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Космические корабли и станции, автоматические КА и методы их проектирования, бортовые комплексы управления, системы и средства жизнеобеспечения, особенности технологии производства ракетно-космических систем

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Применить Всего найдено 13. Отображено 12.
25-10-2016 дата публикации

MEMS parameter identification using modulated waveforms

Номер: US0009475689B2
Автор: Raimondo P. Sessego, Tehmoor M. Dar, Bruno J. Debeurre, SESSEGO RAIMONDO P, DAR TEHMOOR M, DEBEURRE BRUNO J, Sessego Raimondo P., Dar Tehmoor M., Debeurre Bruno J.
Принадлежит: FREESCALE SEMICONDUCTOR, INC., FREESCALE SEMICONDUCTOR INC

A sensor system includes a microelectromechanical systems (MEMS) sensor, control circuit, signal evaluation circuitry, a digital to analog converter, signal filters, an amplifier, demodulation circuitry and memory. The system is configured to generate high and low-frequency signals, combine them, and provide the combined input signal to a MEMS sensor. The MEMS sensor is configured to provide a modulated output signal that is a function of the combined signal. The system is configured to demodulate and filter the modulated output signal, compare the demodulated, filtered signal with the input signal to determine amplitude and phase differences, and determine, based on the amplitude and phase differences, various parameters of the MEMS sensor. A method for determining MEMS sensor parameters is also provided.

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Номер записи: 1
24-10-2017 дата публикации

Compensation and calibration of multiple mass MEMS sensor

Номер: US0009797921B2
Автор: Tehmoor M. Dar, Bruno J. Debeurre, Raimondo P. Sessego, DAR TEHMOOR M, DEBEURRE BRUNO J, SESSEGO RAIMONDO P, Dar Tehmoor M., Debeurre Bruno J., Sessego Raimondo P.
Принадлежит: NXP USA, Inc., FREESCALE SEMICONDUCTOR INC, NXP USA INC, FREESCALE SEMICONDUCTOR, INC.

A system includes a MEMS sensor having dual proof masses capable of moving independently from one another in response to forces imposed upon the proof masses. Each proof mass includes an independent set of sense contacts configured to provide output signals corresponding to the physical displacement of the corresponding sense mass. A switch system is in communication with the sense contacts. The switch system is configured to enable a sense mode and various test modes for the MEMS sensor. When the switch system enables a sense mode, output signals from the sense contacts can be combined to produce sense signals. When the switch system enables a test mode, the second contacts are electrically decoupled from one another to disassociate the output signals from one another. The independent sense contacts and switch system enable the concurrent compensation and calibration of the proof masses along two different sense axes.

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Номер записи: 2
05-12-2017 дата публикации

Compensation and calibration for MEMS devices

Номер: US0009834438B2
Автор: Tehmoor M. Dar, Bruno J. Debeurre, Raimondo P. Sessego, Richard A. Deken, Aaron A. Geisberger, Krithivasan Suryanarayanan, DAR TEHMOOR M, DEBEURRE BRUNO J, SESSEGO RAIMONDO P, DEKEN RICHARD A, GEISBERGER AARON A, SURYANARAYANAN KRITHIVASAN, Dar Tehmoor M., Debeurre Bruno J., Sessego Raimondo P., Deken Richard A., Geisberger Aaron A., Suryanarayanan Krithivasan
Принадлежит: NXP USA, INC., DAR TEHMOOR M, DEBEURRE BRUNO J, SESSEGO RAIMONDO P, DEKEN RICHARD A, GEISBERGER AARON A, SURYANARAYANAN KRITHIVASAN, NXP USA INC, Dar Tehmoor M., Debeurre Bruno J., Sessego Raimondo P., Deken Richard A., Geisberger Aaron A., Suryanarayanan Krithivasan

A sensor system includes a microelectromechanical systems (MEMS) sensor, processing circuitry, measurement circuitry, stimulus circuitry and memory. The system is configured to provide an output responsive to physical displacement within the MEMS sensor to the measurement circuitry. The stimulus circuitry is configured to provide a stimulus signal to the MEMS sensor to cause a physical displacement within the MEMS sensor. The measurement circuitry is configured to process the output from the MEMS sensor and provide it to the processing circuitry, which is configured to generate stimulus signals and provide them to the stimulus circuitry for provision to the MEMS sensor. Output from the measurement circuitry corresponding to the physical displacement occurring in the MEMS sensor is monitored and used to calculate MEMS sensor characteristics. Methods for monitoring and calibrating MEMS sensors are also provided.

