VAPOR DELIVERY CONTAINER WITH FLOW DISTRIBUTOR

A chemical precursor container is disclosed. The container includes a vessel and a lid that define an interior volume, an inlet conduit, an outlet conduit, and a flow distributor positioned inside the vessel and in fluid flow communication with the inlet conduit. The flow distributor has an annular shape and includes a distributor floor having a plurality of apertures formed therein for expelling carrier gas therethrough. The flow distributor includes an inner annular wall that defines a porthole in the flow distributor that allows fluid to pass through the flow distributor from the interior volume of the vessel to the outlet conduit. 1. A container for delivering a chemical precursor to a process tool , comprisinga vessel including a vessel floor, a vessel sidewall extending from the floor to an upper vessel edge, and a lid that spans a radial distance from a center axis of the vessel to the upper vessel edge, the vessel floor, vessel sidewall, and lid of the vessel defining an interior volume in the vessel, the vessel having an exterior surface and an interior surface;an inlet conduit extending through the vessel from the exterior surface of the vessel to the interior surface of the vessel;a flow distributor positioned inside the vessel and in fluid flow communication with the inlet conduit, the flow distributor including at least one conduit having a plurality of apertures formed therein for expelling gas from the inlet conduit into the vessel; andan outlet conduit in fluid flow communication with the interior volume of the vessel,wherein the flow distributor includes a distributor floor, a distributor ceiling, an outer distributor sidewall that extends from an outer perimeter of the distributor floor to an outer perimeter of the distributor ceiling, and an inner distributor sidewall that extends from an inner perimeter of the distributor floor to an inner perimeter of the distributor ceiling, the distributor floor and distributor ceiling spanning from the inner ...

IMPROVED VALVE BLOCK HAVING MINIMAL DEADLEG

In one respect, the invention is an improved valve block design having minimal or no deadlegs that improves the efficiency of a system purge process. In another respect, the invention is a system incorporating said improved valve block design. 1. A valve block comprising:a housing having a first side, a second side, and a third side, wherein the first side opposes the second side and the third side is located adjacent to both of the first side and the second side;a first valve seat located on the first side;a first conduit having a first opening that terminates on the first side and within the first valve seat and a second opening that terminates on the second side, the first conduit being linear, the first opening being selectively openable and closeable;a second valve seat located on the third side; anda second conduit extending at an angle from the first conduit, the second conduit being in fluid flow communication with the first conduit, the second conduit having an opening that terminates on the third side within the second valve seat, the opening of the second conduit being selectively openable and closeable.2. The valve block of claim 1 , wherein the second conduit is connected in fluid flow communication to the first conduit at a 90 degree angle.3. The valve block of claim 1 , wherein the housing is in the shape of a rectangular prism.4. The valve block of claim 1 , wherein at least one of the first valve seat and the second valve seat is in the shape of a cylindrical depression.5. A system comprising:a liquid refill source;a purge gas source; and a first port opening connected in fluid flow communication to both the liquid refill source and the purge gas source, the first port opening located on a first side of the valve block,', 'a second port opening, the second port opening located on a second side of the valve block, the second side being located opposite the first side,', 'a first conduit portion connected in fluid flow communication between the first ...

Diptube Design for a Host Ampoule

In one respect, the invention is an improved diptube design for a container for containing and dispensing a liquid chemical, the diptube generating a spring force when compressed that acts to maintain a bottom end of the diptube in contact with a bottom interior surface of the container and a notch located at a bottom edge of the bottom end of the diptube that creates a flow communication between the diptube and the interior volume of the base portion of the container. In another respect, the invention is a method of constructing a container having these limitations. 1. A container for containing and dispensing a liquid chemical , the container comprising:a lid having a lower interior surface and a plurality of ports extending through the lid,a base portion having an interior bottom surface; and an exterior wall defining an interior passageway,', 'a top end that is fixedly attached to a first port of the plurality of ports and extends from the lower interior surface, and', 'a bottom end having a bottom edge, at least a portion of the bottom edge being in contact with the interior bottom surface of the base portion when the lid is affixed to the base, the bottom end further comprising at least one notch that extends to the bottom edge and through the exterior wall into the interior passageway., 'a diptube, the diptube comprising'}2. The container of claim 1 , the diptube further comprising at least one bend located between the top end and bottom end thereof claim 1 , wherein the at least one bend generates a spring force that retains the bottom edge at least partially in contact with the interior bottom surface of the base portion.3. The container of claim 1 , wherein a centerline of the top end of the diptube is not collinear with a centerline of the bottom end of the diptube.4. The container of claim 3 , wherein the centerline of the top end is substantially parallel with the centerline of the bottom end.5. The container of claim 1 , wherein the entire bottom edge ...

Diptube design for a host ampoule

In one respect, the invention is an improved diptube design for a container for containing and dispensing a liquid chemical, the diptube generating a spring force when compressed that acts to maintain a bottom end of the diptube in contact with a bottom interior surface of the container and a notch located at a bottom edge of the bottom end of the diptube that creates a flow communication between the diptube and the interior volume of the base portion of the container. In another respect, the invention is a method of constructing a container having these limitations.

Improved valve block having minimal deadleg

In one respect, the invention is an improved valve block design having minimal or no deadlegs that improves the efficiency of a system purge process. In another respect, the invention is a system incorporating said improved valve block design.

Improved valve block having minimal deadleg