Corrugated Dielectric for Reliable High-current Charge-emission Devices

Micro-fabricated charge-emission devices comprise an electrically conductive gate electrode with an aperture, an electrically conductive base electrode, a charge-emitting microstructure extending from a surface in electrical contact with the base electrode and terminating near the aperture of the gate electrode, and a dielectric layer stack disposed between the base electrode and the gate electrode. The dielectric layer stack comprises a first dielectric layer and a second dielectric layer. The first dielectric layer is disposed between the second dielectric layer and the base electrode. The first dielectric layer is of a different selectively etchable dielectric material than the second dielectric layer. The dielectric layer stack h formed therein a cavity within which the charge-emitting emitting microstructure is disposed. The cavity has a corrugated wall shaped by the first dielectric layer undercutting the second dielectric layer. The corrugated wall surrounds the charge-emitting microstructure disposed within the cavity. 1. A micro-fabricated charge-emission device comprising:an electrically conductive gate electrode with an aperture;an electrically conductive base electrode;a charge-emitting microstructure extending from a surface in electrically conductive contact with the base electrode and terminating near the aperture of the gate electrode; anda dielectric layer stack disposed between the base electrode and the gate electrode, the dielectric layer stack comprising a first dielectric layer and a second dielectric layer, the first dielectric layer being disposed between the second dielectric layer and the base electrode, the first dielectric layer being of a different selectively etchable dielectric material than the second dielectric layer, the dielectric layer stack having formed therein a cavity within which the charge-emitting microstructure is disposed, the cavity having a corrugated wall shaped by the first dielectric layer undercutting the second ...

COMPACT ELECTROSTATIC ION PUMP

The disclosure includes an outer electrode and an inner electrode. The outer electrode defines an inner volume and is configured to receive injected electrons through at least one aperture. The inner electrode positioned in the inner volume. The outer electrode and inner electrode are configured to confine the received electrons in orbits around the inner electrode in response to an electric potential between the outer electrode and the inner electrode. The apparatus does not include a component configured to generate an electron-confining magnetic field. 1. An apparatus , comprising:an outer electrode defining an inner volume and configured to receive injected electrons through at least one aperture; andan inner electrode positioned in the inner volume,wherein the outer electrode and inner electrode are configured to confine the received electrons in orbits around the inner electrode in response to an electric potential between the outer electrode and the inner electrode, andwherein the apparatus does not include a component configured to generate an electron-confining magnetic field.2. The apparatus of claim 1 , wherein the outer electrode further defines a central axis extending from a top of the outer electrode to a bottom of the outer electrode and wherein the inner electrode is positioned at about the central axis.3. The apparatus of claim 1 , wherein the outer electrode comprises a wall defining an inner surface claim 1 , wherein the wall defines the at least one aperture extending through the wall claim 1 , and wherein the at least one aperture defines a direction of travel of the electrons around the central axis.4. The apparatus of claim 2 , wherein the at least one aperture is positioned proximate at least one of the top or the bottom of the outer electrode.5. The apparatus of claim 3 , wherein the inner surface of the outer electrode comprises a getter material configured to adsorb gases from the inner volume claim 3 , and wherein the inner surface is ...

System and method of micro-fluidic handling and dispensing using micro-nozzle structures

Described are a method and system for dispensing a fluid. A fluid-dispensing device includes a substrate and a plurality of nozzles formed in the substrate. Each nozzle has an open-ended tip and a fluid-conducting channel between the tip and a source of fluid. A non-conducting spacer is on the substrate and electrically isolates a gate electrode from the substrate. The gate electrode is located adjacent to the tip of at least one of the nozzles to effect dispensing of the fluid in that nozzle in response to a voltage applied between the gate electrode and the nozzle or fluid in the nozzle. In one embodiment, the gate electrode includes a plurality of individually addressable gate electrodes used for selectively actuating nozzles.

Field emission cathode array coated with electron work function reducing material, and method

A field emission cathode device is disclosed herein and includes an array of electron emitting cathode tips supported by a base electrode or electrodes, a gate electrode spaced from and associated with each tip, and dielectric material located between each gate electrode and the base electrode of its associated cathode tip for insulating the two from one another. The device also includes means for establishing an electric field between the gate electrodes and tips sufficient to cause the tips to emit current. In addition, each electron emitting cathode tip is coated with an electrically conductive material that reduces its electron work function. At the same time, the dielectric material which insulates the base electrodes and gate electrodes from one another is maintained sufficiently free of the electron work function reducing material so as not to result in any appreciable current leakage between the base and gate electrodes. The specific method of coating the cathode tips is also disclosed herein.

