27-07-2005 дата публикации
Номер: CN0001644767A
Принадлежит:
The invention was about one kind of C mixed silicon dice that has the function of inner absorbency of impurity, which has the oxygen concentration of 5-15X1017 cm-3, and C concentration was 5-30X1016cm-3. It is produced by: 1) the crystal was grown by method of straight drawing, the oxygen concentration of 5-15X1017cm-3 and C concentration was 5-30X1016cm-3 were obtained by control the processing parameter. 2) the silicon dice that has the oxygen concentration of 5-15X1017cm-3 and C concentration was 5-30X1016cm-3 was put into the furnace for heat treatment, which was thermal retarded 1-3 h on the temperature of 1100-1250 deg.C under the argon shield and helium gas shield. Then, it was thermal retarded 4-50 h on the temperature of 600-900 deg.C. After all, it was thermal retarded 4-30h on the temperature of 1000-1200 deg.C. Its advantages higher function of inner absorbency of impurity; good ability in the absorbency of harmful metal; used to the integrated circuit for improving the ratio ...
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