20-06-2013 дата публикации
Номер: US20130153767A1
Embodiments of the invention are directed to integrated resonance detectors and arrays of integrated resonance detectors and to methods for making and using the integrated resonance detectors and arrays. Integrated resonance detectors comprise a substrate, a conducting mirror layer, an active layer, and a patterned conducting layer. Electromagnetic radiation is detected by transducing a specific resonance-induced field enhancement in the active layer to a detection current that is proportional to the incident irradiance. 1. An integrated resonance detector for electromagnetic radiation , comprising:a substrate comprising an electrically conducting mirror layer;an active layer on the mirror layer, the active layer being a material capable of supporting electrical current flow;a patterned conducting layer on the active layer, the conducting layer being patterned to absorb the electromagnetic radiation within a selected range of wavelengths; andan electronic circuit electrically connected between the mirror layer and the patterned conducting layer.2. The detector of wherein the substrate is a rigid solid comprising plastic claim 1 , ceramic claim 1 , metal claim 1 , glass claim 1 , or a semiconductor.3. The detector of wherein the rigid solid is a focal plane array sensor or an image sensor comprising a semiconductor.4. The detector of wherein the substrate comprises a semiconductor and the semiconductor comprises silicon claim 2 , InGaAs claim 2 , InSb claim 2 , or HgCdTe.5. The detector of wherein the rigid solid is an array of bolometers.6. The detector of wherein the substrate is a flexible solid comprising metal claim 1 , ceramic claim 1 , plastic claim 1 , or biomaterial.7. The detector of wherein the material of the active layer comprises a conductor claim 1 , semiconductor claim 1 , semi-insulator claim 1 , or insulator.8. The detector of wherein the active layer comprises a plurality of layers.9. The detector of wherein the electronic circuit includes a source ...
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