11-07-2019 дата публикации
Номер: US20190212358A1
Принадлежит:
A servo control signal is binarized using a digital delta-sigma modulator. The digital delta-sigma modulator forms a feedback loop including a digital adder/subtractor, a digital integrator, and a one-bit quantizer to perform pulse-density modulation of the input servo control signal and output the signal as a binary value of +1 or −1. 1. A MEMS capacitive acceleration sensor comprising: wherein the C/V amplifier converts a charge signal output from the capacitive MEMS into an electric signal, the analog/digital converter converts an analog signal based on the electric signal into a digital signal, the digital PID control unit calculates a control signal based on the digital signal, the binarizer converts the control signal into a binary signal, a negative feedback servo control loop in which the capacitive MEMS is controlled by the binary signal is formed,', 'the digital PID control unit performs integration at least once to calculate the control signal,', 'the binarizer forms a feedback loop comprising an integrator, a subtractor, and an encoder, and', 'the encoder generates a binary output depending on whether an input signal is a positive value or a negative value., 'a capacitive MEMS; a C/V amplifier; an analog/digital converter; a digital PID control unit; and a binarizer,'}2. The MEMS capacitive acceleration sensor according to claim 1 , whereinthe binarizer comprises two integrators in series.3. The MEMS capacitive acceleration sensor according to claim 1 , whereinthe binarizer comprises: two integrators arranged in series; and a local loop in which an output signal of the integrator at a latter stage is fed back to front of the integrator at a preceding stage.4. The MEMS capacitive acceleration sensor according to claim 1 , whereinthe capacitive MEMS includes a pair of detection capacitors and a pair of servo capacitors,a movable electrode of the pair of detection capacitors is connected to an input of the C/V amplifier,a movable electrode of the pair of ...
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