27-06-2023 дата публикации
Номер: CN116332485A
Автор:
ZHANG ZHONGSHU,
CHEN QIANG,
ZHANG JUAN,
ZHOU JIE,
FENG JIYAO,
YU YANG,
YU LICHEN,
GUAN LEI,
ZHANG LIANXING,
ZHAO XIAOLIANG,
LI XIANGXING,
LU LIANG
Принадлежит:
The invention relates to a vertical quartz process pipe and a processing method, and belongs to the technical field of quartz tubes, the vertical quartz process pipe comprises a cylinder and a first flange fixedly welded to the cylinder, a second flange is fixed to the side, close to the first flange, of a vacuum furnace main body, the second flange makes contact with the first flange, and a mounting ring plate is fixed to the side, close to the first flange, of the second flange; the outer side wall of the first flange makes contact with the inner side wall of the mounting ring plate, a sealing ring plate is fixed to the side, close to the first flange, of the second flange, a sealing groove for the sealing ring plate to be inserted is formed in the side, close to the second flange, of the first flange, and a mounting plate is arranged on the side, away from the first flange, of the second flange. The plane, away from the second flange plate, of the first flange plate is flush with the ...
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