PROCEDURE FOR THE PRODUCTION OF A METALLIC FILM AS WELL AS BY AN ALUMINUM FILM COATED PRODUCT

Process for Forming Metal Film on Surface of Synthetic Resin Substrate

FORMATION OF THIN SILICON NITRIDE FILM

PURPOSE: To reduce the dependency of the refractive index of a film on ion energy by mixing gaseous nitrogen with a small amt. of gaseous argon, generating mixed ion beams from the gaseous mixture and sputtering a silicon target with the ion beams to form the film. CONSTITUTION: Gaseous nitrogen is mixed with gaseous argon in an ion source so as to regulate the ratio between the partial pressure of nitrogen and that of argon to 1:0.3. Mixed ion beams are generated from the gaseous mixture and a silicon target is sputtered with the ion beams to form a thin silicon nitride film. The refractive index of the film hardly depends on the ion energy. COPYRIGHT: (C)1989,JPO&Japio ...

COIL STRUCTURE FOR INDUCTION EQUIPMENT

PURPOSE: To reduce the highest temperature in a section by forming the flow path for cooling medium in zigzag in the plane among sections laminated between an inside insulation tube and outside insulation tube. CONSTITUTION: At an inside insulation tube 2, along its axis center direction, a plurality of cooling medium introduction holes 7 are provided, and at an outside insulation tube 3, also along its axis center direction, a plurality of cooling medium introduction derivation holes 8 are provided. Among sections 1, along circumferential direction of the section 1, a plurality of spacers 9 are assigned. In order that the cooling medium introduced from the introduction hole 7 is, among sections, as far as the derivation hole 8, formed into zigzag flow path between spacers 9, a spacer 11 is assigned between the inside insulation tube 2 and the inside end 10 of spacer 9, and, a spacer 13 is assigned between the outside insulation tube 3 and the outside end 12 of spacer 9. COPYRIGHT: (C)1995 ...

WINDING STRUCTURE FOR INDUCTION ELECTROMAGNETIC DEVICE

PURPOSE: To uniformly cool a winding to be used in an induction electromagnetic device and reduce the max. point temp. in the winding. CONSTITUTION: Many sections 1A-1E stacked in multiple stages between an inner and outer insulation tubes 2 and 3 are partitioned into groups of plural sections. Flow gaps 10 and 10A are formed between the insides of the lowermost sections and inner insulation tube 2 and between the outsides of the lowermost sections and outer insulation tube 3 alternately at the adjacent groups. Deflecting members 11 and 11A are disposed near the flow gaps 10 and 10A so that a coolant passing through the flow gaps 10 and 10A may flow gradiently to the partitioned sections. Spacers 12 and 12A to block the coolant from flowing are formed each between the opposite side face of each lowermost section to the side face which forms the flow gap 10 and inner or outer insulation tube 3. COPYRIGHT: (C)1996,JPO ...

Process for forming metal film, and aluminum film coated matter

PROCESS FOR FORMING METAL FILM, AND ALUMINUM FILM COATED MATTER

PROCESS FOR FORMING METAL FILM ON SURFACE OF SYNTHETIC RESIN SUBSTRATE

A metal film high in reflectivity and excellent in adhesion to a synthetic resin substrate even in the case where the metal film is sufficiently thin, is formed on a surface of the substrate by sputtering a metal target through an inert gas ion beam drawn out of an ion source in a vacuum vessel. An aluminum film coated matter formed by coating a surface of a synthetic resin substrate with an aluminum film, is characterized in that the aluminum film contains aluminum crystals at a portion in the film at a depth of not more than 600 .ANG. from a film surface thereof which contacts with the substrate. The aluminum crystals has a relation in which a crystal axis <111> perpendicular to a (111) plane is perpendicular or substantially perpendicular to the film surface. Also, the aluminum crystals exhibit a diffraction X-ray spectrum of a (111) plane when measured by X-ray diffraction according to a diffractometer method under the following conditions: target: Cu, X-ray type: K.alpha. ray, measurement ...

PROCESS FOR FORMING METAL FILM, ON SURFACE OF SYNTHETIC RESIN SUBSTRATE

A metal film high in reflectivity and excellent in adhesion to a synthetic resin substrate even in the case where the metal film is sufficiently thin, is formed on a surface of the substrate by sputtering a metal target through an inert gas ion beam drawn out of an ion source in a vacuum vessel. An aluminum film coated matter formed by coating a surface of a synthetic resin substrate with an aluminum film, is characterized in that the aluminum film contains aluminum crystals at a portion in the film at a depth of not more than 600 .ANG. from a film surface thereof which contacts with the substrate. The aluminum crystals has a relation in which a crystal axis <111> perpendicular to a (111) plane is perpendicular or substantially perpendicular to the film surface. Also, the aluminum crystals exhibit a diffraction X-ray spectrum of a (111) plane when measured by X-ray diffraction according to a diffractometer method under the following conditions: target: Cu, X-ray type: K.alpha. ray, measurement ...

MANUFACTURE OF RADIAL CORE

PURPOSE: To faciliate the manufacture of a radial core by sequentially laminating steel plate pieces obtained by cutting obliquely and perpendicularly to the longitudinal direction an original rolled steel plate to form a wedge-shaped core block and employing a plurality of such blocks. CONSTITUTION: An original rolled steel plate 1 is cut obliquely to the logitudinal direction by the first cutting means 2, and the original plate 1' thus cut by the means 2 is further cut by the second cutting means 3 perpendicularly to the longitudinal direction at equal interval in width. Subsequently, the steel plate pieces a, b,..., n are seuentially laminated to form a wedge-shaped iron block. A plurality of such iron blocks are disposed in such a manner that the planar shape becomes approximately circular, are integrally secured, and a radial core is formed. COPYRIGHT: (C)1982,JPO&Japio ...

MANUFACTURE OF JOSEPHSON ELEMENT

PURPOSE:To easily manufacture a Josephson element with high reproducibility by using an oxide ceramic superconducting thin film by forming a first thin superconducting film made of IIIa barium-copper oxide thin film, and further forming a second thin superconducting film made of similar group IIIa barium- copper oxide thin film through an insulating film thereon. CONSTITUTION:Group IIIa metal and/or its oxide, barium and/or its oxide, and copper and/or its oxide are adhered to a substrate 14 held at 400-700 deg.C, and an oxygen neutral beam is irradiated on the substrate to form a first thin superconducting film 23a made of group IIIa barium-copper oxide thin film. Second thin superconducting film 23b is formed on an insulating film 24 similarly to the first thin film. Since the substrate is maintained at relatively low temperatures of 400-700 deg.C during these film forming processes, the insulating film is not thermally diffused in the thin superconducting film. A gold electrode film ...

Process for forming metal film, and aluminum film coated matter

Process for Forming Metal Film, and Aluminum Film Coated Matter

FORMATION OF THIN SILICON NITRIDE FILM

PURPOSE:To reduce the dependency of the refractive index of a film on ion energy by mixing gaseous nitrogen with a small amt. of gaseous argon, generating mixed ion beams from the gaseous mixture and sputtering a silicon target with the ion beams to form the film. CONSTITUTION:Gaseous nitrogen is mixed with gaseous argon in an ion source so as to regulate the ratio between the partial pressure of nitrogen and that of argon to 1:0.3. Mixed ion beams are generated from the gaseous mixture and a silicon target is sputtered with the ion beams to form a thin silicon nitride film. The refractive index of the film hardly depends on the ion energy.

ION SOURCE DEVICE

PURPOSE: To restrain consumption of heat filaments by separating the heat filaments and a filament introducing part penetrating through an arc chamber through support levers of both end parts of the heat filaments from each other by a cathode plate. CONSTITUTION: A cathode plate 26 is arranged in parallel to a cover plate 14 under support levers 25p and 25n of a positive electrode and a negative electrode arranged in an arc chamber 1, and an positive electrode side opening hole 27p having a diameter smaller than the support lever 25n is formed in a position superposed on the support lever 25p composed of a metallic plate slightly smaller than an under surface of the cover plate 14 so that the whole filaments 2 in the arc chamber 1 are separated from the cover plate 14. Screw parts 30p and 30n penetrating through main body parts 29p and 29n having a diameter larger than opening holes 27p and 27n and the opening holes 27p and 27n on its base part side, are screwed in the tips of the support ...

MANUFACTURE OF RADIAL CORE

PURPOSE: To simplify the manufacture of a radial core by cutting an original rolled steel plate perpendicularly to th longitudinal direction at an equal interval in width, cutting further the original steel plate thus cut in its longitudinal direction, and forming a wedge-shaped iron block with the respective steel plate pieces. CONSTITUTION: An original rolled steel plate 1 sis cut perpendicularly to the longitudinal direction by the first cuttig means 2 at an equal interval in width. The original plate 1' thus cut by the means 2 is further cut by the second cutting means 3 in the longitudinal directin and sequentially by altering the cutting length. Subsequently, the steel plate pieces a, b,..., n thus cut are so sequentially laminated that the outer ends generally coincide to form a wedge-shaped core block. A plurality of such core blocks are disposed so that the planar shape becomes approximately circular, and are integrally secured to form a radial core. COPYRIGHT: (C)1982,JPO&Japio ...

ION BEAM SPUTTERING DEVICE

PURPOSE: To obtain the title ion beam sputtering device with remarkably improved availability of a circular target by making the ion beam incident face of an ion beam obliquely injected on the target practically circular. CONSTITUTION: The perforated regions 25 having pores 24 at the electrodes 21W23 constituting a drawing electrode system 20 for an ion source 10 are made elliptic so that the incident face of the ion beam 12 drawn therefrom on the circular target 6 is made practically circular. Namely, when the incident angle of the ion beam 12 to the target 6 is controlled to θ°, the perforated regions 25 of the respective electrodes 21W23 are made elliptic at θ°, and the major axis 25a is paralleled with the shaft 6a for inclining the target 6. Accordingly, the incident face of the ion beam on the target 6 is made almost circular as shown in the figure. Consequently, the ion beam 12 can be injected on almost the whole surface of the target 6, and the utilization efficiency of the target ...

VERFAHREN ZUR HERSTELLUNG EINER SUPRALEITENDEN DUENNEN SCHICHT UND ANORDNUNG ZU SEINER DURCHFUEHRUNG.

