DIAGNOSTIC MECHANISM IN DIFFERENTIAL PRESSURE TYPE MASS FLOW CONTROLLER

This invention provides a diagnostic mechanism of a differential pressure type mass flow controller comprising a diagnostic parameter calculating section that obtains a mass flow rate integrated value by means of an integrating calculation from the lowering pressure value of an inlet side sensor among the inlet side sensor and an outlet side sensor arranged in communication respectively at the inlet side and the outlet side of a differential pressure generating resistive element that generates a differential pressure between the inlet and the outlet by changing a flow rate control valve arranged on the channel where a fluid flows from a flow rate control state to a closed state, and further obtains a diagnostic volume value from the obtained mass flow rate integrated value, and a comparing section that compares the diagnostic volume value obtained at the diagnostic parameter calculating section with a specified volume value.

HYBRID FLOW RATIO CONTROLLER SYSTEM WITH CHANNELS FOR FLOW RATIO CONTROL, FLOW RATE OR PRESSURE CONTROL, AND OVERFLOW CONTROL

A hybrid flow ratio controller system is provided, which includes an inlet configured to receive a total inlet fluid flow and three or more distribution channels. Each of the three or more distribution channels has a respective variable flow control valve and carries a respective portion of the total inlet fluid flow. The hybrid flow ratio controller further includes a controller operatively coupled to the respective variable flow control valves. The controller is configured to control a flow rate of at least a first distribution channel according to a predetermined flow ratio of the inlet fluid flow in accordance with a flow ratio control mode, to control a flow of at least a second distribution channel in either a flow rate control mode or a pressure control mode, and to control a third distribution channel in an overflow mode.

MASS FLOW CONTROLLER VERIFYING SYSTEM, VERIFYING METHOD AND VERIFYING PROGRAM

In a mass flow controller verifying system, there are provided a verifying gas line arranged in parallel to influent flow gas lines and joined into a post-confluent flow gas line, a reference volume calculating portion adapted to calculate a reference volume determined for a specified piping of a gas piping system, a verifying parameter calculating portion adapted to calculate a verifying parameter based on time series data of a measurement pressure measured by a pressure measurement unit during a control of a flow rate by a mass flow controller to be verified, and a comparing portion adapted to compare a reference parameter set based on the reference volume and the verifying parameter, whereby the verifying system can be introduced into an existing gas piping system used in a semiconductor manufacturing process and so forth at a low cost and is capable of verifying a mass flow controller quickly and accurately. 1. A mass flow controller verifying system for use in a gas piping system provided with one or a plurality of influent flow gas lines each having a mass flow controller and provided with a pre-diverting flow gas line which is before gas lines including the influent flow gas lines are diverting and wherein the pre-diverting flow gas line is provided with a pre-diverting valve thereon , said verifying system comprising:a verifying gas line provided with a flow rate measurement unit adapted to measure a flow rate of a gas, a flow rate adjustable valve by which an opening degree thereof is adjusted so that the measurement flow rate measured by the flow rate measurement unit is coincident with a set flow rate, and a pressure measurement unit adapted to measure a gas pressure, wherein the verifying gas line is arranged in parallel to the influent flow gas lines and connected to the pre-diverting flow gas line;a reference volume calculating portion adapted to calculate a reference volume based on time series data of a measurement pressure measured by the pressure ...

Piezoelectric actuator and fluid control valve

In order to provide a piezoelectric actuator and a fluid control valve that can vaporize a liquid material more effectively than a conventional arrangement, the piezoelectric actuator comprises a piezoelectric stack wherein a piezoelectric ceramic layer and an electrode layer are alternately laminated, a DC voltage application circuit that displaces the piezoelectric stack by applying a DC voltage to at least a part or whole of the piezoelectric stack, and a vibration voltage application circuit that vibrates the piezoelectric stack by applying a voltage having a predetermined frequency or above to at least a part or whole of the piezoelectric stack.

GAS SUPPLY SYSTEM

A gas supply system is provided. The system includes a plurality of component gas supply pipes, a plurality of flow rate control mechanisms for controlling flow rates of the component gases flowing in the component gas supply pipes, and a material gas supply pipe connected with downstream ends of the component gas supply pipes, and connected with one of the gas supply ports at a downstream. The flow rate control mechanism includes flow rate control valves, individual pressure sensors, and fluid resistance elements provided to the component gas supply pipes in this order from upstream, respectively, a common pressure sensor, and controllers for calculating the flow rates of the gases flowing in the component gas supply and controlling the flow rate control valves of the corresponding component gas supply pipes so that the calculated component gas flow rate approaches a predetermined gas flow rate, respectively. 1. A gas supply system comprising:a plurality of gas supply devices each connected to a respective plurality of gas supply ports formed in a device manufacturing chamber, each of the gas supply devices being configured to supply a material gas composed of a plurality of component gases to the gas supply ports; a plurality of component gas supply pipes, each configured to flow a respective component gas, the component gases collectively forming a material gas flow;', 'a plurality of flow rate control mechanisms, each flow rate control mechanism being configured to control a flow rate of the component gas flowing in a respective component gas supply pipe; and', 'a material gas supply pipe connected at an upstream end thereof with downstream ends of the plurality of component gas supply pipes, and connected at a downstream end thereof with one of the component gas supply ports; and, 'wherein each of the gas supply devices includes a fluid resistance element, an individual pressure sensor, and a flow rate control valve provided on the corresponding component gas ...

