substance in a preferred direction, generate electricity from, the motion of a working substance molecules, or generate electromagnetic signals. Means of transmitting and controlling currents through these beams are also described.

ELECTROHYDRODYNAMIC CONDUCTION PUMP

An electrohydrodynamic (EHD) conduction pump is provided for pumping dielectric liquids, and a particular adaptation for mass transport of isothermal and non-isothermal single phase liquids. The EHD conduction pump does not require direct injection of electric charges into the fluid. The EHD conduction pump includes an EHD pumping section and associated connecting tubes with electrodes arranged in series in the pumping section. The electrodes are coupled to a high voltage low current dc power supply. A positive polarity dc voltage is applied to the electrodes. Various electrode configurations may be used, such as three-needle, hollow-tube, or pin-needle electrode configuration.

Sem actuated levitation devices

A microelectromechanical system (MEMS) device is configured to be actuated directly by an energy field through Coulombic interactions to have a translational motion. The MEMS device can be untethered, and actuated by irradiating an actuator with the energy field thereby building up electrical charges on the actuator. The MEMS device can thus be actuated with Coulomb forces from the built up electrical charges to suspend a movable portion over a rail. In one example, the energy field includes an electron beam from a scanning electron microscope (SEM).

Motion controlled actuator

A device can have an outer frame and an actuator. The actuator can have a movable frame and a fixed frame. At least one torsional flexure and at least one hinge flexure can cooperate to provide comparatively high lateral stiffness between the outer frame and the movable frame and can cooperate to provide comparatively low rotational stiffness between the outer frame and the movable frame.

Mems actuator device

A method for making an actuator device includes providing a wafer comprising a layer of an electrically conductive material and forming a plurality of rotationally symmetrical dies in the electrically conductive material, each die including a plurality of radial tabs and complementarily sized radial recesses arranged in alternating fashion and at equal angular increments around the circumfery of the die. To maximize the use of available wafer space, the dies are arranged in a pattern on the wafer in which each die is rotated relative to adjacent dies through an angle of 360 degrees divided by twice the number of tabs or recesses on the die and, except for dies located at an outer periphery of the wafer, each die is disposed in edge-to-edge near abutment with an adjacent die and each tab of each die is nested within a complementary recess of an adjacent die.

Charge-driven electrostatic inductance

Charge-Driven Electrostatic Induction is a method for using modest voltage to induce large density electric charge across a large insulation gap. Large density equal and opposite charges are first created in a high performance capacitor adjacent said insulation gap. One charge is trapped on its electrode and the other charge is relocated further from the gap so the electric field from the trapped charge, with minimum interference, induces equal and opposite charge across the gap and stores large density electric energy in the insulation. With electrode area to gap ratio kept sufficiently large to limit field fringing, Charge-Driven Electrostatic Induction will rival electromagnetic motor performance. In practice it will be superior. Using layered, thin film components will eliminate permanent magnets, coils, ferromagnetic materials and large power current sources. The multi-step process will permit high operating speeds.

Nanometer Scale Instrument for Biochemically, Chemically, or Catalytically Interacting with a Sample Material

A data storage system that includes a positioning system for positioning the write/read mechanism and the storage medium of the data storage device with respect to each other in first and second predefined directions. In several embodiments, the read/write mechanism is used to mechanically write data to and electrically read data from the storage medium. In still another embodiment, the read/write mechanism is used to optically write data to and electrically read data from the storage medium. In yet another embodiment, the read/write mechanism is acoustically aided in electrically writing data to and reading data from the storage medium.

Microelectromechanical systems (mems) resonators and related apparatus and methods

Devices having piezoelectric material structures integrated with substrates are described. Fabrication techniques for forming such devices are also described. The fabrication may include bonding a piezoelectric material wafer to a substrate of a differing material. A structure, such as a resonator, may then be formed from the piezoelectric material wafer.

Electrostatic actuator

An electrostatic actuator 100 includes: a stator 1 that includes a substrate 102 and a plurality of linear electrodes 1 a to 1 d separately provided on the substrate 102 and arranged in parallel; and a movable element 2 disposed on the linear electrodes 1 a to 1 d of the stator 1. Multiple projecting elements 104 b are provided at regular intervals on a surface of the stator 1 so as to face the movable element 2, forming a mat surface. A smooth layer 105 is formed on a surface of the movable element 2 so as to face the mat surface.

MICRO-ELECTROMECHANICAL GENERATOR AND ELECTRIC APPARATUS USING SAME

Disclosed is a highly reliable inductive vibration power generator wherein mechanical damping caused by the phenomenon of electrostatic pulling-in (stiction) and the like is suppressed even if the potential of an electret is increased and/or the gap between an electrode and the electret is reduced in order to increase the amount of power generation. The two surfaces of a movable substrate are respectively provided with first electrets and second electrets. By means of providing first electrodes and second electrodes to a lower substrate and an upper substrate and facing the respective electrets with a predetermined gap therebetween, electrostatic force is caused to arise on both sides of the movable substrate, and the pulling of the movable substrate in only one direction is prevented. 15-. (canceled)6. A micro-electro-mechanical power generator comprising:a first substrate having a first substrate surface;a second substrate having a second substrate surface;a movable substrate which can move; andfixation structures for supporting the movable substrate;wherein the first substrate surface and the second substrate surface are opposed to each other;wherein the movable substrate is disposed between the first substrate and the second substrate and can move at least in one axis direction that is in parallel with the first substrate surface (hereinafter, the direction is also referred to as a “moving direction of the movable substrate”);wherein a plurality of first electrets are disposed on one surface of the first substrate surface and a surface of the movable substrate facing to the first substrate surface and a plurality of first electrodes are disposed on the other surface;wherein a plurality of second electrets are disposed on one surface of the second substrate surface and the surface of the movable substrate facing to the second substrate surface and a plurality of second electrodes are disposed on the other surface;wherein the first electrets, the first electrodes, ...

Electrostatic parallel plate actuators whose moving elements are driven only by electrostatic force and methods useful in conjunction therewith

An actuator apparatus is provided that includes at least one actuator device, each actuator device including an array of moving elements, each individual moving element is operative to be constrained to travel alternately back and forth along a respective axis responsive to an individual first electrostatic force operative thereupon, wherein each moving element has an at-rest position and is driven away from its at rest position solely by the first electrostatic force; and at least one electrode operative to apply a controlled temporal sequence of potential differences with at least one individual moving element from among the array of moving elements thereby to selectably generate the first electrostatic force; and a controller operative to receive the digital input signal and to control at least one of the at least one electrode and the individual moving element to apply the sequence of potential differences.

Rotationally deployed actuator devices

A method for making an actuator device includes forming a substantially planar structure, including an outer frame with a latch foot, a fixed frame coupled to the outer frame, a latch mass coupled to the fixed frame, a latch block coupled to the latch mass by a latch block flexure, a moveable frame coupled to the outer frame, and an actuator incorporating a plurality of interdigitated teeth alternately attached to the fixed and moving frames. For operation, the latch mass is rotated downward until an upper surface of the latch block is disposed below and held in latching contact with a lower surface of the latch foot by the latch block flexure.

Cascaded Electrostatic Actuator

A cascaded electrostatic actuator can be formed from a substantially planar substrate. The cascaded electrostatic actuator can be formed in a plane of the substrate. Various embodiments are described.

ELECTROMECHANICAL TRANSDUCER DEVICE AND ANALYTE INFORMATION ACQUIRING APPARATUS

To suggest an electromechanical transducer device with a high S/N ratio, an electromechanical transducer device includes a first substrate; electromechanical transducer elements two-dimensionally arrayed on a front surface of the first substrate and configured to provide conversion between acoustic waves and electric signals; an electric wiring substrate that is a second substrate electrically connected with a back surface of the first substrate; a first acoustic matching layer provided between the first substrate and the second substrate; an acoustic attenuating member arranged on a back surface of the second substrate; and a second acoustic matching layer provided between the second substrate and the acoustic attenuating member. 1. An electromechanical transducer device , comprising:a first substrate;electromechanical transducer elements two-dimensionally arrayed on a front surface of the first substrate and configured to provide conversion between acoustic waves and electric signals;an electric wiring substrate that is a second substrate electrically connected with a back surface of the first substrate;a first acoustic matching layer provided between the first substrate and the second substrate;an acoustic attenuating member arranged on a back surface of the second substrate; anda second acoustic matching layer provided between the second substrate and the acoustic attenuating member.2. The electromechanical transducer device according to claim 1 , wherein the electromechanical transducer element includes a capacitive electromechanical transducer element having a vibrating membrane claim 1 , a first electrode arranged on the vibrating membrane claim 1 , and a second electrode arranged at a position at which the second electrode faces the first electrode with a gap arranged therebetween.3. The electromechanical transducer device according to claim 1 , wherein an acoustic impedance of the first acoustic matching layer is smaller than an acoustic impedance of the ...

APPARATUS FOR USE AS A MOTOR OR GENERATOR

Apparatus () for use as a motor or generator, comprising: a capacitor assembly () comprising: a first conductor part () defining a first conductor region () and a second conductor part () defining a second conductor region (), the first and second conductor parts () being spaced apart to define opposed sides of a passageway () extending between the first and second conductor regions (); and an inner part () moveable relative to at least one of the conductor parts along the passageway () extending between the first and second conductor regions (). 1. Apparatus for use as a motor or generator , comprising:a capacitor assembly comprising:a first conductor part defining a first conductor region and a second conductor part defining a second conductor region, the first and second conductor parts being spaced apart to define opposed sides of a passageway extending between the first and second conductor regions; andan inner part moveable relative to at least one of the conductor parts along the passageway extending between the first and second conductor regions.2. Apparatus according to claim 1 , wherein the inner part is a polarisable or a polarised part.3. (canceled)4. Apparatus according to claim 1 , wherein the inner part is configured to follow a path through the passageway and the inner part comprises first and second regions spaced along the path claim 1 , the first and second regions being configured to provide different levels of attraction to an electric field generated between the first and second conductor parts.5. (canceled)6. (canceled)7. Apparatus according to claim 4 , wherein the first region of the inner part is electrically conductive and the second region is electrically insulating.8. Apparatus according to claim 7 , wherein the first region of the inner part has an electric polarisation potential or electric polarisation level greater than that of the second region and in use the first region is polarised in a first orientation relative to the apparatus ...

SEMICONDUCTOR DEVICE AND DRIVE METHOD OF ELECTROSTATIC ACTUATOR

According to one embodiment, a semiconductor device includes an electrostatic actuator including first and second lower electrodes, an upper electrode, and an insulating film provided between the upper electrode and the first and second lower electrodes, the first lower electrode and upper electrode configuring a first variable capacitance element, the second lower electrode and upper electrode configuring a second variable capacitance element, a first fixed capacitance element connected to the first lower electrode, a second fixed capacitance element connected to the second lower electrode, and a detection circuit connected to the upper electrode and configured to detect a charge amount stored in the insulating film. 1. A semiconductor device comprising:an electrostatic actuator including first and second lower electrodes, an upper electrode supported above the first and second lower electrodes by an anchor and configured to move downwardly, and an insulating film provided between the upper electrode and the first and second lower electrodes, the first lower electrode and upper electrode configuring a first variable capacitance element, the second lower electrode and upper electrode configuring a second variable capacitance element;a first fixed capacitance element connected to the first lower electrode;a second fixed capacitance element connected to the second lower electrode; anda detection circuit connected to the upper electrode and configured to detect a charge amount stored in the insulating film.2. The device of claim 1 , further comprising:a drive circuit including a boost capacitor whose first electrode is connected to the upper electrode, the drive circuit being configured to apply a downward electric field between the lower electrodes and the upper electrode to drive the upper electrode downwardly and set the electrostatic actuator in a down state;a voltage generation circuit configured to generate a monitor voltage used for determining whether the ...

MEMS DEVICE AND MANUFACTURING METHOD THEREOF

A Micro-Electro-Mechanical System (MEMS) device and its manufacturing method are provided. Said device comprises a MEMS component and said component comprises a main body () and a movable electrode (). Said main body () contains a fixed electrode () and a cavity () and is covered by a first dielectric layer () which seals said cavity () into an enclosure. Said movable electrode () is connected with said main body () flexibly by a fixing piece and overhangs in said enclosure. Vias () are formed in said first dielectric layer () and filled with a second dielectric layer (). The patent enables effective packaging for a MEMS device. 1. An MEMS apparatus including an MEMS device comprising:a main body containing a fixed electrode; anda movable electrode movably connected with the main body through a fixer and movable relative to the fixed electrode;wherein the main body defines a trench therein, the movable electrode being suspended in the trench, a first dielectric layer being located on the main body and above the trench and covering the trench for forming a sealed cavity, the movable electrode being suspended inside the sealed cavity through the fixer, holes being defined through the first dielectric layer and filled with a second dielectric layer.2. The MEMS apparatus as claimed in claim 1 , wherein the main body includes a substrate claim 1 , a first insulation layer located on the substrate claim 1 , and a second insulation layer located on the first insulation layer claim 1 , the trench extends through the first insulation layer and the second insulation layer.3. The MEMS apparatus as claimed in claim 1 , wherein the movable electrode is formed of a material selected from Al claim 1 , Ti claim 1 , Cu claim 1 , Co claim 1 , Ni claim 1 , Ta claim 1 , Pt claim 1 , Ag claim 1 , Au or any combination thereof.4. The MEMS apparatus as claimed in claim 1 , wherein the first dielectric layer claim 1 , the second dielectric layer claim 1 , the first insulation layer and the ...

DISK TYPE MEMS RESONATOR

A variation in a resonance frequency due to variation in dimension accuracy of the supporting structure of the vibrating unit is reduced, and energy loss leaked from the supporting structure is reduced as much as possible. The electrostatic drive disk-type MEMS vibrator includes: a disk type vibrating unit; drive electrodes disposed at a prescribed gap g from the peripheral portion of the disk type vibrating unit and disposed at both sides of the vibrating unit so as to face each other; a unit for applying alternating current bias voltages of the same phase to the drive electrodes; and detection units that obtain outputs corresponding to the capacitance between the disk type vibrating unit and the drive electrodes. The disk type vibrating unit is supported by a pillar-shaped supporting structure disposed upright at the center of the disk and a transverse cross-sectional shape of the supporting structure is non-circular. 1. A disk type resonator , which is an electrostatic drive disk type MEMS resonator , comprising:a disk type vibrating unit;drive electrodes disposed opposite to one another, the drive electrodes being disposed at both sides of the vibrating unit having a predetermined gap with respect to an outer peripheral portion of the disk type vibrating unit;a unit configured to apply an alternating current bias voltage with a same phase to the drive electrodes; anda detection unit configured to obtain an output corresponding to an electrostatic capacitance between the disk type vibrating unit and the drive electrodes, whereinthe disk type vibrating unit is supported by a pillar-shaped supporting structure,the supporting structure is disposed upright at the center of the disk, andthe supporting structure has a transverse cross-sectional shape of a non-circular shape.2. The disk type resonator according to claim 1 , whereinthe supporting structure has the transverse cross-sectional shape of the non-circular shape that is a square shape, a cross shape, a ...

MICROELECTROMECHANICAL SYSTEMS (MEMS) RESONATORS AND RELATED APPARATUS AND METHODS

Devices having piezoelectric material structures integrated with substrates are described. Fabrication techniques for forming such devices are also described. The fabrication may include bonding a piezoelectric material wafer to a substrate of a differing material. A structure, such as a resonator, may then be formed from the piezoelectric material wafer. 1. An apparatus , comprising:a first microelectromechanical systems MEMS wafer comprising a first MEMS device;a second MEMS wafer comprising a second MEMS device,wherein the second MEMS wafer is configured to cap the first MEMS wafer.2. The apparatus of claim 1 , wherein the first MEMS device is a MEMS resonator and wherein the second MEMS device is a MEMS gyroscope.3. The apparatus of claim 1 , wherein the first and second MEMS wafers are bonded together in a face-to-face configuration.4. The apparatus of claim 1 , wherein the first and second MEMS wafers are bonded together by a eutectic bond.5. The apparatus of claim 1 , wherein the first MEMS device is configured to be actuated via electrostatic actuation.6. The apparatus of claim 1 , wherein the first MEMS device is a MEMS microphone. The present application claims the benefit under 35 U.S.C. §120 as a divisional application of U.S. patent application Ser. No. 13/466,767, filed May 8, 2012 under Attorney Docket No. G0766.70046US00 and entitled “Microelectromechanical Systems (MEMS) Resonators and Related Apparatus and Methods.”U.S. patent application Ser. No. 13/466,767 claims the benefit under 35 U.S.C. §120 as a continuation-in-part of U.S. patent application Ser. No. 12/750,768, filed Mar. 31, 2010 under Attorney Docket No. G0766.70009US01 and entitled “Integration of Piezoelectric Materials with Substrates”. U.S. patent application Ser. No. 12/750,768 claims priority under 35 U.S.C. §119(e) to U.S. Patent Application Ser. No. 61/165,405, filed Mar. 31, 2009 under Attorney Docket No. G0766.70009US00 and entitled “Integration of Piezoelectric Materials With ...