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Номер записи: 3
04-01-2018 дата публикации

COMPENSATION AND CALIBRATION OF MULTIPLE MASS MEMS SENSOR

Номер: US20180003734A1
Автор: Dar Tehmoor M., DEBEURRE BRUNO J., Sessego Raimondo P.
Принадлежит:

A system includes a MEMS sensor having dual proof masses capable of moving independently from one another in response to forces imposed upon the proof masses. Each proof mass includes an independent set of sense contacts configured to provide output signals corresponding to the physical displacement of the corresponding sense mass. A switch system is in communication with the sense contacts. The switch system is configured to enable a sense mode and various test modes for the MEMS sensor. When the switch system enables a sense mode, output signals from the sense contacts can be combined to produce sense signals. When the switch system enables a test mode, the second contacts are electrically decoupled from one another to disassociate the output signals from one another. The independent sense contacts and switch system enable the concurrent compensation and calibration of the proof masses along two different sense axes. 112-. (canceled)13. A method of determining trim values for a microelectromechanical systems (MEMS) sensor , said MEMS sensor having a first movable element and a second movable element suspended from a substrate , and said method comprising:providing a first stimulus signal to said MEMS sensor to cause physical displacement of said first movable element;providing a second stimulus signal to said MEMS sensor to cause said physical displacement of said second movable element;detecting a first output signal corresponding to said physical displacement of said first movable element;detecting a second output signal corresponding to said physical displacement of said second movable element;evaluating said first output signal to determine a first trim value specific to said first movable element; andevaluating said second output signal to determine a second trim value specific to said second movable element.14. The method of wherein said physical displacement of said first movable element differs from said physical displacement of said second movable element ...

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Номер записи: 4
29-01-2015 дата публикации

MEMS PARAMETER IDENTIFICATION USING MODULATED WAVEFORMS

Номер: US20150027198A1
Автор: Dar Tehmoor M., DEBEURRE BRUNO J., Sessego Raimondo P.
Принадлежит: Freescale Semiconductor, Inc.

A sensor system includes a microelectromechanical systems (MEMS) sensor, control circuit, signal evaluation circuitry, a digital to analog converter, signal filters, an amplifier, demodulation circuitry and memory. The system is configured to generate high and low-frequency signals, combine them, and provide the combined input signal to a MEMS sensor. The MEMS sensor is configured to provide a modulated output signal that is a function of the combined signal. The system is configured to demodulate and filter the modulated output signal, compare the demodulated, filtered signal with the input signal to determine amplitude and phase differences, and determine, based on the amplitude and phase differences, various parameters of the MEMS sensor. A method for determining MEMS sensor parameters is also provided. 1. A microelectromechanical systems (MEMS) system comprising:a MEMS sensor having a moveable mechanical element configured to be moveable responsive to an electromagnetic signal applied to the moveable mechanical element, and further comprising a sense contact configured to provide as an output an electromagnetic output signal corresponding to motion of the moveable mechanical element;a control circuit in electrical communication with the moveable mechanical element of the MEMS sensor, and configured to provide an electromagnetic input signal comprising at least two oscillating frequencies to the moveable mechanical element of the MEMS sensor; anddemodulation circuitry in electrical communication with the sense contact of the MEMS sensor and the control circuit, and configured to demodulate the electromagnetic output signal corresponding to motion of the moveable mechanical element and provide a demodulated signal to the control circuit, wherein the control circuit is configured to evaluate the demodulated signal to determine at least one characteristic of the MEMS sensor.2. A MEMS parameter identification system as claimed in further comprising signal evaluation ...

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Номер записи: 5
09-03-2017 дата публикации

COMPENSATION AND CALIBRATION OF MULTIPLE MASS MEMS SENSOR

Номер: US20170067932A1
Автор: Dar Tehmoor M., DEBEURRE BRUNO J., Sessego Raimondo P.
Принадлежит:

A system includes a MEMS sensor having dual proof masses capable of moving independently from one another in response to forces imposed upon the proof masses. Each proof mass includes an independent set of sense contacts configured to provide output signals corresponding to the physical displacement of the corresponding sense mass. A switch system is in communication with the sense contacts. The switch system is configured to enable a sense mode and various test modes for the MEMS sensor. When the switch system enables a sense mode, output signals from the sense contacts can be combined to produce sense signals. When the switch system enables a test mode, the second contacts are electrically decoupled from one another to disassociate the output signals from one another. The independent sense contacts and switch system enable the concurrent compensation and calibration of the proof masses along two different sense axes. 1. A system comprising:a microelectromechanical systems (MEMS) sensor having a first movable element and a second movable element suspended from a substrate;a first sense contact configured to provide a first output signal corresponding to physical displacement of said first movable element;a second sense contact configured to provide a second output signal corresponding to said physical displacement of said second movable element;a switch system in communication with said first and second sense contacts, said switch system being configured to enable a sense mode and a test mode of said MEMS sensor, wherein said first and second sense contacts are electrically coupled with one another to produce a sense signal as a combination of said first and second output signals when said switch system enables said sense mode, and said first and second sense contacts are electrically decoupled from one another to disassociate said first output signal from said second output signal when said switch system enables said test mode.2. The system of wherein said first ...

