16-06-2016 дата публикации
Номер: US20160172153A1
Принадлежит:
Electron microscope support structures and methods of making and using same. The support structures are generally constructed using semiconductor materials and semiconductor manufacturing processes. The temperature of the support structure may be controlled and/or gases or liquids may be confined in the observation region for reactions and/or imaging. 142.-. (canceled)43. An environmental cell comprising a holder , a window device , and a temperature controlled device , wherein the window device and the temperature controlled device are stacked in a columnar arrangement in the holder and form an observation region where gases and/or liquids can be confined.44. The environmental cell of claim 43 , wherein the temperature controlled device comprises (a) a first membrane comprising at least one membrane observation region claim 43 , and (b) at least one conductive element in contact with the first membrane forming a heatable region of the membrane.45. The environmental cell of claim 44 , wherein the first membrane comprises a semiconductor material selected from the group consisting of silicon nitride claim 44 , silicon carbide claim 44 , boron nitride claim 44 , graphene claim 44 , carbon claim 44 , aluminum nitride claim 44 , silicon dioxide claim 44 , silicon and combinations thereof.46. The environmental cell of claim 44 , wherein the at least one conductive element comprises a semiconductor material such that the at least one conductive element is relatively more conductive than the first membrane.47. The environmental cell of claim 44 , wherein the at least one conductive element comprises a material selected from the group consisting of silicon carbide claim 44 , aluminum nitride claim 44 , boron nitride claim 44 , monocrystalline silicon claim 44 , polycrystalline silicon claim 44 , amorphous silicon claim 44 , other semiconductor materials claim 44 , metals claim 44 , ceramics claim 44 , conducting oxides claim 44 , and combinations thereof.48. The ...
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