A SCANNING PROBE MICROSCOPE AND A METHOD FOR OPERATING THEREOF

A method of operating a scanning probe microscope, wherein a control loop is provided which is configured for controlling one or more feedback parameters of the scanning probe microscope. One or more system identification measurements are performed during operation of the control loop, wherein during the one or more system identification measurements an excitation signal with a plurality of frequency components is introduced in the control loop and a resulting response signal indicative of a cantilever displacement or a stage-sample distance between a sensor device and a sample is measured. A model response function is identified using said excitation signal and said resulting response signal, wherein one or more settings and/or input signals are adapted in the control loop based on the identified model response function. The scanning probe microscope is used for characterization of the sample using the adapted one or more settings and/or input signals. 1. A method of operating a scanning probe microscope wherein a control loop is provided that is configured for controlling one or more feedback parameters of the scanning probe microscope , wherein the scanning probe microscope comprises a sensor device including a cantilever having a probe tip , wherein the scanning probe microscope includes at least one stage actuator for actuating at least one of an object stage or sensor stage to vary a relative distance between the sensor device and a sample , and wherein a controller is provided with one or more control parameters configured to control the at least one stage actuator for keeping the sample at a desired distance with respect to the cantilever , the method including: an excitation signal having a plurality of frequency components is introduced in the control loop, and', 'a resulting response signal indicative of a cantilever displacement or a stage-sample distance between the sensor device and the sample is measured,', 'wherein a model response function is ...

METHOD OF AND SYSTEM FOR PERFORMING DETECTION ON OR CHARACTERIZATION OF A SAMPLE

The present document relates to a anatomic force microscope comprising a probe comprising a probe tip configured to sense a sample disposed proximate to the probe tip, a detector to detect a deflection of the probe tip, an actuator coupled to the probe and configured to move the probe in a sense state with the sample at a predetermined force set point and a vibrator in communication with the sample to provide a vibration to the sample, the vibration comprising a modulation frequency, wherein the acoustic vibrator is configured to provide the vibration in a modulation period after an initial sense period without modulation and wherein the probe is moved during or after said modulation period to a successive sample position over said sample while moving the probe in a non-contact state. 1. An atomic force microscope comprising:a probe comprising a probe tip configured to sense a sample disposed proximate to the probe tip;a detector to detect a deflection of the probe tip;an actuator coupled to the probe and configured to move the probe in a sense state with the sample at a first predetermined force set point; anda vibrator in communication with the sample to provide a vibration having a modulation frequency to the sample,wherein the vibrator is controlled to provide the vibration to the sample in a modulation period after an initial sense period without modulation of the sample by the vibrator, andwherein the probe is moved during or after said modulation period to a successive sample position over said sample while moving the probe in a non-contact state.2. The atomic force microscope of claim 1 , wherein the actuator is configured to keep the probe in a sense state with the sample at a second force set point claim 1 , different from the first set point claim 1 , in the modulation period.3. The atomic force microscope of claim 1 , wherein the vibrator comprises a mechanical transducer.4. The atomic force microscope of claim 2 , wherein the mechanical transducer ...

Scanning probe microscope and a method for operating thereof

A method of operating a scanning probe microscope, wherein a control loop is provided which is configured for controlling one or more feedback parameters of the scanning probe microscope. One or more system identification measurements are performed during operation of the control loop, wherein during the one or more system identification measurements an excitation signal with a plurality of frequency components is introduced in the control loop and a resulting response signal indicative of a cantilever displacement or a stage-sample distance between a sensor device and a sample is measured. A model response function is identified using said excitation signal and said resulting response signal, wherein one or more settings and/or input signals are adapted in the control loop based on the identified model response function. The scanning probe microscope is used for characterization of the sample using the adapted one or more settings and/or input signals.

