01-09-2022 дата публикации
Номер: US20220275010A1
Принадлежит:
Provided is a novel silylcyclodisilazane compound, a composition for depositing a silicon-containing thin film containing the same, and a method for manufacturing the silicon-containing thin film using the same, and since the silylcyclodisilazane compound of the present invention has high reactivity, thermal stability and high volatility, it can be used as a silicon-containing precursor, thereby manufacturing a high-quality silicon-containing thin film by various deposition methods. 2. The silylcyclodisilazane compound of claim 1 , wherein{'sup': 1', '3, 'sub': 1', '5', '2', '5, 'Rand Rare each independently C-Calkyl or C-Calkenyl;'}{'sup': '2', 'sub': 1', '5', '2', '5, 'Ris hydrogen, C-Calkyl or C-Calkenyl;'}{'sup': '4', 'sub': 1', '5', '2', '5, 'Ris C-Calkyl or C-Calkenyl;'}{'sup': 5', '6, 'sub': 1', '5', '2', '5, 'Rand Rare each independently hydrogen, C-Calkyl or C-Calkenyl; and'}{'sup': '7', 'sub': 1', '5', '2', '5, 'Ris C-Calkyl or C-Calkenyl.'}5. The composition for depositing a silicon-containing thin film of claim 4 , wherein{'sup': 11', '13, 'sub': 1', '7', '2', '7, 'Rand Rare each independently C-Calkyl or C-Calkenyl;'}{'sup': 12', '14, 'sub': 1', '7', '2', '7, 'Rand Rare each independently hydrogen, C-Calkyl or C-Calkenyl;'}{'sup': '15', 'sub': 1', '7', '2', '7, 'Ris C-Calkyl or C-Calkenyl;'}{'sup': 16', '17, 'sub': 1', '7', '2', '7, 'Rand Rare each independently hydrogen, C-Calkyl or C-Calkenyl; and'}{'sup': '18', 'sub': 1', '7', '2', '7, 'Ris C-Calkyl or C-Calkenyl.'}6. The composition for depositing a silicon-containing thin film of claim 4 , wherein{'sup': 11', '13, 'sub': 1', '7', '2', '7, 'Rand Rare each independently C-Calkyl or C-Calkenyl;'}{'sup': '12', 'sub': 1', '7', '2', '7, 'Ris hydrogen, C-Calkyl or C-Calkenyl;'}{'sup': '14', 'Ris hydrogen;'}{'sup': '15', 'sub': 1', '7', '2', '7, 'Ris C-Calkyl or C-Calkenyl;'}{'sup': 16', '17, 'sub': 1', '7', '2', '7, 'Rand Rare each independently hydrogen, C-Calkyl or C-Calkenyl;'}{'sup': 18', 'a', 'b', 'c ...
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