TILTING ACTUATOR WITH CLOSE-GAP ELECTRODES

A tunable tilting device is described. The device includes a tilting element and a suspension structure that has one or more flexures coupled to the tilting element. The suspension structure has a variable bending stiffness and configured to bend due to a tilting motion of the tilting element around a pivot axis. The suspension structure is responsive to a tuning force actuating a variation of an extension stress or a compression stress of the suspension structure, and thereby can vary the bending stiffness of the suspension structure. 1. A tunable tilting device comprising:{'b': 154', '156, 'a tilting element () and a suspension structure () including at least one flexure coupled to the tilting element, said suspension structure having a variable bending stiffness and configured to bend due to a tilting motion of the tilting element around a pivot axis, said suspension structure being responsive to a tuning force actuating a variation of an extension stress or a compression stress of the suspension structure, whereby the bending stiffness of the suspension structure is varied as a result of the response to the tuning force.'}2. The tilting device of claim 1 , wherein said tuning force is produced by an actuation selected from the list including an electrostatic actuation claim 1 , a magnetic actuation claim 1 , a piezoelectric actuation and a thermal actuation.3. The tilting device of claim 1 , wherein said pivot axis passes through a pivot point having a location substantially independent of deflection of the suspension structure from equilibrium position.4. The tilting device of claim 1 , comprising a tilting actuator comprising a fixable electrode structure (F) comprising mutually parallel fixable electrodes and a movable electrode structure (M) comprising mutually parallel movable electrodes coupled to the tilting element claim 1 , the fixable electrodes of said fixable electrode structure are at least partially interdigitated with the movable electrodes of ...

Method for producing a MEMS apparatus with a high aspect ratio, and converter and capacitor

The invention presents a method for producing microstructured apparatuses for microelectromechanical systems (MEMS). In order to increase the maximum aspect ratio conditioned by physical or chemical microstructuring methods, it is proposed to design flat elements of the apparatus, which are structured such that they are movable relative to one another, to be laterally changeable from a first reference position relative to one another (structuring position) to a second reference position (operating position) in a permanent or irreversible manner. As a result, higher trench capacitances can be formed between structured wall sections. The reference position can be changed by means of integrated drives or by supplying energy from the outside and said change is effected in a direction which is substantially different from the measuring direction. In addition to mechanical work and energy from electrical or magnetic fields, heat can be used to shift location in drives as a result of the action of force on an element or induced changes in length. This method makes it possible to produce highly sensitive sensors for very small excitation signals or to produce economical actuators with an extremely high level of efficiency in the form of low-attenuation, area-optimized, highly capacitive converters, as well as variable vertical capacitors with a high capacitance. 120-. (canceled)211. A method for manufacturing microelectromechanical device () with high aspect ratio , comprising the steps of:{'b': 2', '3', '3', '20', '21', '5', '9', '21', '4', '2', '3', '3', '6', '2, 'separating at least one structure part () of a silicon wafer or a semiconductor component with a thickness that is minimal in relation to the surface expansion by chemical and/or physical material removal with technology-related aspect ratio relative to a surrounding part () or a further structure part () by producing separating grooves () and forming at least two separating groove wall sections (), that are ...

PASTE AND POLYMER TRANSDUCER INCLUDING COATING FILM FORMED FROM SAME AS ELECTROLYTE FILM OR ELECTRODE FILMS

Paste which is prepared by any solid concentration and is excellent in terms of handleability, applicability, and storage stability; an electrolyte film or electrode film which is an even and highly flexible coating film formed in a desired thickness from the paste through a few repetitions of an application/drying step; and a polymer transducer which can be industrially and economically produced and shows excellent performance. The paste comprises: a solid polyelectrolyte (A) consisting of a block copolymer containing; a polymer block (a-1) which is represented by chemical formula (1) 2. The paste according to claim 1 , wherein the anion Y is selected from a carboxylic acid anion claim 1 , sulfonic acid anion and phosphoric acid anion.3. The paste according to claim 1 , wherein the non-dissociable particles (C) is non-dissociable polymer particles.4. The paste according to claim 1 , wherein the non-dissociable particles (C) is selected from particles of a crystalline polymer claim 1 , particles of a cross-linked polymer and inorganic particles.5. The paste according to claim 1 , wherein the paste contains conductive fine particles (D) whose average particle diameter is 1/50 times or less the length of the major axis of the non-dissociable particles (C).6. The paste according to claim 5 , wherein the conductive fine particles (D) is selected from metal fine particles claim 5 , metal compound fine particles claim 5 , a conductive carbon fine particle and a powder of a conductive polymer.7. An electrolyte film being formed into a film-like shape by drying and solidifying the paste according to .8. An electrode film being formed into a film-like shape by drying and solidifying the paste according to . The present invention relates to a paste which is useful as a material for forming an electrolyte film and an electrode film and to a polymer transducer comprising a coating film formed from the paste as the electrolyte film or the electrode film.Recently, in a field of ...

Rotational Type of MEMS Electrostatic Actuator

A cantilever type of electrostatic vertical combdrive actuators may generate larger actuator displacement (typically over 70 um) with a relatively small and simple structure. The actuation voltage is lower while the actuation movement is robust without any typical sideway finger snapping phenomena due to a cantilever type of structure. Because of its small form factor, it can form a high fill factor array in applications such as lower power consumption display devices, sensitive electromagnetic radiation detector/detector arrays, etc. The MEMS (Micro-Electro-Mechanical Systems) electrostatic rotational actuators may have wide applications such as in optical shutter, optical chopper, optical switches, optical attenuators, optical tunable filter, RF shunt switch, RF ohmic contact switch, RF MEMS variable capacitors, MEMS display and sensitive electromagnetic radiation detector etc. 1. A MEMS actuator , comprising:a combdrive carried by a substrate, the combdrive having a fixed comb and a movable comb, each of the fixed comb and the movable comb having comb fingers, the fixed comb being immovably carried by the substrate;a resilient body attached between an anchor point on the substrate and the movable comb, the resilient body permitting cantilevered, pivotal movement of the movable comb parallel to a plane defined by the comb fingers of the fixed comb in response to an actuating voltage applied to the combdrive, the comb fingers of the fixed and movable combs being curved in the direction of the movement.2. The MEMS actuator of claim 1 , wherein the fixed comb and the movable comb are electrically isolated.3. The MEMS actuator of claim 2 , wherein the movable comb moves toward the fixed comb in response to the actuating voltage.4. The MEMS actuator of claim 1 , wherein the movable comb is attached to the resilient body by a carrier body.5. The MEMS actuator of claim 1 , wherein the combdrive comprises a plurality of movable combs and fixed combs.6. The MEMS actuator ...

VIBRATION GENERATOR, VIBRATION GENERATION DEVICE, AND ELECTRONIC EQUIPMENT AND COMMUNICATION DEVICE PROVIDED WITH VIBRATION GENERATION DEVICE

A vibration power generator including a first substrate; first electrodes disposed over one surface of the first substrate; a second substrate spaced from the first substrate and opposed to the one surface of the first substrate; and second electrodes disposed over one surface of the second substrate so as to be opposed to the first electrodes, wherein one of the first and second electrodes includes a film holding a charge; one of the first and second substrates is a vibratory substrate; and an overlapped area between the first and second electrodes becomes minimum and then maximum, or becomes maximum and minimum, and an electrostatic capacity Cp formed between the first and second electrodes when the overlapped area becomes maximum changes, and the change of Cp comprises an increase of Cp, while the vibratory substrate is displaced from the vibration center to the vibration end. 1. A vibration power generator comprising:a first substrate;a plurality of first electrodes disposed over one surface of the first substrate;a second substrate spaced from the first substrate and opposed to the one surface of the first substrate with the first electrodes disposed thereover; anda plurality of second electrodes disposed over one surface of the second substrate so as to be opposed to the first electrodes,wherein one of the first electrode and the second electrode comprises a film holding a charge,one of the first substrate and the second substrate is vibratory with respect to the other,while the vibratory substrate is displaced from the center of vibration to the end of vibration, an overlapped area between the first electrode and the second electrode viewed in the direction perpendicular to the surface of the first substrate changes at least one time in such a manner that the overlapped area becomes minimum and then increases to become maximum, or that the overlapped area becomes maximum and then decreases to become minimum,an electrostatic capacity formed between the first ...

DEVICE FOR CONVERTING MECHANICAL ENERGY INTO ELECTRICAL ENERGY

An apparatus for converting mechanical vibrational energy into electrical power includes first and second collecting electrodes configured for connection to terminals of an electrical load, and an electret placed facing the first electrode. The electret is mounted so as to move relative to the first electrode in one degree-of-freedom in a plane. Relative movement between the electret and the first electrode induces a potential difference across the electrodes. The electret has a continuous layer and a series of protrusions, each of which extends perpendicular to the plane. These protrusions are distributed in the degree-of-freedom with a first pitch, which is smaller than the travel between the first electrode and the electret. The first electrode has faces facing the electret. These faces are distributed in the degree-of-freedom with a second pitch identical to the first pitch. 117-. (canceled)18. An apparatus for converting mechanical vibrational energy into electrical power , said apparatus comprising first and second collecting electrodes configured for connection to terminals of an electrical load , an electret placed facing at least said first electrode , said electret being mounted so as to be able to move at least relative to said first electrode along at least one degree-of-freedom in a plane , whereby relative movement between said electret and said first electrode induces a potential difference across said first and second electrodes , said electret comprising a continuous layer having a series of protrusions extending in a direction perpendicular to said plane , said protrusions being distributed along said degree-of-freedom with a first pitch , said first pitch being smaller than an extent of travel between said first electrode and said electret , and wherein said first electrode comprises faces facing said electret , said faces being distributed in said degree-of-freedom with a second pitch , said second pitch being identical to said first pitch.19. ...

APPARATUS AND METHODS FOR INDIVIDUAL ADDRESSING AND NOISE REDUCTION IN ACTUATOR ARRAYS

Apparatus for generating a target physical effect, at least one attribute of which corresponds to at least one characteristic of a digital input signal sampled periodically, the apparatus comprising a multiplicity of electrostatic actuator elements, each comprising a moving element moving between first and second electrodes, the multiplicity of electrostatic actuator elements including Nr first subsets (R-subsets) of actuator elements and Nc second subsets (C-subsets) of actuator elements, wherein a first partitioning of the multiplicity of actuator elements yields the Nr first subsets (R-subsets) and a second partitioning of the multiplicity of actuator elements yields the Nc second subsets (C-subsets); a first plurality of Nr electrical connections (R-wires) interconnecting the moving elements of actuator elements in each R-subset, such that the moving element of any actuator element in each individual R-subset is electrically connected to the moving elements of all other actuator elements in the individual R-subset, and electrically isolated from the moving elements of all actuator elements not in the individual R-subset; a second plurality of Nc electrical connections (A-wires) interconnecting the first electrodes of actuator elements in each C-subset, such that the first electrode of any actuator element in each individual C-subset is electrically connected to the first electrode of all other actuator elements in the individual C-subset, and electrically isolated from all actuator elements not in the individual C-subset; a third plurality of Nc electrical connections (B-wires) interconnecting the second electrodes of actuator elements in each C-subset, such that the second electrode of any actuator element in each individual C-subset is electrically connected to the second electrode of all other actuator elements in the individual C-subset, and electrically isolated from all actuator elements not in the individual C-subset; and a controller electrically ...

MEMS DEVICE FRONT-END CHARGE AMPLIFIER

This document discusses, among other things, apparatus and methods for a front-end charge amplifier. In certain examples, a front-end charge amplifier for a microelectromechanical system (MEMS) device can include a charge amplifier configured to couple to the MEMS device and to provide sense information of a proof mass of the MEMS device, a feedback circuit configured to receive the sense information and to provide feedback to an input of the charge amplifier, and wherein the charge amplifier includes a transfer function having a first pole at a first frequency, a second pole at a second frequency, and one zero at a third frequency. 1. An apparatus comprising:a charge amplifier configured to couple to a microelectromechanical system (MEMS) device and to provide sense information of a proof mass of the MEMS device;a feedback circuit configured to receive the sense information and to provide feedback to an input of the charge amplifier; andwherein the charge amplifier includes a transfer function having a first pole at a first frequency, a second pole at a second frequency, and one zero at a third frequency.2. The apparatus of claim 1 , wherein the first frequency and the second frequency are at or below a resonance frequency of the proof mass.3. The apparatus of claim 1 , wherein the third frequency is substantially higher than the first frequency and the second frequency.4. The apparatus of claim 1 , wherein the two poles and the zero are configured to reduce phase offset of the sense information to substantially zero over a predetermined frequency range.5. The apparatus of claim 1 , wherein the charge amplifier include a multistage charge amplifier.6. The apparatus of claim 5 , wherein the multistage charge amplifier includes a first amplifier stage configured to provide a fixed gain.7. The apparatus of claim 6 , wherein the multistage charge amplifier includes a second amplifier stage having a transfer function including the first pole.8. The apparatus of claim 7 ...

MEMS SHOCK CUSHION SPRING SYSTEMS AND METHODS

Techniques are disclosed for systems and methods to provide shock impact mitigation for MEMS structures. A MEMS structure may include one or more actuators. An actuator may include a first frame having a spine, where the spine includes a body and a tip. The actuator may include a second frame connected to the first frame and including a shock stop, where the shock stop includes a surface in proximity to the spine tip. An actuator may include a shock cushion spring fixed relative to the spine tip and situated substantially between the spine tip and the shock stop surface, where the shock cushion spring is adapted to protect the spine tip from contact with the shock stop surface. 1. A microelectromechanical (MEMS) device comprising:a first frame comprising a spine, wherein the spine comprises a spine body and a spine tip;a second frame coupled to the first frame and comprising a shock stop, wherein the shock stop comprises a shock stop surface in proximity to the spine tip; anda shock cushion spring fixed relative to the spine tip and situated substantially between the spine tip and the shock stop surface, wherein the shock stop surface is adapted to limit a range of relative motion of the first and second frames, and wherein the shock cushion spring is adapted to protect the spine tip from contact with the shock stop surface.2. The MEMS device of claim 1 , wherein:the MEMS device comprises an actuator;the shock cushion spring is separated from the shock stop by a gap adapted to allow the first and second frames to move relative to each other in one or more directions substantially parallel to the shock stop surface; andthe one or more directions and/or a width of the gap depend, at least in part, on physical characteristics of an intra-actuator flexure moveably connecting the first and second frames.3. The MEMS device of claim 1 , wherein the shock cushion spring comprises:a compliant member adapted to flex in response to contact with the shock stop and substantially ...

MINIATURE MEMS ACTUATOR ASSEMBLIES

In one embodiment, an electrostatic actuator includes a generally planar fixed frame, a generally planar moving frame coupled to the fixed frame by a flexure for substantially coplanar, perpendicular movement relative to the fixed frame, a plurality of interdigitated teeth, a fixed portion of which is attached to the fixed frame and a moving portion of which is attached to the moving frame, and an elongated output shaft having opposite input and output ends, the input end being coupled to the moving frame. 1. An electrostatic actuator , comprising:a generally planar fixed frame;a generally planar moving frame coupled to the fixed frame by a flexure for substantially coplanar, perpendicular movement relative to the fixed frame;a plurality of interdigitated teeth, a fixed portion of which is attached to the fixed frame and a moving portion of which is attached to the moving frame;an elongated output shaft having opposite input and output ends, the input end being coupled to the moving frame.2. The actuator of claim 1 , further comprising an output coupler coupled to the output end of the output shaft.3. The actuator of claim 2 , wherein the input end of the output shaft is coupled to the moving frame by a first monopod flexure and the output end of the output shaft is coupled to the output coupler by a second monopod flexure.4. The actuator of claim 3 , wherein at least one of the first and second monopod flexures comprises:a first hinge that is stiffer in a direction normal to the actuator than it is in a direction parallel to the actuator, anda second hinge coupled to an end of the first hinge, the second hinge being more flexible in a direction normal to the actuator than it is in a direction parallel to the actuator.5. The actuator of claim 4 , wherein the first hinge comprises a plurality of corrugations and the second hinge is U-shaped.6. The actuator of claim 3 , wherein the fixed frame claim 3 , moving frame claim 3 , interdigitated teeth output shaft and ...

DIELECTRIC FILM, METHOD FOR MANUFACTURING THE SAME, AND TRANSDUCER INCLUDING THE SAME

A dielectric film includes an elastomer, and metallic oxide particles having a particle diameter of 100 nm or less that are chemically bonded to the elastomer and are dispersed in the elastomer in a state of primary particles. A method for manufacturing the dielectric film includes: a chelating process of adding a chelating agent to an organometallic compound to produce a chelate compound of the organometallic compound; a sol manufacturing process of adding an organic solvent and water to the chelate compound to obtain a sol of metallic oxide particles produced by the hydrolytic reaction of the organometallic compound; a mixed solution preparing process of mixing the sol of the metallic oxide particles and a polymer solution containing a rubber polymer having functional groups that optionally react with hydroxy groups; and a film forming process of applying the mixed solution onto a substrate, and curing the resultant coating film. 1. A dielectric film for use in a transducer , characterized in thatthe dielectric film is produced from a liquid composition containing metallic oxide particles that are synthesized by hydrolytic reaction of an organometallic compound and that have a hydroxy group, and a polymer solution containing a rubber polymer having a functional group that optionally reacts with the hydroxy group of the metallic oxide particles, and an elastomer; and', 'the metallic oxide particles having a particle diameter of 100 nm or less that are chemically bonded to the elastomer and are dispersed in the elastomer in a state of primary particles., 'the dielectric film includes2. The dielectric film according to claim 1 , wherein the functional group is one or more groups selected from a carboxy group claim 1 , an amino group claim 1 , and an epoxy group.3. The dielectric film according to claim 1 , wherein the metallic oxide particles include one or more elements selected from titanium claim 1 , zirconium claim 1 , and silicon.4. The dielectric film according ...

