13-10-2016 дата публикации
Номер: US20160296966A1
Принадлежит:
A mask assembly for thin film deposition includes: a mask frame including an opening, the mask frame disposed surrounding the opening; and a mask unit including: first masks mounted on the mask frame, the first masks extending in a first direction; a second mask disposed on the first masks, the second mask including: one open hole; and at least one foreign substance discharge hole; and a third mask disposed on the second mask, the third mask extending in a second direction and including deposition holes, wherein the second direction crosses the first direction, and wherein a substrate is disposed on the third mask. 1. A mask assembly for thin film deposition , the mask assembly comprising:a mask frame comprising an opening, the mask frame disposed surrounding the opening; and first masks mounted on the mask frame, the first masks extending in a first direction;', one open hole; and', 'at least one foreign substance discharge hole; and, 'a second mask disposed on the first masks, the second mask comprising, 'a third mask disposed on the second mask, the third mask extending in a second direction and comprising deposition holes,', 'wherein the second direction crosses the first direction, and', 'wherein a substrate is disposed on the third mask., 'a mask unit comprising2. The mask assembly of claim 1 , wherein the first masks are disposed spaced apart from each other in the second direction claim 1 , andwherein the first masks are uniaxially tensioned in the first direction.3. The mask assembly of claim 2 , wherein the first masks are a strip shape having no deposition holes.4. The mask assembly of claim 3 , wherein each of the first masks comprises:a first plate extending in the first direction; anda first protrusion part protruding from the first plate and extending in the first direction.5. The mask assembly of claim 3 , wherein each of the first masks comprises a plate extending in the first direction.6. The mask assembly of claim 1 , wherein the second mask is ...
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