06-02-2014 дата публикации
Номер: US20140038348A1
An etchant composition includes ammonium persulfate (((NH))SO), an azole-based compound, a water-soluble amine compound, a sulfonic acid-containing compound, a nitrate-containing compound, a phosphate-containing compound, a chloride-containing compound, and residual water. 1. An etchant composition comprising:{'sub': 4', '2', '2', '8, 'ammonium persulfate (((NH))SO), an azole-based compound, a water-soluble amine compound, a sulfonic acid-containing compound, a nitrate-containing compound, a phosphate-containing compound, a chloride-containing compound, and residual water.'}2. The etchant composition of claim 1 , further comprising:an assistance oxidizer.3. The etchant composition of claim 2 , whereina content of the assistance oxidizer is about 0.1 wt % to about 2 wt %.4. The etchant composition of claim 3 , wherein{'sub': 3', '4', '3', '3', '4', '2', '2, 'the assistance oxidizer includes one selected from a group consisting of phosphoric acid (HPO), nitric acid (HNO), acetic acid (CHCOOH), perchloric acid (HClO), and hydrogen peroxide (HO).'}5. The etchant composition of claim 1 , whereinthe ammonium persulfate content is about 0.1 wt % to about 20 wt %, the azole-based compound content is about 0.01 wt % to about 2 wt %, the water-soluble amine compound content is about 0.1 wt % to about 5 wt %, the sulfonic acid-containing compound content is about 0.1 wt % to about 10 wt %, and the nitrate-containing compound content is about 0.1 wt % to about 10 wt %.6. The etchant composition of claim 5 , whereinthe phosphate-containing compound content is about 0.1 wt % to about 5 wt %.7. The etchant composition of claim 6 , whereinthe chloride-containing compound content is about 0.001 wt % to about 1 wt %.8. The etchant composition of claim 1 , whereinthe azole-based compound includes one selected from the group consisting of benzotriazole, aminotetrazole, imidazole, and pyrazole.9. The etchant composition of claim 1 , whereinthe water-soluble amine compound includes one ...
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