19-10-2017 дата публикации
Номер: US20170297897A1
Принадлежит:
Embodiments of the present invention provide an MEMS actuator with a substrate, at least one post attached to the substrate and a deflectable actuator body that is connected to the at least one post via at least one spring, wherein, during electrostatic, electromagnetic or magnetic force application, the actuator body takes a second position starting from a first position by a tilt-free translational movement, wherein the first position and the second position are different, and wherein in a top view of the MEMS actuator the actuator body is arranged outside an area spanned by the at least one post. 1. MEMS actuator , comprising:a substrate;at least one post attached to the substrate; anda deflectable actuator body connected to the at least one post via at least one spring,wherein, during electrostatic, electromagnetic or magnetic force application, the actuator body takes a second position starting from a first position by a tilt-free translational movement, wherein the first position and the second position are different; andwherein in a top view of the MEMS actuator at least 90% of the actuator body and a centroid of the actuator body are arranged outside an area, wherein, with at least two posts, the area is an area spanned by the at least two posts, and wherein, with exactly one post, the area is an area of the post.2. MEMS actuator according to claim 1 , wherein the actuator body performs a tilt-free translational movement parallel to a direction of force application.3. MEMS actuator according to claim 1 , wherein the MEMS actuator comprises a drive that is configured to cause the electrostatic claim 1 , electromagnetic or magnetic force application to the deflectable actuator body.4. MEMS actuator according to claim 1 , wherein claim 1 , during the movement of the actuator body claim 1 , a centroid of the movable elements of the MEMS actuator weighted with their respective movement amplitude runs along a main force application vector of the force application. ...
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