07-09-2017 дата публикации
Номер: US20170256418A1
Принадлежит:
Disclosed is a method for lithography patterning. The method includes providing a substrate, forming a deposition enhancement layer (DEL) over the substrate, and flowing an organic gas near a surface of the DEL. During the flowing of the organic gas, the method further includes irradiating the DEL and the organic gas with a patterned radiation. Elements of the organic gas polymerize upon the patterned radiation, thereby forming a resist pattern over the DEL. The method further includes etching the DEL with the resist pattern as an etch mask, thereby forming a patterned DEL. 1. A method for lithography patterning , comprising:providing a substrate;forming a deposition enhancement layer (DEL) over the substrate;flowing an organic gas near a surface of the DEL;during the flowing of the organic gas, irradiating the DEL and the organic gas with a patterned radiation, wherein elements of the organic gas polymerize upon the patterned radiation, thereby forming a resist pattern over the DEL; andetching the DEL with the resist pattern as an etch mask, thereby forming a patterned DEL.2. The method of claim 1 , wherein the DEL comprises Ru.3. The method of claim 1 , wherein the DEL comprises one of: Ce claim 1 , La claim 1 , Sb claim 1 , Pb claim 1 , Hf claim 1 , Zr claim 1 , Ti claim 1 , Cr claim 1 , W claim 1 , Mo claim 1 , Fe claim 1 , Os claim 1 , Co claim 1 , Rh claim 1 , Ir claim 1 , Ni claim 1 , Pd claim 1 , Pt claim 1 , Cu claim 1 , Ag claim 1 , Au claim 1 , Zn claim 1 , Cd claim 1 , Al claim 1 , Ga claim 1 , Tl claim 1 , Ge claim 1 , Sn claim 1 , and Bi.4. The method of claim 1 , wherein the DEL comprises a polymer having a functional group selected from a group consisting of: —I claim 1 , —Br claim 1 , and —Cl.5. The method of claim 1 , wherein the DEL comprises a polymer having a functional group selected from a group consisting of: —NH claim 1 , —COOH claim 1 , —OH claim 1 , —SH claim 1 , —N claim 1 , and —S(═O)—.6. The method of claim 1 , wherein the DEL comprises ...
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