ELECTROSTATIC MACHINE

Systems, devices, and methods for an electrostatic machine are provided. In one embodiment, an electrostatic machine may be configured to have an electric field motor, a rotor assembly and a motor drive, wherein the improvement may include generating at least three watts (3 W) of power with a product of a gap pressure (p) and a gap distance (d) of less than ninety megapascals-micrometer (90 MPa*um). 1. An electrostatic machine having an electric field motor , a rotor assembly and a motor drive , wherein the improvement comprises:{'sub': gap', 'gap, 'generating at least three watts (3 W) of power with a product of a gap pressure (p) and a gap distance (d) of less than ninety megapascals-micrometer (90 MPa*um).'}2. An electrostatic machine having an electric field motor , a rotor assembly and a motor drive , wherein the improvement comprises:{'sub': gap', 'gap, 'generating at least one hundred and fifty watts (150 W) of power with a product of a gap pressure (p) and a gap distance (d) of less than ninety megapascals-micrometer (90 MPa*um).'}3. An electrostatic machine having an electric field motor , a rotor assembly and a motor drive , wherein the improvement comprises:{'sub': gap', 'gap, 'generating at least three watts (3 W) of power with a magnitude of a product of a gap pressure (p) and a gap distance (d) less than or equal to a magnitude of each of a height, a length and a width of the electrostatic machine multiplied by two hundred fifty (250).'}4. An electrostatic machine having an electric field motor , a rotor assembly and a motor drive , wherein the improvement comprises:{'sub': gap', 'gap, 'generating at least one hundred and fifty watts (150 W) of power with a magnitude of a product of a gap pressure (p) and a gap distance (d) less than or equal to a magnitude of each of a height, a length and a width of the electrostatic machine multiplied by two hundred fifty (250).'}5. An electrostatic machine having an electric field motor , a rotor assembly and a ...

MICROMECHANICAL DEVICE

The force on the electrodes of an electrostatic field is used so that lateral tensile or compressive forces result which can deform a deformable element or can strongly deflect a deflectable structure. For this, a micromechanical device includes, apart from an electrode and a deformable element, an insulating spacer layer via which the electrode is fixed to the deformable element, wherein the insulating spacer layer is structured into several spaced-apart segments along a lateral direction, so that by applying an electric voltage between the electrode and the deformable element lateral tensile or compressive forces bending the deformable element along the lateral direction result. Thereby, the problem that normally accompanies electrostatic drives, namely the problem of the pull-in effect, is overcome. The deflection of the deformable element can be much larger than the gaps of the two electrodes, i.e. the above-mentioned electrode and the deformable element. A usage as a sensor is also possible. 1. A micromechanical device , comprisingan electrode;a deformable element; andan insulating spacer layer, 'wherein', 'wherein the electrode is fixed to the deformable element via the insulating spacer layer, and'}the insulating spacer layer is structured into several spaced-apart segments along a lateral direction, so that by applying an electric voltage between the electrode and the deformable element an area force acting in a thickness direction is applied to the electrode and the deformable element, as a consequence of which lateral tensile or compressive forces result that bend the deformable element along the lateral direction according to the bimorph principle.2. The micromechanical device according to claim 1 , wherein the segments each comprise a longitudinal extension direction running transversely to the lateral direction.3. The micromechanical device according to claim 2 , wherein the segments and the gaps between the same are stripe-shaped.4. The micromechanical ...

Capacitance change type power generation device

A power generation device includes: a composite layer formed by a dielectric elastomer with ferroelectric particles dispersed therein; and a pair of electrodes disposed on opposite sides of the composite layer, the pair of electrodes being stretchable and compressible along with stretch and compression of the composite layer. The ferroelectric particles have crystal orientability and are orientationally dispersed in the dielectric elastomer, and are polarized in the layer thickness direction of the composite layer.

GRAPHENE SHEET AND NANOMECHANICAL RESONATOR

A graphene sheet is provided. The graphene sheet includes a carbon lattice and a spatial distribution of defects in the carbon lattice. The spatial distribution of defects is configured to tailor the buckling properties of the graphene sheet. 197-. (canceled)98. A nanomechanical resonator , comprising:a support structure;a graphene sheet at least partially suspended from the support structure, the graphene sheet having a carbon lattice that substantially defines a plane; andan actuator configured to actively control the resonant frequency of a portion of the graphene sheet by varying an out-of-plane force applied to the graphene sheet.99. The resonator of claim 98 , wherein varying the out-of-plane force varies the out-of-plane coupling of the graphene to the support structure.100. The resonator of claim 98 , wherein the graphene sheet comprises a free surface.101. The resonator of claim 98 , wherein the graphene sheet is fully connected to the support structure.102. The resonator of claim 98 , wherein the graphene sheet includes a length dimension and a width dimension claim 98 , and wherein the length dimension is at least three times greater than the width dimension103. The resonator of claim 98 , wherein the graphene sheet includes a length dimension and a width dimension claim 98 , and wherein the length dimension is at least ten times greater than the width dimension.104. The resonator of claim 103 , wherein the graphene sheet includes a first end and a second end disposed lengthwise opposite the first end claim 103 , and wherein the graphene sheet is supported at the first end by the support structure.105. The resonator of claim 104 , wherein the graphene sheet is a cantilever.106. The resonator of claim 104 , further comprising a second support structure;wherein the second end of the graphene sheet is supported by the second support structure.107. The resonator of claim 106 , wherein the graphene sheet forms a bridge over a trench.108. The resonator of claim ...

Multi-State Electrostatic Actuator and Digital Camera Therewith

An actuator that operates by electrostatic attraction and repulsion and can have fixed and moving electrodes is disclosed for one or more embodiments. The fixed and moving electrodes can be inclined relative to each other at an acute angle. The actuator can be radially symmetric and mirrored about the moving electrode. The moving electrode can have a central aperture over which is placed an optical element such as a lens. The optical element can be part of an optical train that permits the focus of an electronic camera to be modified by changing the displacement of the lens along the optical axis of the camera. 1145-. (canceled)146. An electrostatic actuator , comprising:a rigid electrode and a flexible electrode having opposing surfaces forming an acute angle and defining overlapping apertures; anda dielectric coupled between the opposing surfaces electrically isolating the rigid and flexible electrodes and defining a movable area of the opposing surface of the flexible electrode that is configured to be movable toward or away from the opposing surface of the rigid electrode upon respective application of attractive or repulsive electrostatic charge to the opposing surfaces.147. The electrostatic actuator of claim 146 , wherein one or both of the rigid and flexible electrodes comprises a radially symmetric shape.148. The electrostatic actuator of claim 146 , wherein the rigid and flexible electrodes each have at least a modicum of in-plane electrical conductivity claim 146 , sufficient to carry uniform electrostatic charge.149. The electrostatic actuator of claim 146 , wherein the flexible electrode is deformable by stretching in the in-plane direction.150. The electrostatic actuator of claim 146 , wherein the flexible electrode is configured to deform upon application of attractive charges to the opposing surfaces causing formation of a moving contact line where ahead of the line the flexible and rigid electrodes are apart and behind it they abut.151. The ...

METHOD AND APPARATUS FOR SENSING UNDERWATER SIGNALS

Methods, apparatuses, and systems are disclosed for forming a transducer. The transducer may include a bottom plate formed from a first sheet of material, a top plate formed from a second sheet of material, and a middle portion. The middle portion includes a mid-upper element formed from a third sheet of material, the mid-upper element having a mid-upper frame, a mid-upper mass, and a plurality of mid-upper attachment members coupling the mid-upper mass to the mid-upper frame. The middle portion also may include a central element formed from a fourth sheet of material, the central element having a central frame and a central mass. 1. A method of forming a transducer comprisingthe acts of:forming the bottom plate from a first sheet of metal material;forming a top plate from a second sheet of metal material;forming a middle portion comprising a mid-upper element and a central element forming the mid-upper element from a third sheet of material the mid-upper element comprising a mid-upper frame, a mid-upper mass, and a plurality of mid-upper attachment members coupling the mid-upper mass to the mid-upper frame;', 'forming the central element from a fourth sheet of material, the central element comprising a central frame and a central mass;', 'coupling the mid-upper mass and the central mass together to form a combined mass; and', 'coupling the mid-upper frame and the central frame together to form a combined frame;, 'including the acts ofcoupling the combined frame to the top plate such that a first capacitance is provided between the combined mass and the top plate; andcoupling the combined frame to the bottom plate such that a second capacitance is provided between the combined mass and the bottom plate.2. The method of claim 1 , further comprising the acts of:forming a mid-lower element from a fifth sheet of material, the mid-lower element comprising, a mid-lower frame, a mid-lower mass, and a plurality of mid-lower attachment members coupling the mid-lower mass to ...

ELECTRONIC DEVICE, ELECTRONIC APPARATUS, AND METHOD OF MANUFACTURING ELECTRONIC DEVICE

An electronic device includes a first base body, a second base body, a third base body held between the first base body and the second base body, a first functional element disposed in a first cavity surrounded by the first base body and the third base body, and a second functional element disposed in a second cavity surrounded by the second base body and the third base body. 1. An electronic device comprising:a first base body;a second base body;a third base body held between the first base body and the second base body;a first functional element disposed in a first cavity surrounded by the first base body and the third base body; anda second functional element disposed in a second cavity surrounded by the second base body and the third base body.2. The electronic device according to claim 1 , whereinthe first base body and the second base body are each provided with an alignment mark.3. The electronic device according to claim 1 , whereinthe first functional element detects a physical quantity different from a physical quantity detected by the second functional element.4. The electronic device according to claim 1 , whereinthe first functional element is the same as the second functional element, andthe third base body has an opening section adapted to communicate the first cavity and the second cavity with each other.5. The electronic device according to claim 1 , whereina material of the first and second base bodies is glass, anda material of the third base body is one of silicon and glass.6. The electronic device according to claim 1 , further comprising:a substrate, which includes an integrated circuit adapted to process signals of the first and second functional elements, and to which the first base body is mounted; anda mold section adapted to mold the first, second, and third base bodies and the substrate.7. A method of manufacturing an electronic device comprising:a first preparation step of preparing a first structure by preparing a first base body and ...

SYSTEM AND METHOD OF SENSING ACTUATION AND RELEASE VOLTAGES OF INTERFEROMETRIC MODULATORS

This disclosure provides methods and apparatus for calibrating display arrays. In one aspect, a method of calibrating a display array includes determining a particular drive response characteristic and updating a particular drive scheme voltage between updates of image data on the display array. The drive response characteristic may be determined by applying a ramp voltage to a line of the array and detecting a current pulse due to a capacitance change on the line. The ramp voltage generator can include a capacitor and a digitally controlled current source. 1. A method of calibrating an array of electromechanical elements , the method comprising:driving the array of electromechanical elements using an initial set of drive scheme voltages;generating a ramped voltage by charging a capacitor with a digitally controlled current;applying the ramped voltage to a subset of the array;determining a drive response characteristic based at least in part on a capacitance change produced by applying the ramped voltage to the subset of the array;determining a first updated drive scheme voltage for the array based at least in part on the drive response characteristic;driving the array using an updated set of drive scheme voltages, wherein the updated set of drive scheme voltages includes the first updated drive scheme voltage.2. The method of claim 1 , additionally comprising:generating a second ramped voltage by charging the capacitor with a second digitally controlled current;applying the second ramped voltage to a second subset of the array;determining a second drive response characteristic based at least in part on a second capacitance change produced by applying the second ramped voltage to the second subset of the array;determining a second updated drive scheme voltage for the array based at least in part on the second drive response characteristic determined; andwherein the updated set of drive scheme voltages further includes the second updated drive scheme voltage.3. The ...

SYSTEM AND METHOD OF SENSING ACTUATION AND RELEASE VOLTAGES OF INTERFEROMETRIC MODULATORS

This disclosure provides methods and apparatus for calibrating display arrays. In one aspect, a method of calibrating a display array includes determining a particular drive response characteristic and updating a particular drive scheme voltage between updates of image data on the display array. The drive response characteristic may be determined by applying a ramped voltage to a line of the array and detecting a current pulse due to a capacitance change on the line. The drive response characteristic can be determined based on data representing a width of a current pulse in the waveform or a weighted or unweighted area of a current pulse in the waveform. 1. A method of calibrating an array of electromechanical elements , the method comprising:applying a ramp voltage to a subset of the array and detecting an induced waveform including one or more current pulses;evaluating one or more characteristics of the induced waveform in a region of the waveform containing at least a portion of a current pulse;wherein the evaluating is based at least in part on data representing at least one of a width of all or the portion of the current pulse in the region and a weighted or unweighted area of all or the portion of the current pulse in the region; anddetermining a drive response characteristic based at least in part on the evaluated characteristics.2. The method of claim 1 , further comprising determining an updated drive scheme voltage for the array based at least in part on the determined drive response characteristic; and driving the array of electromechanical elements using the updated drive scheme voltage.3. The method of claim 1 , wherein the evaluating one or more characteristics of the induced waveform in the region of the waveform containing at least a portion of the current pulse includes:determining a value representing a peak current of the current pulse;determining a first voltage substantially equal to the ramp voltage at which the current pulse reaches a first ...

MECHANICAL META-MATERIALS

The present invention provides meta-materials with an actively controllable mechanical property. The meta-material includes a deformable structure and a set of activation elements. The activation elements are controllable between multiple states. The meta-material includes a first value for a mechanical property when one or more of the activation elements is in the first activation state and includes a second value for the mechanical property when the activation elements have been activated to the second activation state. In one aspect, the meta-material resembles a composite material where the connectivity between the component materials or shape and arrangement of the component materials is dynamically controllable so as to affect a mechanical property of the meta-material. 1. A method of absorbing energy using a meta-material , the meta-material comprising a deformable structure and a set of activation elements coupled to the deformable structure , the method comprising:activating at least one activation element from a first activation state to a second activation state, wherein the meta-material includes a first value for a mechanical property when the at least one activation element is in the first activation state and the meta-material includes a second value for the mechanical property when the at least one activation element has been activated to the second activation state; andapplying an external force to the meta-material such that the deformable structure deforms, wherein said external force is inadequate to deform said deformable structure when said at least one activation element is in said first activation state.2. The method of claim 1 , wherein activating the at least one activation element comprises applying an electrostatic clamping voltage to the least one activation element.3. The method of claim 1 , wherein the mechanical property is one of: toughness claim 1 , elastic modulus claim 1 , stiffness claim 1 , damping claim 1 , shape and resilience ...

Electronic device and method of manufacturing the same

An electronic device includes a substrate, an electrode formed on the substrate, and a movable portion provided above the electrode, the movable portion being elastically deformable, in which the movable potion includes a shape memory alloy film.

MEMS DEVICE, ELECTRONIC APPARATUS, AND MANUFACTURING METHOD OF MEMS DEVICE

A MEMS device is a MEMS device having a MEMS vibrator which includes a plurality of MEMS constituent elements laminated and formed above a first foundation portion which is laminated above a main surface of a wafer substrate, and the MEMS constituent elements are laminated above a first oxide film and a nitride film so as to cover an opening which is formed in the nitride film and exposes a second foundation portion above which the nitride film is laminated. 1. A MEMS device comprising:a first foundation portion that is disposed above a substrate surface and has an opening; andMEMS constituent elements that are disposed above the first foundation portion,wherein some of the MEMS constituent elements are connected to the substrate surface in the opening.2. The MEMS device according to claim 1 , further comprising:a second foundation portion that is disposed between the substrate and the first foundation portion,wherein the substrate surface is a surface which is located on the first foundation portion side of a surface of the second foundation portion.3. The MEMS device according to claim 1 , wherein the area of the opening in plan view of the substrate is in a range of 5% or more and 95% or less of the area of the MEMS constituent elements.4. The MEMS device according to claim 1 , wherein the MEMS constituent elements include a fixed lower electrode and a movable upper electrode claim 1 , andwherein a region where the fixed lower electrode overlaps the movable upper electrode is provided in plan view of the substrate.5. The MEMS device according to claim 4 , wherein the opening is formed at least around the region where the fixed lower electrode overlaps the movable upper electrode in plan view of the substrate.6. The MEMS device according to claim 4 , wherein the opening is formed at least around a region where the fixed lower electrode claim 4 , the movable upper electrode claim 4 , and the first foundation portion overlap each other in plan view of the substrate. ...

