17-01-2013 дата публикации
Номер: WO2013009152A1
Принадлежит:
The present invention relates to an hot wire flux sensor and a flow meter using same, and more specifically, to a flux sensor and a flow meter using same in which the hot wire flux sensor is manufactured using micro-electro mechanical systems (MEMS) technology, the flux sensor enabling the temperatures of the fluid flowing through a conduit pipe to be measured at the entrance side and at the exit side, and, simultaneously, facilitating the position of the sensor or a heater to be varied on the basis of the volume or the type of the fluid. The flow meter comprises: a rectangular panel; at least three heating patterns, each of which is formed on the end part at one side of the panel in the lengthwise direction, and which are arranged side-by-side along the widthwise direction of the panel; electric line patterns, which extend from both ends of each of the heating patterns to the end part at the other side of the panel; and electrode pads, which are formed on a substrate and which are connected ...
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