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Небесная энциклопедия

Космические корабли и станции, автоматические КА и методы их проектирования, бортовые комплексы управления, системы и средства жизнеобеспечения, особенности технологии производства ракетно-космических систем

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Мониторинг СМИ

Мониторинг СМИ и социальных сетей. Сканирование интернета, новостных сайтов, специализированных контентных площадок на базе мессенджеров. Гибкие настройки фильтров и первоначальных источников.

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Применить Всего найдено 14. Отображено 14.
12-11-2019 дата публикации

High sensitivity single-axis MEMS accelerometer with bilateral flexures

Номер: US0010473687B1
Автор: Paul J. Resnick, Brian D. Homeijer, Thomas A. Friedmann, Michael Wiwi, RESNICK PAUL J, HOMEIJER BRIAN D, FRIEDMANN THOMAS A, WIWI MICHAEL, Resnick, Paul J., Homeijer, Brian D., Friedmann, Thomas A., Wiwi, Michael
Принадлежит: National Technology & Engineering Solutions of Sandia, LLC, NAT TECH & ENG SOLUTIONS SANDIA LLC

A microelectromechanical systems (MEMS) accelerometer that has high sensitivity to motion along the z axis is discussed. The device includes two symmetrical sets of bilateral, diametrically opposed high aspect ratio flexures that tether a movable proof mass to the frame of the device. The flexures are designed in such a way as to restrict movement of the proof mass along the x and y axes but readily allow motion along the z axis. More specifically, when the device experiences an acceleration along the x or y axes, the proof mass is restricted from moving because some of the bilateral, diametrically opposed flexures are in compression and others are in tension.

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Номер записи: 1
27-11-2018 дата публикации

Vertically integrated optoelectronics package for MEMS devices

Номер: US0010139564B1
Автор: Brian D. Homeijer, Matt Eichenfield, HOMEIJER BRIAN D, EICHENFIELD MATT, Homeijer, Brian D., Eichenfield, Matt
Принадлежит: National Technology & Engineering Solutions of Sandia, LLC, NAT TECH & ENG SOLUTIONS SANDIA LLC

The present application relates to vertically integrated assemblies including a MEMS-based optomechanical architecture. In some embodiments, the assembly includes a MEMS/optoelectronic module, an emitter module, and a detector module, where these modules are vertically integrated. Methods of fabricating such assemblies are also described herein.

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Номер записи: 2
02-08-2016 дата публикации

Calibration of MEMS sensor

Номер: US0009403671B2
Автор: Brian D. Homeijer, Robert Newton Bicknell, HOMEIJER BRIAN D, BICKNELL ROBERT NEWTON, Homeijer Brian D., Bicknell Robert Newton
Принадлежит: Hewlett-Packard Development Company, L.P., HOMEIJER BRIAN D, BICKNELL ROBERT NEWTON, HEWLETT-PACKARD DEV COMPANY L P, Homeijer Brian D., Bicknell Robert Newton

A micro electromechanical systems (MEMS) sensor is excited. The response of the MEMS sensor is measured. The MEMS sensor is calibrated.

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Номер записи: 3
19-11-2019 дата публикации

Low-power MEMS wakeup system

Номер: US0010481672B1
Автор: Benjamin Griffin, Robert William Reger, Sean Yen, Bryson Barney, Andrew Ian Young, Travis Ryan Young, Michael Wiwi, Michael David Henry, Brian D. Homeijer, GRIFFIN BENJAMIN, REGER ROBERT WILLIAM, YEN SEAN, BARNEY BRYSON, YOUNG ANDREW IAN, YOUNG TRAVIS RYAN, WIWI MICHAEL, HENRY MICHAEL DAVID, HOMEIJER BRIAN D, Griffin, Benjamin, Reger, Robert William, Yen, Sean, Barney, Bryson, Young, Andrew Ian, Young, Travis Ryan, Wiwi, Michael, Henry, Michael David, Homeijer, Brian D.
Принадлежит: National Technology & Engineering Solutions of Sandia, LLC, NAT TECH & ENG SOLUTIONS SANDIA LLC

There is provided a near-zero-power wakeup system in which a MEMS sensor for mechanical or acoustic signals is coupled to a very-low-power complementary metal oxide semiconductor (CMOS) application-specific integrated circuit (ASIC). Power consumption can be minimized by operating the ASIC with sub-threshold gate voltages.

