10-02-2010 дата публикации
Номер: CN0101644611A
Принадлежит:
The invention provides a surface acoustic wave sensor with low loss and high temperature stability, which comprises a piezoelectric substrate, an input interdigital transducer and an output interdigital transducer which are deposited on the piezoelectric substrate and sensitive membranes covered on the piezoelectric substrate, the input interdigital transducer and the output interdigital transducer. The piezoelectric substrate is made of crystal materials with high electromechanical coupling factor and high temperature stability, and the piezoelectric substrate adopts LGS, LGT, LGN, gallium phosphate, Sr3TaGa3Si2O14, Sr3NbGa3Si2O14, Ca3TaGa3Si2O14, Ca3NbGa3Si2O14, Sr3Ga2Ge4O14 and lithium tetraborate. The input interdigital transducer excites and spreads acoustic waves in the piezoelectricsubstrate, the output interdigital transducer is used for receiving the acoustic waves, when a loaded object to be tested reacts with the sensitive membranes, the features of the acoustic waves are changed ...
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