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Применить Всего найдено 6. Отображено 6.
19-03-2020 дата публикации

LINEARIZED MICROMECHANICAL SENSOR

Номер: US20200088598A1
Автор: DANNENBERG Arne, Duell Andreas, Franz Jochen, Grutzeck Helmut, Oppl Stephan, Schwarz Mike, Zehringer Stefan, Zimmermann Soeren
Принадлежит:

A micromechanical sensor includes a substrate having a cavity; a flexible diaphragm that spans the cavity; and a lever element that spans the diaphragm and has a first and a second end section, the end sections lying on opposite sides of a center section. A first joint element is fitted between the first end section and the substrate and a second joint element is fitted between the center section and the diaphragm, so that the lever element is able to be pivoted due to a deflection of the diaphragm. In addition, two capacitive sensors are provided, each having two electrodes, one electrode of each sensor being mounted at one of the end sections of the lever element, and the other being mounted on the substrate. The electrodes of the sensors are disposed in such a way that distances between the electrodes of different sensors are influenced oppositely when the lever element is pivoted. Moreover, the sensor includes an actuator for applying an actuating force between the lever element and the substrate. 110-. (canceled)11. A micromechanical sensor , comprising:a substrate having a cavity;a flexible diaphragm which spans the cavity;a lever element that spans the diaphragm and has a first end section, a second end section, and a center section, the first end section and the second end section lying on opposite sides of the center section relative to one another;a first joint element that is fitted between the first end section and the substrate;a second joint element that is fitted between the center section and the diaphragm;a first capacitive sensor and a second capacitive sensor, each of the first capacitive sensor and the second capacitive sensor having two electrodes, of which one is mounted at one of the first or second end sections and the other is mounted on the substrate so that distances between the electrodes of different capacitive sensors are influenced oppositely when the lever element is pivoted because of a deflection of the diaphragm; andan actuator ...

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Номер записи: 1
02-07-2020 дата публикации

METHOD FOR MANUFACTURING MICROMECHANICAL DIAPHRAGM SENSORS

Номер: US20200209089A1
Автор: DANNENBERG Arne, Oppl Stephan
Принадлежит:

A method for manufacturing a micromechanical sensor, in particular a pressure difference sensor, including creating a functional layer on a substrate; creating at least one rear side trench area proceeding from a rear side of a substrate, for exposing the functional layer for a sensor diaphragm; creating at least one front side trench area for forming at least one supporting structure, in particular an energy storage structure, preferably in the form of a spring structure, in the substrate as a mounting for the sensor diaphragm; and at least partially filling at least a front side trench area with a gel. 111-. (canceled)12. A method for manufacturing a micromechanical sensor , comprising the following steps:creating a functional layer on a substrate;creating at least one rear side trench area, proceeding from a rear side of a substrate to expose the functional layer for a sensor diaphragm;creating at least one front side trench area to form at least one supporting structure, the supporting structure being an energy storage structure, in the substrate as a mounting for the sensor diaphragm; andat least partially filling at least one of the at least one front side trench area with a gel.13. The method as recited in claim 12 , wherein the micromechanical sensor is a pressure difference sensor.14. The method as recited in claim 12 , wherein the energy storage structure is a spring structure.15. The method as recited in claim 12 , wherein multiple rear side trench holes for creating the at least one rear side trench area are generated.16. The method as recited in claim 15 , wherein at least one cavity for forming a first connecting trench area between rear side trench holes is generated.17. The method as recited in claim 16 , wherein multiple front side trenches for creating the at least one front side trench area are generated.18. The method as recited in claim 12 , wherein:a stop layer is created between the substrate and the functional layer,the at least one rear side ...

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Номер записи: 2
05-07-2018 дата публикации

Linearized micromechanical sensor

Номер: DE102017200057A1
Автор: Andreas Duell, Arne Dannenberg, Helmut Grutzeck, Jochen Franz, Mike Schwarz, Soeren Zimmermann, Stefan Zehringer, Stephan Oppl
Принадлежит: ROBERT BOSCH GMBH