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Номер записи: 6
02-06-2016 дата публикации

Mems parameter identification using modulated waveforms

Номер: US20160152464A1
Автор: Bruno J. Debeurre, Raimondo P. Sessego, Tehmoor M. Dar
Принадлежит: FREESCALE SEMICONDUCTOR INC

A sensor system includes a microelectromechanical systems (MEMS) sensor, control circuit, signal evaluation circuitry, a digital to analog converter, signal filters, an amplifier, demodulation circuitry and memory. The system is configured to generate high and low-frequency signals, combine them, and provide the combined input signal to a MEMS sensor. The MEMS sensor is configured to provide a modulated output signal that is a function of the combined signal. The system is configured to demodulate and filter the modulated output signal, compare the demodulated, filtered signal with the input signal to determine amplitude and phase differences, and determine, based on the amplitude and phase differences, various parameters of the MEMS sensor. A method for determining MEMS sensor parameters is also provided.

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Номер записи: 7
16-06-2016 дата публикации

COMPENSATION AND CALIBRATION FOR MEMS DEVICES

Номер: US20160167961A1
Автор: Dar Tehmoor M., DEBEURRE BRUNO J., Deken Richard A., GEISBERGER Aaron A., Sessego Raimondo P., Suryanarayanan Krithivasan
Принадлежит: Freescale Semiconductor, Inc.

A sensor system includes a microelectromechanical systems (MEMS) sensor, processing circuitry, measurement circuitry, stimulus circuitry and memory. The system is configured to provide an output responsive to physical displacement within the MEMS sensor to the measurement circuitry. The stimulus circuitry is configured to provide a stimulus signal to the MEMS sensor to cause a physical displacement within the MEMS sensor. The measurement circuitry is configured to process the output from the MEMS sensor and provide it to the processing circuitry, which is configured to generate stimulus signals and provide them to the stimulus circuitry for provision to the MEMS sensor. Output from the measurement circuitry corresponding to the physical displacement occurring in the MEMS sensor is monitored and used to calculate MEMS sensor characteristics. Methods for monitoring and calibrating MEMS sensors are also provided. 1. A method of monitoring and calibrating MEMS sensors in a system comprising a MEMS sensor , comprising:generating an electronic stimulus signal in the system;providing the electronic stimulus signal to the MEMS sensor;providing an electronic output from the MEMS sensor corresponding to a physical displacement of a portion of the MEMS sensor responsive to the electronic stimulus signal;monitoring, the electronic output from the MEMS sensor; and,determining a characteristic of the MEMS sensor based on the electronic output.2. A method as claimed in claim 1 , further including the step of comparing the monitored electronic output to an expected output to determine if the difference between the monitored output and expected output is less than a pre-determined threshold.3. A method as claimed in claim 2 , further including the steps of:monitoring in the processor the amount of elapsed time that has passed without the difference falling below the pre-determined threshold; and,recognizing an error condition if the elapsed time reaches a pre-determined time limit.4 ...

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Номер записи: 8
18-09-2014 дата публикации

COMPENSATION AND CALIBRATION FOR MEMS DEVICES

Номер: US20140260508A1
Автор: Dar Tehmoor M., DEBEURRE BRUNO J., Deken Richard A., GEISBERGER Aaron A., Sessego Raimondo P., Suryanarayanan Krithivasan
Принадлежит: Freescale Semiconductor, Inc.

A sensor system includes a microelectromechanical systems (MEMS) sensor, processing circuitry, measurement circuitry, stimulus circuitry and memory. The system is configured to provide an output responsive to physical displacement within the MEMS sensor to the measurement circuitry. The stimulus circuitry is configured to provide a stimulus signal to the MEMS sensor to cause a physical displacement within the MEMS sensor. The measurement circuitry is configured to process the output from the MEMS sensor and provide it to the processing circuitry, which is configured to generate stimulus signals and provide them to the stimulus circuitry for provision to the MEMS sensor. Output from the measurement circuitry corresponding to the physical displacement occurring in the MEMS sensor is monitored and used to calculate MEMS sensor characteristics. Methods for monitoring and calibrating MEMS sensors are also provided. 1. A microelectromechanical systems (MEMS) sensor system comprising:a MEMS sensor configured to provide a first output signal responsive to, and indicative of, a physical displacement of a mechanical portion the MEMS sensor;measurement circuitry electrically coupled to the MEMS sensor and having signal processing circuitry electrically coupled to a first switch, the measurement circuitry configured to process the first output signal in the signal processing circuitry to generate and provide to the switch a fourth processed signal corresponding to the first output signal and indicative of a physical displacement of a mechanical portion of the MEMS sensor, the measurement circuitry further configured to provide, as it is generated, the fourth processed signal external to the measurement circuitry or to additional circuitry of the measurement circuitry based on the first switch configuration;stimulus circuitry electrically coupled to the MEMS sensor and configured to provide a second stimulus signal to the MEMS sensor responsive to a third signal received by the ...

