29-09-2022 дата публикации
Номер: US20220310362A1
Принадлежит:
A processing chamber includes a ground shield and a cover ring. The ground shield includes an annular body, and at least one guide pin extending from the annular body. The cover ring is positioned on the ground shield, and includes an annular body including at least one recess. At least a part of the at least one guide pin is receivable in the at least one recess, an inner cylindrical ring extends from the annular body, and an outer cylindrical ring extends from the annular body and is radially separated from the inner cylindrical ring by a horizontally extending portion of the annular body. 1. A processing chamber , comprising: an annular body, and', 'at least one guide pin extending from the annular body; and, 'a ground shield including,'} an annular body,', 'an inner cylindrical ring extending from the annular body of the cover ring,', 'an outer cylindrical ring extending from the annular body of the cover ring and radially separated from the inner cylindrical ring by a horizontally extending portion of the annular body of the cover ring, and', 'at least one recess defined in the outer cylindrical ring, wherein the at least one recess is configured to receive at least a part of the at least one guide pin., 'a cover ring positioned over the ground shield, and including,'}2. The processing chamber of claim 1 , whereinthe ground shield includes at least two guide pins extending from the annular body, and a first guide pin of the at least two guide pins is located at or adjacent an inner radial end of the ground shield and between the inner cylindrical ring and the outer cylindrical ring, and', 'a second guide pin of the at least two guide pins is located between the first guide pin and an outer wall of the ground shield, and below the outer cylindrical ring, and, 'the cover ring includes at least two recesses corresponding to the at least two guide pins, wherein'}wherein the at least one recess includes a first recess and a second recess, the first recess is defined ...
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