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Небесная энциклопедия

Космические корабли и станции, автоматические КА и методы их проектирования, бортовые комплексы управления, системы и средства жизнеобеспечения, особенности технологии производства ракетно-космических систем

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Мониторинг СМИ

Мониторинг СМИ и социальных сетей. Сканирование интернета, новостных сайтов, специализированных контентных площадок на базе мессенджеров. Гибкие настройки фильтров и первоначальных источников.

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Форма поиска

Поддерживает ввод нескольких поисковых фраз (по одной на строку). При поиске обеспечивает поддержку морфологии русского и английского языка
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Применить Всего найдено 34. Отображено 34.
17-06-2010 дата публикации

Method for Producing a Component from a Fiber Reinforced Ceramic, in particular, for Use as a Power Plant Component

Номер: US20100151256A1
Принадлежит:

A method for producing a component having a base body made of a carbon fiber reinforced ceramic and a protective layer which is applied on the base body includes the following steps: providing the base body: applying a first layer on the base body, the first layer comprising a slip with reactive carbon; applying a second layer on the first layer, the second layer comprising a slip with silicon. The application of the layers can be carried out by painting, brushing, filling or dipping techniques, or by fully automatable spraying devices. Finally, the silicon of the second layer is liquefied in a thermal treatment, so that the liquid silicon penetrates into the first layer and forms with the reactive carbon a reaction protective layer composed of a silicon carbide compound.

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20-01-2009 дата публикации

Method for brazing ceramic surfaces

Номер: US0007478742B2

A method for producing a brazed joint having at least one of a metal/ceramic joint and a ceramic/ceramic joint. The method includes forming bores in at least one ceramic surface to be brazed, and the bores have an average diameter of greater than 550 mum. The instant abstract is neither intended to define the invention disclosed in this specification nor intended to limit the scope of the invention in any way.

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10-05-2005 дата публикации

Combustion chamber with internal jacket made of a ceramic composite material and process for manufacture

Номер: US0006890660B2
Принадлежит: Astrium GmbH, ASTRIUM GMBH

A combustion chamber, in particular for a rocket drive, comprises at least one jacket made of a composite material with a ceramic matrix. The composite material contains a fibrous structure made of carbon-containing fibers, and the fibrous structure comprises layers of fibers that form a three-dimensional matrix.

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10-05-2005 дата публикации

Combustion chamber structure and its manufacturing process

Номер: US0006889496B2

A combustion chamber structure for a rocket engine or the like, has a combustion chamber liner with cooling channels and at least one manifold for feeding and removing a coolant, particularly a cryogenic fuel. The at least one manifold is brazed together with the combustion chamber liner and the area of the combustion chamber liner that is not covered by the at least one manifold is coated with an electroplated structural jacket. The invention also includes a method for manufacturing the combustion chamber structure.

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30-01-2003 дата публикации

Combustion chamber with internal jacket made of a ceramic composite material and process for manufacture

Номер: US20030021974A1
Принадлежит: Astrium GmbH

A combustion chamber, in particular for a rocket drive, comprises at least one jacket made of a composite material with a ceramic matrix. The composite material contains a fibrous structure made of carbon-containing fibers, and the fibrous structure comprises layers of fibers that form a three-dimensional matrix.

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20-03-2001 дата публикации

Wall construction for a combustion chamber or a nozzle of a high performance propulsion plant

Номер: US0006202405B1

A combustion chamber wall structure for a high performance propulsion plant or a wall structure for a nozzle of flying bodies has an outer pressure jacket and an inner wall member provided with a multitude of cooling channels. In operation the inner wall is in contact with hot gases. An intermediate layer made of a material having shape memory characteristics and/or superelastic characteristics is arranged between the inner wall member and the outer pressure jacket.

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13-11-2007 дата публикации

Combustion chamber with internal jacket made of a ceramic composite material and process for manufacture

Номер: US0007293403B2
Принадлежит: Astrium GmbH, ASTRIUM GMBH

A combustion chamber, in particular for a rocket drive, includes at least one jacket madeof a composite material with a ceramic matrix. The composite material contains a fibrous structure made of carbon-containing fibers, and the fibrous structure comprises layers of fibers that form a three-dimensional matrix.

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07-07-2005 дата публикации

Method for brazing ceramic surfaces

Номер: US20050145679A1
Принадлежит: EADS Space Transportation GmbH

A method for producing a brazed joint having at least one of a metal/ceramic joint and a ceramic/ceramic joint. The method includes forming bores in at least one ceramic surface to be brazed, and the bores have an average diameter of greater than 550 μm. The instant abstract is neither intended to define the invention disclosed in this specification nor intended to limit the scope of the invention in any way.