Optical recording medium comprising (1.1.1) aluminum

ELECTRON BEAM IRRADIATOR

ALUMINUM FILM-COATED MEMBER

PURPOSE: To provide the subject member having an aluminum film with high reflectance and excellent durability. CONSTITUTION: This aluminum film-coated member 2 is obtd. by coating the surface of a synthetic resin base body 4 with an aluminum film 6. This aluminum film 6 contains aluminum crystals at a depth D within 600Å from the film surface 5 in contact with the base body 4 in a manner that the <111> chrystallographic axis perpendicular to the (111) chrystal face of the crystal is perpendicular or almost perpendicular to the film plane 5. COPYRIGHT: (C)1993,JPO&Japio ...

REACTOR

PROBLEM TO BE SOLVED: To reduce the quantity of iron used for a reactor and provide a small- loss reactor whose sizes and weight are reduced by the quantity of ion reduction by permitting the center of each coil to be the voltage applying part and both edges to be the neutral point potential part, bringing both edges of each coil close and separating the coils at the center. SOLUTION: A coil 2 is provided by laminating coils 2a, which are manufactured by winding wire in a plate shape, by subsequently shifting the position, bringing the two legs close at each edge 4, separating them at most at the center part 3 and winding them. Each leg is formed by sandwiching a space insulator 6 which constitutes a space between the leg irons 5, and the edges of the two leg irons 5 are connected to yokes 7 and 13 which form magnetic paths. The voltage applying part of the coil 2 of each leg is set at the center where the coils 2 of the two legs are separated at most, and both edges of the coil 2 are set ...

FORMATION OF METAL FILM

PURPOSE: To efficiently form a metal film having high reflectance in spite of its small thickness and also having satisfactory adhesion to an acrylic resin molded body. CONSTITUTION: An Al target 28a is sputtered with inert gas ion beams 36 extracted from an ion source 34 in a vacuum vessel 2 to form an Al film of 50-400Å thickness on the surface of an acrylic resin substrate 6a. COPYRIGHT: (C)1992,JPO&Japio ...

MANUFACTURE OF JOSEPHSON ELEMENT

PURPOSE: To simply manufacture a Josephson element with high reproducibility by forming an insulating layer interposed between superconducting thin films made of group IIIa bariumcopper oxide by implanting oxygen ions into the surface of a first superconducting thin film. CONSTITUTION: A first superconducting thin film 2 is formed on a substrate 1, oxygen ions are implanted (as designated by arrows (a)) on the oxide thin film 2 to form an insulating layer 3 on its surface layer, and a second superconducting thin film 4 is so formed as to be superposed partly with the first superconducting thin film 2. The film 2 is formed in a strip state on the substrate 1, and the second film 2 is formed in a strip state on the substrate 1 to be partly superposed with the first film 2. The first and second films 2, 4 are formed of three types of materials, made of group IIIa metal and/or its oxide, barium and/or its oxide, and copper and/or its oxide. The purities of these materials are all 99.5% or more ...

Process for forming metal film, and aluminum film coated matter

MANUFACTURING DEVICE FOR MAGNETIC RECORDING MEDIUM

PURPOSE: To harden a magnetic film with irradiation of electron beams during or immediately after the orientation of a vertical magnetic field, by forming a vertical magnetic field around an irradiating window of an electron beam irradiator. CONSTITUTION: A magnetic field generator 1 consists of the 1st magnetic pole bar 11 set around an irradiating window 5A of an electron beam irradiator 5, the 2nd magnetic pole piece 12 disposed opposite to the bar 11 centering on the carrying path of a base material 4 and a magnetic flux generating mechanism 13 which generates a magnetic flux crossing the area between both bars 11 and 12. The magnetic fluxes produced from magnets 14 and 15 cross the carrying path of the material 4 between both bars 11 and 12 as shown by an arrow. Thus a magnetic film on the material 4 undergoes the vertical magnetic field orientation. Then the electron beams are irradiated on the magnetic film during or immediately after the magnetic field orientation since the bar ...

PRODUCTION OF THIN FILM

PURPOSE: To form a metallic film having excellent adhesive strength and uniform thickness by subjecting a thin film material to a sputter deposition as a target by ion irradiation at the time of forming the metallic thin film on the surface of paper. CONSTITUTION: An Ar gas is introduced from a port 4 into an ion generation chamber 1 provided with a positive electrode 3 and a coil 5 for forming a magnetic field as well as an thermoelectron is generated by the heating of a filament 2 as a hot cathode and the Ar gas is made to a gas ion beam to accelerate by an ion drawing electrode 6, then the metallic target 8 as the material for the thin film is subjected to the sputtering. Metallic sputter grains sprung out of the surface of the target 8 by the Ar gas ion beam stick to the surface of the paper 9, by which the metallic thin film having the excellent adhesive strength and uniform film thickness can be formed. COPYRIGHT: (C)1988,JPO&Japio ...

IRON CORE LEG FOR REACTOR

PROBLEM TO BE SOLVED: To prevent peeling and breakage of an iron core block constructed by laminating magnetic steel plates whose a coating of self-fusibility is applied to the surface. SOLUTION: Iron core blocks 1 integrally constructed by laminating magnetic steel plates 7 whose a coating of self-fusibility is applied to the surface and gap plates 2 are stacked alternately to construct an iron core leg. The gap plate 2 has a shape that the gap plate wholly covers the surface of a stacked plane of the iron core block 1. The iron core blocks 1 and the gap plates 2 are adhered to each other stacked planes. The end portions of the magnetic steel plates 7 are covered with the gap plates 2 to prevent peeling and breakage of the magnetic steel plates 7 caused by a collision with the outside. COPYRIGHT: (C)1999,JPO ...

Current-limiting device utilizing a superconductor for a current-limiting operation

A current-limiting device is a current-limiting device that uses a superconductor to perform a current-limiting operation, the current-limiting device including: a superconducting current-limiting element including the superconductor; a capacitor; a reactor; and a bypass switch. The series capacitor is connected in series to the superconducting current-limiting element. The current-limiting reactor is further connected in series to a series circuit including the superconducting current-limiting element and the series capacitor. The thyristor switch is connected in parallel to the series circuit.

SUPERCONDUCTING ELECTROMAGNETIC SHIELDING AIR-CORE REACTOR

PURPOSE: To downsize a superconducting electromagnet shielding air-core reactor and make possible highly efficient cooling. CONSTITUTION: A superconducting electromagnet shielding air-core reactor comprises an inner cooling reservoir 8 with an air-core coil placed inside and an outer cooling reservoir 11 with the inner cooling reservoir 8 separately placed inside via heat-insulating spacers 12, 14, 16, wherein the inner cooling reservoir 8 is formed to be sealed by an electromagnetic shielding member and filled with a cooling medium, the electromagnetic shielding body, and the inner cooling reservoir are unified. COPYRIGHT: (C)1996,JPO ...

ION SOURCE DEVICE

PURPOSE: To achieve a long life of a thermal filament by setting a potential of a cover disposed close to as the filament to be the same potential of a minus terminal of a filament. CONSTITUTION: A cover 19 comprising a high-fusing point material of tungsten, tantalum, etc., is disposed close to a thermal filament 5, and a potential of the cover 19 is set to be the same potential of a minus terminal 4 of the filament 5. The potential of the cover 19 is thus set to be lower than the potential at any position in the filament 5, ions in plasma are easy to flow to the cover 19, the ions flowing to the filament 5 are dispersed in the cover 19, and partial consumption of the filament 5 can be reduced, thereby its life can be elongated. COPYRIGHT: (C)1994,JPO ...

SOUND ARRESTER OF GAS INSULATION ELECTRIC APPARATUS

PROBLEM TO BE SOLVED: To suppress noise from a gas insulation electric apparatus. SOLUTION: This sound arrester is provided with a sound insulating wall 11 which covers a gas isolation electric apparatus device 1, a high temperature side pipe 21 which passes through the sound insulating wall 11 from the body 1 and is connected to the cooler 4, low temperature side pipes 23, 24 which pass through the sound insulating wall 11 from the cooler 4 and are connected to the body 1, and a blower 6 fitted on the high temperature pipe 21 or the lower temperature side pipes 23, 24. At least the exposed parts of the high temperature side pipe 21 and the low temperature side pipes 23, 24 are formed into a double pipe consisting of an outer pipe 25, and an inner pipe 26 having the outer pipe 25 and a clearance 27. COPYRIGHT: (C)1998,JPO ...

WINDING STRUCTURE FOR INDUCTION ELECTRICMAGNETIC DEVICE

PURPOSE: To reduce the maximum temperature in a section by a method wherein a flow-controlling member is provided inside or outside insulating cylinder side forming the circuit space near each circuit space so that a cooling medium passing through each circuit space flows aslant on the side of the section. CONSTITUTION: Flow-controlling members 21, 22 are provided near circuit spaces 6, 7 so that a cooling medium passing through each of circuit spaces 6, 7 flows aslant on the side of the section. Means for arranging the flow-controlling members 21, 22 is optical, and an outside barrier 5 and an inside barrier 4 are integrally provided. Thus, a flow speed of the cooling medium can be made uniform and a difference in a temperature among respective sections can be averaged and the maximum temperature in the sections can be reduced. COPYRIGHT: (C)1995,JPO ...

ION SOURCE DEVICE

PROBLEM TO BE SOLVED: To reliably check contact of an electron and plasma generated by an electrode and DC discharge by arranging an anode electrode of DC discharge electrically insulated from a main casing in a cusp field. SOLUTION: DC discharge is generated in a main plasma chamber 14 by DC voltage between a cathode electrode formed of an MP cathode 10 and respective anode electrodes 29, and gas in the main plasma chamber 14 is ionized by this DC discharge, and an electron and main plasma 26 are generated. At this time, the respective anode electrodes 29 exist in a cusp field formed by a magnetic 20, and surfaces are respectively covered with a magnetic field of about several ten gauss sufficient to prevent the direct inflow of an electron and plasma. Therefore, an electron travels in the main plasma chamber 14 for many hours, and ionization efficient of ionized gas in the main plasma chamber 14 is improved, and shutting-up efficiency of the main plasma 26 is enhanced, and an ion beam ...