MEMS Device Comprising An Under Bump Metallization

The present invention concerns a MEMS device comprising an under bump metallization ()—UBM—to contact the device via flip-chip bonding with a substrate. The UBM () is placed on the surface of the MEMS device and close to the corners of the surface. Further, the shape of the UBM () is adapted to the shape of the corners. 1. A MEMS device , comprising:a surface having an under-bump metallization (UBM) to contact the device with a substrate via flip-chip bonding;wherein the UBM is placed on the surface of the MEMS device at a location that is close to a corner of the surface, andwherein a shape of the UBM is adapted to the shape of the corner.2. The MEMS device according to claim 1 , wherein the surface of the MEMS device comprises an active part and the shape of the UBM is adapted to the shape of the corners and the shape of the active part.3. The MEMS device according to claim 1 , wherein the shape of the UBM is approximately triangular.4. The MEMS device according to claim 3 , wherein the triangular shape includes rounded corners.5. The MEMS device according to claim 3 , wherein the triangular shape is that of an isosceles triangle.6. The MEMS device according to claim 3 , wherein one side of the UBM is concave.7. The MEMS device according to claim 1 , wherein the device comprises four UBMs claim 1 , one of the four UBMs is placed in a corresponding one of the corners of the surface of the device.8. The MEMS device according to claim 1 , wherein the MEMS device is a MEMS microphone chip.9. The MEMS device according to claim 1 , wherein the UBM is part of a UBM pad located on the surface claim 1 , the UBM pad further comprising at least one of an underlying metal layer and a conducting layer below the UBM claim 1 , wherein the UBM pad is placed close to the corners of the MEMS device claim 1 , and wherein the shape of the UBM pad is adapted to the shape of the corners.10. The MEMS device according to claim 9 , wherein the conducting layer comprises highly doped ...

OUT-OF-PLANE TRAVEL RESTRICTION STRUCTURES

The present disclosure includes structures and methods of forming structures for restricting out-of-plane travel. One example of forming such structures includes providing a first wafer comprising a bond layer of a particular thickness on a surface of a substrate material removing the bond layer in a first area - - to expose the surface of the substrate material applying a mask to at least a portion of a remaining bond layer - --- and a portion of the exposed surface of the substrate material in the first area --- to form a second area exposed on the surface of the substrate material etching the second area to form a cavity in the substrate material and the bond layer and forming by the etching, in the cavity a structure -- for restricting out-of-plane travel, where the structure -- has a particular height from a bottom of the cavity determined by the particular thickness of the bond layer 1. A method of forming a structure for restricting out-of-plane travel , the method comprising:providing a first wafer comprising a bond layer of a particular thickness on a surface of a first substrate material;removing the bond layer in a first area to expose the surface of the first substrate material;applying a mask to at least a portion of a remaining bond layer and a portion of the exposed surface of the first substrate material in the first area to form a second area exposed on the surface of the first substrate material;etching the second area to form a cavity in the first substrate material and the bond layer; andforming by the etching, in the cavity, the structure for restricting out-of-plane travel, wherein the structure has a particular height from a bottom of the cavity determined by the particular thickness of the bond layer.2. The method of claim 1 , including the cavity having a particular depth determined from the bottom of the cavity to a top surface of the bond layer.3. The method of claim 2 , including determining the particular height of the structure from the ...

POWER GENERATOR, AND ELECTRIC EQUIPMENT USING IT

A power generator includes a power generating device that generates a power by receiving vibration, and a power converter that converts the output of the power generating device. The power generating device outputs powers through a first system and a second system. The power converter is driven by receiving the output of the second system from the power generating device, and converts the output of the first system from the power generating device into another power. 113-. (canceled)14. A power generator comprising:a power generating device that generates a power by receiving vibration;a power converter that converts the output from the power generating device;a detector that detects information about the output from the power generating device; anda controller that switches presence/non-presence of power conversion of the power converter, whereinpresence/non-presence of power conversion in the power converter is switched based on the output from the power generating device,when determining based on the information that the output from the power generator is not more than the power consumption of the power generator, the controller stops the power conversion of the power converter.15. (canceled)16. The power generator according to claim 14 , whereinwhen determining based on the information that the output from the power generating device is not less than a predetermined value, the controller blocks input from the power generating device into the power converter.17. The power generator according to claim 14 , whereinthe information detected by the detector is the output power of the power generating device.18. The power generator according to claim 14 , whereinthe power generating device has a vibration body that can vibrate, andthe information detected by the detector is vibrational amplitude of the vibration body.19. The power generator according to claim 18 , further comprising:an MPPT circuit that controls the power converter, whereinthe MPPT circuit controls the ...

METHOD OF ENERGY HARVESTING USING BUILT-IN POTENTIAL DIFFERENCE OF METAL-TO-METAL JUNCTIONS AND DEVICE THEREOF

This invention is related with electrical energy conversion device, which uses built-in potential of metal-to-metal junctions from repeating movements with random frequencies, speeds and amplitudes at the medium of the device. The device using the method does not rely on a resonant frequency, besides, it can convert the kinetic energy to electrical energy even at low frequencies. Furthermore, its application to the real life situations is economic and beneficial because of the efficient working principle and simple structure. Unique design of the device enables direct wiring of the outputs of identical or similar devices together for the purpose of power scaling without the need of using another device, which may cause energy losses and increase the total cost. This device also does not require a dummy voltage source or a precharge at the beginning of energy harvesting 1. An energy conversion device using built-in potential difference of metal-to-metal junctions , in which a charge shuttle device is used the energy conversion device comprising:a capsulation, which is fixed within a reference frame of the device, but is subject to external motion and encapsulates all the device components;a plurality of device first electrode and a device second electrode wherein the device first electrode is mechanically coupled to the capsulation, wherein the device second electrode is mechanically coupled to the capsulation; a device first electrode node connected to the device first electrode;', 'a device second electrode node connected to the device second electrode; and', 'a device shuttle node connected to the device shuttle electrode;, 'a moving shuttle that moves back and forth between the device first electrode and the device second electrode wherein external motion is exerted to the moving shuttle, and the moving shuttle cannot be in electrical contact with the device first electrode and the device second electrode at the same time;'}wherein an electrical energy is ...

MEMS DEVICE AND METHODS FOR MANUFACTURING AND USING SAME

A Micro Electro Mechanical Systems (MEMS) device includes a rotor having first rotor teeth and second rotor teeth formed in at least two layers of silicon-on-insulator (SOI) substrate. Each rotor tooth belonging to the first rotor teeth is formed in a first layer and each rotor tooth belonging of the second rotor teeth is formed in a second layer. A stator includes first stator teeth and second stator teeth formed in at least two layers of SOI substrate. Each stator tooth belonging to the first stator teeth is formed in a first layer and each stator tooth belonging to the second stator teeth is formed in a second layer. 1. A method , comprising:providing a rotor which comprises a first plurality of rotor teeth, each of which is formed in a first layer of an SOI substrate, and a second plurality of rotor teeth, each of which is formed in a second layer of an SOI substrate;providing at least one stator which comprises a first plurality of stator teeth, each of which is formed in a first layer of an SOI substrate, and a second plurality of stator teeth, each of which is formed in a second layer of an SOI substrate;applying voltage to at least one of the at least one stator, thereby causing all of the first plurality of rotor teeth located opposite to the first plurality of stator teeth of said at least one stator to move downwardly and all of the second plurality of rotor teeth located opposite to the second plurality of stator teeth of said at least one stator to move upwardly.2. The method according to claim 1 , wherein the first plurality of rotor teeth is located above the first plurality of teeth of the at least one stator claim 1 , and the second plurality of rotor teeth is located below the second plurality of teeth of the at least one stator.3. The method according to claim 1 , wherein an upper surface of each rotor tooth belonging to the first plurality of rotor teeth is located at the same plane as the upper surface of the rotor claim 1 , and wherein upper ...

DYNAMICALLY-BALANCED FOLDED-BEAM SUSPENSIONS

It is believed that the folded-beam suspension responds as a linear spring. Though true for the static response, this is not true for dynamic responses. For shuttle displacements in the order of the width of the flexure beams, the response becomes strongly nonlinear. This nonlinearity is caused by axial stresses which are induced due mainly to the inertia of the flying bar. A solution for this problem is given by shortening the anchored beams of the suspension by a predetermined amount, such that the flexure beams between anchor and flying bar, and between flying bar and shuttle have different lengths. In this dynamically-balanced suspension, the ratio between the motions of the shuttle and of the flying-bar ensures that the effective shortening of all beams is the same. Therefore, no axial stresses are induced, and the motion ratio is constant and unaffected by motion amplitude, resulting in a linear dynamic spring response. 1. A folded beam suspension resonator comprising:a shuttle suspended by a suspension such that its motion is regulated by the elastic characteristics of said suspension;a pair of flying bars, one disposed on each side of said shuttle, each flying bar connected to said shuttle by a first pair of flexure beams, and being connected to anchor points by a second pair of flexure beams, the length of each of said second pair of flexure beams being shorter than the length of each of said first pair of flexure beams;wherein the lengths of said flexure beams in said first and second pairs of flexure beams are selected such that no internal axial stresses are induced in said flexure beams when said resonator is undergoing harmonic motion.2. A folded beam suspension resonator according to claim 1 , wherein said lack of internal axial stress is achieved by selecting the lengths of said flexure beams such that the axial contractions of said first pair of flexure beams are equal to the axial contractions of said second pair of flexure beams.3. A folded beam ...

CAPACITIVE ACTUATOR MOTOR, CAPACITIVE ACTUATOR, AND CAPACITIVE ACTUATOR UNIT

A capacitive actuator motor according to an embodiment of the present invention includes a capacitive actuator having six actuator units and a motor output cam having a periodic shape portion. Each of the six actuator units includes a buckling displacement expansion mechanism configured to convert an output of a piezoelectric element and urge an output joint in a predetermined output direction and a preload adjustment spring configured to urge an output joint with a certain characteristic in a direction in which the periodic shape portion and the output joint come into contact with each other. 1. A capacitive actuator motor , comprising:a capacitive actuator including a plurality of actuator units; anda motor output cam including a periodic shape portion,wherein each of the plurality of actuator units includes a displacement expansion mechanism configured to convert an output of an expandable element having capacitive properties and urge an output transmission portion in a predetermined output direction and a urger configured to urge the output transmission portion with a certain characteristic in a direction in which the periodic shape portion and output transmission portion come into contact with each other.2. The capacitive actuator motor according to claim 1 ,wherein each of the plurality of actuator units generates a unit motor thrust by pressing or pulling the output transmission portion in the direction of the motor output cam, andwherein each of the plurality of actuator units is disposed at a phase interval with respect to the periodic shape portion such that, in a motor thrust which is a resultant force of unit motor thrusts generated by each of the plurality of actuator units, thrust components other than a thrust component generated by an input of the expandable element from the outside cancel each other out between the plurality of actuator units.3. The capacitive actuator motor according to claim 1 ,wherein each of the plurality of actuator units ...

ARTIFICIAL MUSCLE ACTUATORS COMPRISING ELECTRODES WITH AN INSULATION BILAYER

An artificial muscle actuator that includes a housing, a dielectric fluid housed within the housing, and an electrode pair positioned in the housing. The electrode pair includes a first electrode and a second electrode. The first electrode and the second electrode each include a metal film. The first electrode includes an insulation bilayer disposed on the metal film of the first electrode in an orientation facing the second electrode. In addition, the insulation bilayer includes an acryl-based polymer layer disposed on the metal film and a biaxially oriented polypropylene (BOPP) layer disposed on the acryl-based polymer layer. 1. An artificial muscle actuator comprising:a housing;a dielectric fluid housed within the housing; and the electrode pair comprises a first electrode and a second electrode;', 'the first electrode and the second electrode each comprise a metal film;', 'the first electrode comprises an insulation bilayer disposed on the metal film of the first electrode in an orientation facing the second electrode; and', 'the insulation bilayer comprises an acryl-based polymer layer disposed on the metal film and a biaxially oriented polypropylene (BOPP) layer disposed on the acryl-based polymer layer., 'an electrode pair positioned in the housing, wherein2. The artificial muscle actuator of claim 1 , wherein the acryl-based polymer layer comprises a poly(ethylacrylate acrylamide).3. The artificial muscle actuator of claim 1 , wherein the acryl-based polymer layer is an adhesive layer adhered to the metal film and the BOPP layer.4. The artificial muscle actuator of claim 1 , wherein the second electrode comprises an insulation bilayer disposed on the metal film of the second electrode in an orientation facing the second electrode.5. The artificial muscle actuator of claim 1 , wherein the insulation bilayer surrounds the metal film of the first electrode.6. The artificial muscle actuator of claim 5 , wherein the second electrode comprises an insulation ...

ELECTROSTATIC GENERATOR ELECTRODE-CENTERING AND SEISMIC-ISOLATION SYSTEM FOR FLYWHEEL-BASED ENERGY STORAGE MODULES

Robust electro-static (ES) device embodiments, with application to energy storage flywheels as an example, are described that provide reliable, high-efficiency operation in the presence of thermal and mechanical perturbations, as well as seismic events. Electro-static generators and motors, when augmented with magnetic bearings, passive three-dimensional stabilization techniques and dynamic touch-down bearings, enable robust performance in the face of these environmental concerns, as well as efficient operation during typical operational sequences, including spin-up and steady-state modalities. 1. An apparatus , comprising:an open cylindrical rotor having a central axis of rotation;a first support structure that is stationary relative to said rotor;a first annular element having its outermost edge attached to the inner surface of said rotor;a second annular element attached to said first support structure, wherein said second annular element is positioned in proximity to said first annular element, wherein at least one of said first annular element and said second annular element is configured to magnetically attract the other of said first annular element and said second annular element;a second support structure;an axial stabilizer selected from the group consisting of a first triplet array and a second triplet array, wherein said first triplet array comprises:a first magnetic annular element attached to the inner surface of said rotor;a second magnetic annular element attached to said second support structure; anda third magnetic annular element attached to said second support structure, wherein said second magnetic annular element and said third magnetic annular element are positioned on opposite sides, one to another, of said first magnetic annular element and both magnetically repel said first magnetic annular element, and wherein said second triplet array comprises:a first magnetic annular element attached to said second structure;a second magnetic annular ...

Electrically conductive electret and associated electret-based power source and self-powered structure

This invention provides electrically conductive electret, electret-based direct-current power source and structural electret, with applications including the self-sensing of damage, stress and strain (including structural self-sensing) and electric powering (including structural self-powering). The electret is an electrically conductive material comprising mobile charge carriers (electrons, holes or ions), which exhibit a gradient in the carrier concertation along a line connecting the positive charge center and negative charge center in the electret. The carriers create an electric dipole. The material is electrically continuous along this line, which is along the path of least electrical resistance. The material exhibits microstructure comprising microscopic features that are positioned along said line and that interact with said carriers, with the interaction enhancing said dipole. The materials are preferably metals, carbons and their composites. The electret's electric field preferably ranges from 10′ V/m to 1 V/m. The electrical conductivity preferably ranges from 10Ω·mto 10Ω·m. 2. An electret material of claim 1 , wherein said dipole exhibits electric field claim 1 , said electric field ranging from 10V/m to 1 V/m.3. An electret material of claim 1 , wherein said electrical conductivity ranges from 10Ω·mto 10Ω·m.4. An electret material of claim 1 , wherein said electrically conductive material is selected from the group consisting of metals claim 1 , alloys claim 1 , copper claim 1 , nickel claim 1 , steel claim 1 , stainless steel claim 1 , alloy steels claim 1 , galvanized steel claim 1 , tin claim 1 , tin-lead claim 1 , metal-matrix composites claim 1 , carbons claim 1 , carbon fibers claim 1 , exfoliated-graphite-based flexible graphite claim 1 , carbon nanotubes claim 1 , carbon nanofibers claim 1 , graphite claim 1 , graphene claim 1 , isotropic graphite claim 1 , carbon-carbon composites claim 1 , ceramic-matrix composites claim 1 , cement-matrix ...

TRANSDUCER AND SUBJECT INFORMATION ACQUISITION APPARATUS

A transducer includes a plurality of elements each including at least one cell structured in such a way that a diaphragm including one of a first electrode and a second electrode disposed facing each other via a space is vibratably supported, bias wiring for supplying a bias voltage to the first electrode to provide a potential difference between the first and the second electrodes, and for electrically connecting the first electrodes of the elements to each other, and signal wiring lines each connected to a different one of the elements. The bias wiring includes a plurality of branch wiring lines to each of which the first electrodes of a part of the elements are connected, a plurality of first common wiring lines for connecting the branch wiring lines to each other, and a second common wiring line for connecting the first common wiring lines to each other. 1. A transducer comprising:a plurality of elements each including at least one cell structured in such a way that a diaphragm including one of a first electrode and a second electrode disposed facing each other via a space is vibratably supported;bias wiring for supplying a bias voltage to the first electrode to provide a potential difference between the first and the second electrodes, and for electrically connecting the first electrodes of the plurality of elements to each other; anda plurality of signal wiring lines each connected to a different one of the plurality of elements,wherein the bias wiring includes a plurality of branch wiring lines to each of which the first electrodes of a part of the plurality of elements are connected, a plurality of first common wiring lines for connecting the plurality of branch wiring lines to each other, and a second common wiring line for connecting the plurality of the first common wiring lines to each other.2. The transducer according to claim 1 , further comprising a terminal to which the bias wiring is connected claim 1 ,wherein the bias wiring and the terminal are ...