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06-02-2001 дата публикации

Combustion chamber wall construction for high power engines and thrust nozzles

Номер: US0006182442B2
Принадлежит: DaimlerChrysler AG

A wall construction for a combustion chamber or thrust nozzle of a high power engine of a flying body includes an inner wall body that is subjected to the hot gases within the combustion chamber, and an outer jacket that surrounds the inner wall body and carries the mechanical loads. The inner wall body has a plurality of cooling channels through which a cooling medium may flow. The outer jacket is made of a long-fiber C/SiC composite material, while the inner wall member is made of a short fiber C/SiC composite material. The reduced thermal expansion coefficient of this ceramic composite material in comparison to metal alloys leads to a reduced straining and reduced deformation of the wall construction and therewith an increased operating life.

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01-09-2020 дата публикации

Method for producing a double-walled thermostructural monolithic composite part, and part produced

Номер: US0010759713B2
Принадлежит: MBDA FRANCE, AIRBUS DEFENCE AND SPACE GMBH

A fibrous preform (1) is produced, provided with a sandwich structure comprising an intermediate flexible core (4) and two outer fibrous frames (2, 3), respectively arranged on opposing outer faces of said flexible core (4) and assembled by sections of wire (8, 9) passing through said fibrous frames (2, 3), said preform (1) being impregnated with resin. Said preform is then hardened and the core (4) is removed, preferably by pre-densification with chemical vapour infiltration, and the structure produced is then densified with liquid-phase infiltration.

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08-07-2004 дата публикации

Combustion chamber with internal jacket made of a ceramic composite material and process for manufacture

Номер: US20040128979A1
Принадлежит: Astrium GmbH

A combustion chamber, in particular for a rocket drive, comprises at least one jacket made of a composite material with a ceramic matrix. The composite material contains a fibrous structure made of carbon-containing fibers, and the fibrous structure comprises layers of fibers that form a three-dimensional matrix.

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05-08-2004 дата публикации

Combustion chamber structure and its manufacturing process

Номер: US20040148924A1
Принадлежит:

A combustion chamber structure for a rocket engine or the like, has a combustion chamber liner with cooling channels and at least one manifold for feeding and removing a coolant, particularly a cryogenic fuel. The at least one manifold is brazed together with the combustion chamber liner and the area of the combustion chamber liner that is not covered by the at least one manifold is coated with an electroplated structural jacket. The invention also includes a method for manufacturing the combustion chamber structure.

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03-08-2017 дата публикации

Method for producing a double-walled thermostructural monolithic composte part, and part produced

Номер: US20170217843A1

A fibrous preform ( 1 ) is produced, provided with a sandwich structure comprising an intermediate flexible core ( 4 ) and two outer fibrous frames ( 2, 3 ), respectively arranged on opposing outer faces of said flexible core ( 4 ) and assembled by sections of wire ( 8, 9 ) passing through said fibrous frames ( 2, 3 ), said preform ( 1 ) being impregnated with resin. Said preform is then hardened and the core ( 4 ) is removed, preferably by pre-densification with chemical vapour infiltration, and the structure produced is then densified with liquid-phase infiltration.

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22-10-2015 дата публикации

Manufacturing of Components from Parts Made from Different Materials, Particularly of Space Transportation Components Such as Combustion Chambers for Thrusters

Номер: US20150298213A1
Принадлежит:

A method for manufacturing components from parts made from different materials involves producing a transition between one part made from a first material and another part made from a second material by an additive layer manufacturing method. The additive layer manufacturing method involves starting with the first material and then gradually changing the material composition to the second material. 1. A method for manufacturing of components from parts made from different materials , the method comprising:producing a transition between one part made from a first material and another part made from a second material using an additive layer manufacturing method, wherein the additive layer manufacturing method comprises starting with the first material and then gradually changing a material composition to the second material.2. The method of claim 1 , wherein the additive layer manufacturing uses a powder bed claim 1 , a powder feeding claim 1 , or a wire feeding for producing the transition between the one part to the another part.3. The method of claim 2 , wherein the additive layer manufacturing method uses at least two individual powder feeders claim 2 , wherein one powder feeder is configured to produce layers of the first material and another powder feeder is configured to produce layers of the second material.4. The method of claim 3 , wherein an energy source of the powder feeders are a laser or an electron beam.5. The method of claim 2 , wherein the gradually changing of the material composition from the first material to the second material comprises:starting with a deposition of the first material by a powder feeding of the first material,then gradually decreasing the powder feeding of the first material and at the same time gradually increasing a powder feeding of the second material, andending with an isolated deposition layer of the second material.6. The method of claim 2 , wherein the gradually changing of the material composition from the first ...