Verfahren zur Erzeugung eines Metallfilms sowie durch einen Aluminiumfilm beschichtetes Erzeugnis

CORE LEG FOR REACTOR

PURPOSE: To reduce a vibration and a noise regarding a core leg, for a reactor, in which block cores have been piled up via spacers. CONSTITUTION: Ceramic spacers 2A, 2B are attached to individual opposite faces of individual block cores 1 which have been piled up. The block cores 1 are piled up in such a way that opposite edges of the individual spacers 2A, 2B are brought face to face with each other. When the edges of the individual spacers 2A, 2B are smooth, the block cores 1 are tightened uniformly. Consequently, the noise and the vibration of a core leg are reduced. COPYRIGHT: (C)1995,JPO ...

MANUFACTURE OF SUPERCONDUCTIVE THIN FILM

PURPOSE: To fabricate ceramic superconductive thin film uniform and of high quality easily by affixing the group IIa and group IIIa elements or oxides onto a base board by CVD and PVD method, respectively. CONSTITUTION: The group IIIa elements and those of copper type easy to gasify are affixed to a base board by the CVD method, while the group IIa hard to gasify by the PVD method. To form a superconductive film of YBa2Cu3O7, for ex., Y and Cu are affixed to the base board by the CVD method of radical jet type, while B by the MBE method. Gaseous yttrium cyclopentadienyl (YC) is used as Y material, while gaseous copper acetylacetonate (CuA) as Cu material. BaO is used as Ba material. From a nozzle 2 a mixture gas of YC, CuA, O2 and N2 is sprayed to the base board 5 by opening a shutter 6 and closing shutter 7. Then the shutter 7 is opened to irradiate the BaO molecular beam in a crucible 3 to the base board 5. This is repeated to form a film, which undergoes then a heat treatment. COPYRIGHT ...

ION SOURCE

PURPOSE: To obtain a ion source capable of taking out ion beams of high quality, of long life and with a smaller amount of impurity. CONSTITUTION: Instead of using filaments, a transparent window 26 is provided on the wall of a plasma generating vessel 2 to enable to introduce laser beams 36 emitted from an outer laser beam source 34 into the plasma generating vessel 2. And a pair or reflection mirrors 30 and 32 are provided in the plasma generating vessel 2 to reflect the introduced laser beams 36 between them repeatedly; thereby ionizing substances introduced in the plasma generating vessel 2 can be photoionized. COPYRIGHT: (C)1992,JPO&Japio ...

WOUND IRON CORE

PROBLEM TO BE SOLVED: To avoid local generation of eddy current and generation of magnetic saturation, by dispersing magnetic flux distributed on the winding start part and the winding end part of a silicon steel plate, along the longitudinal direction of the silicon steel plate. SOLUTION: End edges of the winding start part 2 and the winding end part 3 of a silicon steel plate 1 are obliquely cut so as to slant to the longitudinal direction of the silicon steel plate 1. It is considered that magnetic flux concentrates along end edges of the winding start part 2 and a winding end part 3 of the silicon steel plate 1, so that the shape wherein the end edges are slanted is used, and the magnetic flux is dispersed on the slant direction, i.e., along the longitudinal direction of the silicon steel plate 1. Thereby generation of eddy current is reduced, and magnetic flux density can be reduced. COPYRIGHT: (C)1997,JPO ...

THIN FILM FORMING APPARATUS

PURPOSE: To permit the assist of ions while the mixing of foreign matter into a thin film is prevented by irradiating particles issued from a particle source with light, ionizing the above and impressing bias voltage on the space between the particle source and a substrate. CONSTITUTION: At the time of irradiating particles 10 sputtered from a target 6 with light 26 from a light source 24, the sputtered particles are excited and ionized by the energy of the light 26. When the substrate 12 is biased to the negative against the target 6 by a bias power source 28, the ionized sputtering particles 10 are made incident on the substrate 12 by energy in accordance with the vias voltage, and by the energy, the assist of ions can be executed. In this way, the quality of a thin film deposited on the substrate 12 is improved, and the control of its crystalline properties can be executed. COPYRIGHT: (C)1992,JPO&Japio ...

PRODUCTION OF OPTICAL DISK

PURPOSE: To suppress the noise at the time of reproducing information and the variation by subjecting the polished surface of a glass substrate to milling washing by irradiation with ions before/after forming guide grooves and information bits on the polished surface after polishing the surface of the glass substrate. CONSTITUTION: The glass substrate S formed by setting the distance between the substrate S and an ion source 3 for ion beam milling at 250mm, polishing the substrate by using a polishing material and forming the guide grooves and the information pits on the polished surface by etching is put into a vacuum vessel 1 and the inside of this vacuum 1 is evacuated to a vacuum. Gaseous argon is then introduced into the vessel and is ionized. The substrate S is irradiated with the argon ions 3a at 45° to the normal erected on the substrate S. At this time, ion acceleration energy is specified to 500eV and the ion current density at the ion leading out port of the ion source 3 to 0.6mA ...

Verfahren zur Erzeugung eines Metallfilms sowie durch einen Aluminiumfilm beschichtetes Erzeugnis

THIN FILM FORMING DEVICE

PURPOSE: To reduce an initial cost without using a costly pump for a spare chamber. CONSTITUTION: This thin film forming device has a film forming chamber 1 where a thin film is formed on a substrate 2 and the vacuum evacuated spare chamber 3 which is provided via a gate valve 4 at the film forming chamber 1 and through which the substrate 2 is transported to the film forming chamber 1. The relation between volume V1 and V2 is so determined as to satisfy the following equation: V1/V2≥(P2-P)/(P-P1) when the volume of the film forming chamber 1 is designated as V1, the vacuum degree which can be attained as P1, the vacuum degree necessary at the time of film formation as P, the volume of the spare chamber 3 as V2 and the vacuum degree which can be attained as P2. COPYRIGHT: (C)1994,JPO&Japio ...

BEARING DEVICE OF WATER-COOLED ROTARY SHAFT

PURPOSE: To improve reliability of a bearing device for a water-cooled rotary shaft of a vacuum film forming apparatus by providing both paired atmosphere guide grooves and atmosphere introduction pipes at the positions for sandwiching cooling water leading-in and leading-out grooves of a bearing housing and a seal material on both sides of each groove. CONSTITUTION: Circular atmosphere guide grooves 26, 27 are provided at the positions for sandwiching a cooling water in groove 20 and a cooling water out groove 22 on the inner peripheral face of a bearing housing 16 which supports a rotary shaft 7. Atmosphere introduction pipes 28, 29 which are communicated with the atmosphere guide grooves 26, 27 are connected to the bearing housing 16. Not only both sides of the cooling water leading-in and leading-out grooves 20, 22 but also both sides of atmosphere guide grooves 26, 27 are sealed by an O-ring 25 between the inner peripheral face of the bearing housing 16 and the outer peripheral face ...

FORMING METHOD FOR MAGNETIC FILM

PURPOSE: To control magnetic anisotropy in the surface of a magnetic film by irradiating a sputter target with ion beams and applying ion beams from the lateral direction of a base body simultaneously or alternately while a film is deposited onto the base body. CONSTITUTION: The upper section of a base body 1 is irradiated with ion beams 6' from the lateral direction from an ion source 6 for irradiating the base body 1 simultaneously or alternately while a film is deposited onto the base body 1 through sputtering by irradiating a sputter target 3 with ion beams 5' from an ion source 5 for sputtering, thus forming a magnetic film onto the base body 1. The crystallizability of the magnetic film is improved in the direction of irradiation of ion beams 6' by the ion source 6 for irradiating the base body at that time, and magnetization in the direction is facilitated. COPYRIGHT: (C)1991,JPO&Japio ...

MANUFACTURE OF SUPERCONDUCTING FILM

PURPOSE:To manufacture a superconducting oxide film easily with high reproductivity by forming an oxide film using at first two of the three materials and then ion implanting the rest of the material forming the superconducting film. CONSTITUTION:An oxide film 2 is formed on the surface of a substrate 1 using two of the materials of group IIIa metal or its oxide, barium or its oxide, and copper or its oxide by vacuum evaporation and sputtering processes. Ion implantation is then performed to the film 2 using the material other than the two used in the above process, namely using yttrium or barium. Using an ion implanter and controlling the implantation amount accurately, the composition of the film 2 can be made uniform. Further, since the implantation is performed at a relatively low temperature, crystal structure of the film can be grown as the orthorhombic system. In this way a superconducting oxide film can be manufactured easily with high reproductivity.

MANUFACTURE OF SUPERCONDUCTIVE THIN FILM

PURPOSE: To make it possible to form an oxide ceramic superconductive thin film with high reproductivity by causing group IIIa metal, barium, copper and/or their oxide to adhere onto a substrate maintained at a specific temperature and irradiating oxygen neutral beam onto the substrate. CONSTITUTION: Evaporation materials chosen one each from respective groups of group IIIa metal (Sc, Y, Er, etc.) or oxides of group IIIa metal, barium or barium oxide, and copper or oxides of copper are put into crucibles 1W3 respectively and are made to evaporate by scanning the crucibles 1W3 with an electron beam (a) from an electron beam evaporation source 6. Here, the temperature of a substrate under evaporation is made 400W700°C. As a result, simultaneously with the deposit of the respective metals or metallic oxides onto the substrate 8, oxygen ion drawn out of an oxygen source 7 is neutralized with a neutralizer 11, irradiated an an oxygen neutral beam (b) onto the surface of the substrate 8, reacts ...

SUBSTRATE DETECTOR

PURPOSE: To surely detect the presence or absence of even a transparent resin substrate having high transparency by irradiating the substrate on a tray in a vacuum chamber diagonally with a laser beam, measuring the reflected light rays from the substrate surface and tray surface and detecting the difference therebetween. CONSTITUTION: The surface of the substrate 13 is irradiated with the laser beam from a laser beam projector 14 and the reflected light from the surface of the substrate 13 and the reflected light from the surface of the tray 18 are received by a laser beam receiving part 16 in order to check whether the substrate 13 not formed with films exists or not on the tray 18 connected by a supporting part 12 to a rotating arm 11 within a substrate exchange chamber 4 in the vessel 1 of a vacuum film forming chamber 2. In such a case, whether the substrate 13 having high transparency exists on the tray 18 or not is easily and exactly detected even with the substrate made of the resin ...