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Номер записи: 9
18-09-2014 дата публикации

MCU-BASED COMPENSATION AND CALIBRATION FOR MEMS DEVICES

Номер: US20140266246A1
Автор: Dar Tehmoor M., Debeurre Bruno, Sessego Raimondo P.
Принадлежит: Freescale Semiconductor, Inc.

A sensor system includes a microelectromechanical systems (MEMS) sensor, a processor, measurement circuitry, stimulus circuitry and memory. The MEMS sensor is configured to provide an output responsive to physical displacement within the MEMS sensor to the measurement circuitry. The stimulus circuitry is configured to provide a stimulus signal to the MEMS sensor to cause a physical displacement within the MEMS sensor. The measurement circuitry is configured to process the output from the MEMS sensor and provide it to the processor. The processor is configured to generate stimulus signals and provide them to the stimulus circuitry for provision to the MEMS sensor. The processor is configured to monitor the output from the measurement circuitry corresponding to the physical displacement occurring in the MEMS sensor, calculate MEMS sensor characteristics based on the output, and update calibration values based on the output. Methods for monitoring and calibrating MEMS sensors are also provided. 1. A microelectromechanical systems (MEMS) sensor system comprising:a MEMS sensor configured to provide a first output signal responsive to a physical displacement of a mechanical portion the MEMS sensor,measurement circuitry electrically coupled to the MEMS sensor and configured to monitor the first output signal and process the first output signal to provide a fourth signal corresponding to the first output signal external to the measurement circuitry;stimulus circuitry electrically coupled to the MEMS sensor and configured to provide a second stimulus signal to the MEMS sensor responsive to a third signal received by the stimulus circuitry, the second stimulus signal configured to cause a physical displacement of a mechanical portion of the MEMS sensor, anda processor electrically coupled to the measurement circuitry and the stimulus circuitry, wherein the processor is configured to provide the third signal to the stimulus circuitry, the processor configured to receive an ...

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Номер записи: 10
29-12-2015 дата публикации

Compensation and calibration for MEMS devices

Номер: US9221679B2
Автор: Aaron A. Geisberger, Bruno J. Debeurre, Krithivasan Suryanarayanan, Raimondo P. Sessego, Richard A. Deken, Tehmoor M. Dar
Принадлежит: FREESCALE SEMICONDUCTOR INC

A sensor system includes a microelectromechanical systems (MEMS) sensor, processing circuitry, measurement circuitry, stimulus circuitry and memory. The system is configured to provide an output responsive to physical displacement within the MEMS sensor to the measurement circuitry. The stimulus circuitry is configured to provide a stimulus signal to the MEMS sensor to cause a physical displacement within the MEMS sensor. The measurement circuitry is configured to process the output from the MEMS sensor and provide it to the processing circuitry, which is configured to generate stimulus signals and provide them to the stimulus circuitry for provision to the MEMS sensor. Output from the measurement circuitry corresponding to the physical displacement occurring in the MEMS sensor is monitored and used to calculate MEMS sensor characteristics. Methods for monitoring and calibrating MEMS sensors are also provided.

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Номер записи: 11
10-05-2016 дата публикации

MCU-based compensation and calibration for MEMS devices

Номер: US09335396B2
Автор: Bruno Debeurre, Raimondo P. Sessego, Tehmoor M. Dar
Принадлежит: FREESCALE SEMICONDUCTOR INC

A sensor system includes a microelectromechanical systems (MEMS) sensor, a processor, measurement circuitry, stimulus circuitry and memory. The MEMS sensor is configured to provide an output responsive to physical displacement within the MEMS sensor to the measurement circuitry. The stimulus circuitry is configured to provide a stimulus signal to the MEMS sensor to cause a physical displacement within the MEMS sensor. The measurement circuitry is configured to process the output from the MEMS sensor and provide it to the processor. The processor is configured to generate stimulus signals and provide them to the stimulus circuitry for provision to the MEMS sensor. The processor is configured to monitor the output from the measurement circuitry corresponding to the physical displacement occurring in the MEMS sensor, calculate MEMS sensor characteristics based on the output, and update calibration values based on the output. Methods for monitoring and calibrating MEMS sensors are also provided.

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Номер записи: 12