A scanning probe microscope and a method for operating thereof

A method of operating a scanning probe microscope, wherein a control loop is provided which is configured for controlling one or more feedback parameters of the scanning probe microscope. One or more system identification measurements are performed during operation of the control loop, wherein during the one or more system identification measurements an excitation signal with a plurality of frequency components is introduced in the control loop and a resulting response signal indicative of a cantilever displacement or a stage-sample distance between a sensor device and a sample is measured. A model response function is identified using said excitation signal and said resulting response signal, wherein one or more settings and/or input signals are adapted in the control loop based on the identified model response function. The scanning probe microscope is used for characterization of the sample using the adapted one or more settings and/or input signals.

Probe cassette for holding a probe in storage for use in a scanning probe microscope

The present disclosure concerns probe cassette 1 for holding a probe 60 in storage to provide automated transfer of the probe to a probe mount of a scanning probe microscope. The probe cassette comprising a first vacuum chamber C1 with a volume V1, and a second vacuum chamber C2 with a volume V2, and a first and second vacuum channel 10, respectively fluidly connecting the first and second vacuum chamber to an outlet 30 fluidly connectable to an external vacuum, such that upon application of the external vacuum a mounting position of the probe relative to the cassette and a mounting position of the cassette relative to the sample stage is maintained. The probe cassette arranged to allow breaking a vacuum condition in the second chamber maintaining the mounting position of the probe before breaking a vacuum condition in the first chamber maintaining a mounting position of the probe cassette.

Method of and system for performing detection on or characterization of a sample

Probe cassette for holding a probe in storage for use in a scanning probe microscope

The present disclosure concerns probe cassette 1 for holding a probe 60 in storage to provide automated transfer of the probe to a probe mount of a scanning probe microscope. The probe cassette comprising a first vacuum chamber C1 with a volume V1, and a second vacuum chamber C2 with a volume V2, and a first and second vacuum channel 10, respectively fluidly connecting the first and second vacuum chamber to an outlet 30 fluidly connectable to an external vacuum, such that upon application of the external vacuum a mounting position of the probe relative to the cassette and a mounting position of the cassette relative to the sample stage is maintained. The probe cassette arranged to allow breaking a vacuum condition in the second chamber maintaining the mounting position of the probe before breaking a vacuum condition in the first chamber maintaining a mounting position of the probe cassette.

Probe cassette for holding a probe in storage for use in a scanning probe microscope

The present disclosure concerns probe cassette 1 for holding a probe 60 in storage to provide automated transfer of the probe to a probe mount of a scanning probe microscope. The probe cassette comprising a first vacuum chamber C 1 with a volume V 1, and a second vacuum chamber C 2 with a volume V 2, and a first and second vacuum channel 10, respectively fluidly connecting the first and second vacuum chamber to an outlet 30 fluidly connectable to an external vacuum, such that upon application of the external vacuum a mounting position of the probe relative to the cassette and a mounting position of the cassette relative to the sample stage is maintained. The probe cassette arranged to allow breaking a vacuum condition in the second chamber maintaining the mounting position of the probe before breaking a vacuum condition in the first chamber maintaining a mounting position of the probe cassette.

Method of and system for performing detection on or characterization of a sample

The present document relates to a anatomic force microscope comprising a probe comprising a probe tip configured to sense a sample disposed proximate to the probe tip, a detector to detect a deflection of the probe tip, an actuator coupled to the probe and configured to move the probe in a sense state with the sample at a predetermined force set point and a vibrator in communication with the sample to provide a vibration to the sample, the vibration comprising a modulation frequency, wherein the acoustic vibrator is configured to provide the vibration in a modulation period after an initial sense period without modulation and wherein the probe is moved during or after said modulation period to a successive sample position over said sample while moving the probe in a non-contact state.

Method of and system for performing detection on or characterization of a sample

The present document relates to a anatomic force microscope comprising a probe comprising a probe tip configured to sense a sample disposed proximate to the probe tip, a detector to detect a deflection of the probe tip, an actuator coupled to the probe and configured to move the probe in a sense state with the sample at a predetermined force set point and a vibrator in communication with the sample to provide a vibration to the sample, the vibration comprising a modulation frequency, wherein the acoustic vibrator is configured to provide the vibration in a modulation period after an initial sense period without modulation and wherein the probe is moved during or after said modulation period to a successive sample position over said sample while moving the probe in a non-contact state.