CORE WITH GAP FOR REACTOR

PROBLEM TO BE SOLVED: To provide a core with a gap for a reactor wherein the increase of the magnetic strain generated by the force for clamping axially the core is suppressed and noises are reduced thereby. SOLUTION: This core with a gap comprises a laminate of grain oriented silicon steel plates to form block cores 2 and yoke cores 4, 5 with non-magnetic insulators 3 for a gap interposed between the block cores 2 to form a leg core. In this case, using as the grain oriented silicon steel plate the one having an inner tension not smaller than the tension equal to 15kg/cm2 plus a magnetic attraction force generated by the gap, the action of a compression force applied to the grain oriented silicon steel plate in its axial direction when clamping the core is reduced to eliminate the rapid increase of a magnetic strain. COPYRIGHT: (C)1998,JPO ...

ION SOURCE

PURPOSE: To make it possible to perform the restoration for the part of flashover by separately annunciating the detection of a pulse current through the first pulse current detection means and the detection of a pulse current through the second pulse current detection means. CONSTITUTION: An ion source is equipped with the first pulse current detection means S1 provided between a filament 2 and an arc power supply 4, and the second pulse current detection means S2 provided between an accelerating electrode 7 and an accelerating power supply 6, which apply accelerating voltage to said accelerating electrode 7. And, the outputs from the first and the second pulse current detection means are input to an annunciating means, and through the annunciating means, each detection status of the first and the second pulse current detection means is separately annunciated. In this way, when a flashover occurs, the place where the flashover occurs can be easily specified thus necessary treatment can ...

MANUFACTURE OF MAGNETIC RECORDING MEDIUM

PURPOSE: To smooth the surface of a magnetic recording medium, and to improve the degree of orientation by forming a magnetic coated film by applying a magnetic paint to the surface of a nonmagnetic base material, bringing said film to a vertical magnetic field orientation in a vertically oriented magnetic field, irradiating an electron beam after its orientation, and hardening the coated film. CONSTITUTION: When a magnetic coated film which is applied to the surface of a base material is brought to a vertical magnetic field orientation, if the orientation processing time in its magnetic field exceeds 5sec, as its time elapses, the surface becomes rough. Accordingly, it is necessary that this orientation processing is ended within 5sec. Also, in the coated film which is not dried yet, when an orientation magnetic field becomes zero, its magnetic particle starts a rotation before the first 1sec elapses, and its degree of orientation drops. Accordingly, in order to avoid a drop of the degree ...

THREE-PHASE TRANSFORMER

(57)【要約】 【課題】 収納するタンクをデッドスペースの少ない円 筒形にできるとともに、タンク構造を強固にでき、タン ク内の圧力を上げて絶縁性能を高め、小形にできるよう にする。 【解決手段】 コイル１０の巻回された上下方向の脚鉄 心８の上端・下端に、水平方向の上部ヨーク鉄心１１・ 下部ヨーク鉄心９をＶノッチ接合して変圧器素体１２を 構成し、３個の変圧器素体１２を、各ヨーク鉄心１１・ ９が平面が正三角形の各辺に位置するよう配置し、隣接 する変圧器素体１２の両上部ヨーク鉄心１１及び両下部 ヨーク鉄心９のそれぞれの端部を、平面がほぼＶ形の上 部接続鉄心１５及び下部接続鉄心１５により接続する。

MANUFACTURE OF SUPERCONDUCTIVE THIN FILM

PURPOSE: To obtain a thin film with high reproductivity by causing group IIIa metal, barium, copper and/or their oxides to adhere onto a substrate of a specific temperature, irradiating an oxygen neutral beam onto the substrate to form the thin film, and then performing heat treatments for two times at respectively specified temperature. CONSTITUTION: Evaporation materials chosen one each from respective group of group IIIa metal (Sc, Y, Er, etc.) or their oxides, barium or barium oxide, and copper or oxides of copper are put into crucibles 1W3 respectively and evaporated by scanning the crucibles 1W3 with an electron beam (a) from an electron beam evaporation source 6, with the base plate temperature during evaporation made at 900W950°C. Then the oxygen ion drawn out of an oxygen ion source 7 simultaneously with the evaporation is neutralized with a neutralizer 11 and forms a thin film on the surface of the substrate 8. After the thin film is formed, the thin film undergoes a 1st heat ...

ION SOURCE APPARATUS

PROBLEM TO BE SOLVED: To simplify the structure of an ion source apparatus and emit desiring ion beam efficiently at low discharge voltage by installing a specified magnet in the outer circumference of side walls of a plasma generating chamber provided with a thermoelectron emitting material, a cathode, and an anode in the inside and keeping a box body at a specified potential. SOLUTION: A tungsten filament 7 in a plasma generating chamber 2 which is evacuated to be vacuum and into which argon gas is introduced emits thermoelectrons by supplying electricity from an electric power source 10. Further, when voltage of an arc power source 5 is applied between an anode 14 and a cathode 6, plasma of argon ions is generated in the chamber 2 due to d.c. discharge. The plasma is made highly dense in the center part of the chamber 2 by the line cusp magnetic field generated by a magnet 13 and drawn out by an ion beam extracting electrode 15. Moreover, by keeping a box body 1 at a float potential ...

MANUFACTURE OF SUPERCONDUCTIVE THIN FILM

PURPOSE: To obtain a superconductive thin film with a high reproductivity by causing group IIIa metal, barium, copper and/or their oxides to adhere on a substrate at a normal temperature, irradiating an oxygen neutral beam onto the substrate to form a thin film, and then heat treating a specific temperature in an oxygen gas atmosphere. CONSTITUTION: Evaporation materials chosen one each from respective groups of group IIIa metal (Sc, Y, Er, etc.) or oxides of group IIIa metal, barium or barium oxide, and copper or oxides of copper are put into crucibles 1W3 respectively and are made to evaporate by scanning the crucibles 1W3 with an electron beam (a) from an electron beam evaporation source 6. Here, the temperature of the substrate under evaporation is made normal temperature. Simultaneously with this, the oxygen ion drawn out of an oxygen ion source 7 is neutralized with a neutralizer 11, irradiated as an oxygen neutral beam (b) onto the surface of the substrate 8, reacts with respective ...

VERFAHREN ZUR HERSTELLUNG EINER SUPRALEITENDEN DUENNEN SCHICHT UND ANORDNUNG ZU SEINER DURCHFUEHRUNG.

ION BEAM SPUTTERING DEVICE

PURPOSE: To suppress consumption of a filament and to prolong the continuous operation time of a device by providing this device with a controller which iterates an ion drawing out operation by holding the filament power source, acceleration power source and deceleration power source of an ion source turned on and turning the arc power source on only at the time of ion drawing out and off at other times. CONSTITUTION: The filament power source, acceleration power source and deceleration power source are held turned on at all times and kept in a standby state by sequence timer setting from a control circuit. The arc power source is turned on and off according to the film forming time so that the drawing out of an ion beam and film forming are executed. The exchange of substrates and film formation are thus repeated. The arc power source is impressed to the filament only at the time of drawing out the ion beam and, therefore, the consumption of the filament at the time exclusive of this time ...

MANUFACTURE OF SUPERCONDUCTIVE THIN FILM

PURPOSE: To form a thin film made of a laminated body of group IIa -group IIIa-copper/oxide by spattering group IIa, group IIIa metals and copper in sequence or in turn, laminating them on a substrate, and radiating an oxygen neutral beam on the substrate. CONSTITUTION: The group IIa metal and/or its oxide, the group IIIa metal and/or its oxide, and copper and/or its oxide are spattered in sequence, or copper and/or its oxide and other two kinds of metals and/or their oxides are spattered in turn and laminated on a substrate. In addition, an oxygen neutral beam is radiated on the substrate. That is, individual metals or metal oxides are laminated on the substrate by spattering in a multi-layer structure (artificial lattice), metals are oxidized into metal oxides by the oxygen neutral beam radiated to the substrate, on the other hand the oxygen separated at the time of deposition is replenished for the metal oxides by the oxygen neutral beam. A superconductive thin film made of a laminated ...

MANUFACTURE OF SUPERCONDUCTIVE THIN FILM

PURPOSE:To obtain a superconductive thin film having superconductive characteristic stable at high temperatures by making adhesion of group IIIa metallic sum and/or its oxide, group IIa metal and/or its oxide, and copper and/or its oxide to a substrate under the existence of oxygen and fluorine. CONSTITUTION:For instance, an alloy of group IIIa metal-group IIa metal- copper-oxygen of Y-Ba-Cu-O etc., is used as a target 3. At that time, the atomic number ratio of group IIIa metal: group IIa metal: copper is made to about 0.5-2:2-10:3-10. Sputtering occurs with an ion beam a drawn from an ion source 2 for sputtering striked to the target 3 when forming film to a substrate 8. Forming film is made with sputtering particles b emissioned from the target 3 by the sputtering adhered to the substrate 8 surface. During such forming film, a thin film composed of IIIa-IIa-copper-oxygen-fluoring is formed on the substrate 8 with oxygen gas and fluoring gas introduced from gas introduction pipes 6 and ...

ION SOURCE DEVICE

PURPOSE: To perform a long time operation by providing a cutter movably between adjacent electrodes of an extraction electrode, moving the cutter, and removing adhesive matter from an electrode surface, so that the electrode is cleaned without dismantling a device to prevent a short-circuit between the electrodes. CONSTITUTION: In an adhesive matter removing cutter 25 formed with a long scaled blade, a base part is secured to a drive shaft 21, and the cutter is provided turnably between an adjacent decelating electrode 9 and ground electrode 10 and reciprocated to move in a fan shape, so as to scrape off adhesive matter sticking to the electrode 9. The cutter 25 is connected to a supporter 20 and grounded. A current introducing terminal 26 is provided to be inserted through an upper side part of the supporter 20, to connect the terminal 26 and the electrode 9 by a lead wire 27, and a vessel 28 of opening the upper surface is provided in the downward of the electrode 9 in the supporter 20 ...

MANUFACTURE OF SUPERCONDUCTIVE THIN FILM

PURPOSE: To obtain a superconductive thin film having superconductive characteristic stable at high temperatures by making adhesion of group IIIa metallic sum and/or its oxide, group IIa metal and/or its oxide, and copper and/or its oxide to a substrate under the existence of oxygen and fluorine. CONSTITUTION: For instance, an alloy of group IIIa metal-group IIa metal- copper-oxygen of Y-Ba-Cu-O etc., is used as a target 3. At that time, the atomic number ratio of group IIIa metal: group IIa metal: copper is made to about 0.5W2:2W10:3W10. Sputtering occurs with an ion beam a drawn from an ion source 2 for sputtering striked to the target 3 when forming film to a substrate 8. Forming film is made with sputtering particles b emissioned from the target 3 by the sputtering adhered to the substrate 8 surface. During such forming film, a thin film composed of IIIa-IIa-copper-oxygen-fluoring is formed on the substrate 8 with oxygen gas and fluoring gas introduced from gas introduction pipes 6 ...

