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Применить Всего найдено 5. Отображено 5.
20-07-2015 дата публикации

ELECTRIC HEATER FOR MULTISTAGE SEMICONDUCTOR PROCESSING DEVICE INCLUDING LIFT MEANS

Номер: KR1020150083644A
Автор: CHA, IL SOO
Принадлежит:

The present invention relates to an electric heater for a semiconductor processing device configured with a plurality of zones, and more specifically, relates to an electric heater for a multistage semiconductor processing device with a lift means, comprising: a heating body in which a plurality of heating blocks having a heating element therein is accumulated in multiple stages, and a lift device to selectively lift up the heating block. The electric heater for the multistage semiconductor processing device including the lift means enables a user to effectively perform maintenance. COPYRIGHT KIPO 2015 ...

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Номер записи: 1
03-02-2016 дата публикации

PIPE COUPLING CLAMP

Номер: KR101590977B1
Автор: CHA, IL SOO
Принадлежит: MMTK CO., LTD.

The present invention relates to a pipe coupling clamp for connecting pipes having a flange unit, and more specifically, to a pipe coupling clamp which connects pipes formed in a semiconductor industry, improves coupling and loosening of the pipes and prevents the pipes from being easily loosened due to vibration, expansion, etc. A pipe coupling clamp according to the present invention has a hinge unit and a locking unit and is formed to surround and connect a pair of pipes which have a flange unit. The pipe coupling clamp comprises: first and second clamp bodies which are connected to at least one hinge unit; a locking unit which is formed on the other side of the hinge units, prevents the first and second clamp bodies from being spread out by being rotated with respect to the hinge units and is formed to apply a tightening force; a fixation device for a locking unit formed to prevent the locking unit from being loosened; and a stopping device configured to fixate rotation of a fixation ...

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Номер записи: 2
20-07-2015 дата публикации

SEMICONDUCTOR BYPRODUCT COLLECTING DEVICE INCLUDING SEMICONDUCTOR BYPRODUCT BLOCKING MEANS

Номер: KR1020150083643A
Автор: CHA, IL SOO
Принадлежит:

The present invention relates to a semiconductor byproduct collecting device including a semiconductor byproduct blocking means to prevent byproduct which is generated and discharged in a processor chamber of etching and deposition of a thin film during a semiconductor manufacturing process, from being inhaled to a vacuum pump. According to the present invention, the semiconductor byproduct collecting device including a semiconductor byproduct blocking means comprises: a cylindrical housing having a first connection pipe and a second connection pipe; a plurality of trap plates installed in the housing; and a temperature control means to control a temperature in the housing and thereby preventing byproduct generated in a processor chamber during a semiconductor manufacturing process from being inhaled to a vacuum pump. The semiconductor byproduct collecting device may improve the collecting efficiency by including the semiconductor byproduct blocking means which blocks discharging of the ...

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Номер записи: 3
12-01-2017 дата публикации

ROTARY BY-PRODUCT TRAPPING APPARATUS TO PROTECT VACUUM PUMP

Номер: KR101694921B1
Автор: CHA, IL SOO
Принадлежит: MMTK CO., LTD.

The present invention relates to a rotary by-product trapping apparatus to protect a vacuum pump, installed to prevent semiconductor (reaction) by-products generated in a processor chamber for deposition and etching processes used during a semiconductor manufacturing process from being sucked by a vacuum pump. According to the present invention, in a by-product trapping apparatus installed between a processor chamber and a vacuum pump to prevent by-products generated in the processor chamber from being sucked by the vacuum pump, the by-product trapping apparatus comprises: a trapping body including a rotation generating air inlet rotating air supplied by suction force of the vacuum pump to trap first by-products; a by-product trapping cone member which includes multiple trapping cones having, in an upper part, a rotation generating air inlet rotating again the supplied air to trap second by-products; and a trapping cone member cover having multiple trapping holes moving again the supplied ...

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Номер записи: 4
02-02-2016 дата публикации

Lift means multistage semiconductor processing device for electric heaters

Номер: KR0101590975B1
Автор: 차일수
Принадлежит: (주) 엠엠티케이

... 본 발명은 복수의 존으로 이루어지는 반도체 처리장치용 전기히터에 관한 것으로, 상세하게는 내측에 발열체가 구비되는 복수의 발열블록이 다단으로 적층되어 이루어지는 히팅몸체와, 상기 발열블록을 선택적으로 상측으로 들어올릴 수 있는 리프트장치를 포함하도록 하여 유지보수가 용이하도록 이루어진 리프트수단이 구비된 다단형 반도체 처리장치용 전기히터에 관한 것이다.

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Номер записи: 5