31-03-2011 дата публикации
Номер: JP2011066136A
Принадлежит:
PROBLEM TO BE SOLVED: To provide a fail-safe mechanism having two stages of fail-safe operations in such a way that the inertial travel of a table in the case of the stop of a control means is checked by a spring reaction and that a hydrostatic bearing is grounded only in the emergency case of the application of an excessive load to the table. SOLUTION: The fail-safe mechanism includes a body base 1, and a positioning table mechanism 5 which is levitated on the body base 1 by hydrostatic bearings 3 and 4 and is moved in a Y direction by a linear motor to transfer a board, etc., carried by the positioning table mechanism to a given position. The fail-safe mechanism also includes a leaf spring 10 which is disposed on the body base 1 and projects in its extending/contracting action to come in contact with the table mechanism 5 to check its travel in the Y direction, and a limit switch 11 which is pressed when the leaf spring 10 shifts its position in a given extent or larger. COPYRIGHT: (C ...
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