BLOCK IRON CORE FOR REACTOR

PROBLEM TO BE SOLVED: To protect the edge of a block iron core against separation and delamitation by a method wherein a gap plate slightly larger in size than the base of the block iron core composed of laminated magnetic steel plates of self-adhesive properties is bonded to the base, and cutouts deeper than the thickness of the bent part of suspending metal fittings are provided to the opposed peripheral sides of the gap plate. SOLUTION: A large number of magnetic steel plates 2 each coated with a self-adhesive film are laminated into a block iron core body 1 polygonal or nearly circular in cross section, and the laminated block iron core body 1 is formed into one piece by thermocompression bonding. A gap plate 3 is bonded to the base of the block iron core body 1, and a cutout 4 is provided to the opposed peripheral sides of the gap plate 3 respectively so as to make the edge face of the core body 1 exposed. The external shape of the gap plate 3 is equal to or slightly larger is size ...

COIL STRUCTURE FOR INDUCTIVE ELECTOR-MAGNETIC APPARATUS

PROBLEM TO BE SOLVED: To decrease an average temperature and maximum temperature in improving the cooling efficiency of a coil. SOLUTION: A plural section 1 made of coil wound disk are stacked between an inner insulation cylinder 2 and an outer insulation cylinder 3. The path between the inner side of each section 1 and an inner insulation cylinder 2, and the path between the outer side of each section 1 and an outer insulation cylinder 3, are vertical path for flowing refrigerant. Between the section 1 stacked lower out of the stacked section 1, inside barrier and outside barrier are arranged alternately at intervals. Flowing paths 11, 12 are formed between the circumference of an inner barrier 9 and an outer insulation cylinder 3, and between the internal circumference of an outer barrier 10 and an inner insulation cylinder 2. COPYRIGHT: (C)1997,JPO ...

ION SOURCE EQUIPMENT

PURPOSE: To lengthen the service life of an electron emission source, by generat ing electrons necessary to generate plasma in a subsidiary plasma chamber, and then supplying the generated electrons to the main plasma chamber. CONSTITUTION: A main plasma chamber 29 is formed by a main casing body 28 made of the metal of a non-magnetic body, while a subsidiary plasma cham ber 31 is formed by a subsidiary casing body 30 made of the metal of another non-magnetic body, mounted via an insulator 18 onto the left-side opening of the main casing body 28, and then an electron emission hole 32 is formed be tween the main and subsidiary plasma chambers 29, 31. Subsidiary plasma 37 is generated by high-frequency discharge in the subsidiary plasma chamber 31 serving as an electron emission source so that electrons (e) necessary to generate plasma in the main plasma chamber 29 that generates ion beams by DC discharge are generated, and then supplied to the main plasma chamber 29. The electron emission ...

MANUFACTURE DEVICE FOR MAGNETIC RECORDING MEDIUM

PURPOSE: To prevent the magnetic flux produced from a magnetic field generator from affecting the electron beams by forming a magnetic field generator with a U-shaped magnet having both magnetic poles disposed opposite to each other centering on the carrying path of a base material and a magnetic piece set opposite to both magnetic poles of the magnet centering on said carrying path. CONSTITUTION: A magnetic field generator 1 is provided with a U-shaped magnet 11A having both magnetic poles disposed along the carrying path of a tape 2. A magnetic piece 4 made of a silicon steel plate, 'Permally(R)', etc. having high permeability is disposed opposite to the magnetic poles of the magnet 11A centering on the carrying path of the tape 2. The magnetic flux delivered from the N magnetic pole of the magnet 11A reaches the bar 4 through the carrying path and then returns to the S magnetic pole of the magnet 11A from the bar 4 through said carrying path. While the tape 2 travels toward an arrow.

ION SOURCE DEVICE

PURPOSE: To prolong the life of an electron emitting source and realize continuous operation for a long time by forming an auxiliary plasma by high frequency electric discharge so as to form plasma producing electrons, and supplying the electrons into a main casing. CONSTITUTION: When a high frequency voltage is supplied from a high frequency power source 31 so as to be applied between electrodes 32, 33, high frequency electric discharge is generated in a chamber 29 so that electron emitting gas introduced into the chamber 29 through an introducing port 30 is ionized, thus producing an auxiliary plasma 38. Electrons (e) produced by ionization is supplied into a main plasma chamber 37 through a discharge hole 35. Ionized gas through another introducing port 6 is ionized to produce a main plasma 39 in a chamber 37 by DC electric discharge by utilizing the electrons (e). At this moment, the main plasma 39 is efficiently confined by a cusp magnetic field of a magnet 11, and further, the main ...

MANUFACTURE OF SUPERCONDUCTING THIN FILM

PURPOSE: To form a superconducting thin film on the surface of a substrate in O2 by spattering a target made of a IIIa group metal or/and its oxide, a IIa group metal or/and its oxide, copper or/and its oxide with an ion beam or a neutral beam. CONSTITUTION: The powder of Y2O5:BaO:CuO is mixed at the mol ratio of 3:6:4 and temporarily baked at a high temperature to form a target 9. A sapphire substrate 10 is kept at about 700°C and rotated, the target 9 is spattered with an Ar+ ion beam in the atmosphere of the Ar gas 1×10-4Torr end O2 gas partial pressure 0.5W5×10-5 Torr in a chamber 7 to form a superconducting thin film made of Y-Ba-Cu oxide on the sapphire substrate 10. The electric resistance of this film in the liquid N2 is 0. COPYRIGHT: (C)1988,JPO&Japio ...

FORMATION OF ALUMINUM FILM

PURPOSE: To form an Al film having superior crystallinity and low specific resistivity by impressing a negative bias voltage in specific range on a base material at the time of sputtering an Al target by means of an inert gas ion beam in vacuum. CONSTITUTION: In vacuum, an inert gas ion beam 4 is extracted from an ion source 2 and an Al target is irradiated with this ion beam 4, by which Al grains 6a from the target 6 are deposited onto the surface of a base material 10 to form an Al film. At this time, a negative bias voltage in the range between -50 and -350V is impressed from a D.C. electric power source 14 via a holder 12 on the base material 10. By this method, a high-efficiency Al film having superior crystallinity and reduced in specific resistivity can be formed on the surface of the base material 10. COPYRIGHT: (C)1992,JPO&Japio ...

MANUFACTURE OF SUPERCONDUCTIVE THIN FILM

PURPOSE:To obtain a superconductive thin film with a high reproductivity by causing group IIIa metal, barium, copper and/or their oxides to adhere on a substrate at a normal temperature, irradiating an oxygen neutral beam onto the substrate to form a thin film, and then heat treating a specific temperature in an oxygen gas atmosphere. CONSTITUTION:Evaporation materials chosen one each from respective groups of group IIIa metal (Sc, Y, Er, etc.) or oxides of group IIIa metal, barium or barium oxide, and copper or oxides of copper are put into crucibles 1-3 respectively and are made to evaporate by scanning the crucibles 1-3 with an electron beam (a) from an electron beam evaporation source 6. Here, the temperature of the substrate under evaporation is made normal temperature. Simultaneously with this, the oxygen ion drawn out of an oxygen ion source 7 is neutralized with a neutralizer 11, irradiated as an oxygen neutral beam (b) onto the surface of the substrate 8, reacts with respective ...

OPTICAL DISK

PURPOSE: To obtain an optical disk in which deterioration in S/N and the like during reproducing due to transmitted light through a reflecting film can be prevented and the thickness of the reflecting film is ≤30nm. CONSTITUTION: A reflecting film 3 is formed as a thin film having ≤30nm thickness on a substrate 1 where recording pits 2 are formed. The dye 5 of a light-absorbing color such as black is mixed into a protective resin film 4 or applied on the surface of the reflecting film 3 so as to form an absorbing material for the light transmitted through the reflecting film 3. COPYRIGHT: (C)1996,JPO ...

MANUFACTURE OF SUPERCONDUCTIVE THIN FILM

PURPOSE:To make it possible to form an oxide ceramic superconductive thin film with high reproductivity by causing group IIIa metal, barium, copper and/or their oxide to adhere onto a substrate maintained at a specific temperature and irradiating oxygen neutral beam onto the substrate. CONSTITUTION:Evaporation materials chosen one each from respective groups of group IIIa metal (Sc, Y, Er, etc.) or oxides of group IIIa metal, barium or barium oxide, and copper or oxides of copper are put into crucibles 1-3 respectively and are made to evaporate by scanning the crucibles 1-3 with an electron beam (a) from an electron beam evaporation source 6. Here, the temperature of a substrate under evaporation is made 400-700 deg.C. As a result, simultaneously with the deposit of the respective metals or metallic oxides onto the substrate 8, oxygen ion drawn out of an oxygen source 7 is neutralized with a neutralizer 11, irradiated an an oxygen neutral beam (b) onto the surface of the substrate 8, reacts ...

MANUFACTURE OF JOSEPHSON ELEMENT

PURPOSE: To easily manufacture a Josephson element with high reproducibility by using an oxide ceramic superconducting thin film by forming a first thin superconducting film made of IIIa barium-copper oxide thin film, and further forming a second thin superconducting film made of similar group IIIa barium- copper oxide thin film through an insulating film thereon. CONSTITUTION: Group IIIa metal and/or its oxide, barium and/or its oxide, and copper and/or its oxide are adhered to a substrate 14 held at 400∼700°C, and an oxygen neutral beam is irradiated on the substrate to form a first thin superconducting film 23a made of group IIIa barium-copper oxide thin film. Second thin superconducting film 23b is formed on an insulating film 24 similarly to the first thin film. Since the substrate is maintained at relatively low temperatures of 400∼700°C during these film forming processes, the insulating film is not thermally diffused in the thin superconducting film. A gold electrode film is formed ...