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06-12-2002 дата публикации

Combustion chamber used in a rocket engine comprises a casing made from a composite material with a ceramic matrix and containing a fiber structure of carbon fibers forming a three dimensional matrix

Номер: FR2825417A1
Принадлежит: Astrium GmbH

Combustion chamber comprises a casing made from a composite material with a ceramic matrix and containing a fiber structure of carbon fibers forming a three dimensional matrix. Independent claims are also included for: a process for the production of a combustion chamber; and a process for the production of an intermediate layer between an inner casing and an outer casing. Preferred Features: The fiber structure consists of first, second and third layers of fibers. The fibers of the first layer extend in a first spatial direction, the fibers of the second layer extend in a second spatial direction, and fibers of the third layer extend in a third spatial direction. The individual layers partially penetrate each other. The composite material contains from silicon carbide.

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26-01-2007 дата публикации

METHOD FOR BRAZING CERAMIC SURFACES

Номер: FR2862246B1
Принадлежит: EADS Space Transportation GmbH

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17-05-2002 дата публикации

COMBUSTION CHAMBER FOR HIGH-POWERED ENGINES AND NOZZLES

Номер: FR2774432B1
Принадлежит: Daimler Benz AG

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06-08-1999 дата публикации

COMBUSTION CHAMBER FOR HIGH-POWERED ENGINES AND NOZZLES

Номер: FR2774432A1
Принадлежит: Daimler Benz AG

Chambre de combustion pour un moteur et une tuyère de forte puissance d'engins volants, notamment de fusées, comprenant une enveloppe extérieure et un corps de base intérieur exposé aux gaz chauds, ce corps de base étant muni d'un grand nombre de canaux de refroidissement.L'enveloppe extérieure (1) est en fibres longues C/ SiC et le corps de base intérieur (2) est en fibres courtes C/ SiC. Combustion chamber for an engine and a high-power nozzle of flying vehicles, in particular rockets, comprising an outer casing and an inner base body exposed to hot gases, this base body being provided with a large number of The outer shell (1) is of C / SiC long fibers and the inner base body (2) is of C / SiC short fibers.

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18-01-2002 дата публикации

COMBUSTION CHAMBER FOR A HIGH POWER ENGINE AND NOZZLES

Номер: FR2773850B1
Принадлежит: Daimler Benz AG

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19-04-2007 дата публикации

Combustion structure and method for its production

Номер: DE50306725D1
Принадлежит: Astrium GmbH

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30-03-2017 дата публикации

Method for producing a tank for fuel

Номер: DE102009034566B4
Принадлежит: Airbus Defence and Space GmbH

Verfahren zum Herstellen eines Treibstofftanks, wobei zumindest ein Bestandteil (1) einer Tankschale des Tanks mit einem generativen Herstellungsverfahren in einer Aufbaurichtung (A) schichtweise aufgebaut wird, wobei – der Bestandteil (1) aus Titan oder einer Titanlegierung besteht und eine hohle Gestalt aufweist, die durch eine Wand mit einer Wandstärke definiert ist, – nach dem schichtweisen Aufbau des Bestandteils (1) der Bestandteil (1) weiterverarbeitet wird, um die Endmaße des Bestandteils (1; 13) zu erzeugen, wobei zum schichtweisen Aufbau des Bestandteils (1) ein Energiestrahl (6) auf eine aufzubauende Oberfläche (5) gerichtet wird, auf der ein drahtförmiger Ausgangswerkstoff (4) aus Titan oder einer Titanlegierung bereitgestellt wird, wobei ein geschmolzener Bereich (7) aus dem Ausgangswerkstoff (4) auf der aufzubauenden Oberfläche (5) mit dem Energiestrahl (6) erzeugt wird, und der Energiestrahl (6) sowie der drahtförmige Ausgangswerkstoff (4), um eine Schicht (3) des Bestandteils (1) herzustellen, über der aufzubauenden Oberfläche (5) kreisförmig in einer senkrecht zu der Aufbaurichtung (A) liegenden Ebene (B) mit hinsichtlich der darunter liegenden Schicht verändertem oder gleichbleibendem Durchmesser geführt werden, so dass der Bestandteil (1; 13) in einer domartigen Gestalt (1) oder einer zylindrischen Gestalt (13) aufgebaut wird. Method for producing a fuel tank, wherein at least one component (1) of a tank shell of the tank is built up in layers with a generative manufacturing process in a construction direction (A), wherein - the component (1) consists of titanium or a titanium alloy and has a hollow shape, which is defined by a wall with a wall thickness, - after the layered structure of the component (1) the component (1) is further processed to produce the final dimensions of the component (1; 13), wherein the layered structure of the component (1) an energy beam (6) is directed onto a surface (5) to be constructed, on which a wire-shaped ...

