Composite method for processing metallic mold with partial three-dimensional microstructure

The present invention relates to a combined machining method of a metal mould with a partial three-dimensional microstructure, which belongs to the field of micromachining techniques. Combined with the quasi-LIGA micromachining technique and the tiny electric spark micromachining technique, the combined machining method resolves the problem on how to machine the metal mould with a complex microstructure, part of which is three-dimensional and the rest part of which is two-dimensional. In the technical scheme, based on the LIGA technique, a planar two-dimensional microstructure is produced on a metal baseplate; according to the tiny electric spark machining mode, tool electrodes are produced; at a specified position on the two-dimensional microstructure, the shape of the two-dimensional microstructure is modified by tiny electric sparks until a three-dimensional microstructure is formed. The combined machining method has the following advantages: the machining precision and the surface quality ...