ELECTROSTATIC CAPACITANCE TRANSDUCER, PROBE, AND SUBJECT INFORMATION ACQUIRING DEVICE

An electrostatic capacitance transducer includes: multiple elements each having a cell including a first electrode, and a vibrating film including a second electrode, formed across a gap from the first electrode; a first flexible printed circuit having multiple first lines; and a second flexible printed circuit having multiple second lines. Part of the multiple elements are grouped into a first element group, each one thereof being electrically connected to a different one of the first lines. Part of the multiple elements other than the first element group are grouped into a second element group, each one thereof being electrically connected to a different one of the second lines. The intervals between adjacent lines in at least part of the plurality of first and second lines are wider at an opposite side from a connection side where the lines have been connected to the multiple elements, than at the connection side. 1. An electrostatic capacitance transducer , comprising: a first electrode, and', 'a vibrating film including a second electrode, formed across a gap from the first electrode;, 'a plurality of elements, each of the elements having a cell including'}a first flexible printed circuit having a plurality of first lines; anda second flexible printed circuit having a plurality of second lines;wherein a part of the plurality of elements are grouped into a first element group, each one of the elements of the first element group being electrically connected to a different one of the first lines;wherein a part of the plurality of elements other than the first element group are grouped into a second element group, each one of the elements of the second element group being electrically connected to a different one of the second lines; andwherein the intervals between adjacent lines in at least part of the plurality of first and second lines are wider at an opposite side from a connection side where the lines have been connected to the plurality of elements, than at ...

Area Efficient Single-Ended Analog-to-Digital Converter

A single ended n-bit hybrid digital-to-analog converter is configured to receive as an input an analog signal and produce an n-bit digital output. The converter includes a split main sub-digital-to-analog converter capacitor array, a most significant bit capacitor array, and a main capacitor array. A coupling capacitor couples the main array to the split main sub-digital-to-analog convert.

ULTRASONIC TRANSDUCER AND METHOD OF MANUFACTURING THE SAME

An ultrasonic transducer and a method of manufacturing the same are provided. The ultrasonic transducer includes a substrate, a first insulation layer, and a first thin film layer; a plurality of support members formed on the first thin film layer; a second thin film layer supported by the plurality of support members; a cavity between the first thin film layer and the second thin film layer; and a common ground electrode on the second thin film layer.

VIBRATOR, MANUFACTURING METHOD OF VIBRATOR, ELECTRONIC APPARATUS, AND MOBILE UNIT

A MEMS vibrator includes a wafer substrate, a fixed lower electrode (first electrode) disposed on a principal surface of the wafer substrate, a support member whose one end is fixed to the wafer substrate, and a movable upper electrode (second electrode) joined to the other end of the support member and having a region overlapping the fixed lower electrode with a gap. The support member has a reinforcing region where the thickness of the support member in a thickness direction of the wafer substrate is larger than the thickness of the movable upper electrode in the thickness direction of the wafer substrate. 1. A vibrator comprising:a substrate;a first electrode disposed above a principal surface of the substrate;a support member fixed to the substrate; anda second electrode joined to the support member, being spaced apart from the first electrode, and having a region overlapping the first electrode in plan view of the substrate, whereinthe support member has a reinforcing region where the thickness of the support member in a thickness direction of the substrate is larger than the thickness of the second electrode in the thickness direction of the substrate.2. The vibrator according to claim 1 , whereinthe second electrode is a vibrating plate that flexurally vibrates in the thickness direction of the substrate, anda node portion of the flexural vibration of the second electrode is joined to the other end of the support member.3. The vibrator according to claim 1 , comprising a plurality of pairs of the support members each pair of which interpose the second electrode therebetween.4. The vibrator according to claim 1 , whereinthe reinforcing region is a region where the thickness of the support member in the thickness direction of the substrate is larger in a direction away from the principal surface of the substrate than the thickness of the second electrode in the thickness direction of the substrate.5. The vibrator according to claim 1 , whereinthe thickness of ...

MICROELECTROMECHANICAL COMPONENT AND METHOD FOR PRODUCING A MICROELECTROMECHANICAL COMPONENT

A microelectromechanical component and a method for producing a microelectromechanical component includes a charge-storing layer that has improved long-term stability. The charge-storing layer is completely enclosed by dielectric layers such that there is a high potential barrier between the charge-storing layer and the dielectric layers. During normal operation, it is not possible to overcome this high potential barrier and, as a result, the stored charge carriers are maintained over a very long period of time. 1. A microelectromechanical component , comprising:a first electrically conductive substrate;a second electrically conductive substrate arranged in a manner spaced apart from the first electrically conductive substrate;a first dielectric layer arranged on a side of the first conductive substrate which faces in the direction of the second electrically conductive substrate;a charge-storing layer arranged on the first dielectric layer; anda second dielectric layer arranged on the charge-storing layer.2. The microelectromechanical component according to claim 1 , wherein the charge-storing layer is a polycrystalline layer.3. The microelectromechanical component according to claim 1 , wherein the charge-storing layer is a layer composed of nanocrystallites embedded into a dielectric.4. The microelectromechanical component according to claim 1 , further comprising a first electrically insulating sealing layer arranged on the second dielectric layer.5. The microelectromechanical component according to claim 1 , further comprising a ferroelectric layer arranged on a side of the second electrically conductive substrate which faces in the direction of the first conductive substrate.6. The microelectromechanical component according to claim 5 , further comprising a second electrically insulating sealing layer arranged on the ferroelectric layer.7. A method for producing a microelectromechanical component claim 5 , comprising:applying a first dielectric layer to a first ...

Passive indexing of a movable element having teeth

The invention relates to a device including: a movable element ( 1 ) comprising teeth ( 11; 11 i , i, 11 i+1 , 11 i+2 , 11 i+3 , 11 i+4 ); a driving element ( 2 ) for engaging with the teeth ( 11; 11 i , 11 i+1 , 11 i+2 , 11 i+3 , 11 i+4 ) of the movable element ( 1 ) so as to set the movable element ( 1 ) in motion in a direction of movement; an actuator element ( 3 ) capable of generating an alternating movement so as to move the driving element ( 2 ) according to at least two phases, i.e. a driving phase, during which the driving element ( 2 ) is engaged with a tooth ( 11; 11 i , 11 i+1 , 11 i+2 , 11 i+3 , 11 i+4 ) of the movable element ( 1 ), and a return phase without driving, during which the driving element ( 2 ) is shifted with respect to the movable element ( 1 ); and a first indexing element ( 4 ), which includes a first indexing finger ( 41 ) to be positioned between two teeth ( 11; 11 i , 11 i+1 , 11 i+2 , 11 i+3 , 11 i+4 ) of the movable element ( 1 ), and which is connected to the actuator element ( 3 ) in order to move the driving element ( 2 ) and the first indexing finger ( 41 ) simultaneously.

STRESS TOLERANT MEMS ACCELEROMETER

A Micro-Electro-Mechanical System (MEMS) accelerometer employing a rotor and stator that are both released from a substrate. In embodiments, the rotor and stator are each of continuous a metal thin film. A stress gradient in the film is manifested in capacitive members of the rotor and stator as a substantially equal deflection such that a relative displacement between the rotor and stator associated with an acceleration in the z-axis is substantially independent of the stress gradient. In embodiments, the stator comprises comb fingers cantilevered from a first anchor point while the rotor comprises comb fingers coupled to a proof mass by torsion springs affixed to the substrate at second anchor points proximate to the first anchor point. 1. A Microelectromechanical System (MEMS) , comprising:a substrate; a beam cantilevered from a first anchor point affixed to the substrate; and', 'a plurality of stator comb fingers at an end of the beam opposite the first anchor point; and', a body adjacent to opposite sides of the beam and attached to the substrate at a second anchor point that is proximate to, but electrically isolated from, the anchored end of the stator; and', 'a plurality of rotor comb fingers at an end of the body opposite the second anchor point and interdigitated with the stator comb fingers., 'a released rotor including], 'a released stator including2. The MEMS of claim 1 , wherein the stator beam and the rotor body are of a same conductive thin film layer.3. The MEMS of claim 2 , wherein the conductive thin film layer is a metal interconnect layer disposed over semiconductor transistor structures disposed within the substrate.4. The MEMS of claim 1 , wherein the beam is of a beam length at least ten times greater than a beam width claim 1 , and wherein the body has a body width more than ten times the beam width.5. The MEMS of claim 1 , wherein the beam extends through a center of the rotor body width claim 1 , and wherein the stator and rotor comb ...

ELECTROSTATIC INDUCTION TYPE POWER GENERATION ELEMENT

An electrostatic induction type power generation element is capable of increasing the amount of generated power while suppressing a parasitic capacitance between electrodes between which induced electromotive force is generated. An electrostatic induction type power generation element in one embodiment includes: substrates which are opposed to each other and which move relative to each other in a direction parallel to the opposing surfaces of the substrates; a charge retaining unit and conductors which are respectively formed on the opposing surfaces of the substrates; and a substance which is interposed between the substrates opposed to each other and between the charge retaining unit and the conductors, and which has an anisotropic dielectric constant in which a relative dielectric constant in the direction parallel to the opposing surfaces is higher than a relative dielectric constant in a direction orthogonal to the opposing surfaces. 1. An electrostatic induction type power generation element which coverts kinetic energy to electric energy , and comprises:substrates which are opposed to each other, and relatively move in the direction parallel to the opposing surfaces,a charge retaining unit and a conductor which are respectively formed on the opposing surfaces of the substrates, anda substance provided between the opposing substrates and between the charge retaining unit and the conductor, the substance having an anisotropic dielectric constant so that a relative dielectric constant in the direction orthogonal to the opposing surfaces is larger than a relative dielectric constant in the direction parallel to the opposing surfaces.2. An electrostatic induction type power generation element according to claim 1 , wherein the substance having an anisotropic dielectric constant is liquid crystal.3. An electrostatic induction type power generation element according to claim 1 , wherein the charge retaining unit is an electret.4. An electrostatic induction type ...

ELECTROSTATIC ACTUATOR

An actuator is configured to include a first substrate that has a first conductive surface, which may be or include a first conductive electrode layer. The actuator also includes a second substrate that has a second conductive surface, which may be or include a second conductive electrode layer. The first and second conductive surfaces face toward each other across a compression space between the first and second substrates. A group of elastic support nodules span the compression space and separate the first and second conductive surfaces. The compression space is less than fully filled with solid elastic material and is configured to be compressed by relative movement of the first and second conductive surfaces toward each other in response to a voltage difference between the first and second conductive surfaces. 1. An actuator comprising:a first substrate having a first conductive surface;a second substrate having a second conductive surface, the first and second conductive surfaces facing toward each other across a compression space between the first and second substrates; anda plurality of elastic nodules spanning the compression space and separating the first and second conductive surfaces, the compression space being less than fully filled with solid material and configured to be compressed by relative movement of the first and second conductive surfaces toward each other in response to a voltage difference between the first and second conductive surfaces.2. The actuator of claim 1 , wherein:the first substrate, the second substrate, and the plurality of elastic nodules are included in a flexible substrate.3. The actuator claim 1 , wherein:at least one of the first conductive surface or the second conductive surface is electrically insulated from the plurality of elastic nodules.4. The actuator of claim 1 , wherein:the first and second conductive surfaces are both electrically insulated from the plurality of elastic nodules.5. The actuator of claim 1 , wherein ...

HIGH DISPLACEMENT ULTRASONIC TRANSDUCER

In some examples, a transducer apparatus includes a spring structure that enables a large, reliable amount of displacement of a transducer plate. For instance, an individual cell of the transducer apparatus may include a substrate having a first electrode portion, with at least one spring anchor extending from a first side of the substrate. At least one spring member may be supported by the at least one anchor, and may be connected to a plate that includes a second electrode portion. Accordingly, the spring member may support the plate, at least in part, for enabling the plate to move in a resilient manner toward and away from the substrate. In some cases, the spring member may be a bar-shaped spring that is cantilevered to an anchor or supported by two or more anchors. Additionally, a cavity between the plate and the substrate may be sealed by a sealing material. 1. A transducer apparatus comprising:a substrate including a first electrode portion;a plate including a second electrode portion;at least one spring member connected to the plate; the at least one spring member is bar-shaped; and', 'the at least one spring member supports the plate, at least in part, to allow relative movement between the plate and the substrate., 'at least one anchor between the substrate and the at least one spring member to support the spring member away from the substrate, wherein2. The transducer apparatus as recited in claim 1 , wherein:there is a cavity between the plate and the substrate; andthe transducer apparatus further comprises a sealing layer to, at least in part, seal the cavity.3. The transducer apparatus as recited in claim 2 , wherein the sealing layer comprises a layer of sealing material disposed on at least one of a top side of the plate or a bottom side of the plate.4. The transducer apparatus as recited in claim 1 , wherein a plurality of the plates are arranged side-by-side to form a plurality of transducer cells claim 1 , each transducer cell comprising a ...

METHOD FOR DETERMINING A TORSION ANGLE OF A MIRROR BODY OF AN MEMS APPARATUS

A method comprises applying a driver voltage to an electrostatic comb drive of an MEMS apparatus and overlaying the driver voltage with a periodic voltage signal. The method further comprises determining a torsion angle of a mirror body of the MEMS apparatus based on the periodic voltage signal. 1. A method , comprising:applying a driver voltage to an electrostatic comb drive of an MEMS apparatus;overlaying the driver voltage with a periodic voltage signal; anddetermining a torsion angle of a mirror body of the MEMS apparatus based on the periodic voltage signal.2. The method as claimed in claim 1 , wherein applying the driver voltage to the electrostatic comb drive comprises:applying a first driver voltage to a first stator of the comb drive; andapplying a second driver voltage to a second stator of the comb drive.3. The method as claimed in claim 2 , wherein overlaying the driver voltage with the periodic voltage signal comprises:overlaying the first driver voltage with a first periodic voltage signal; andoverlaying the second driver voltage with a second periodic voltage signal.4. The method as claimed in claim 3 , wherein the first periodic voltage signal and the second periodic voltage signal are substantially in anti-phase.5. The method as claimed in claim 3 , wherein a frequency of the first periodic voltage signal and a frequency of the second periodic voltage signal are higher than a resonant frequency of the MEMS apparatus.6. The method as claimed in claim 3 , wherein a frequency of the first periodic voltage signal and a frequency of the second periodic voltage signal are in a range from 1 MHz to 100 MHz.7. The method as claimed in claim 3 , wherein an amplitude of the first periodic voltage signal and an amplitude of the second periodic voltage signal are in a range from 0.1 V to 1 V.8. The method as claimed in claim 3 , further comprising:determining a measurement signal at a rotor of the comb drive, wherein the measurement signal is based on the first ...

Varying Capacitance Rotating Electrical Machine

A varying capacitance rotating electrical machine provides capacitor elements, such as capacitor plates, that move with respect to each other as separated by a thin film of fluid, for example, air, on which one capacitor element floats. In one embodiment, multiple plates provide for three-phase operation. Narrow gaps provided by the floating capacitor elements increase the power density of the rotating electrical machine. 1. A rotating electrical machine comprising:a stator supported on a frame and having at least one stator plate;a rotor supported on an axle supported on bearings mounted on the frame for rotation of the axle about an axis with respect to the stator and including at least one rotor plate positioned to pass by the stator plate during rotation of the rotor with respect to the stator; anda liquid film between the stator and rotor,wherein the at least one stator plate and at least one rotor plate are axially movable to float in separation when the at least one rotor plate passes by the at least one stator plate on the liquid film so that during operation of the rotating electrical machine, the liquid suspends the at least one stator plate and at least one rotor plate in separation in a manner of a fluid bearing and without mechanical contact between the at least one rotor plate and the at least one stator plate and intervening solid bearing materials.2. The rotating electrical machine of further including a spring element biasing at least one of the at least one rotor plate and the at least one stator plate axially toward the other of the at least one rotor plate and the at least one stator plate.3. The rotating electrical machine of wherein the stator supports at least two conductive stator plates connected to stationary terminals on the frame for communication with external circuitry.4. The rotating electrical machine of wherein the rotating electrical machine is a motor and further including an AC voltage source attached across the terminals.5. The ...

Linearly deployed actuators

A method for making an actuator includes forming a substantially planar actuator device of an electrically conductive material, the device incorporating an outer frame, a fixed frame attached to the outer frame, a moveable frame disposed parallel to the fixed frame, a motion control flexure coupling the moveable frame to the outer frame for coplanar, rectilinear movement relative to the outer frame and the fixed frame, and an actuator incorporating a plurality of interdigitated teeth, a fixed portion of which is attached to the fixed frame and a moving portion of which is attached to the moveable frame, moving the moveable frame to a deployed position that is coplanar with, parallel to and spaced at a selected distance apart from the fixed frame and fixing the moveable frame at the deployed position for substantially rectilinear, perpendicular movement relative to the fixed frame.

ELECTROSTATIC ACTUATOR, SWITCH DEVICE, POWER SUPPLY DEVICE, AND PROGRAM

[Object] To make it possible to selectively switch the threshold value of the drive voltage. 1. An electrostatic actuator , comprising:a base section;a movable electrode section held to be displaceable in a predetermined direction with respect to the base section; anda plurality of fixed electrodes fixed to the base section to be separated from the movable electrode section along a movable direction of the movable electrode section and face the movable electrode section, the plurality of fixed electrodes being electrically separated from each other,wherein the electrostatic actuator is driven in accordance with a drive voltage selectively applied to the plurality of fixed electrodes and a voltage value of the drive voltage.2. The electrostatic actuator according to claim 1 ,wherein the plurality of fixed electrodes include a first fixed electrode and a second fixed electrode, andthe voltage value of the drive voltage for driving differs in accordance with a combination of fixed electrodes to which the drive voltage is applied among the first fixed electrode and the second fixed electrode.3. The electrostatic actuator according to claim 2 ,wherein the first fixed electrode and the second fixed electrode differ in an area of a portion facing the movable electrode section.4. The electrostatic actuator according to claim 3 ,wherein in the plurality of fixed electrodes, at least one of the number of first fixed electrodes and the number of second fixed electrodes is two or more, andthe number of the first fixed electrodes is different from the number of the second fixed electrodes.5. The electrostatic actuator according to claim 3 ,wherein a sum of the areas of the portion facing the movable electrode section in the first fixed electrode is a power of a sum of the areas of the portion facing the movable electrode section in the second fixed electrode.6. The electrostatic actuator according to claim 2 ,wherein the first fixed electrode and the second fixed electrode ...

