01-10-2015 дата публикации
Номер: US20150277047A1
Принадлежит:
A method of fabrication and device made by preparing a photosensitive glass substrate comprising at least silica, lithium oxide, aluminum oxide, and cerium oxide, masking a design layout comprising one or more holes to form one or more electrical conduction paths on the photosensitive glass substrate, exposing at least one portion of the photosensitive glass substrate to an activating energy source, exposing the photosensitive glass substrate to a heating phase of at least ten minutes above its glass transition temperature, cooling the photosensitive glass substrate to transform at least part of the exposed glass to a crystalline material to form a glass-crystalline substrate and etching the glass-crystalline substrate with an etchant solution to form one or more angled channels that are then coated. 51. The method of claim , wherein the one or more metals comprise metals , alloys , metal-nanoparticles , alloy nanoparticles , metal inserts , alloy inserts , noble metals or a combination thereof.61. The method of claim , further comprising the step of coating the one or more metals with a second dielectric coating material.74. The method of claim , wherein the second dielectric coating material is SiO , SiN or a combination thereof.81. The method of claim , further comprising the step of coating at least a portion of the device with one or more polymers , one or more metal , one or more alloys , one or more metal-nanoparticles , one or more alloy nanoparticles , one or more metal inserts , one or more alloy inserts , one or more noble metals or a combination thereof.91. The method of claim , wherein the glass substrate is heated to a temperature of 420-520° C. for between 10 minutes and 2 hours and then heated to a temperature range heated to 520-620° C. for between 10 minutes and 2 hours.101. The method of claim , further comprising the step of smoothing the surface using a surface-smoothing acid containing at least one of nitric acid to dissolve surface metals and ...
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