05-05-2023 дата публикации
Номер: CN116068842A
Принадлежит:
The invention discloses an OPC (Optical Proximity Correction) method, which comprises the following steps of: 1, deforming a first-layer graph, namely, setting an auxiliary graph in an adjacent area in which a safety distance needs to be set in the first-layer graph; 2, OPC correction is conducted on the second-layer graph, in the OPC correction, the auxiliary graph is the part which cannot be covered by the second-layer graph, operation is conducted on the second-layer graph according to the relative relation between the second-layer graph and the auxiliary graph so that OPC correction can be achieved, and after OPC correction is completed, the second-layer graph is subjected to OPC correction. The distance between the first-layer graph and the second-layer graph at the position where the safety distance needs to be set in the first-layer graph is larger than or equal to the safety distance. According to the method, the safety distance between two adjacent layers of patterns can be set ...
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