POWER GENERATING DEVICE AND POWER GENERATING MODULE

A power generating device includes: a photoelectric conversion unit having a photoelectric conversion film; an electret layer for holding electric charges; an electret power generator configured of a light transmissive material; and an insulating layer which is covering a photoelectric conversion film and transmits light in all wavelength bands available for the photoelectric conversion film or some of the all wavelength bands. The electret layer is stacked on the insulating layer. 1. A power generating device , comprising:a photoelectric conversion unit having a photoelectric conversion film;an electret power generator formed of a light transmissive material and having an electret layer for holding electric charges; andan insulating layer which is covering the photoelectric conversion film and transmits light in all wavelength bands available for the photoelectric conversion film or some of the all wavelength bands,the electret layer being stacked on the insulating layer.2. The power generating device according to claim 1 , whereinthe electret power generator includes:a light-transmissive movable substrate;a first transparent electrode disposed on the electret layer; anda second transparent electrode disposed on the light-transmissive movable substrate.3. The power generating device according to claim 1 , whereinthe electret power generator includes:a light-transmissive movable substrate; anda first transparent electrode and a second transparent electrode which are disposed on the light-transmissive movable substrate.4. The power generating device according to claim 1 , whereinthe photoelectric conversion unit includes an electrode, anda surface, which receives no incident light, of the photoelectric conversion film is in contact with the electrode.5. The power generating device according to claim 1 , whereinthe electret power generator is formed of polycarbonate, polypropylene, polytetrafluroethylene, amorphous fluoro resin, or silicon dioxide.6. The power ...

TRANSDUCER DEVICE

A transducer device includes a first dielectric layer, a first electrode layer and a second electrode layer that hold the first dielectric layer in a thickness direction, a second dielectric layer provided continuously from the first dielectric layer, a third electrode layer and a fourth electrode layer that hold the second dielectric layer in the thickness direction, and a controller. The controller calculates a command value of voltage to be applied to the first electrode layer and the second electrode layer and applies a voltage corresponding to the command value to the first electrode layer and the second electrode layer so that the first dielectric layer is deformed in the thickness direction. The controller measures a capacitance Cs of the second dielectric layer via the third electrode layer and the fourth electrode layer and calculates the command value in reference to the measured capacitance Cs. 1. A transducer device comprising:a first dielectric layer;a first electrode layer and a second electrode layer that hold the first dielectric layer in a thickness direction;a second dielectric layer on which no external force acts, the second dielectric layer being provided continuously from the first dielectric layer;a third electrode layer and a fourth electrode layer that hold the second dielectric layer in the thickness direction; anda controller that calculates a command value of voltage to be applied to the first electrode layer and the second electrode layer and applies a voltage corresponding to the command value to the first electrode layer and the second electrode layer so that the first dielectric layer is deformed in the thickness direction,wherein the controller measures a capacitance Cs of the second dielectric layer via the third electrode layer and the fourth electrode layer and calculates the command value in reference to the measured capacitance Cs.2. The transducer device according to claim 1 , wherein the controller obtains a relative ...

Motor powered by electrostatic forces

An electrostatic repulsion motor comprising a rotor adjacent a stator. A main charging line is connected to a rotor charging line and a stator charging line. There is a discharging for the rotor. A continuous repeating of the charging and discharging sequences, produces continuous rotation of the rotor. Mechanical energy is generated at the axle of the rotor by the electrostatic energy going into the motor. Electrostatic energy in a concentrated amount is the second most powerful type of energy, nuclear energy being the first. The problems for the need of better insulating materials and techniques have gone away, along with the economical and convenient shortcomings. An important property of the electrostatic motor is that they can operate from a much greater variety of sources than the present electromagnetic motors. The electric field of the earth is one example. 1) An electrostatic motor comprising a rotor and a stator and having charging and discharging lines , wherein:a) said rotor with an axle and a plurality of side holes;b) there is a plurality of rim holes;c) there is a plurality of pointed metallic prongs protruding from said rotor;d) each said side holes have fine wires connected to each said pointed metallic prong;e) said stator has a v-shaped groove;f) said v-shaped groove meets a round hole;g) said round hole makes an angle;h) therein said round hole is a plug holding a pointed metallic prong;i) said pointed metallic prong in said stator is opposite a said pointed metallic prong in said rotor;j) a charging line is connected to said charging lines of said rotor and said stator;k) said rotor charging line has a cover cap with fine wires therein;l) said rotor discharging line has a cover cap with fine wires therein, andm) whereby the rotating axle of said rotor is generated by the charging and discharging of said motor.2) An electrostatic motor comprising a rotor and a stator and having charging and discharging lines claim 1 , wherein side holes as ...

ACTIVE COOLING DEVICE WITH ELECTRO-STATICALLY MOVING ELECTRODE AND METHOD OF ACTIVE COOLING WITH ELECTRO-STATICALLY MOVING ELECTRODE

A device () includes: a first electrode (); an electro-statically movable second electrode (); and an electrically insulating layer () disposed between the first and second electrodes. The electro-statically movable second electrode is configured to have a first geometric configuration in response to a first electrical potential between the first and second electrodes, and is further configured to have a second geometric configuration in response to a second electrical potential between the first and second electrodes. The device is configured to receive a time-varying voltage and in response thereto the electrostatically movable second electrode is configured to repeatedly transition between the first geometric configuration and the second geometric configuration to influence a flow of a fluid () for cooling at least one heat-generating element (). 1. A lighting unit , comprising:at least one solid state light source; a first electrode,', 'an electro-statically movable second electrode, and', 'an electrically insulating layer disposed between the first and second electrodes,', 'wherein the electro-statically movable second electrode is configured to have a first geometric configuration in response to a first electrical potential between the first and second electrodes, and is further configured to have a second geometric configuration in response to a second electrical potential between the first and second electrodes,, 'a cooling device configured to remove heat from the at least one solid state light source, the cooling device includinga controller configured to apply a time-varying voltage to the cooling device that causes the electro-statically movable second electrode to repeatedly transition between the first and second geometric configurations to influence a flow of a fluid which cools the at least one solid state light source.2. The lighting unit of claim 1 , further comprising a substrate claim 1 , wherein the at least one solid state light source is ...

Electrostatic Actuator with Tri-Electrode Topology

A new tri-electrode topology reduces the control voltage requirement for electrostatic actuators. Conventional parallel plate actuators are dual-electrode systems, formed by the MEMS structure and the drive electrode. By placing a perforated intermediate electrode between these elements, a tri-electrode configuration is formed. This topology enables a low voltage on the intermediate electrode to modulate the electrostatic force of the higher voltage drive electrode, whose voltage remains fixed. Results presented show that in comparison to conventional parallel plate electrostatic actuators, the intermediate electrode's modulating voltage can be as low as 20% of normal, while still providing the full actuation stroke. 1. An electrostatic actuator comprising:a base;a drive electrode mounted to the base in a stationary position thereon and connected or connectable to a first voltage source to apply a drive voltage to said drive electrode;a movable electrode suspended over the drive electrode in spaced relation therefrom;an intermediate electrode disposed between the drive electrode and the movable electrode in spaced relation from each thereof and connected or connectable to a variable second voltage source to apply a variable control voltage to said intermediate electrode, said intermediate electrode having a plurality of openings therein at an area thereof overlying the drive electrode;whereby an electric field generated by application of the drive voltage to the drive electrode passes through the openings in the intermediate electrode and is modulated by the variable control voltage applied to the intermediate electrode.2. The electrostatic actuator of wherein said drive electrode is connected to said first voltage source.3. The electrostatic actuator of wherein said intermediate electrode is connected to said variable second voltage source.4. The electrostatic actuator of wherein the openings in the intermediate electrode each have a width less than claim 1 , equal ...

Bearing-Less Electrostatic Flywheel

A bearing-less flywheel both exchanges energy with a rotating flywheel using a regenerative controller via a rotating electrostatic field but also suspends the flywheel with an electrostatic field to provide a compact robust mechanism for energy storage. 1. A flywheel system comprising:a housing adapted to hold a vacuum therein;a stator providing a set of independent electrically conductive plates arranged circularly about an axis and adapted to generate a rotating electrostatic field and a lifting electrostatic field centered on that axis within the housing; anda rotor plate positioned within the housing beneath the stator adapted to be lifted by the lifting electrostatic field and rotated by the rotating electrostatic field.2. The flywheel system of wherein an upper surface of the rotor plate is a dielectric material free of electrically conductive plates.3. The flywheel system of further including a ground plate positioned beneath the dielectric material.4. The flywheel system of wherein an upper surface of the rotor plate includes radially extending circularly arrayed electrically conductive plates.5. The flywheel system of wherein the electrically conductive plates intercommunicate through resistive material having a higher electrical resistance than the material of the electrically conductive plates.6. The flywheel system of wherein the stator electrically conductive plates extend in a plane above the rotor plate.7. The flywheel system of wherein the stator electrically conductive plates extend downward outside a periphery of the rotor plate.8. The flywheel system of wherein the stator electrically conductive plates are divided into electrically independent segments each holding multiple electrically independent electrically conductive plates.9. The flywheel system of further including a second stator and second rotor positioned for coaxial rotation of the rotor and second rotor.10. The flywheel system of wherein the rotor plate is substantially free from ...

ENERGY HARVESTER FOR ELECTROSTATIC ENERGY

Provided is an electrostatic energy harvester Including a lower electrode; a ferroelectric material layer which is disposed on the lower electrode and formed of a poled ferroelectric material; a friction-charged body which is adapted to be repeatedly contacted with and separated from the ferroelectric material layer and has an electric susceptibility different from an electric susceptibility of the ferroelectric material layer; and an upper electrode provided on the friction-charged body. 1. An energy harvester comprising:a lower electrode;a ferroelectric material layer which is disposed on the lower electrode and formed of a poled ferroelectric material; anda friction-charged body which is adapted to be repeatedly contacted and separated from the ferroelectric material layer, has an electric susceptibility different from an electric susceptibility of the ferroelectric material layer, and functions as an upper electrode to exchange electrons with the lower electrode.2. The energy harvester of claim 1 , wherein the friction-charged body and the ferroelectric material layer have opposite charging characteristics.3. The energy harvester of claim 1 , wherein the friction-charged body generates triboelectricity when the friction-charged body is separated from the ferroelectric material layer and the friction-charged body is in contact with the ferroelectric material layer.4. The energy harvester of claim 1 , wherein the ferroelectric material layer comprises at least one of polyvinylidene difluoride (PVDF) claim 1 , lead zirconate titanate (PZT) claim 1 , platinum oxide (PTO) claim 1 , Barium tin oxide (BTO) claim 1 , bismuth ferric oxide (BFO) claim 1 , KNbO3 claim 1 , NaNbO3 claim 1 , and GeTe.5. The energy harvester of claim 1 , wherein the friction-charged body comprises metal.6. The energy harvester of claim 1 , wherein the ferroelectric material layer comprises polyvinylidene difluoride (PVDF) claim 1 , and the friction-charged body comprises aluminum (Al).7. The ...

DEVICE WITH ELECTRODE CONNECTED TO THROUGH WIRE, AND METHOD FOR MANUFACTURING THE SAME

A capacitive transducer includes a substrate having a first surface and a second surface opposite the first surface, the substrate including a through wire extending therethrough between the first surface and the second surface, and a cell on the first surface, the cell including a first electrode and a second electrode spaced apart from the first electrode with a gap between the first electrode and the second electrode. Conductive protective films are disposed over surfaces of the through wire on the first surface side and the second surface side of the substrate. 1. A capacitive transducer comprising:a substrate having a first surface and a second surface opposite the first surface, the substrate including a through wire extending therethrough between the first surface and the second surface; anda cell on the first surface, the cell including a first electrode and a second electrode spaced apart from the first electrode with a gap between the first electrode and the second electrode,wherein a conductive protective film is disposed over a surface of the through wire on the first surface side of the substrate, and a conductive protective film is disposed over a surface of the through wire on the second surface side of the substrate.2. The capacitive transducer according to claim 1 , wherein each of the conductive protective films comprises a multilayer film having two or more layers.3. The capacitive transducer according to claim 1 , wherein the surfaces of the through wire are recessed from the first surface and the second surface of the substrate.4. The capacitive transducer according to claim 1 , further comprising an electrode pad configured to be electrically connected to the through wire via either of the conductive protective films.5. The capacitive transducer according to claim 1 , further comprising a wire configured to be electrically connected to the through wire via either of the conductive protective films.6. The capacitive transducer according to claim ...

MULTI-DIRECTIONAL ACTUATOR

An apparatus is provided. The apparatus includes a bidirectional comb drive actuator. The apparatus may also include a cantilever. The cantilever includes a first end connected to the bidirectional comb drive actuator and a second end connected to an inner frame. In addition, the cantilever may include first and second conductive layers for routing electrical signals. Embodiments of the disclosed apparatuses, which may include multi-dimensional actuators, allow for an increased number of electrical signals to be routed to the actuators. Moreover, the disclosed apparatuses allow for actuation multiple directions, which may provide for increased control, precision, and flexibility of movement. Accordingly, the disclosed embodiments provide significant benefits with regard to optical image stabilization and auto-focus capabilities, for example in size- and power-constrained environments. 1. An apparatus , comprising:a bidirectional comb drive actuator; and a first end connected to the bidirectional comb drive actuator; and', 'a second end connected to an inner frame., 'a cantilever having first and second conductive layers for routing electrical signals, the cantilever comprising2. The actuator of claim 1 , wherein the bidirectional comb drive actuator comprises:first and second frame pieces; andfirst and second comb drives.3. The actuator of claim 2 , wherein the first and second comb drives each comprise first and second comb finger arrays.4. The actuator of claim 3 , wherein:the first comb finger array of the first comb drive is connected to the second frame piece;the second comb finger array of the first comb drive is connected to the first frame piece;the first comb finger array of the second comb drive is connected to the first frame piece; andthe second comb finger array of the second comb drive is connected to the second frame piece.5. The actuator of claim 4 , wherein:the first comb finger array of the first comb drive and the second comb finger array of the ...

CONTROL SYSTEM FOR LINEAR SWITCHED CAPACITIVE DEVICES

A switched capacitive device includes a stationary portion including first circuit boards. The device also includes a translatable portion including second circuit boards proximate to, and interdigitated with, the first circuit boards. The second circuit boards are translatable with respect to the first circuit boards. The first circuit boards induce substantially linear motion of the second circuit boards through the use of an electric field induced by the first circuit boards. The device further includes a control system including switching devices and a controller coupled to the switching devices. The switching devices are coupled to at least a portion of at least one first circuit board. The switching device is configured to intermittently energize and de-energize the first circuit board for predetermined periods of time. The controller alternatingly opens and closes the switching devices through transmitted gating commands as a function of a determined load on the switched capacitive device. 1. A switched capacitive device comprising:a stationary portion comprising a plurality of first circuit boards extending at least partially in a predetermined dimension;a translatable portion comprising a plurality of second circuit boards proximate to, and interdigitated with, said plurality of first circuit boards, said plurality of second circuit boards translatable with respect to said plurality of first circuit boards, said plurality of second circuit boards extending at least partially in the predetermined dimension, said plurality of first circuit boards configured to induce substantially linear motion of said plurality of second circuit boards in the predetermined dimension through the use of an electric field induced by at least a portion of said plurality of first circuit boards; and a plurality of switching devices, at least one switching device of said plurality of switching devices coupled to at least a portion of at least one first circuit board of said ...

ULTRASOUND ELEMENT AND ULTRASOUND ENDOSCOPE

A US element includes a silicon substrate, wherein a lower electrode layer that has a plurality of lower electrode sections, and a plurality of lower wiring sections, and is connected to a lower electrode terminal to which a drive signal and a bias signal are applied, a lower insulating layer, an upper insulating layer in which a plurality of cavities are formed, an upper electrode layer that has a plurality of upper electrode sections and a plurality of upper wiring sections, and is connected to an upper electrode terminal at a ground potential for detecting a capacitance signal, and a protection layer are sequentially stacked on the silicon substrate, and the US element further includes a shield electrode section that is formed at least at an upper side of the lower wiring sections, and is connected to a shield electrode terminal at a ground potential. 1. An ultrasound element , comprising a base substrate ,wherein a lower electrode layer that has a plurality of lower electrode sections, and a plurality of lower wiring sections that connect the plurality of lower electrode sections, and is connected to a lower electrode terminal to which a drive signal and a bias signal are applied,a lower insulating layer,an upper insulating layer in which a plurality of cavities are formed,an upper electrode layer that has a plurality of upper electrode sections that are disposed to face the respective lower electrode sections via the respective cavities, and a plurality of upper wiring sections that connect the plurality of upper electrode sections, and is connected to an upper electrode terminal at a ground potential, for detecting a capacitance signal, anda protection layer are sequentially stacked on the base substrate,the ultrasound element further comprising:a shield electrode section that is formed at least at an upper side of the lower wiring sections, and is connected to a shield electrode terminal at a ground potential.2. The ultrasound element according to claim 1 , ...