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23-07-1999 дата публикации

Combustion chamber and nozzle with outer pressure envelope especially for rocket

Номер: FR2773850A1
Принадлежит: Daimler Benz AG

The combustion chamber and nozzle have an outer pressure envelope (9), an inner wall (10) with cooling channels (11), and an intermediate layer (2) of a superelastic material with parallel filaments or adjacent strips. In between the cooling channels the inner wall has slits (3) through part of its thickness, lying perpendicular to the intermediate layer.

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18-02-2020 дата публикации

Procedure for the realization of a monolithic thermo-structural composite double wall and obtained piece

Номер: ES2743211T3
Принадлежит: Arianegroup Gmbh, MBDA France SAS

Procedimiento para la realización de una pieza monolítica compuesta fibras/matriz termoestructural (10) que incluye dos pieles de material compuesto (11, 12) espaciadas entre sí e interrelacionadas por una pluralidad de distanciadores filiformes de material compuesto (13), procedimiento según el cual al menos: A/ se fabrica una preforma fibrosa (1) provista de una estructura de emparedado que incluye un alma flexible intermedia (4) y dos capas de refuerzo fibrosas externas (2, 3), respectivamente dispuestas sobre caras externas opuestas de dicha alma flexible (4) y ensambladas por tramos de hilo (8, 9) pasantes por dichas capas de refuerzo fibrosas (2, 3), impregnándose de resina esta preforma (1); B/ se cura dicha preforma y se elimina dicha alma (4); y C/ se realiza una densificación de la estructura así obtenida, caracterizado por que, en la etapa B/, se realiza una predensificación con una infiltración por vía gaseosa en orden a generar una predensificación de dicha preforma (1) y, así, de dichos tramos de hilo pasantes (8, 9) destinados a configurar dichos distanciadores (13), quedando dichos tramos de hilo pasantes (8, 9) provistos de una capa de carbono merced a esta predensificación, y por que, en la etapa C/, se realiza una densificación de dicha estructura con infiltración por vía líquida. Procedure for the realization of a monolithic composite piece of fibers / thermostructural matrix (10) that includes two composite material skins (11, 12) spaced from each other and interrelated by a plurality of filiform composite material spacers (13), a process according to which at least: A / a fibrous preform (1) is manufactured provided with a sandwich structure that includes an intermediate flexible core (4) and two external fibrous reinforcing layers (2, 3), respectively arranged on opposite external faces of said core flexible (4) and assembled by sections of thread (8, 9) passing through said fibrous reinforcing layers (2, 3), this preform (1) being impregnated ...

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26-09-2002 дата публикации

Segmented rocket drive and method for producing the same

Номер: WO2002018772A8

The invention relates to a method for producing a rocket drive and to a rocket drive which has a combustion chamber (1) and an expansion nozzle (2) which adjoins the combustion chamber (1). At least two single-piece segment bodies (4a, 4b, 4c) are provided, each segment body (4a, 4b, 4c) forming partial contours of the combustion chamber (1) and the expansion nozzle (2). Said segment bodies are brought together in order to form the combustion chamber (1) and the expansion nozzle (2).

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28-05-2003 дата публикации

Segmented rocket drive and method for producing the same

Номер: EP1313938A1
Принадлежит: Astrium GmbH

The invention relates to a method for producing a rocket drive and to a rocket drive which has a combustion chamber (1) and an expansion nozzle (2) which adjoins the combustion chamber (1). At least two single-piece segment bodies (4a, 4b, 4c) are provided, each segment body (4a, 4b, 4c) forming partial contours of the combustion chamber (1) and the expansion nozzle (2). Said segment bodies are brought together in order to form the combustion chamber (1) and the expansion nozzle (2).

