28-03-2019 дата публикации
Номер: US20190096726A1
Принадлежит:
A substrate transport apparatus having a drive section and a scara arm operably connected to the drive section to move the scara arm. The scara arm has an upper arm and at least one forearm. The forearm is movably mounted to the upper arm and capable of holding a substrate thereon. The upper arm is substantially rigid and is adjustable for changing a predetermined dimension of the upper arm. 1. A substrate transport apparatus comprising:a drive section defining a first axis of rotation; and an upper arm pivotally joined to the drive section to rotate about the first axis of rotation relative to the drive section, the upper arm being an elongated substantially rectilinear member terminating at opposite ends, the upper arm being located relative to the drive section so that the first axis of rotation is at one end of the opposite ends of the upper arm,', 'a first forearm, having a first end effector depending therefrom, and being pivotally joined to the upper arm at another end of the opposite ends of the upper arm, a joint between the first forearm and the upper arm defining a first elbow joint of the scara arm, and', 'a second forearm, having a second end effector depending therefrom, and being pivotally joined to the upper arm at a same end of the opposite ends of the upper arm as the first forearm, another joint between the second forearm and the upper arm defining a second elbow joint of the scara arm,', 'wherein the first elbow joint and second elbow joint are independent of each other., 'a scara arm movably connected to the drive section, the scara arm including2. The apparatus of claim 1 , wherein the first elbow joint defines a second axis of rotation claim 1 , and the second elbow joint defines a third axis of rotation claim 1 , and wherein the second axis of rotation is radially closer to the first axis of rotation than the third axis of rotation.3. The apparatus of claim 1 , further comprising a controller connected to the drive section claim 1 , the ...
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