イオンビーム装置

SAMPLE PRODUCTION APPARATUS AND SAMPLE PRODUCTION METHOD

PROBLEM TO BE SOLVED: To provide a sample production apparatus and a sample producing method, in which cross-sectional processing at an arbitrary angle is possible, in the ion beam processing in a non-inclining sample stand. SOLUTION: The sample production apparatus is constituted so that a sample section may be formed by ion beam processing in the sample 1 held to the sample stand 2 using an ion beam optical system 5 which converges, scans, and deflects the ion beam 4 emitted from the ion source 9. It is constituted so that the angle, which is made by an ion beam optical axis of the ion beam optical system 5 and the sample stand 2 surface, may be fixed, and formation of the sample section may be controlled by rotation within the sample stand surface of the sample stand 2. With the apparatus arrangement by the non- inclining sample stand effective in reduction of apparatus manufacturing cost, the ion beam irradiation processing at arbitrary angles is attained, and an accurate section can ...

荷電粒子顕微鏡

荷電粒子顕微鏡

イオンビーム加工装置

PHOTOIONIZATION MASS SPECTROMETER

PROBLEM TO BE SOLVED: To enhance the total detecting efficiency of a photoionization mass spectrometer. SOLUTION: A photoionization mass spectrometer is composed of an elliptical spherical mirror 10 which owns geometrical focuses jointly, of a laser device 6 which is arranged in such a way that a pulsed laser beam 7 is condensed on one of the geometrical focuses 11, of a lens 12, of an ion gun 2 which shines a pulsed laser beam 3 at a sample, of a mass spectrometer 9 and of the like. Pulses of a laser beam are passed repeatedly through an identical position on the sample, a laser intensity due to the overlap of the pulses is increased, and an ionization efficiency is increased. COPYRIGHT: (C)1999,JPO ...

荷電粒子顕微鏡

ION MICROSCOPE

PROBLEM TO BE SOLVED: To provide a gas field ionization ion source of high stability capable of obtaining a large current, and to provide an ion microscope of high resolution and deep focal depth. SOLUTION: This ion microscope includes the gas field ionization ion source, is constituted to install a refrigerator for cooling the gas field ionization ion source independently of an ion microscope body, and is provided with a refrigerant circulation circuit cooling mechanism for circulating a refrigerant between the gas field ionization ion source and the refrigerator. Thus, mechanical vibration of the refrigerator propagated to the gas field ionization ion source is reduced, and an ion source brightness is enhanced compatibly as well as to enhance ion beam convergence performance. COPYRIGHT: (C)2011,JPO&INPIT ...

ガス電界電離イオン源及びその使用方法、並びに、イオンビーム装置

BEAM MEMBER AND SAMPLE PROCESSING DEVICE USING BEAM MEMBER

PROBLEM TO BE SOLVED: To provide a method and a device for surely and stably isolating, extracting and storing a minute sample piece, without contaminating the minute sample piece and/or its surrounding area. SOLUTION: The beam member is made of a rod-like member, shaped as its split tip is thinner than its root for isolating the sample piece, including the area to be observed from sample substrate through ion beam sputtering method, pushing in the sample and holding it, and then extracting it to be separated. The rod-like member utilizes its shape to obtain the sample piece, and then uses force produced by elastic deformation of the sample-piece holding section for holding the sample piece. This beam member is used to extract the sample piece from the sample substrate and relocate it on the mounting base for placing sample pieces. After that, the sample piece is isolated from the beam member so as to store the sample piece. COPYRIGHT: (C)2011,JPO&INPIT ...

イオンビーム加工装置及び加工方法

イオンビーム加工・観察装置およびそれを用いたイオンビーム加工・観察方法

SAMPLE PROCESSING APPARATUS

PROBLEM TO BE SOLVED: To provide an apparatus and method for surely and stably separating, removing, and storing a minute test piece without contaminating the minute test piece and an area around the minute test piece. SOLUTION: A test piece including an area to be observed is separated from a sample substrate by ion beam sputtering. A beam member is used to remove the test piece from the sample substrate. After the test piece is moved onto a mounting table on which the test piece is mounted, the test piece is stored by separating the beam member and the test piece from each other. The beam member serves to push in a sample for retention and pull out the sample for separation. The beam member has a tip that is narrower than a root of the beam member, and the tip is in a divided shape. The beam member is composed of a rod-like member for holding the test piece by force of elastic deformation in a site, obtained by the shape, in which the test piece is held. COPYRIGHT: (C)2011,JPO&INPIT ...