05-08-2015 дата публикации
Номер: CN104816217A
Принадлежит:
The invention relates to a precise angle drive device used in a vacuum environment. The precise angle drive device comprises a support base, a connecting sleeve, a connecting base, a rotary platform which rotates around an X-shaft, a first ion source clamping arm, a second ion source clamping arm, a rotary platform which rotates around a Y-shaft, a driven rotary shaft, an ion source and a control system. The precise angle drive device is directly driven by a motor; compared with rotary motion systems which adopt rotary motors, gears and the like, the precise angle drive device is good for improving cleanness of a vacuum room as no intermediate transmission link exists and efficiently improves repeated positioning precision as no reverse motion gap exists. The precise angle drive device is compact and simple in structure, convenient to manufacture and install, high in motion response frequency of a transmission structure, fast in motion speed, and is satisfied with precise control requirements ...
Подробнее