Ein mikromechanischer Sensor umfasst ein Substrat mit einem Hohlraum; eine elastische Membran, die den Hohlraum überspannt; und ein die Membran überspannendes Hebelelement mit einem ersten und einem zweiten Endabschnitt, wobei die Endabschnitte auf gegenüberliegenden Seiten eines Mittelabschnitts liegen. Zwischen dem ersten Endabschnitt und dem Substrat ist ein erstes Gelenkelement angebracht und zwischen dem Mittelabschnitt und der Membran ist ein zweites Gelenkelement angebracht, sodass das Hebelelement aufgrund einer Auslenkung der Membran geschwenkt werden kann. Ferner sind zwei kapazitive Sensoren mit jeweils zwei Elektroden vorgesehen, wobei eine Elektrode jedes Sensors an einem der Endabschnitte des Hebelelements und die andere am Substrat angebracht ist. Die Elektroden der Sensoren sind derart angeordnet, dass Abstände zwischen den Elektroden verschiedener Sensoren gegenläufig beeinflusst werden, wenn das Hebelelement geschwenkt wird. Darüber hinaus umfasst der Sensor einen Aktuator zur Aufbringung einer Stellkraft zwischen dem Hebelelement und dem Substrat. A micromechanical sensor comprises a substrate with a cavity; an elastic membrane spanning the cavity; and a lever member spanning the diaphragm having first and second end portions, the end portions lying on opposite sides of a central portion. Between the first end portion and the substrate, a first hinge member is mounted, and between the central portion and the diaphragm, a second hinge member is mounted, so that the lever member can be pivoted due to a deflection of the diaphragm. Further, two capacitive sensors each having two electrodes are provided, wherein one electrode of each sensor is attached to one of the end portions of the lever member and the other to the substrate. The electrodes of the sensors are arranged such that distances between the electrodes of different sensors are counteracted when the lever element is pivoted. In addition, the sensor comprises an actuator for applying a ...

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Номер записи: 3
06-12-2022 дата публикации

Method for manufacturing micromechanical diaphragm sensors

Номер: US11519803B2
Автор: Arne Dannenberg, Stephan Oppl
Принадлежит: ROBERT BOSCH GMBH

A method for manufacturing a micromechanical sensor, in particular a pressure difference sensor, including creating a functional layer on a substrate; creating at least one rear side trench area proceeding from a rear side of a substrate, for exposing the functional layer for a sensor diaphragm; creating at least one front side trench area for forming at least one supporting structure, in particular an energy storage structure, preferably in the form of a spring structure, in the substrate as a mounting for the sensor diaphragm; and at least partially filling at least a front side trench area with a gel.

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Номер записи: 4
10-05-2022 дата публикации

Linearized micromechanical sensor

Номер: US11326969B2
Автор: Andreas Duell, Arne Dannenberg, Helmut Grutzeck, Jochen Franz, Mike Schwarz, Soeren Zimmermann, Stefan Zehringer, Stephan Oppl
Принадлежит: ROBERT BOSCH GMBH

A micromechanical sensor includes a substrate having a cavity; a flexible diaphragm spanning the cavity; and a lever element that spans the diaphragm and has a first and second end section on opposite sides of a center section. A first joint element is between the first end section and the substrate and a second joint element is between the center section and the diaphragm. The lever element can be pivoted due to a deflection of the diaphragm. Two capacitive sensors are provided, each having two electrodes, one electrode of each sensor being mounted at one of the end sections of the lever element, and the other being mounted on the substrate. The electrodes are disposed so that distances between the electrodes of different sensors are influenced oppositely when the lever element is pivoted. Also, an actuator is provided for applying an actuating force between the lever element and the substrate.

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Номер записи: 5
13-11-2019 дата публикации

Linearized micromechanical sensor

Номер: EP3566037A1
Автор: Andreas Duell, Arne Dannenberg, Helmut Grutzeck, Jochen Franz, Mike Schwarz, Soeren Zimmermann, Stefan Zehringer, Stephan Oppl
Принадлежит: ROBERT BOSCH GMBH

A micromechanical sensor comprises a substrate with a cavity; an elastic diaphragm which spans the cavity; and a lever element, spanning the diaphragm, with a first and a second end portion, wherein the end portions are located on opposite sides of a central portion. Fitted between the first end portion and the substrate is a first joint element, and fitted between the central portion and the diaphragm is a second joint element, and so the lever element can be pivoted as a result of a deflection of the diaphragm. Furthermore, two capacitive sensors each having two electrodes are provided, wherein one electrode of each sensor is fitted on one of the end portions of the lever element and the other is fitted on the substrate. The electrodes of the sensors are arranged such that spacings between the electrodes of different sensors are influenced oppositely when the lever element is pivoted. Moreover, the sensor comprises an actuator for applying an actuating force between the lever element and the substrate.

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Номер записи: 6