13-06-2013 дата публикации
Номер: US20130152027A1
A method of for compensating for variations in structures of an integrated circuit. The method includes (a) selecting a mask design shape and selecting a region of the mask design shape; (b) applying a model-based optical proximity correction to all of the mask design shape; and after (b), (c) applying a rules-based optical proximity correction to the selected region of the mask design shape. 1. A method , comprising:selecting a mask design shape;selecting a region of said mask design shape;using a computer, applying a model-based optical proximity correction to all regions of said mask design shape, said model optical proximity correction based on a computer model of a photolithographic process that generates a simulated photoresist pattern based on said mask design shape;after said applying said model-based optical proximity correction, using a computer, applying a rule-based optical proximity correction to said selected region of said mask design shape, said rule-based optical proximity correction based on testing for a particular condition occurring in a mask design shape and applying a rule to said mask design shape to change the mask design shape.2. The method of claim 1 , where said mask design shape defines a circuit shape and said circuit shape crosses an interface between a first region and an abutting second region of an integrated circuit.3. The method of claim 2 , wherein said circuit shape crosses said interface perpendicularly.4. The method of claim 2 , wherein said first and second regions have different reflectivities.5. The method of claim 2 , wherein a top surface of said first region is raised above a top surface of said second region forming a step.6. The method of claim 2 , wherein applying said rule-based optical proximity correction includes placing a design collar on said mask design shape in said selected region claim 2 , said design collar increasing a width of said mask design shape proximate to said interface in a direction parallel to a ...
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