ION BEAM DEVICE

PURPOSE: To aim at an increase in ion beam quantity, by constituting an anode, being set up in an arc chamber together with a filament in order to ionize a neutral gas and generate plasma, to be directly cooled inside the chamber. CONSTITUTION: A filament 3 and an anode 2 are set up in an arc chamber 1, and a neutral gas to be introduced is ionized, generating plasma. Next, the ion is drawn out by an electrode 5, irradiating a target 7, and it is machined. At this time, a cooling mechanism is formed by a cooling pipe 21 being set up inside the chamber 1 and surrounding an outer circumference of the anode 2, a cooler 22 set up at the outside of the chamber 1 and a circulating pump 23. And, the anode is directly cooled whereby cooling efficiency is enhanced. Therefore, generation of impurity gases is extremely reduced, and plasma input power is increased, thus an ion beam quantity is increasable. COPYRIGHT: (C)1987,JPO&Japio ...

PRODUCTION OF OPTICAL DISK

PURPOSE: To provide the optical disk which is small in medium noise and high in SN even if a laser beam of ≤600nm wavelength is used for reproduction of information by improving the method for forming an aluminum reflection film. CONSTITUTION: An aluminum target 14 is sputtered by the inert gas ion beam 20 drawn out of an ion source 18 in a vacuum vessel 10 and aluminum particles 22 having 15 to 140eV energy at each one piece of the Al atoms generated by the sputtering are deposited on the substrate 4, by which the aluminum reflection film is formed. In addition, the energy of the inert gaseous ion beam 20 is set within a 200 to 5000eV range at this time. COPYRIGHT: (C)1994,JPO&Japio ...

MANUFACTURE OF SUPERCONDUCTIVE THIN FILM

PURPOSE:To obtain a thin film with high reproductivity by causing group IIIa metal, barium, copper and/or their oxides to adhere onto a substrate of a specific temperature, irradiating an oxygen neutral beam onto the substrate to form the thin film, and then performing heat treatments for two times at respectively specified temperature. CONSTITUTION:Evaporation materials chosen one each from respective group of group IIIa metal (Sc, Y, Er, etc.) or their oxides, barium or barium oxide, and copper or oxides of copper are put into crucibles 1-3 respectively and evaporated by scanning the crucibles 1-3 with an electron beam (a) from an electron beam evaporation source 6, with the base plate temperature during evaporation made at 900-950 deg.C. Then the oxygen ion drawn out of an oxygen ion source 7 simultaneously with the evaporation is neutralized with a neutralizer 11 and forms a thin film on the surface of the substrate 8. After the thin film is formed, the thin film undergoes a 1st heat ...

BUCKET TYPE ION SOURCE DEVICE

PURPOSE: To extend the service life of a thermal filament by preventing the service life of an ion source device from decreasing with spatter on the lid plate thereof due to ions in plasma, and further preventing the ingress of ion beam impurities, regarding a bucket type ion source device where the thermal filament is used as an ion emission source. CONSTITUTION: A lid plate 8 is fitted via an electrical insulator 19 to the opening of an arc chamber enclosure 1 connected to the positive electrode of an arc power supply 13 for direct current discharge at the side faced to an ion beam takeout electrode group 4, thereby isolating electrically the lid plate 8 from the enclosure 1. Also, there is provided a spatter restraining power supply (potential fixing device) 21 between the negative electrode of an arc power supply 13 and the lid plate 8, so as to keep the lid plate 8 at a potential lower than the plasma potential in the enclosure 1, but higher than the cathode potential of the negative ...

THIN FILM PRODUCING DEVICE

PURPOSE: To construct overall the thin film forming device smaller in size and lower in cost than hereto fore. CONSTITUTION: This device is provided with a film forming chamber 1 having a lower opening 10, one or ≥2 load-lock chambers 2 having a lower opening 20 and valve seat 22 and horizontally arranged adjacent to the chamber 1, a valve passage 30 communicating the chambers with each other, a valve disk 6 made horizontally movable in the valve passage and also used as a substrate holder, valve supports 61 on which the valve disk is placed and made vertically movable and horizontally immovable and made horizontally movable in the valve passage so that the valve disk is selectively faced the opening of the film forming chamber on load-lock chamber, an air cylinder 9 for driving the support and a jack J capable of attaching and detaching the valve disk faced the opening of the load-lock chamber to and from the valve seat in the load-lock chamber, and the valve seat 22 in the load-lock chamber ...

MANUFACTURE OF MAGNETO-OPTICAL RECORDING MEDIUM

PURPOSE: To form a Bi-substd. garnet film having good magneto-optical characteristics by depositing the Bi-substd. garnet film on a substrate while irradiating the substrate with ions of a mixture gas of inert gas and oxygen. CONSTITUTION: The Bi-substd. garnet film is deposited on a substrate while the substrate 1 is irradiated with ions of a mixture gas of inert gas and oxygen. With irradiation of inert gas ions, the Bi-substd. garnet film has small grain size and uniform surface. With irradiation of oxygen ions, shortage of oxygen in the Bi-substd. garnet film is compensated, and the obtd. Bi-substd. garnet film has excellent optical uniformity with little scattering of light and is free from oxygen shortage. Thereby, a magneto-optical recording medium having uniform optical property and excellent magneto-optical characteristics can be manufactured. COPYRIGHT: (C)1991,JPO&Japio ...

MANUFACTURE OF JOSEPHSON ELEMENT

PURPOSE:To simply manufacture a Josephson element with high reproducibility by forming an insulating layer interposed between superconducting thin films made of group IIIa bariumcopper oxide by implanting oxygen ions into the surface of a first superconducting thin film. CONSTITUTION:A first superconducting thin film 2 is formed on a substrate 1, oxygen ions are implanted (as designated by arrows (a)) on the oxide thin film 2 to form an insulating layer 3 on its surface layer, and a second superconducting thin film 4 is so formed as to be superposed partly with the first superconducting thin film 2. The film 2 is formed in a strip state on the substrate 1, and the second film 2 is formed in a strip state on the substrate 1 to be partly superposed with the first film 2. The first and second films 2, 4 are formed of three types of materials, made of group IIIa metal and/or its oxide, barium and/or its oxide, and copper and/or its oxide. The purities of these materials are all 99.5% or more ...

FORMATION OF ALUMINUM FILM

PURPOSE: To form an aluminum film having excellent crystallizability by irradiating a basic membrane with a second inactive gas ion beam under the specific condition on the occasion of forming an aluminum film on the surface of the basic membrane by the ion beam sputtering. CONSTITUTION: An aluminum film is formed on the surface of a basic membrane 10 by sputtering an aluminum target 6 with an inactive gas beam 4 generated from an ion source 2. Simultaneously, the basic membrane 10 is irradiated with an inert gas ion beam 16 generated from an ion source 14. In this case, an incident angle of the second inert gas ion beam 15 to the perpendicular direction at the surface of the basic membrane is set from 0° to 45° and the transport ratio of the second inert gas ion to aluminum particles to the basic membrane is set to 1.0% to 30%. COPYRIGHT: (C)1992,JPO&Japio ...

MANUFACTURE OF SUPERCONDUCTIVE THIN FILM

PURPOSE: To provide a superconductive thin film consisting of laminated of group IIIa-Ba oxide-Cu oxide with high reproductivity by placing group IIIa-Ba and Cu on a base one over another, and irradiating oxygen neutral beam. CONSTITUTION: Three mutually independent evaporation cells 1W3, a base holder 4, and an oxygen ion source 8 are installed in a vacuum chamber. Group IIIa metal, Ba and/or its oxide, and Cu and/or its oxide are placed on a base 9 one over another, and oxygen neutral beam is irradiated to the deposit of Ba, Cu, and/or their oxides to accomplish a film of laminate layers 10W12 of group IIIa metal, Ba oxide-Cu oxide. This allows easy preparation of an oxide ceramic superconductive film with high reproductivity and easily. COPYRIGHT: (C)1989,JPO&Japio ...

ELECTRIC APPARATUS

PROBLEM TO BE SOLVED: To increase the pressure of internal refrigerant using an inexpensive panel type heat exchanger without causing any increase of stress at the welded circumferential edge part of a panel. SOLUTION: The body of an electric apparatus and internal refrigerant 6 for insulating and cooling the body are contained in an enclosed container 1, circumferential edge parts 4c of two plate bodies 4a are secured by welding, and a panel type heat exchanger 3a internally conducting fluid is provided in the container 1. The panel type heat exchanger 3a is connected with inflow piping 5b and outflow piping 5a communicating with the outside of the container 1 so that external refrigerant 7 flows into the heat exchanger 3a through the inflow piping 5b and flows out therefrom through the outflow piping 5a thus increasing the pressure of the internal refrigerant 6 above the pressure of the external refrigerant 7. COPYRIGHT: (C)2003,JPO ...

ION-BEAM SPUTTERING DEVICE

PURPOSE: To efficiently form a multilayer film on a substrate by projecting plural ion beams obtained by plural drawing electrode systems on plural targets, and injecting and depositing the sputtered particles on the substrate held by a rotary substrate holder. CONSTITUTION: An arc chamber 20 provided with a filament 24, a magnet 28, etc., is furnished in the recess of a vacuum vessel 4 provided with a vacuum pump 2, and the gas supplied from a gas inlet 22 is made into plasma. The ion in the plasma is drawn by the two drawing electrode systems 26a and 26b and introduced into the vacuum vessel 4, and the respective ion beams 16a and 16b are projected on the targets 8a and 8b on the two holders 6a and 6b. As a result, the sputtered particles 18a and 18b are alternately injected and deposited on ≥1 substrate 12 on the rotary substrate holder 30 through movable shutters 36a and 36b. Consequently, a multilayer film is efficiently formed on the substrate 12 without turning off the vacuum. COPYRIGHT ...

PRODUCTION OF PROTECTIVE FILM FOR MAGNETO-OPTICAL DISK

PURPOSE: To decrease the compressive stress of the protective film by blowing gaseous oxygen to a film deposited surface simultaneously with sputtering of a silicon target by a nitrogen or a beam mixture composed of the nitrogen and argon, thereby forming an SiON film specified in the ratio of oxygen and nitrogen as the protective film. CONSTITUTION: Gaseous nitrogen is introduced from an introducing path 5 into an ion source 1 where the nitrogen ion beam is formed and is drawn to the outside. The nitrogen ion beam drawn to the outside of the ion source 1 sputters the target 6 and forms the thin nitride film on the surface of a substrate 9. The gaseous oxygen is blown to the surface of the substrate 9 at the time of the film formation, i.e. the gaseous oxygen introducing path 11 is prepd. and the front end thereof is directed to the surface of the substrate 9 to blow the gaseous oxygen. O/N is specified to 0.27-0.71. The compressive stress as the protective film is decreased in this way ...