Matrix-addressed flat panel display

A matrix-addressed flat panel display, utilizing cathodes of the field emission type. The cathodes are incorporated into the display backing structure, and energize corresponding cathodo-luminescent areas on a face plate. The face plate is spaced 40 microns from the cathode arrangement in the preferred embodiment, and a vacuum is provided in the space between the plate and such cathodes. Electrical connections for the bases of the cathodes are diffused sections through the backing structure.

Miniature pressure sensor and pressure sensor arrays

An improved pressure sensor element and pressure sensor array is formed by a cathode layer, a cathode tip attached to the cathode layer, and an anode layer opposing the cathode layer. The magnitude of the electron current flowing between the cathode tip and the anode layer is dependant on the field strength at the cathode tip, which is dependant on the separation between the cathode tip and the anode layer. As a deflectable anode layer is deflected towards the cathode tip, the field strength increases, causing a corresponding change in the magnitude of the flow of electrons. The cathode tip is separated from the anode layer such that electron current is produced at relatively low voltages by tunneling or field emission. The exact method of current production is selected by controlling the initial separation between the anode layer and the cathode tip. Pressure sensor elements are produced using a series of fabrication processes including forming a hole in an insulating layer deposited on the cathode layer, depositing a cathode having a cathode tip into the hole thus formed, and bonding the anode layer onto the insulating layer, thereby forming a pressure sensor element. A plurality of pressure sensor elements are fabricated into pressure sensor arrays by this method. Pressure sensor elements or pressure sensor arrays are thus produced at low cost.

Liquid Metal Wetting of Micro-Fabricated Charge-Emission Structures

Described is a micro-fabricated charged particle emission device including a substrate and a plurality of charged particle emission sites formed in the substrate. A path extends between each emission site and a source of liquid metal. Each path is coated with a wetting layer of non-oxidizing metal for wetting the liquid metal. Exemplary non-oxidizing metals that may be used to provide the wetting layer include gold and platinum. The wetting layer is sufficiently thin such that some liquid metal is able to flow to each emission site despite any chemical interaction between the liquid metal and the non-oxidizing metal of the wetting layer.

Auf einer feldemissionskathode basierendes flaches anzeigepaneel mit abstandhaltern aus organischem polymermaterial.

Liquid Metal Wetting of Micro-Fabricated Charge-Emission Structures

Described is a micro-fabricated charged particle emission device including a substrate and a plurality of charged particle emission sites formed in the substrate. A path extends between each emission site and a source of liquid metal. Each path is coated with a wetting layer of non-oxidizing metal for wetting the liquid metal. Exemplary non-oxidizing metals that may be used to make the wetting layer include gold and platinum. The wetting layer is sufficiently thin such that some liquid metal is able to flow to each emission site despite any chemical interaction between the liquid metal and the non-oxidizing metal of the wetting layer.

Liquid metal wetting of micro-fabricated charged particle emission structures

System and method of micro-fluidic handling and dispensing using micro-nozzle structures

A fluid-dispensing device comprises substrate (212) and a plurality of nozzles (204) formed in the substrate (212). Each nozzle has (204) has an open-ended tip and a fluid-conducting channel (220) between the tip and a source of fluid. A non-conducting spacer is on the substrate (212) and electrically isolates a gate electrode (208) from the substrate (212). The gate electrode is located adjacent to the tip of at least one of the nozzles (204) to effect dispensing of the fluid in that nozzle (204) in response to a voltage applied between the gate electrode (208) and the nozzle (204) or fluid in the nozzle (204). The gate electrode (208) includes a plurality of individually addressable gate electrodes used for selectively actuating nozzles (204).

Compact electrostatic ion pump

The disclosure includes an outer electrode and an inner electrode. The outer electrode defines an inner volume and is configured to receive injected electrons through at least one aperture. The inner electrode positioned in the inner volume. The outer electrode and inner electrode are configured to confine the received electrons in orbits around the inner electrode in response to an electric potential between the outer electrode and the inner electrode. The apparatus does not include a component configured to generate an electron-confining magnetic field.