20-07-2017 дата публикации
Номер: US20170203377A1
A heating and cooling device including: an airtight processing chamber openable to load a member-to-be-processed in the airtight processing chamber; a transfer apparatus to adjust a distance between the member-to-be-processed and a cooling unit that cools the member-to-be-processed, by moving the member-to-be-processed and/or the cooling unit; an induction heating apparatus to heat the member-to-be-processed, including a induction heating coil; a cooling apparatus to cool the member-to-be-processed by cooling the cooling unit; a temperature sensor to determine a temperature of the member-to-be-processed; and a controller to control the induction heating apparatus and the cooling apparatus based on the temperature determined by the temperature sensor. 1. A heating and cooling device comprising:an airtight processing chamber openable to load a member-to-be-processed in the airtight processing chamber;a transfer apparatus to adjust a distance between the member-to-be-processed and a cooling unit that cools the member-to-be-processed, by moving the member-to-be-processed and/or the cooling unit;an induction heating apparatus to heat the member-to-be-processed, including an induction heating coil;a cooling apparatus to cool the member-to-be-processed by cooling the cooling unit;a temperature sensor to determine a temperature of the member-to-be-processed; anda controller to control the induction heating apparatus and the cooling apparatus based on the temperature determined by the temperature sensor.2. The heating and cooling device according to claim 1 , wherein the induction heating coil is disposed below the member-to-be-processed.3. The heating and cooling device according to claim 2 , whereinthe induction heating coil has a hollow structure, andthe cooling apparatus is configured to circulate a coolant through the hollow structure of the induction heating coil.4. The heating and cooling device according to claim 3 , whereinthe cooling unit includes a cooling plate ...
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