COMB-DRIVE ACTUATOR

A vertical comb-drive actuator comprising a support base and a movable body is described. The support base comprises first comb electrodes and a first surface wherein the first comb electrodes extend from the first surface. The movable body attached to the support base comprises second comb electrodes and a second surface wherein the second comb electrodes extend from the second surface. The movable body may rotate about a rotation axis and the first comb electrodes are interdigitated with the second comb electrodes correspondingly. The second comb electrodes extend along a first direction, the rotation axis extends along a second direction, and the first comb electrodes extend along a third direction. The distance between the first lateral face of the first comb electrode and the second surface is shorter than the second length defined as the distance between the end surface of the second comb electrode and the second surface. 1. A comb-drive actuator , comprising:a support base, comprising at least one first comb electrode and a first surface wherein the at least one first comb electrode extends from the first surface; anda movable body attached to the support base and comprising at least one second comb electrode and a second surface wherein the at least one second comb electrode extends from the second surface, wherein the movable body is allowed to rotate about a rotation axis and the at least one first comb electrode is interdigitated with the at least one second comb electrode;wherein the at least one second comb electrode extends along a first direction, the rotation axis extends along a second direction, the at least one first comb electrode extends along a third direction, a distance between a first lateral face of the first comb electrode of the support base and a second surface is shorter than a second length defined as the distance between an end surface of the second comb electrode of the movable body and the second surface, and the first lateral face ...

Ultrasonic Sensor Microarray and Method of Manufacturing Same

A sensor assembly including one or more capacitive micromachined ultrasonic transducer (CMUT) microarray modules which are provided with a number of individual transducers. The microarray modules are arranged to simulate or orient individual transducers in a hyperbolic paraboloid geometry. The transducers/sensor are arranged in a rectangular or square matrix and are activatable individually, selectively or collectively to emit and received reflected beam signals at a frequency of between about 100 to 170 kHz. 1. A method of forming a capacitive micromachined transducers (CMUT) microarray comprising a plurality of transducers , said method comprising ,providing a first silicon wafer having generally planar, parallel top and bottom surfaces, said first wafer having a thickness selected at between about 300 and 500 microns,photo-plasma etching said top surface of the first wafer to form a plurality of pockets therein, each of said pockets having a common geometric shape, each of said pockets characterized by a respective sidewall extending generally normal to said top surface and extending to a depth of between about 0.2 and 5 microns,providing a second silicon wafer having generally planar, parallel top and bottom surfaces, said second wafer having a thickness selected at between about 0.05 and 5 microns, and preferably 0.2 and 2 microns as a device layer,contiguously sealing the bottom surface of the second wafer over the top surface of the first wafer to substantially seal each pocket as a transducers air gap,applying a conductive metal layer to at least part of at least one of the bottom surface of the first wafer and the top surface of the second wafer.2. The method as claimed in claim 1 , wherein the step of applying the metal layer comprises coating a layer of a metal selected from the group consisting of gold claim 1 , silver and copper claim 1 , wherein said conductive metal layer has a thickness selected at between about 50 and 500 nanometers claim 1 , and ...

ACTUATOR, DEFORMABLE MIRROR, ADAPTIVE OPTICS SYSTEM USING THE DEFORMABLE MIRROR, AND SCANNING LASER OPHTHALMOSCOPE USING THE ADAPTIVE OPTICS SYSTEM

Provided is an actuator including a substrate, a movable portion provided so as to be movable with respect to the substrate, at least three elastic bodies for supporting the movable portion to the substrate in a displaceable manner, a movable comb electrode supported by the movable portion and extending in a direction parallel to a surface of the substrate, and a fixed comb electrode supported by the substrate and extending in the direction parallel to the surface of the substrate in which the movable comb electrode and the fixed comb electrode are arranged so as to be alternately engaged with each other with a distance, and each of all of the elastic bodies has a long axis that forms an angle of more than 90° and 180° or less with respect to at least one of the other elastic bodies. 1. An actuator comprising:a substrate;a movable portion provided so as to be movable with respect to the substrate;at least three elastic bodies for connecting the movable portion and the substrate;a movable comb electrode including a plurality of comb teeth each having one end supported by the movable portion and extending from the one end supported by the movable portion in a direction parallel to a surface of the substrate; anda fixed comb electrode including a plurality of comb teeth each having one end supported by the substrate and extending from the one end supported by the substrate in the direction parallel to the surface of the substrate,wherein the plurality of comb teeth of the movable comb electrode and the plurality of comb teeth of the fixed comb electrode are arranged so as to alternately engage with each other with a distance, andwherein each of all the at least three elastic bodies has a long axis that forms an angle of more than 90° and 180° or less with respect to a long axis of at least one of the other elastic bodies.2. The actuator according to claim 1 ,wherein the movable portion comprises an extending portion, andwherein at least a part of the at least three ...

MULTILAYER STRUCTURE, POLYMER ACTUATOR ELEMENT, SENSOR ELEMENT, AND DEVICE

A multilayer structure includes an electrolyte layer and electrode layers each of which is placed on a corresponding one of two principal surfaces of the electrolyte layer. The electrolyte layer includes a mixed ionic liquid containing a plurality of ionic liquids and a base polymer for electrolytes. The electrode layers both include a base polymer, a carbon material, and the mixed ionic liquid. The melting point Tmm of the mixed ionic liquid is lower than the melting point Tm1 of a first ionic liquid which has the lowest melting point among a plurality of the ionic liquids. 1. A multilayer structure comprising: a first base polymer for electrolytes; and', 'a first ionic liquid mixture containing a plurality of ionic liquids; and, 'an electrolyte layer having two main surfaces, the electrolyte layer comprising a second base polymer;', 'a carbon material; and', 'a second ionic liquid mixture which is the same as the first ionic liquid mixture,, 'a pair of electrode layers each disposed on respective one of the two main surfaces of the electrolyte layer, each of the electrode layers comprisingwherein the first ionic liquid mixture has a melting point Tmm lower than a first melting point Tm1 of a first ionic liquid which has a lowest melting point among the plurality of ionic liquids.2. The multilayer structure according to claim 1 , wherein the melting point Tmm of the first ionic liquid mixture and the first melting point Tm1 of the first ionic liquid satisfy the following inequality:{'br': None, 'i': Tmm', 'Tmm≤Tmm', 'Tm', 'Tmm, '1≤1+(1−1)/2'}where Tmm1 is a lowest melting point of the first ionic liquid mixture obtained by varying respective blending amounts of the plurality of ionic liquids forming the first ionic liquid mixture.3. The multilayer structure according to claim 2 , wherein the first ionic liquid mixture contains multiple types of cations.4. The multilayer structure according to claim 3 , wherein the first ionic liquid mixture contains multiple types ...

ULTRASONIC TRANSDUCER DEVICE WITH THROUGH-SUBSTRATE VIA

A Capacitive Micromachined Ultrasonic Transducer (CMUT) device includes at least one CMUT cell including a first substrate having a top side including a patterned dielectric layer thereon including a thick and a thin dielectric region. A membrane layer is bonded on the thick dielectric region and over the thin dielectric region to provide a movable membrane over a micro-electro-mechanical system (MEMS) cavity. A through-substrate via (TSV) includes a dielectric liner which extends from a bottom side of the first substrate to a top surface of the membrane layer. A top side metal layer includes a first portion over the TSV, over the movable membrane, and coupling the TSV to the movable membrane. A patterned metal layer is on the bottom side surface of the first substrate including a first patterned layer portion contacting the bottom side of the first substrate lateral to the TSV. 1. A transducer device , comprising:a substrate having a first side and a second side opposite the first side; a dielectric layer over the first side of the substrate, the dielectric layer having a first region and a second region thinner than and laterally surrounded by the first region to define a cavity;', 'a membrane layer enclosing the cavity and including a movable membrane over the second region of the dielectric layer; and', 'a through-substrate via (TSV) penetrating the substrate, the dielectric layer, and the membrane layer., 'a transducer cell, including2. The transducer device of claim 1 , wherein the membrane layer is bonded directly on the first region of the dielectric layer.3. The transducer device of claim 1 , wherein the TSV is free from vertically overlapping the movable membrane.4. The transducer device of claim 1 , wherein the TSV includes a conductive filler extending from the second side of the substrate to be coplanar with the membrane layer.5. The transducer device of claim 1 , further comprising:a metal layer contacting the TSV adjacent to the first side of the ...

ELECTROSTATIC-ACTUATOR-BASED, TUNABLE, SOFT ROBOTS

An electrostatic actuator has a first polymeric layer formed with an arch, a first electrode of metal deposited upon the first polymeric layer; a second polymeric layer formed flat; a second electrode of metal deposited upon the second polymeric layer; and a dielectric disposed on the second electrode. The second polymeric layer is mechanically coupled to the first polymeric layer at a first and second end of the arch. In an embodiment, the actuator has a pair of legs attached to the arch of the first polymeric layer to form a crawler unit. In another embodiment a steerable robot has a first crawling unit with its second polymeric layer mechanically coupled to the second polymeric layer of a second crawling unit.

Localized Haptics Using Shifting Masses

In one example, hollow tubes each having a spherical mass inside are positioned between two plates. Each plate can have a matrix of nodes that mirrors the other plate. If the mass is a ferromagnetic mass, then each node can have an electromagnetic coil such that the ferromagnetic mass. If the mass is a conductive mass, then each node can be a conductive node. The conductive nodes can have the same type of charge or opposing charges. The conductive mass can be negatively charged, positively charged, or part can be positively charged and part negatively charged. Spring(s) can be between the mass and the first plate or between the mass and the second plate, or both. Electric current(s) can be applied to a node in the first plate, a node in the second plate, or both, which causes the mass to shift to output a haptic effect. 1. A system comprising:a hollow tube comprising a first end and a second end opposite the first end, the hollow tube defining a cavity between the first end and the second end;a first node corresponding to the first end;a second node corresponding to the second end;a mass disposed within the cavity; andwherein the mass is movable within the cavity and at least one of the first node or the second node is configured to move the mass within the cavity to output a haptic effect when an electrical current is provided to the at least one of the first node or the second node.2. The system of claim 1 , wherein the first node comprises a width between 5 microns and 3 millimeters and a length between 5 microns and 3 millimeters.3. The system of claim 2 , wherein the second node mirrors the first node.4. The system of claim 3 , wherein the hollow tube comprises a height between the first end and the second end of at least 0.5 millimeters.5. The system of claim 1 ,wherein the hollow tube comprises a hollow cylinder and the mass comprises at least one of a spherical mass or a cylindrical mass, orwherein the hollow tube comprises a hollow cuboid and the mass ...

PULSE-TRAIN DRIVE SYSTEM FOR ELECTROSTATIC GENERATORS AND MOTORS

A novel motor drive system has been described for use in electrostatic generator/motor systems based on the time variation of capacity of a rotating condenser comprised of segmented rotor and stator elements. It takes advantage of the fact that the motor action of such a system depends only on the rms value of the drive pulses, which therefore can be formed simply by periodically interrupting a high-frequency ac wave train. This new circuitry simplifies the drive system and takes advantage of recent developments of devices used in the art of inversion of dc voltages to high-frequency (tens of kiloHz) ac. 1. An apparatus , comprising:a step-up transformer comprising a primary winding and a secondary winding;a variable capacitor electrically attached to said secondary windings, wherein said variable capacitor is configured to drive an electrostatic motor comprising a rotor and a stator;{'sub': 1', '2', '1', '2', '1', '2', '1', '2, 'a circuit first arm and a circuit second arm, wherein said first arm comprises a switch SwAand a switch SwB, wherein said second arm comprises a switch SwBand a switch SwA, wherein a first side of said primary winding is connected between said switch SwAand said switch SwBand wherein a second side of said primary winding is connected between said switch SwBand said switch SwA; and'}{'sub': 1', '1', '2', '2', '1', '2, 'a Dc power supply comprising a positive terminal connected to said switch SwAand said switch SwB, wherein said switch SwAand said switch SwBare both connected to ground, wherein said DC power supply is configured to provide power to at least one of said switch SwAand said switch SwB;'}means configured for rotating said rotor at a plurality of speeds;means configured for alternating, at the same continuous frequency at all of said plurality of speeds, while the capacitance of said variable capacitor is increasing, the voltage polarity across said primary winding; andmeans configured for preventing, while the capacitance of said ...

DESIGN FOR ELECTROSTATIC GENERATOR/MOTOR ELECTRODES LOCATED ON THE INNER SURFACE OF AN ELECTROMECHANICAL BATTERY ROTOR

A geometric design of ES generator/motor electrodes mounted on the inner surface of a fiber-composite rotor is provided. The electrode configuration is able to sustain very high g levels. The rotor may be formed of carbon-fiber wound an top of an inner E or S-glass fiber composite core. The electrode design provides the needed area to satisfy the power requirements of the storage system and utilizes a stacked wedge-like electrode array that bath solves the high-g problem and results in a doubling or tripling of the electrode area, relative to that of electrodes that conform to the inner cylindrical surface of the rotor. 1. An apparatus , comprising:an open cylindrical rotor having an inner wall and a longitudinal axis of rotation (AOR), wherein said inner wall comprises a rotor electrode mounting surface, wherein the distance from said AOR to said mounting surface periodically varies along the length of said AOR.2. The apparatus of claim 1 , wherein said surface comprises a series of rings attached to said inner wall claim 1 , wherein said rings are oriented to be perpendicular to said AOR.3. The apparatus of claim 2 , wherein each ring of said series of rings has a base and a peak claim 2 , wherein said base is connected to said inner wall claim 2 , wherein said peak points toward said AOR claim 2 , wherein said base is wider than said peak.4. The apparatus of claim 3 , wherein said peak is rounded or beveled.5. The apparatus of claim 2 , wherein said inner wall is electrically non-conductive.6. The apparatus of claim 5 , wherein each ring of said series of rings comprises material selected from the group consisting of G-10 glass and fiberglass.7. The apparatus of claim 5 , wherein said rotor comprises a carbon fiber composite wound onto a non-conducting core.8. The apparatus of claim 7 , wherein said non-conducting core comprises a material selected from the group consisting of glass and basalt fiber.9. The apparatus of claim 1 , wherein said rotor comprises ...

STATOR POSITIONER FOR ELECTROSTATIC GENERATOR ELECTRODES AND NEW ELECTRODE DESIGN

A mechanical system is provided for maintaining a desired gap between a stator electrode array and a rotor electrode array by employing repelling magnets on the inner surface of the rotor and on movable carts that support azimuthally segmented stator arrays. 1. An apparatus for use with a device that includes a rotor having rotor electrodes , wherein said device further includes a stator having stator electrodes , wherein said rotor electrodes face said stator electrodes and wherein a gap exists between said rotor electrodes and said stator electrodes , the apparatus comprising:a mechanism configured to move the stator electrodes upon expansion or contraction of the diameter of the rotor, wherein said mechanism does not utilize any electrical components to move said stator electrodes.2. The apparatus of claim 1 , wherein said device is an electrostatic generator/motor.3. The apparatus of claim 1 , wherein said mechanism is configured to automatically adjust said gap depending on the expansion or contraction of the rotor.4. The apparatus of claim 3 , wherein said mechanism is configured to maintain said gap at a constant distance depending on the expansion or contraction of the rotor.5. An apparatus claim 3 , comprising:a rotor that is rotatable about an axis;first electrodes fixedly attached to the outer wall of said rotor;a stator located around said rotor, wherein said stator is fixed relative to said rotor;second electrodes fixedly attached to the inner wall of said stator, wherein said first electrodes face said second electrodes, wherein a gap exists between said first electrodes and said second electrodes.non-electrical means for moving said second electrodes upon expansion or contraction of the diameter of said rotor6. The apparatus of claim 5 , wherein said means maintains a constant gap between said first electrodes and said second electrodes upon expansion or contraction of the diameter of said rotor.7. The apparatus of claim 5 , wherein said means varies ...

ELECTROSTATIC GENERATOR/MOTOR ROTOR ELECTRODE SYSTEM SUITABLE FOR INSTALLATION ON THE OUTER SURFACE OF AN EMB ROTOR

Electrostatic generator electrodes mounted on the outer surface of a fiber-composite rotor. The conducting strips are mounted with a slight tilt in angle such that the electrodes will experience no tension or compression effects as the rotor spins up or slows down. The compression would come about from effects associated with the Poisson Ratio. This change can eliminate any metal fatigue or loss of bonding that might have arisen if the electrodes were to be aligned with the axis. 1. An apparatus , comprising:a cylindrical rotor having an axis of rotation and an outer surface; anda plurality of rotor electrodes attached to said outer surface, wherein each rotor electrode of said plurality of rotor electrodes has a width dimension and a length dimension, wherein said length dimension is longer than said width dimension and is oriented at an angle relative to said axis of rotation.3. The apparatus of claim 2 , wherein said material is a fiber-composite.4. The apparatus of claim 1 , wherein said each rotor electrode comprises an electrically conductive foil.5. The apparatus of claim 4 , wherein said foil comprises aluminum.6. The apparatus of claim 1 , wherein said each rotor electrode comprises a planar stack of thin metal wires claim 1 , connected electrically to each other at one or both ends of the stack.7. The apparatus of claim 4 , Wherein each said foil comprises rounded edges made by folding a small width of the foil back on itself with the folded edge section being at the back.8. The apparatus of claim 7 , further comprising two thin longitudinally oriented pieces of wire included in the folds to make more rounded edges.9. The apparatus of claim 1 , wherein said outer surface is non-conducting.10. The apparatus of claim 1 , further comprising a thin cover layer of fiber composite placed over said each electrode.11. The apparatus of claim 1 , wherein said each rotor electrode is attached with adhesive to said rotor surface.12. The apparatus of claim 1 , wherein ...

