27-06-2019 дата публикации
Номер: US20190196332A1
Принадлежит:
A resist underlayer composition and a method of forming patterns, the composition including a solvent; and a polymer having a structure where at least one of a first moiety represented by one of Chemical Formula 1-1 to Chemical Formula 1-3 is combined with a third moiety represented by Chemical Formula 3, or at least one of a second moiety represented by one of Chemical Formula 2-1 to Chemical Formula 2-3 is combined with a third moiety represented by Chemical Formula 3 2. The resist underlayer composition as claimed in claim 1 , wherein:{'sup': '5', 'claim-text': {'br': None, 'sub': 2', 'n2', '2', 'n3, 'sup': 'a', '*—(CH)-L-(CH)—R, and \u2003\u2003[Chemical Formula 4]'}, 'Rof Chemical Formula 3 is a group represented by Chemical Formula 4,'}in Chemical Formula 4,{'sub': '2', 'L is —O—, —S—, —S(═O)—, —S(═O)—, —S(—O), —C(═O)—, —(CO)O—, —O(CO)O—, a substituted or unsubstituted C1 to C20 alkylene group, a substituted or unsubstituted C2 to C10 alkenylene group, a substituted or unsubstituted C2 to C10 alkynylene group, a substituted or unsubstituted C3 to C10 cycloalkylene group, a substituted or unsubstituted C2 to C10 heterocycloalkylene group, a substituted or unsubstituted C6 to C30 arylene group, a substituted or unsubstituted C2 to C30 heteroarylene group, or a combination thereof,'}{'sup': 'a', 'Ris hydrogen, deuterium, a halogen, a hydroxy group, a thiol group, a cyano group, a nitro group, an amino group, an epoxy group, an oxetane group, a vinyl group, a (meth)acrylate group, a carboxyl group or a salt thereof, a sulfonic acid group or a salt thereof, a phosphoric acid group or a salt thereof, a substituted or unsubstituted C1 to C30 alkyl group, a substituted or unsubstituted C1 to C10 alkoxy group, a substituted or unsubstituted C1 to C30 thioalkyl group, a substituted or unsubstituted C3 to C10 cycloalkyl group, a substituted or unsubstituted C6 to C30 aryl group, a substituted or unsubstituted C2 to C30 heteroaryl group, or a combination thereof,'}n2 and ...
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