BI-MATERIAL TERAHERTZ SENSOR AND TERAHERTZ EMITTER USING METAMATERIAL STRUCTURES

Bi-material terahertz (THz) sensors with metamaterial structures are described. In one embodiment, MEMS fabrication-friendly SiOand Al are used to maximize the bi-material effect and metamaterial absorption at 3.8 THz, the frequency of a quantum cascade laser illumination source. Sensors with different configurations were fabricated and the measured absorption is near 100% and responsivity is around 1.2 deg/μW. Fabrication and use of the sensors in focal plane arrays for real time THz imaging is described. In a further embodiment, the metamaterial structure is utilized as a THz emitter when heated by an external source. 1. A bi-material terahertz (THz) sensor comprising:a metamaterial absorber;a first bi-material leg connected to the metamaterial absorber;a second bi-material leg connected to the metamaterial absorber;one or more anchor structures connecting the first bi-material leg and the second bi-material leg to a substrate; anda substrate.2. The bi-material THz sensor of wherein the metamaterial absorber comprises:an electrically conductive ground plane layer;an electrically insulating dielectric layer in communication with the electrically conductive ground plane layer; anda plurality of electrically conductive surface elements formed on the dielectric layer and in communication with the dielectric layer.3. The bi-material THz sensor of wherein the ground plane is reflective to allow external optical readout.4. The bi-material THz sensor of wherein the one or more anchor structures thermally insulate the first and second bi-material legs from the substrate.5. The bi-material THz sensor of wherein the one or more anchor structures have a lower thermal conductance than the first and second bi-material legs.6. The bi-material THz sensor of wherein the one or more anchor structures comprise:an anchor structure, wherein the anchor structure is connected to the first bi-material leg and the second bi-material leg and to the substrate.7. The bi-material THz sensor ...