07-01-2016 дата публикации
Номер: WO2016003153A1
Автор:
LEE, Dong Hoon,
JUNG, Yong Chul,
LEE, Sang Deok,
KIM, Hee Muk,
KIM, Seong Hoon,
KWON, Tae Kyu
Принадлежит:
Proposed are a detector for detecting an electrostatic charge in a charged body and a measuring device for same. More particularly, provided are a "detector for detecting an electrostatic charge in a charged body and a measuring device for same", which are capable of detecting and measuring the amount of electrostatic charge existing in a charged body, by using a conductive shutter plate that opens and closes a conductive plate separated a predetermined distance from the charged body at predetermined intervals, to generate a predetermined current in the conductive plate and convert the current to voltage for measuring same. When the proposed detector for detecting an electrostatic charge in a charged body and the measuring device for same are used, the amount of electrostatic charge existing in a charged body can be detected in real time, so that measures can immediately be taken when a charged body such as a wafer or a display has more than a certain level of electrostatic charge. Also ...
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