ION BEAM SPUTTERING DEVICE

PURPOSE: To increase the yield of ion beam sputtering by gradually increasing the inside diameter of a cylindrical target from one end, transferring a wire on the axis of the target and irradiating the inside of the target with an ion source from the other end. CONSTITUTION: When the surface of a wire 11 is coated in an ion beam sputtering device, a cylindrical target 12 whose inside diameter has been gradually increased from one end toward the other end is set in the device and a nearly cylindrical ion source 13 for irradiating the inside 12a of the target 12 is also set at the larger diameter side of the target 12 so that the target 12 and the ion source 13 have a common axis l1. The wire 11 is extended on the axis l1 of the target 12 through the ion source 13, drawn out of a transferring means 14, coated and housed in a wire housing chamber (transferring means) 15. Thus, the yield of ion beam sputtering can be increased. COPYRIGHT: (C)1990,JPO&Japio ...

ION SOURCE

PURPOSE: To control thermion emitted from a filament and to stabilize ion beam even if gas pressure is changed, by connecting a positive electrode of a constant current power source for the filament to a negative electrode of an arc power source. CONSTITUTION: Most of discharge current Ia concomitant with D.C. discharge passes through a negative side of a filament 1 and return to a negative pole of a power source 3. Namely a route: A→ filament 1→N→ electrode 21→K, becomes the main discharge path as shown in the Figure. The negative side of the filament 1 is therefore excited and heated by currents If'+Ia for the negative side and If' for the positive side. As the electrode 21 is a constant current source, it works to stabilize the currents If'+1a which flow between points N→K. By doing so, current between the points N→K of negative side of the filament 1 is stabilized, the current If' is increased, whereby the current to heat positive side of the filament 1 is increased, and discharged ...

VIBRATION-PROOF STRUCTURE OF GAS INSULATED INDUCTIVE APPARATUS

PROBLEM TO BE SOLVED: To provide a vibration-proof structure of a gas insulated inductive apparatus which can have an expansion joint having a simple structure and can enhance the vibration-proof effect. SOLUTION: The main body 3 accommodates an induction device and is filled with an insulation gas. A wiring pipe 21 connected to an upper end of a side wall of the main body 3 bent toward one end of a heat exchanger 7; whereas a wiring pipe 22 connected to a lower end of the sidewall of the main body is bent toward the other end of the heat exchanger, to thereby an upstanding piping located on a linear extension line of the heat exchanger 7. Mounted as inserted into the linear piping are expansion pipe joints 11 so that the expansion of the pipe joints 11 can be limited without provision of a limit rod. COPYRIGHT: (C)1997,JPO ...

Current-limiting and power-flow control device

A current-limiting and power-flow control device according to the present invention includes a superconducting current-limiting element including a superconductor, a series capacitor, and a parallel circuit. The series capacitor is connected in series with the superconducting current-limiting element. The parallel circuit includes a reactor connected in parallel with a series circuit including the superconducting current-limiting element and the series capacitor. Accordingly, overcurrent at the time of occurrence of a fault causes transition of the superconductor of the superconducting current-limiting element to the normal conducting state, and thus causes autonomous current-limiting operation of the superconducting current-limiting element. Thus, application of an excessive load across the terminals of the series capacitor due to the aforementioned fault can surely be prevented. Accordingly, unlike the conventional device, it is unnecessary to install an arrester for protection of the series capacitor and the configuration of the current-limiting and power-flow control device can be simplified.

MAGNETO-OPTICAL RECORDING MEDIUM AND ITS PRODUCTION

PURPOSE: To improve the corrosion resistance of a magnetic film consisting of an amorphous alloy of a rare earth element and transition metal element on a substrate by superposing a nitride layer of the constituting element of the magnetic film on said magnetic film. CONSTITUTION: A semi-processed product formed with the prescribed magnetic film 8 on the substrate 4 is housed in a vacuum vessel 12 and an ion source 16 is disposed toward the magnetic film 8. An N ion beam 18 is implanted to the surface of the magnetic film in a high vacuum to form the nitride layer 10 of the element constituting the film 8. The layer 10 having good corrosion resistance is obtd. if the quantity of the implantation is selected in a 1012W1018 pieces/cm2 range. The film 10 is formed in the depth direction from the surface of the film 8 and is free from the problem of exfoliation. COPYRIGHT: (C)1988,JPO&Japio ...

MANUFACTURE OF SUPERCONDUCTING FILM

PURPOSE: To manufacture a superconducting oxide film easily with high reproductivity by forming an oxide film using at first two of the three materials and then ion implanting the rest of the material forming the superconducting film. CONSTITUTION: An oxide film 2 is formed on the surface of a substrate 1 using two of the materials of group IIIa metal or its oxide, barium or its oxide, and copper or its oxide by vacuum evaporation and sputtering processes. Ion implantation is then performed to the film 2 using the material other than the two used in the above process, namely using yttrium or barium. Using an ion implanter and controlling the implantation amount accurately, the composition of the film 2 can be made uniform. Further, since the implantation is performed at a relatively low temperature, crystal structure of the film can be grown as the orthorhombic system. In this way a superconducting oxide film can be manufactured easily with high reproductivity. COPYRIGHT: (C)1989,JPO&Japio ...

REACTOR IRON CORE

(57)【要約】 【課題】 ギャップ付鉄心リアクトルの脚鉄心を形成す る各ブロック鉄心間の絶縁ギャップ体の反り等による弊 害を防止し、脚鉄心に上下方向の締付力を加えて振動を 効果的に抑制する。 【解決手段】 短冊状の磁性鋼板（ケイ素鋼板６）の積 層体からなる複数のブロック鉄心４を、磁性鋼板の積層 方向を水平方向にした状態で積み重ね、各ブロック鉄心 ４間それぞれに、絶縁ギャップ体として、中央部がくり 抜かれた環状の樹脂板からなるギャップ板７を設け、各 ブロック鉄心４及び各ギャップ板７により、コイルが巻 装される脚鉄心３を形成する。

MANUFACTURE OF SUPERCONDUCTIVE THIN FILM

PURPOSE:To provide a superconductive thin film consisting of laminated of group IIIa-Ba oxide-Cu oxide with high reproductivity by placing group IIIa-Ba and Cu on a base one over another, and irradiating oxygen neutral beam. CONSTITUTION:Three mutually independent evaporation cells 1-3, a base holder 4, and an oxygen ion source 8 are installed in a vacuum chamber. Group IIIa metal, Ba and/or its oxide, and Cu and/or its oxide are placed on a base 9 one over another, and oxygen neutral beam is irradiated to the deposit of Ba, Cu, and/or their oxides to accomplish a film of laminate layers 10-12 of group IIIa metal, Ba oxide-Cu oxide. This allows easy preparation of an oxide ceramic superconductive film with high reproductivity and easily.

AIR-CORE REACTOR

PURPOSE: To control the inductance without local overheating by a method wherein an electromagnetic shield is composed of a plurality of short-circuited coils and short-circuit switches are provided to some of the short-circuited coils. CONSTITUTION: A plurality of short-circuited coils 4' are piled along the axial direction to form a shield and a coil 1 is inserted into the shield. Some 4" of the short-circuited coils 4' are opened and closed by short-circuit switches 6. When a short-circuited coil 4" with the short-circuit switch 6 is closed by the switch 6, it works as a shield to flux like other short-circuited coils 4' but when it is opened, as no current is induced in that coil, it has no effect on the flux produced by the coil 1. Therefore, the inductance of the coil 1 increases a little at this portion. With this constitution, the inductance of the reactor can be controlled by the ON-OFF of the short-circuited coils 4". COPYRIGHT: (C)1984,JPO&Japio ...

SUPERCONDUCTING TRANSFORMER ATTACHED WITH CURRENT-LIMITING DEVICE

PROBLEM TO BE SOLVED: To provide a superconducting transformer attached with a current- limiting device, which is compact, low in impedance voltage and can realize high voltage and large capacity. SOLUTION: A superconducting transformer 2, provided with a winding 4 formed of superconducting wire of which impedance voltage is set low, is connected with a superconducting current-limiting device 5 through a series connecting of the winding thereto, and the transformer 2 and device 5 are housed in a same vessel 1 filled with liquid helium. Then a short-circuit current is suppressed by the device 5, so as to result in a higher voltage and larger capacity for the transformer. COPYRIGHT: (C)1999,JPO ...

NEUTRAL-POINT GROUNDING APPARATUS

PROBLEM TO BE SOLVED: To miniaturize a neutral-point grounding apparatus in which a reactor and a resistor are installed side by side. SOLUTION: A neutral-point grounding apparatus is constituted in such a way that a liquid resistance material 5, in which an electromagnetic shielding tube 3 and an electrostatic shielding plate 4 are immersed, is filled into a container 1 for an air-core reactor device constituted so as to house an air-core coil 2 having a prescribed resistance, the electromagnetic shielding tube 3 and the electrostatic shileding plate 4 inside the container 1, that the electromagnetic shielding tube 3 and the electrostatic shielding plate 4 are used also as electrodes of the liquid resistance material 5 and that a reactance, a resistance which is connected in series with the reactance and a resistance connected in parallel with a series circuit by the reactance and by the resistance are housed inside a single container. COPYRIGHT: (C)1999,JPO ...

MANUFACTURE OF SUPERCONDUCTIVE THIN FILM

PURPOSE: To form a thin film made of a laminated body of group IIa -group IIIa-copper/oxide by evaporating group IIa, group IIIa metals and copper in sequence and in turn, laminating them on a substrate, and radiating an oxygen neutral beam on the substrate during the deposition of them. CONSTITUTION: The group IIa metal end/or its oxide, group IIIa metal and/or its oxide, and copper and/or its oxide are evaporated in sequence or copper and/or its oxide and other two kinds of metals and/or their oxides are evaporated in turn and laminated on a substrate. In addition, an oxygen neutral beam is radiated on the substrate during the deposition of them. That is, metals or metal oxides are driven into a metal or metal oxide substrate or into other deposition object already stuck on the substrate by this oxygen neutral beam, a mixing layer is formed on their interfaces to firmly bind with the substrate and between layers, and the peel strength is improved. A superconductive thin film made of a ...

