21-05-2015 дата публикации
Номер: US20150140321A1
Принадлежит:
A method and device for improving the adhesion of fluorinated transparent conducting oxide films by incorporating a non-conducting, non-fluorinated adhesion layer between a substrate and a transparent conducting oxide. 1. A device with improved adhesion of a fluorinated transparent conducting oxide layer to a substrate comprising:a substrate;at least one non-fluorinated metal oxide thin film deposited on the substrate; andat least one halogenated transparent conducting oxide layer deposited on the thin film, wherein the non-fluorinated metal oxide film adheres the conducting oxide layer to the substrate.2. The device of claim 1 , wherein the metal of the non-fluorinated metal oxide thin film comprises at least one of tin claim 1 , cadmium claim 1 , zinc claim 1 , indium claim 1 , nickel claim 1 , zirconium claim 1 , vanadium claim 1 , titanium claim 1 , copper claim 1 , hafnium claim 1 , or combinations thereof.3. The device of claim 2 , wherein the metal of the non-fluorinated metal oxide thin film comprises at least one of tin claim 2 , zinc claim 2 , titanium claim 2 , or combinations thereof4. The device of claim 1 , wherein the metal oxide thin film deposited on the substrate comprises a non-halogenated metal oxide thin film.5. The device of claim 1 , wherein the thin film comprises a thickness ranging from about 2 nm to about 30 nm.6. The device of claim 1 , wherein the substrate comprises at least one of glass claim 1 , quartz claim 1 , sapphire claim 1 , SiC claim 1 , diamond claim 1 , ceramic claim 1 , plastic claim 1 , silicon claim 1 , a silicon wafer claim 1 , a photovoltaic cell claim 1 , a semiconductor claim 1 , or combinations thereof7. The device of claim 1 , wherein the halogenated transparent conducting oxide layer comprises at least one of scandium oxide claim 1 , titanium oxide claim 1 , vanadium oxide claim 1 , chromium oxide claim 1 , manganese oxide claim 1 , iron oxide claim 1 , cobalt oxide claim 1 , nickel oxide claim 1 , copper oxide ...
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