19-09-2012 дата публикации
Номер: CN102674368A
Принадлежит:
The invention discloses a method and a system for preparing trichlorosilane. The method comprises the steps of providing a hydrogenation reactor having a first inlet, a second inlet, a third inlet and an outlet; heating a mixture of silicon tetrachloride and hydrogen to a temperature of 590-610 DEG C; introducing the heated mixed gas of silicon tetrachloride and hydrogen into the first inlet of the hydrogenation reactor; introducing dichlorosilane in a gaseous state into the second inlet of the hydrogenation reactor; introducing silicon powders into the third inlet of the hydrogenation reactor; exporting hydrogenation reaction products comprising hydrogen, dichlorosilane, trichlorosilane and silicon tetrachloride from the outlet of the hydrogenation reactor; and purifying and separating trichlorosilane from the hydrogenation reaction products. The method enables a reaction rate to be increased, and thus the production efficiency is improved. Furthermore, dichlorosilane is separated from ...
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