CURRENT-LIMITING DEVICE

A current-limiting device is a current-limiting device that uses a superconductor to perform a current-limiting operation, the current-limiting device including: a superconducting current-limiting element including the superconductor; a capacitor; a reactor; and a bypass switch. The series capacitor is connected in series to the superconducting current-limiting element. The current-limiting reactor is further connected in series to a series circuit including the superconducting current-limiting element and the series capacitor. The thyristor switch is connected in parallel to the series circuit. 1. A current-limiting device that uses a superconductor to perform a current-limiting operation , the current-limiting device comprising:a superconducting current-limiting element including said superconductor;a capacitor connected in series to said superconducting current-limiting element;a reactor further connected in series to a series circuit including said superconducting current-limiting element and said capacitor; anda bypass switch connected in parallel to said series circuit.2. The current-limiting device according to claim 1 , whereinsaid bypass switch includes a thyristor switch.3. The current-limiting device according to claim 1 , further comprisinga suppression circuit connected in series to said bypass switch.4. The current-limiting device according to claim 2 , further comprisinga suppression circuit connected in series to said bypass switch. The present invention relates to a current-limiting device, and more particularly to a current-limiting device that uses a superconductor.There has been conventionally proposed a current-limiting device that uses a superconductor placed in a power system (refer to, for example, Japanese Patent Laying-Open No. 9-130966 (PTD 1)). FIG. 6 of PTD 1 discloses a current-limiting device including: a current-limiting element including a superconductor; and a current-limiting reactor connected in parallel to the current-limiting ...

CURRENT-LIMITING AND POWER-FLOW CONTROL DEVICE

A current-limiting and power-flow control device according to the present invention includes a superconducting current-limiting element including a superconductor, a series capacitor, and a parallel circuit. The series capacitor is connected in series with the superconducting current-limiting element. The parallel circuit includes a reactor connected in parallel with a series circuit including the superconducting current-limiting element and the series capacitor. Accordingly, overcurrent at the time of occurrence of a fault causes transition of the superconductor of the superconducting current-limiting element to the normal conducting state, and thus causes autonomous current-limiting operation of the superconducting current-limiting element. Thus, application of an excessive load across the terminals of the series capacitor due to the aforementioned fault can surely be prevented. Accordingly, unlike the conventional device, it is unnecessary to install an arrester for protection of the series capacitor and the configuration of the current-limiting and power-flow control device can be simplified. 1. A current-limiting and power-flow control device in which a superconductor is used , comprising:a superconducting current-limiting element including said superconductor;a capacitor connected in series with said superconducting current-limiting element; anda parallel circuit including a reactor connected in parallel with a series circuit including said superconducting current-limiting element and said capacitor.2. The current-limiting and power-flow control device according to claim 1 , wherein said reactor included in said parallel circuit functions as a current-limiting reactor.3. The current-limiting and power-flow control device according to claim 1 , wherein said parallel circuit includes a thyristor switch connected in series with said reactor.4. The current-limiting and power-flow control device according to claim 1 , wherein said parallel circuit includes a tapped ...

リアクトル用鉄心

(57)【要約】 【課題】 リアクトル鉄心の小型化を図ることを目的と する。 【解決手段】 自己融着性を有する塗膜を表面に施して なる磁性鋼板を積層してブロック鉄心２を構成する。こ のブロック鉄心２を積み重ねて脚鉄心１を構成する。磁 性鋼板を積層して構成されるヨーク鉄心４、５にブロッ ク鉄心２を衝合してリアクトル鉄心とする。その衝合 は、ブロック鉄心２を構成する磁性鋼板の積層方向Ｐ が、ヨーク鉄心を構成する磁性鋼板の積層方向Ｍに対し て直交させて行う。ヨーク鉄心４、５の内部の磁束量が 均一化されるので、断面積の小さいヨーク鉄心が使用で きるようになる。

Notch signal output circuit

(57)【要約】 【課題】リアクトルと抵抗器が並設される中性点接地装 置の小型化を図ること。 【解決手段】 所定の抵抗を有する空心コイル２と電磁 シールド筒３と静電シールド板４とを容器１内に収納し て構成する空心リアクトル装置の前記容器１内に電磁シ ールド筒３および静電シールド板４を浸漬する液体抵抗 材５を充填し、電磁シールド筒３および静電シールド板 ４を液体抵抗５の電極に兼用し、リアクタンスとリアク タンスと直列に接続される抵抗とリアクタンスと抵抗と の直列回路に並列に接続される抵抗とを一つの容器内に 収納して構成する。

Ion beam device

(57)【要約】本公報は電子出願前の出願データであるた め要約のデータは記録されません。

Process for producing superconducting thin films

A process for producing a superconducting thin film on a surface of a substrate of the present invention comprises the steps of: sputtering a target made of a group IIIa metal and/or an oxide thereof, a group IIa metal and/or an oxide thereof and copper and/or an oxide thereof with an ion beam or a neutral beam to allow the sputtered particles from the target to be deposited on the substrate; and impinging an oxygen neutral beam on the substrate.

Manufacture of superconducting thin film

(57)【要約】本公報は電子出願前の出願データであるた め要約のデータは記録されません。

Production of thin film

(57)【要約】本公報は電子出願前の出願データであるた め要約のデータは記録されません。

Manufacture of superconductive thin film

Photomagnetic recording disk

(57)【要約】本公報は電子出願前の出願データであるた め要約のデータは記録されません。

Magneto-optical recording medium and its production

(57)【要約】本公報は電子出願前の出願データであるた め要約のデータは記録されません。

Manufacture of superconductive thin film

超電導薄膜の製造方法

(57)【要約】本公報は電子出願前の出願データであるた め要約のデータは記録されません。

リアクトル鉄心

(57)【要約】 【課題】 脚鉄心の積み重ねられた各ブロック鉄心を、 脚鉄心の外側にシールドを設けることなく接地電位に し、小型化及びコストダウンを図る。 【解決手段】 各磁性鋼板１６の積層体の中央部に金属 板又は金属網からなる接地電極体１７，１９を挟んで各 ブロック鉄心１５，１５’を形成し、接地電極体１７， １９の積層体から突出した引出端部１７’，１９’を接 地して各ブロック鉄心１５，１５’を接地電位にする。

リアクトル用ブロック鉄心

(57)【要約】 【課題】 自己融着性の磁性鋼板によって構成されるブ ロック鉄心を吊り上げる際に、リフト式の吊り金具を使 用しても、ブロック鉄心の端縁における剥がれ、層割れ などが生じないようにすることを目的とする。 【解決手段】 自己融着性の磁性鋼板を積層して構成さ れるブロック鉄心本体の少なくとも底面に、脚鉄心に要 求されるギャツプを形成するためのギヤップ板を接着す る。ギャップ板はブロック鉄心の底面と同一又はそれよ り若干大きい形状とする。このギャップ板の周縁におけ る互いに向かい合う個所に、吊り金具が係合できる切欠 部を設ける。

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リアクトル脚ブロック鉄心

(57)【要約】 【課題】 スリットの形成される部分の鋼板を１枚板に より構成し、各鋼板の積層時の作業性を向上する。 【解決手段】 鋼板を前後方向に積層し、前面から後方 へ及び後面から前方へそれぞれ複数個のスリット４を形 成する自己融着型のリアクトル脚ブロック鉄心におい て、スリット４の形成される前面側及び後面側の各鋼板 ５を、それぞれ１枚板により構成し、該各鋼板５の中央 部分６より上部及び下部にそれぞれ上端及び下端に開口 した複数個のスリット４ｕ・４ｄを形成し、該各鋼板５ をスリット４ｕ・４ｄの位置を合わせて積層する。

直流高圧装置

(57)【要約】 【課題】 絶縁バリアとしてのプレスボードの厚みを従 来より薄くし、かつ、導電性異物による絶縁，破壊を防 止するようにして、限流リアクトル，直流高圧電源装置 等の直流高圧装置に、信頼性の高い絶縁対策を施す。 【解決手段】 絶縁油２が充填された接地電位の金属容 器（タンク１）に、直流高電圧の電位の高圧機器（巻線 ３）と、この機器の外側に設けられた電界緩和用高圧シ ールド６と、このシールド６の外側に間隔をあけて平行 に設けられた絶縁バリア用の複数枚のプレスボード７ ａ，７ｂ，８ａ，８ｂとを備え、各プレスボード７ａ， ７ｂ，８ａ，８ｂそれぞれのほぼ碁盤の目位置に孔９を 形成し、隣接するプレスボード７ａと７ｂ，８ａと８ｂ を、それぞれの各孔９がずれる位置に配置する。

ガス絶縁電気機器の防音装置

(57)【要約】 【課題】 ガス絶縁電気機器からの騒音を低減させる。 【解決手段】 ガス絶縁電気機器本体１を覆った防音壁 １１と、本体１から防音壁１１を貫通し，冷却器４に接 続された高温側配管２１と、冷却器４から防音壁１１を 貫通し，本体１に接続された低温側配管２３，２４と、 高温側配管２１または低温側配管２３，２４に設けられ たブロワ６とを備え、高温側配管２１及び低温側配管２ ３，２４の少なくとも露出部分を、外管２５と、外管２ ５と間隙２７を有する内管２６とからなる２重管にす る。

リアクトル用ギャップ付鉄心

(57)【要約】 【課題】 軸方向鉄心締付力によって発生する磁歪の増 加を抑制し、これにより騒音の低減の図れるリアクトル 用ギャップ付鉄心を提供すること。 【解決手段】 方向性ケイ素鋼板を積層してブロック鉄 心２およびヨーク鉄心４、５を形成し、ブロック鉄心２ 間にギャップ用の非磁性絶縁体３を挟んで脚鉄心１を形 成したリアクトル用ギャップ付鉄心において、前記方向 性ケイ素鋼板としてギャップにより発生する磁気吸引力 に１５Ｋｇ／ｃｍ ２ を加算した張力以上の内部張力を備 えてなる方向性ケイ素鋼板を用い、鉄心を締め付けたと きの方向性ケイ素鋼板の軸方向にかかる圧縮力の作用を 低減して磁歪の急増をなくする。