03-09-2015 дата публикации
Номер: KR1020150101406A
Автор:
LEE, YOUNG JANG,
SON, KYUNG MO,
LEE, SO HYUNG,
JUNG, HO YOUNG,
PARK, MOON HO,
LEE, SUNG JIN
Принадлежит:
The present invention relates to a thin film transistor substrate having different types of thin film transistors arranged on the same substrate, and a display device using the same. The thin film transistor substrate according to the present invention comprises a substrate, a first thin film transistor, a second thin film transistor, a middle insulation film, and an etching-stopper layer. The first thin film transistor is arranged on the substrate, and includes a polycrystal semiconductor layer, a first gate electrode, a first source electrode, and a first drain electrode arranged on the polycrystal semiconductor layer. The second thin film transistor is arranged on the substrate, and includes a second gate electrode, an oxide semiconductor layer, a second source electrode, and a second drain electrode arranged on the second gate electrode. The middle insulation film is arranged on the first gate electrode and the second gate electrode, and includes a nitride film and an oxide film stacked ...
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