07-03-2019 дата публикации
Номер: US20190074323A1
Принадлежит:
The present disclosure relates to the field of semiconductor technologies, and discloses a method for manufacturing a semiconductor apparatus. The method includes: forming a water film on a bottom surface of a top wafer and a top surface of a bottom wafer; after the water film is formed, attaching the bottom surface of the top wafer to the top surface of the bottom wafer; disposing the attached top wafer and bottom wafer in a vacuum environment; and performing a thermal annealing process, so that the bottom surface of the top wafer is fusion-bonded to the top surface of the bottom wafer. The disclosed methods can reduce bubble voids existing between the bonded wafers. 1. A method for manufacturing a semiconductor apparatus , comprising:forming a water film on a bottom surface of a top wafer and a top surface of a bottom wafer;after the water film is formed, attaching the bottom surface of the top wafer to the top surface of the bottom wafer;disposing the attached top wafer and bottom wafer in a vacuum environment; andperforming a thermal annealing process, so that the bottom surface of the top wafer is fusion-bonded to the top surface of the bottom wafer.2. The method according to claim 1 , wherein pressure intensity in the vacuum environment is 0.0001 mBar to 0.1 mBar.3. The method according to claim 2 , wherein a duration period in the vacuum environment is 0.5 h to 2 h.4. The method according to claim 1 , further comprising:before the water film is formed, performing hydrophilic treatment on the bottom surface of the top wafer and the top surface of the bottom wafer.5. The method according to claim 4 , wherein the hydrophilic treatment comprises plasma treatment.6. The method according to claim 5 , wherein treatment conditions of the plasma treatment comprise:vacuum pressure intensity being less than 1 mBar;a treatment time being 15 s to 90 s;power being 50 W to 200 W; anda treatment atmosphere comprising nitrogen.7. The method according to claim 1 , wherein ...
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