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16-08-2018 дата публикации

CARBON NANOTUBE-BASED MULTI-SENSOR

Номер: US20180231483A1
Автор: Drouin Dominique, Duchesne Eric, Frémont Hélène, Landry Simon, Quelennec Aurore F.M.E., Shafique Umar, Wilson Patrick R.J.
Принадлежит:

Carbon nanotube-based multi-sensors for packaging applications and methods to form the carbon nanotube-based multi-sensors are capable of simultaneously measuring at least two measurands including temperature, strain, and humidity via changes in its electrical properties. 111-. (canceled)12. A carbon nanotube-based multi-sensor for independently measuring temperature , strain , and relative humidity responses in a chip package comprising:a laminate substrate having a plurality of electrical circuits disposed therein;a chip having a first surface mounted on the laminate substrate and electrically connected to electrical circuits disposed in laminate substrate; andan underfill material disposed between the chip and the laminate substrate,wherein a selected one or both of the chip and the laminate substrate further comprises a passivation layer thereon,wherein the carbon nanotube-based multi-sensor is disposed on the passivation layer and comprises a carbon nanotube mesh pattern encapsulated in a moisture permeable polymer matrix with terminal ends exposed;electrodes coupled to the terminal ends, anda processor for treating a signal generated from the carbon nanotube-based multi-sensors when a voltage is applied to the electrodes, wherein the processor is configured to independently measure a variation in an electrical property at a defined frequency as a function of the temperature, strain and relative humidity.131. The carbon nanotube based multi-sensor of claim , wherein the passivation layer is a photosensitive polyimide.141. The carbon nanotube based multi-sensor of claim , wherein the variation in the electrical property comprises a variation of an impedance output by the carbon nanotube-based multi-sensor as a function of the temperature response , the strain response and/or the humidity response.1520-. (canceled) The present invention relates to carbon nanotube-based multi-sensors, and more particularly, combined high sensitivity strain, temperature and/or ...

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Номер записи: 1
16-08-2018 дата публикации

CARBON NANOTUBE-BASED MULTI-SENSOR

Номер: US20180231484A1
Автор: Drouin Dominique, Duchesne Eric, Frémont Hélène, Landry Simon, Quelennec Aurore F.M.E., Shafique Umar, Wilson Patrick R.J.
Принадлежит:

Carbon nanotube-based multi-sensors for packaging applications and methods to form the carbon nanotube-based multi-sensors are capable of simultaneously measuring at least two measurands including temperature, strain, and humidity via changes in its electrical properties. 1. A method of forming a carbon nanotube-based multi-sensor for a chip package , the method comprising:spray coating a layer of a carbon nanotube dispersion onto a surface of a chip and/or a laminate;drying the spray coated layer of a carbon nanotube dispersion;repeating the spray coating and drying to form a multi-layer of a carbon nanotube mesh;patterning the carbon nanotube mesh to form a carbon nanotube mesh pattern;encapsulating the carbon nanotube mesh pattern with a polymer matrix to form a composite material leaving exposed terminal ends;attaching metal electrodes to the exposed terminal ends of the carbon nanotube mesh; andconnecting the metal electrodes to a voltage source.2. The method of claim 1 , wherein patterning the layer of the carbon nanotube mesh defines a meander pattern.3. The method of claim 2 , wherein the meander pattern is a serpentine-shaped pattern.4. The method of claim 1 , wherein patterning the layer of the carbon nanotube mesh defines a patch pattern.5. The method of claim 1 , wherein spray coating the layer of the carbon nanotube dispersion onto a chip and/or laminate comprises spray coating the layer of the carbon nanotube dispersion onto a passivation layer.6. The method of claim 1 , wherein the passivation layer comprises photosensitive polyimide.7. The method of claim 1 , wherein patterning the layer of the carbon nanotube mesh comprises a lithographic and etch process comprising depositing a photoresist claim 1 , exposing the photoresist to activating energy; developing the exposed photoresist to form a relief pattern corresponding to the pattern; and etching the layer of the carbon nanotube mesh to form the pad shaped or a serpentine shaped carbon nanotube mesh ...

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