27-11-2013 дата публикации
Номер: CN103414106A
Принадлежит:
The invention discloses a silicon-substrate semiconductor ultrashort pulse laser which comprises a silicon substrate, a buffering layer, a lower light limiting wrapping layer, a lower potential barrier, an active layer, an upper potential barrier, an upper light limiting wrapping layer and an ohmic contact layer. The buffering layer, the lower light limiting wrapping layer, the lower potential barrier, the active layer, the upper potential barrier, the upper light limiting wrapping layer and the ohmic contact layer are sequentially manufactured on the silicon substrate. The lower light limiting wrapping layer, the lower potential barrier, the active layer, the upper potential barrier, the upper light limiting wrapping layer and the ohmic contact layer are of semiconductor laser extension structures. A groove is downwards formed in the surface of the ohmic contact layer. The groove is filled with silicon dioxide materials. A semiconductor amplifier is arranged on one side of the groove.
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