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Номер записи: 4
02-02-2012 дата публикации

CAPACITIVE SENSORS

Номер: US20120025851A1
Автор: Brian D. Homeijer, Robert G. Walmsley, Rodney L. Alley, Dennis M. Lazaroff, Sara J. Homeijer, HOMEIJER BRIAN D, WALMSLEY ROBERT G, ALLEY RODNEY L, LAZAROFF DENNIS M, HOMEIJER SARA J, HOMEIJER BRIAN D., WALMSLEY ROBERT G., ALLEY RODNEY L., LAZAROFF DENNIS M., HOMEIJER SARA J.
Принадлежит:

The present disclosure includes capacitive sensors and methods of forming capacitive sensors. One capacitive sensor includes a first substrate structure having a first dielectric material formed thereon and electrodes of a first electrode array formed on the first dielectric material. The sensor includes a second substrate structure facing the first substrate structure and having a second dielectric material formed thereon and electrodes of a second electrode array formed on the second dielectric material. The sensor includes a removed portion of the first dielectric material forming a recess between adjacent electrodes of the first electrode array, and the first substrate structure is moveable with respect to the second substrate structure. 1. A capacitive sensor , comprising:a first substrate structure having a first dielectric material formed thereon and electrodes of a first electrode array formed on the first dielectric material;a second substrate structure facing the first substrate structure and having a second dielectric material formed thereon and electrodes of a second electrode array formed on the second dielectric material; anda removed portion of the first dielectric material forming a recess between adjacent electrodes of the first electrode array;wherein the first substrate structure is moveable with respect to the second substrate structure.2. The capacitive sensor of claim 1 , wherein a thickness of the first dielectric material beneath the electrodes of the first electrode array is selected such that electrical energy within the first substrate structure claim 1 , and associated with a parasitic capacitance between adjacent electrodes of the first electrode array claim 1 , is substantially eliminated.3. The capacitive sensor of claim 2 , wherein the thickness of the first dielectric material is between about 1 micron and about 3 microns.4. The capacitive sensor of claim 2 , wherein the thickness of the first dielectric material is at least 2 ...

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Номер записи: 5
14-02-2013 дата публикации

ERROR CORRECTION IN ACCELERATION-SENSING DEVICES

Номер: US20130036789A1
Автор: Brian D. Homeijer, Robert N. Bicknell, HOMEIJER BRIAN D, BICKNELL ROBERT N, HOMEIJER BRIAN D., BICKNELL ROBERT N.
Принадлежит: Hewlett Packard Development Co LP

An acceleration-sensing device having error correction includes a stator having at least one conductor affixed to a surface and a proof mass having a first conductor affixed at a first location relative to the at least one conductor affixed to a surface of the stator. The proof mass includes a second conductor affixed at a second location relative to the at least one conductor affixed to a surface of the stator, wherein an excitation signal applied to the first conductor of the proof mass brings about a force on the proof mass in the plane of motion of the proof mass that is substantially equally opposed by a force resulting from an excitation signal applied to the second conductor of the proof mass in the plane of motion of the proof mass.

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Номер записи: 6
15-08-2013 дата публикации

SUSPENDED MASSES IN MICRO-MECHANICAL DEVICES

Номер: US20130205901A1
Автор: Brian D. Homeijer
Принадлежит:

The micro-mechanical device includes a substrate with an internal cavity, a first surface, and an opposing second surface. A first trench is formed from the first surface of the substrate into the internal cavity. The first trench at least partially defines flexures. A second trench is formed from the second surface of the substrate into the internal cavity and at least partially defines a suspended mass. The suspended mass is connected by the flexures to the substrate. 1. A micro-mechanical device comprising:a substrate comprising an internal cavity, a first surface, and an opposing second surface;a first trench formed through the first surface of the substrate into the internal cavity, the first trench at least partially defining flexures; anda second trench formed through the second surface of the substrate into the internal cavity, the second trench at least partially defining a suspended mass, in which the suspended mass is connected by the flexures to the substrate, in which the flexures are sandwiched between sides suspended mass and the surrounding substrate.2. The device of claim 1 , in which the flexures are symmetrically disposed about a center of mass of the suspended mass such that the tendency of the suspended mass to twist under acceleration is reduced.3. The device of claim 1 , in which the second trench is a release trench formed around the perimeter of the suspended mass.4. The device of claim 1 , in which the second trench defines additional flexures.5. The device of claim 1 , in which the flexures are to allow preferential motion of the suspended mass in an in-plane direction.6. The device of claim 1 , in which the device is to sense in-plane accelerations.7. The device of claim 1 , further comprising bumpers formed by the release trench.8. The device of claim 1 , in which the first trench is formed into a first portion of the internal cavity and the second trench is formed into a different second portion of the internal cavity.9. The device of ...

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Номер записи: 7
07-03-2013 дата публикации

ACCELEROMETER

Номер: US20130055813A1
Автор: Robert Newton Bicknell, Brian D. Homeijer
Принадлежит: HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P.

An accelerometer can include a support structure having situated thereupon a stator electrode array including multiple stator electrodes (e.g., A, B, and C); and a proof mass positioned parallel to the stator electrode array and capable of displacement parallel thereto. A translator electrode array facing the stator electrode array can comprise multiple translator electrodes (e.g., a and b) can be situated on the proof mass. Further included is a drive circuitry to apply drive voltages to six capacitances formed by the stator and translator electrodes. The total force exerted on the proof mass by the drive voltages is held constant at about zero.