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09-06-2004 дата публикации

Rocket engine in segment design

Номер: DE10043303B4
Принадлежит: Astrium GmbH

Verfahren zur Herstellung eines Raketentriebwerkes, welches eine Brennkammer (1) und eine an die Brennkammer (1) angrenzende Expansionsdüse (2) aufweist, wobei mindestens zwei einteilige Segmentkörper (4a, 4b, 4c) hergestellt werden, wobei jeder Segmentkörper (4a, 4b, 4c) Teilkonturen sowohl der Brennkammer (1) als auch der Expansionsdüse (2) bildet und die Segmentkörper (4a, 4b, 4c) zur Bildung der Brennkammer (1) und der Expansionsdüse (2) zusammengefügt werden, dadurch gekennzeichnet, dass vor dem Zusammenfügen der Segmentkörper (4a, 4b, 4c) mehrere Kühlkanäle (3) und/oder mehrere Rillen oder Rippen in den Segmentkörpern (4a, 4b, 4c) geformt werden. Method for producing a rocket engine which has a combustion chamber (1) and an expansion nozzle (2) adjoining the combustion chamber (1), at least two one-piece segment bodies (4a, 4b, 4c) are produced, each segment body (4a, 4b, 4c) forming partial contours of both the combustion chamber (1) and the expansion nozzle (2) and the segment bodies (4a, 4b, 4c) to form the combustion chamber (1) and the expansion nozzle (2), characterized in that before the segment bodies (4a, 4b, 4c) are joined together, a plurality of cooling channels (3) and / or a plurality of grooves or ribs are formed in the segment bodies (4a, 4b, 4c).

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11-07-2019 дата публикации

Piezo common rail injector with inward opening servo valve

Номер: DE102018200288A1
Принадлежит: Continental Automotive GmbH

Einspritzventil mit Servoventilsteuerung mit einem Injektorkörper (10), der ein Düsenmodul (90) mit Düsenkörper (100) und Düsennadel (110) aufweist. Das Düsenmodul (90) ist auf der dem Brennraum zugewandten Seite des Injektors angeordnet und die Düsennadel (110) korrespondiert mit einer auf die Düsennadel (110) wirkendenden Düsenfeder (120). Eine aktornah angeordnete Ventilplatte (60) und eine sich an diese anschließende Drosselplatte (80) sind vorgesehen. Eine Hochdruckkraftstoffleitung (20) und ein Steuerraum (140) sind vorgesehen, die einen Anschluss an das Hochdruckkraftstoffsystem aufweist und die über eine Zulaufdrossel (130) mit dem Steuerraum (140) verbunden ist. Der Steuerraum (140) ist über eine Drossel (160) mit einem in der Drosselplatte (80) ausgebildeteten Ventilraumvolumen (170) verbunden. Das Ventilraumvolumen (170) ist in Verbindung mit einer in der Ventilplatte (60) ausgebildeten Ventilkörperbohrung (180), in der ein Ventilkörper (70) angeordnet ist. Die Ventilköperbohrung (180) und das Ventilraumvolumen (170) bilden den Ventilraum (230). Ein Pin (210) ist vorgesehen, der mit dem Ventilkörper (70) in Verbindung steht und von einem Aktor (30) angetrieben ist. Der Ventilkörper (70) ist in der Ventilkörperbohrung (180) mit Paarungsspiel (195) eingepasst, so dass er sich bei einem Druckaufbau in der Drossel (160) und somit im Ventilraum (230) in eine Schließstellung bewegt. Injector with servo valve control with an injector body (10) having a nozzle module (90) with nozzle body (100) and nozzle needle (110). The nozzle module (90) is arranged on the side of the injector facing the combustion chamber, and the nozzle needle (110) corresponds to a nozzle spring (120) acting on the nozzle needle (110). A valve plate (60) arranged close to the actuator and a throttle plate (80) adjoining it are provided. A high-pressure fuel line (20) and a control chamber (140) are provided, which has a connection to the high-pressure fuel system and which is connected via ...

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18-05-2012 дата публикации

Prüfvorrichtung zum prüfen von prüfkörpern aus hochtemperaturfestem material

Номер: WO2012035041A3
Принадлежит: EADS DEUTSCHLAND GmbH

Gemäß einem Ausführungsbeispiel der Erfindung ist eine Prüfvorrichtung zum Prüfen von Prüfkörpern aus hochtemperaturfestem Material angegeben. Mittels eines Flammspritzbrenners und einer Prüfkörperhalterung wird ein Gasstrahl erzeugt, der zur Simulation von Hochtemperaturbedingungen eingesetzt wird. Dabei ist der Flammspritzbrenner derart blind geschlossen, dass kein Spritzzusatz, also kein Spritzzusatzstoff, in den Flammspritzbrenner gelangt. Dadurch wird eine Simulation von Temperatur und Druckzuständen, wie sie in Abgasbereichen von Antrieben von Raumfahrzeugen vorherrschen, ermöglicht.

