25-04-2023 дата публикации
Номер: CN116000022A
Автор:
ZHANG CONG,
WANG YUN,
LIU HUACHANG,
WU XIAOLEI,
CHEN QIANG,
LI AHONG,
QU PEIHUA,
LI BO,
FAN MENGXU,
ZHOU WENZHONG,
YANG YUE,
KONG QIYU
Принадлежит:
The invention provides a superconducting cavity plasma cleaning circuit device and a use method thereof, and the device comprises a signal source, a power amplifier, a circulator, a directional coupler, a branch tuner, a bias device, a power coupler and a superconducting cavity which are sequentially connected. Two coupling ports of the directional coupler and a power extraction port of the superconducting cavity are connected to power monitoring equipment, and all radio frequency devices are connected through coaxial radio frequency transmission lines with characteristic impedance of 50 ohms. According to the invention, the position of the stub short circuit sheet is adjusted through the stub tuner, so that the problem that the impedance of the power coupler in a weak coupling state is not matched is solved, external power can be smoothly fed into the superconducting cavity, and a certain direct-current bias voltage is applied to the power coupler antenna through the bias device. The device ...
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