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Номер записи: 8
24-03-2015 дата публикации

Suspended masses in micro-mechanical devices

Номер: US0008984942B2
Автор: Brian D. Homeijer, HOMEIJER BRIAN D, HOMEIJER BRIAN D.
Принадлежит: Hewlett-Packard Development Company, L.P., HOMEIJER BRIAN D, HEWLETT PACKARD DEVELOPMENT CO, HOMEIJER BRIAN D., HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P.

The micro-mechanical device includes a substrate with an internal cavity, a first surface, and an opposing second surface. A first trench is formed from the first surface of the substrate into the internal cavity. The first trench at least partially defines flexures. A second trench is formed from the second surface of the substrate into the internal cavity and at least partially defines a suspended mass. The suspended mass is connected by the flexures to the substrate.

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Номер записи: 9
12-05-2015 дата публикации

Error correction in acceleration-sensing devices

Номер: US0009027402B2
Автор: Brian D. Homeijer, Robert N. Bicknell, HOMEIJER BRIAN D, BICKNELL ROBERT N, HOMEIJER BRIAN D., BICKNELL ROBERT N.
Принадлежит: Hewlett-Packard Development Company, L.P., HOMEIJER BRIAN D, BICKNELL ROBERT N, HEWLETT PACKARD DEVELOPMENT CO, HOMEIJER BRIAN D., BICKNELL ROBERT N., HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P.

An acceleration-sensing device having error correction includes a stator having at least one conductor affixed to a surface and a proof mass having a first conductor affixed at a first location relative to the at least one conductor affixed to a surface of the stator. The proof mass includes a second conductor affixed at a second location relative to the at least one conductor affixed to a surface of the stator, wherein an excitation signal applied to the first conductor of the proof mass brings about a force on the proof mass in the plane of motion of the proof mass that is substantially equally opposed by a force resulting from an excitation signal applied to the second conductor of the proof mass in the plane of motion of the proof mass.

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Номер записи: 10
05-03-2013 дата публикации

Accelerometer.

Номер: MX2012013044A
Автор: Brian D Homeijer, Robert Newton Bicknell
Принадлежит: Hewlett Packard Development Co

Un acelerómetro 110 puede incluir una estructura 104 de soporte que tiene colocado en la misma un arreglo 106 de electrodos estatores que incluye múltiples electrodos 110 estatores (por ejemplo, A, B, y C); y una masa de prueba 102 colocada paralela al arreglo de electrodos estatores y capaz del desplazamiento paralelo al mismo. Un arreglo 108 de electrodos traslativos que da hacia el arreglo de electrodos estatores puede comprender múltiples electrodos traslativos 112 (por ejemplo, a y b) y estar colocado en la masa de prueba, Adicionalmente se incluye una circuitería 114 de activación para aplicar voltajes de activación a seis capacitores formados por los electrodos estatores y traslativos. La fuerza total ejercida en la masa de prueba por los voltajes de activación se mantiene constante en aproximadamente cero.

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Номер записи: 11
03-01-2013 дата публикации

Calibration of mems sensor

Номер: WO2013002809A1
Автор: Brian D. Homeijer, Robert Newton Bicknell
Принадлежит: Hewlett-Packard Development Company, L.P.

A micro electromechanical systems (MEMS) sensor is excited. The response of the MEMS sensor is measured. The MEMS sensor is calibrated.

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Номер записи: 12
03-11-2011 дата публикации

Error correction in acceleration-sensing devices

Номер: WO2011136793A1
Автор: Brian D Homeijer, Robert Bicknell
Принадлежит: Hewlett-Packard Development Company, L.P.

An acceleration-sensing device having error correction includes a stator having at least one conductor affixed to a surface and a proof mass having a first conductor affixed at a first location relative to the at least one conductor affixed to a surface of the stator. The proof mass includes a second conductor affixed at a second location relative to the at least one conductor affixed to a surface of the stator, wherein an excitation signal applied to the first conductor of the proof mass brings about a force on the proof mass in the plane of motion of the proof mass that is substantially equally opposed by a force resulting from an excitation signal applied to the second conductor of the proof mass in the plane of motion of the proof mass.

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Номер записи: 13
29-10-2024 дата публикации

Interlocking proof mass for mems inertial sensing device

Номер: US12129167B1
Автор: Brian D. Homeijer, Katherine M. Musick, Paul J. Resnick, Thomas A. Friedmann
Принадлежит: National Technology and Engineering Solutions of Sandia LLC

A microelectromechanical systems (MEMS) inertial sensing device having a large proof mass with interlocking tabs is disclosed. The interlocking tabs limit motion of the proof mass when subjected to large inertial forces. The interlocking tabs are formed around the periphery of the proof mass and interact with corresponding interlocking tabs formed in a frame to which the proof mass is tethered. The motion of the proof mass is limited by the interlocking tabs, which are formed during MEMS fabrication of the inertial sensing device rather than as part of the packaging process. With a large proof mass, the inertial sensing device can provide high sensitivity in low inertial force environments while the interlocking tabs protect the device when subjected to high inertial forces.

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Номер записи: 14