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17-01-1991 дата публикации

Regler fuer einspritzpumpen fuer brennkraftmaschinen

Номер: DD286202A5
Принадлежит: Th Zwickau,De

Die Erfindung betrifft einen Regler fuer Einspritzpumpen mit unterschiedlicher UEbersetzung des Regelhebels mit einem unter der Fliehkraft von Pendelmassen, die mit mindestens je einem Zugarm ausgefuehrt sind, drehzahlabhaengig verstellbaren Reglerelement. Die Erfindung ist dadurch gekennzeichnet, dasz die Regelmuffe (14) bei sich nach auszen bewegenden Fliehmassen (2) ueber den Schwenkhebel (3) auf den zweiseitigen Regelhebel (5) drueckt, an dessen einem Ende die Leerlauffeder * die Angleichfeder (8) und die Hauptregelfeder (9) angreift und an dessen anderen Ende der Winkelhebel (10) drehbar angeordnet ist, dessen eine Ende gelenkig mit der Regelstange der Einspritzpumpe (12) und dessen anderes Ende gelenkig mit dem Bedienhebel (13) verbunden ist, wobei durch die Gestaltung und Anordnung des Schwenkhebels das UEbersetzungsverhaeltnis zwischen Regelmuffe (14) und Regelstange (12) stetig veraenderbar sind.{Brennkraftmaschine; Einspritzpumpe; Regler; Regelhebel; Reglerelement; Regelstange; Winkelhebel; Fliehkraft; Pendelmassen; Zugarm; Stellweguebertragung}

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17-01-1991 дата публикации

Regler fuer einspritzpumpen mit unterschiedlicher uebersetzung des regelhebels

Номер: DD286201A5
Принадлежит: Technische Hochschule Zwickau,De

Die Erfindung betrifft einen Regler fuer Einspritzpumpen mit unterschiedlicher UEbersetzung des Regelhebels von Brennkraftmaschinen mit einem unter der Fliehkraft von Pendelmassen, die mit mindestens je einem Zugarm ausgefuehrt sind, drehzahlabhaengig verstellbaren Reglerelement. Die Erfindung ist dadurch gekennzeichnet, dasz am zweiseitigen Regelhebel (3) ein Winkelhebel (9) drehbar angeordnet ist, dessen eine Ende gelenkig mit der Regelstange der Einspritzpumpe (11) und dessen anderes Ende gelenkig mit dem Bedienhebel (13) verbunden ist und dasz der Winkelhebel (9) ein freies Ende F hat, welches in bestimmten Lagen des Winkelhebels (9) an einen gehaeusefesten Anschlag (14) stoeszt, wobei die fuer die Stellweguebertragung wirksamen Hebelabmessungen veraenderbar sind.{Brennkraftmaschine; Einspritzpumpe; Regler; Regelhebel; Reglerelement; Regelstange; Winkelhebel; Fliehkraft; Pendelmassen; Zugarm; Stellweguebertragung}

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28-02-1990 дата публикации

Verfahren zur lift-off struktierung dicker sputterschichten

Номер: DD276498A1
Принадлежит: Univ Dresden Tech

Die Erfindung betrifft ein Verfahren zur lift-off-Strukturierung von dicken Sputterschichten, insbesondere Lotschichten. Bei dem Verfahren koennen Lackmasken mit senkrechten oder hinterschnittenen Kanten zum Einsatz kommen. Es koennen Schichten strukturiert werden, die dicker sind als die Lackmaske. Erfindungsgemaess wird die Aufgabe dadurch geloest, dass zu Beginn der Beschichtung Teilchen aus einem grossen Raumwinkel zur Beschichtung beitragen, wodurch an der Resistflanke ein Ueberhang entsteht und die Entstehung eines Spaltes hervorgerufen wird. Beim weiteren Schichtaufbau wird der moegliche Winkel fuer auftreffende Teilchen verringert. Der entstandene Ueberhang fuehrt im folgenden Beschichtungsablauf zur Abschattung. Das weitere Wachstum des in der ersten Beschichtungsphase erzeugten Spaltes wird somit gewaehrleistet. Fig. 3

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