PULSED START-UP SYSTEM FOR ELECTROSTATIC GENERATORS

A new rotor start-up system is provided for application to rotating systems such as stationary or vehicular electromechanical battery systems. An embodiment of the system consists of a “locator” that includes a stationary permanent-magnet pole above which is a circular ferromagnetic (e.g., iron) strip embedded in the lower, inner edge of the flywheel rotor. The lower edge of this strip is wave-like so that the magnet can pull the rotor around to a position where the position relative to the minimum capacity between the rotor and stator electrodes is such as to launch the rotor in a chosen direction, i.e., either clock-wise or counter-clockwise. Startup from rest is then accomplished by applying a short high-voltage ac or dc pulse to the EMB capacitor. 1. An apparatus , comprising:a rotor configured to rotate about a central axis;a first plurality of rod shaped electrodes fixedly attached to said rotor, wherein each rod thereof is parallel to all other rods thereof and to said central axis and has a first end and a second end, wherein each said first end is fixedly connected to a first support ring and each said second end is fixedly connected to a second support ring; a ferromagnetic strip configured as a ring and fixedly connected to said rotor and further having a wave-like edge extending away from said rotor; and', 'a permanent magnet having a pole spaced from said wave-like edge such that when said rotor rotates, the gap between said pole and said wave-like edge varies;, 'a magnetic locating system comprisinga first stator and a second stator, w herein said first stator has a second diameter and is centered on said central axis, wherein said second stator has a third diameter and is centered on said central axis, wherein said second diameter and said third diameter are equal, wherein said first diameter is different than both said second diameter and said third diameter;a second plurality of rod shaped electrodes fixedly attached to said first stator;a third ...

Electrostatic comb actuator, deformable mirror using the electrostatic comb actuator, adaptive optics system using the deformable mirror, and scanning laser ophthalmoscope using the adaptive optics system

Provided is an actuator formed in a substrate including a handle layer, an elastic body layer, and an insulating layer, the actuator including a movable portion supported to a support portion by an elastic body, a movable comb electrode formed on the movable portion, a fixed comb electrode supported by the support portion, and electrode wirings connected to the respective comb electrodes in which the elastic body supports the movable portion such that the movable portion is displaceable in a direction perpendicular to the substrate in accordance with voltages applied to the comb electrodes; the comb electrodes are made up of the handle layer, and the elastic body is made up of the elastic body layer; and a handle layer separation groove is provided to electrically separate between the handle layers of the support portions supporting the comb electrodes, and a structure reinforcing portion is formed across the separation groove.

Methods and Systems for Micro Machines

A micro machine may be in or less than the micrometer domain. The micro machine may include a micro actuator and a micro shaft coupled to the micro actuator. The micro shaft is operable to be driven by the micro actuator. A tool is coupled to the micro shaft and is operable to perform work in response to at least motion of the micro shaft.

ACTUATOR ELEMENT USING CARBON ELECTRODE

An object of this invention is to create an actuator in which the amount of deformation is maintained and no displacement in the reverse direction occurs, even when a constant voltage is continuously applied for a long period of time. 1. A conductive thin film comprising a polymer gel containing at least one organic molecule selected from the group consisting of electron-donating organic molecules and electron-withdrawing organic molecules , a nano-carbon material , an ionic liquid , and a polymer.2. The conductive thin film according to claim 1 , wherein the nano-carbon material is selected from the group consisting of carbon nanotubes claim 1 , carbon nanohorns claim 1 , and carbon nanofibers.3. The conductive thin film according to claim 1 , wherein the organic molecule is present in an amount of 3 to 80 parts by weight per 100 parts by weight of the total amount of the nano-carbon material claim 1 , the ionic liquid claim 1 , and the polymer.4. The conductive thin film according to claim 3 , wherein the organic molecule is present in an amount of 15 to 40 parts by weight per 100 parts by weight of the total amount of the nano-carbon material claim 3 , the ionic liquid claim 3 , and the polymer.5. The conductive thin film according to claim 1 , which comprises both an electron-donating organic molecule and an electron-withdrawing organic molecule as the organic molecule.6. The conductive thin film according to claim 1 , which comprises tetracyanoquinodimethane (TCNQ) as the organic molecule.7. The conductive thin film according to claim 6 , wherein tetracyanoquinodimethane is present in an amount of 20 to 100 parts by weight per 50 parts by weight of the nano-carbon material.8. The conductive thin film according to claim 1 , which further comprises a conductive additive.9. A laminate comprising one or more of the conductive thin films according to and one or more electrolyte membranes comprising an ionic liquid and a polymer.10. An actuator element comprising the ...

ELECTROMECHANICAL TRANSDUCER AND METHOD OF PRODUCING THE SAME

An electromechanical transducer includes a first electrode; a silicon oxide film disposed on the first electrode; and a vibration film including a silicon nitride film disposed on the silicon oxide film with a space therebetween and a second electrode disposed on the silicon nitride film so as to oppose the first electrode. 2. The electromechanical transducer according to claim 1 , wherein the substrate is a silicon substrate.3. The electromechanical transducer according to claim 1 , wherein the substrate and the first electrode have a third insulating film provided therebetween.4. The electromechanical transducer according to claim 1 , wherein the substrate is a glass substrate.5. The electromechanical transducer according to claim 1 , wherein the silicon oxide film is in contact with the space and the first electrode.6. The electromechanical transducer according to claim 1 , wherein the silicon nitride film is in contact with the space and the second electrode.7. The electromechanical transducer according to claim 1 , wherein the silicon oxide film has a thickness equal to or higher than 50 nm and equal to or lower than 200 nm in the stacking direction.8. The electromechanical transducer according to claim 1 , wherein the silicon nitride film has a thickness equal to or higher than 300 nm and equal to or lower than 800 nm in the stacking direction.9. The electromechanical transducer according to claim 1 , wherein the space has a thickness equal to or higher than 50 nm and equal to or lower than 300 nm in the stacking direction.10. The electromechanical transducer according to claim 1 , wherein the second electrode includes silicon nitride films each being provided on a different one of an upper surface and a lower surface of the second electrode in the stacking direction.11. The electromechanical transducer according to claim 1 , wherein the voltage-applying unit is configured to apply a voltage so that a negative voltage is applied to the first electrode.12. The ...

MEMS COMPRISING A MOVABLE STRUCTURAL ELEMENT, AND MEMS ARRAY

A MEMS includes a substrate with a substrate extension that rises above a substrate plane. The MEMS includes a movable structural element, a first spring element that mechanically connects the movable structural element to the substrate extension, and a second spring element that mechanically connects the movable structural element to the substrate extension. The first spring element and the second spring element form a parallelogram guide of the movable structural element in relation to the substrate extension. 1. MEMS comprising:a substrate extending within a substrate plane and comprising a substrate extension that rises above the substrate plane;a movable structural element;a first spring element mechanically connecting the movable structural element to the substrate extension; anda second spring element mechanically connecting the movable structural element to the substrate extension;the first spring element and the second spring element providing a parallelogram guide of the movable structural element in relation to the substrate extension;wherein the movable structural element is asymmetrically suspended on one side by means of the parallelogram guide;wherein the actuator comprises an electrostatic drive;wherein the electrostatic drive comprises at least one substrate electrode and a movable electrode mechanically connected to the movable structural element, wherein an electric voltage applied between the substrate electrode and the movable electrode causes the deflection of the movable structural element; andwherein the movable electrode is disposed between the first spring plane and the second spring plane; or wherein the movable electrode is disposed between the first spring plane and the substrate.2. MEMS as claimed in claim 1 , wherein a centroid of the movable structural element in a plan view is arranged outside a foot surface of the substrate extension; or wherein the substrate extension is a first substrate extension and the MEMS comprises a second ...

Mems device

The disclosure provides a MEMS device including: a fixed substrate having a cavity; a driving unit disposed in the cavity and floating above the fixed substrate; and an elastic unit for physically connecting the fixed substrate with the driving unit and varying the height of the driving unit according to a control current, wherein the elastic unit includes a bimorph driving unit connected to the fixed substrate and bent according to the control current, a spring connected to the driving unit, and a frame connecting the bimorph driving unit to the spring. Therefore, in order to overcome the limitations according to the power consumption and the size-reduction due to a coil and a magnet, the MEMS device drives one lens and thus can reduce the power consumption and the size thereof. Further, the MEMS device applies a thermal scheme which performs an automatic focusing function through vertical operation of a lens by a thermal expansion difference of different materials, thereby simplifying the structure thereof and reducing the cost.

PROPULSIVE DEVICES THAT COMPRISE SELECTIVELY REFLECTIVE EPITAXIAL SURFACES

A dynamic Casimir effect device for moving reflective surfaces rapidly comprising: an epitaxial stack of a plurality of closely spaced semiconductor lamina; each lamina having a band gap within a range of band gaps between a low band gap value a high band gap value; and a variable voltage source capable of producing a range of output voltages that is electrically connected to the plurality of lamina; wherein each said semiconductor lamina is connected to said voltage source such that said variable voltage source can apply a range of voltages to the plurality of semiconductor lamina and wherein each said semiconductor lamina becomes a reflecting conductor when said variable voltage source applies a specific semiconductor band gap dependent voltage within said range of output voltages to said semiconductor lamina. 1. A dynamic Casimir effect device for moving reflective surfaces rapidly comprising: an epitaxial stack of a plurality of closely spaced semiconductor lamina; each lamina having a band gap in a range of band gaps between a low band gap value and a high band gap value creating a band gap gradient in said stack; and a variable voltage source capable of producing a range of output voltages that is electrically connected to the plurality of lamina; wherein each said semiconductor lamina is connected to said voltage source such that said variable voltage source can apply a range of voltages to the plurality of semiconductor lamina.2. The device as in wherein each said semiconductor lamina becomes a reflecting conductor when said variable voltage source applies a specific semiconductor band gap dependent voltage within said range of output voltages to said semiconductor lamina.3. The device as in wherein each said semiconductor lamina is a partially transparent dielectric when a voltage below said specific voltage is applied to said semiconductor lamina.4. The device as in wherein the plurality of lamina in said epitaxial stack are arranged in sequential order by ...

MEMS DEVICE WITH A THREE-LAYER COMB ACTUATOR STRUCTURE AND A TWO-LAYER HINGE

A micro-sized optical device may comprise a mirror suspended on a set of hinges that are mounted to the substrate and that are configured to tilt the mirror about an axis, wherein a hinge of the set of hinges is a two-layer structure with a pivot point that aligns with a mass center of the mirror; and a three-layer comb actuator structure associated with the hinge of the set of hinges, wherein the three-layer comb actuator structure includes a rotor comb actuator, a first stator comb actuator, and a second stator comb actuator. 1. A micro-electro-mechanical (MEMs) device comprising:a substrate;a first layer adjacent to the substrate, a second layer adjacent to the first layer, and a third layer adjacent to the second layer; 'wherein the gimbal forms part of the second layer;', 'a gimbal suspended on a set of first hinges that are mounted to the substrate and that are configured to tilt the gimbal about a first axis,'} 'wherein the first comb actuator structure includes a rotor comb actuator that forms part of the second layer and two stator comb actuators that respectively form part of the first layer and part of the third layer;', 'a first comb actuator structure associated with a first hinge of the set of first hinges,'} wherein the mirror forms part of the third layer,', 'wherein the first axis is different than the second axis,', 'wherein the mirror is attached to the gimbal via the set of second hinges to allow the mirror to tilt about the first axis when the gimbal tilts about the first axis; and, 'a mirror suspended on a set of second hinges that are mounted to the gimbal and that are configured to tilt the mirror about a second axis,'} 'wherein the second comb actuator structure includes an additional rotor comb actuator that forms part of the third layer and two additional stator comb actuators that respectively form part of the first layer and part of the second layer.', 'a second comb actuator structure associated with a second hinge of the set of second ...

CAPACITIVE ALTERNATOR

A capacitive alternator is disclosed. The capacitive alternator includes a frame with a shaft rotatably coupled to and extending through the frame. The capacitive alternator includes a stator housed within the frame. The stator includes a plurality of stator electrodes arranged in respective first and second stator assemblies. The stator electrodes in the respective stator assemblies are in electrical communication with one another. The capacitive alternator includes a rotor supported on and fixedly attached to the shaft such that a rotation of the shaft causes a corresponding rotation of the rotor. The rotor includes a dipole assembly, including a first dipole electrode, and a second dipole electrode. The first and second dipole electrodes are electrically isolated from one another, from the shaft, and from the stator electrodes. The dipole assembly is rotatable relative to one of the plurality of stator electrodes. 1. A capacitive alternator comprising:a frame;a shaft rotatably coupled to and extending through the frame; the stator electrodes in the first stator assembly are in electrical communication with one another, and', 'the stator electrodes in the second stator assembly are in electrical communication with one another; and, 'a stator housed within the frame, the stator comprising a plurality of stator electrodes arranged in a first stator assembly and a second stator assembly such that'} 'a first dipole electrode, and a second dipole electrode, wherein the first and second dipole electrodes are electrically isolated from one another, from the shaft, and from the stator electrodes, and wherein the dipole assembly is rotatable relative to one of the plurality of stator electrodes.', 'a rotor supported on and fixedly attached to the shaft such that rotation of the shaft causes a corresponding rotation of the rotor, the rotor comprising a dipole assembly, the dipole assembly comprising2. The capacitive alternator of claim 1 , wherein a motor is coupled to the ...

SELF-ALIGNED DIELECTRIC LINER STRUCTURE FOR PROTECTION IN MEMS COMB ACTUATOR

In some embodiments, the present disclosure relates to a microelectromechanical system (MEMS) comb actuator including a comb structure. The comb structure includes a support layer having a first material and a plurality of protrusions extending away from a first surface of the support layer in a first direction. The plurality of protrusions are also made of the first material. The plurality of protrusions are separated along a second direction parallel to the first surface of the support layer. The MEMS comb actuator may further include a dielectric liner structure that continuously and completely covers the first surface of the support layer and outer surfaces of the plurality of protrusions. The dielectric liner structure includes a connective portion that continuously connects topmost surfaces of at least two of the plurality of protrusions. 1. A microelectromechanical system (MEMS) comb actuator comprising: a support layer comprising a first material, and', 'a plurality of protrusions comprising the first material and extending away from a first surface of the support layer in a first direction, wherein the plurality of protrusions are separated along a second direction parallel to the first surface of the support layer; and, 'a comb structure comprisinga dielectric liner structure continuously and completely covering the first surface of the support layer and outer surfaces of the plurality of protrusions, wherein the dielectric liner structure comprises a connective portion that continuously connects topmost surfaces of at least two of the plurality of protrusions.2. The MEMS comb actuator of claim 1 , wherein the connective portion of the dielectric liner structure has a topmost surface that is planar claim 1 , and wherein a third direction that is perpendicular to the first and second directions is normal to the topmost surface of the connective portion.3. The MEMS comb actuator of claim 1 , wherein the connective portion of the dielectric liner structure is ...

MINIATURE MEMS ACTUATOR ASSEMBLIES

In one embodiment, an electrostatic actuator includes a generally planar fixed frame, a generally planar moving frame coupled to the fixed frame by a flexure for substantially coplanar, perpendicular movement relative to the fixed frame, a plurality of interdigitated teeth, a fixed portion of which is attached to the fixed frame and a moving portion of which is attached to the moving frame, and an elongated output shaft having opposite input and output ends, the input end being coupled to the moving frame. 1. An actuator assembly , comprising:a planar mounting platform that defines a first plane;a plurality of planar actuators, each actuator including at least one elongated output shaft having an output end coupled to an output coupler that is coupled to the mounting platform;wherein each actuator defines an additional plane that is formed at a common non-zero angle with respect to the first plane; andwherein the common angle is less than ninety degrees.2. The actuator assembly of claim 1 , wherein each actuator comprises a one degree-of-freedom actuator.3. The actuator assembly of claim 1 , wherein each actuator comprises a two-degree-of-freedom actuator and wherein the at least one elongated output shaft comprises two elongated output shafts each having an output end coupled to the output coupler of that actuator.4. The actuator assembly of claim 3 , wherein each two-degree-of-freedom actuator comprises:an L-shaped support frame having an upright leg and a lateral leg extending perpendicularly therefrom;a first one-degree-of-freedom actuator coupled to the upright leg; anda second one-degree-of-freedom actuator coupled to the lateral leg.5. The actuator assembly of claim 1 , further comprising a substrate having a central portion and a plurality of arms extending from the central portion.6. The actuator assembly of claim 5 , wherein each actuator is disposed on a corresponding one of the arms of the substrate.7. The actuator assembly of claim 6 , wherein each of ...