FLOW RATE MEASURING DEVICE AND FLOW RATE CONTROLLER

A flow rate measuring device includes a fluid resistance member through which measurement target fluid flows; an upstream side pressure sensor configured to measure pressure on an upstream side of the fluid resistance member from a change of electrical resistance of a resistive element attached to a pressure sensitive surface onto which the target fluid is introduced, and also to measure a temperature of the pressure sensitive surface from a temperature-dependent change of the electrical resistance of the resistive element; a temperature sensor to measure a temperature of the target fluid flowing through the fluid resistance member; and a flow rate calculation part that calculates a flow rate of the target fluid based on the pressure measured by the upstream side pressure sensor, pressure-flow rate characteristics of the fluid resistance member, the upstream side pressure sensor temperature, and the target fluid temperature in the fluid resistance member.

FLUID MECHANISM, SUPPORT MEMBER CONSTITUTING FLUID MECHANISM AND FLUID CONTROL SYSTEM

This invention provides a fluid mechanism that can arrange a plurality of fluid device units and external fluid devices mounted as a set on the fluid device units effectively and compactly. Each of the fluid device units is arranged with respective side surfaces in a longitudinal direction of the fluid device unit tightly attached, and the external fluid devices are arranged side-by-side external to and outside of the fluid device unit in the width direction. Furthermore, as for an introducing path and a discharging path that connect the external fluid devices and the fluid device unit, the introducing path, which is short, is connected to the discharging path, which is long.

FLUID RESISTANCE DEVICE

In order to be able to stably manufacture a fluid resistance device having the same resistance characteristics while preventing fluid such as gas from leaking, a fluid resistance device is provided with a fluid resistance element having a resistance flow passage, a base member and a fixing member for holding the fluid resistance element to be fixed between the base member and the fixing member, and a thin plate-shaped seal member interposed between the fixing member and the fluid resistance element. 1. A fluid resistance device comprising:a fluid resistance element having a resistance flow passage;a first member and a second member configured to hold the fluid resistance element to be fixed between the first and second members; anda thin plate-shaped seal member interposed between the first member and the fluid resistance element.2. The fluid resistance device according to further comprising a pressing member applying a force to the first member configured to fix the fluid resistance element between the first member and the second member claim 1 , whereina second seal member which is deformable in the thickness direction is interposed between the pressing member and the first member.3. The fluid resistance device according to claim 1 , wherein the fluid resistance element comprises:a slit plate formed with a slit passing through in a thickness direction; anda slit cover plate provided on each side of the slit plate in the thickness direction to cover a partial portion of the slit.4. The fluid resistance device according to claim 3 , wherein the slit plate has an annular shape including a first though hole passing through a center portion thereof in a thickness direction claim 3 , and a plurality of the slits are radially formed outward from the center portion claim 3 ,the slit cover plate has an annular shape formed with a second through hole passing through a center portion thereof in a thickness direction, overlapping the first through hole and at least a part of ...

FLUID MECHANISM, SUPPORT MEMBER CONSTITUTING FLUID MECHANISM AND FLUID CONTROL SYSTEM

This invention provides a fluid mechanism that can arrange a plurality of fluid device units and external fluid devices mounted as a set on the fluid device units effectively and compactly. Each of the fluid device units is arranged with respective side surfaces in a longitudinal direction of the fluid device unit tightly attached, and the external fluid devices are arranged side-by-side external to and outside of the fluid device unit in the width direction. Furthermore, as for an introducing path and a discharging path that connect the external fluid devices and the fluid device unit, the introducing path, which is short, is connected to the discharging path, which is long. 1. A fluid mechanism comprising a plurality of fluid device units where one or a plurality of fluid devices are arranged between an input port into which a fluid flows and an output port from which the fluid flows out , a direction connecting the input port and the output port being set as a longitudinal direction as viewed in plan view , and a support member that supports the fluid device units in a state of being adjacent each other with the longitudinal direction of the fluid device units substantially parallel to each other , and characterized by that:the support member comprises:an introducing path that is connected to the input port and that introduces the fluid into the input port, anda discharging path that is connected to the output port and that discharges the fluid from the output port, whereinan introducing port that is formed at a leading end of the introducing path is arranged outside of the fluid device unit and is located at one end of the fluid device unit in a width direction, which is a direction orthogonal to the longitudinal direction as viewed in plan view, anda discharging port that is formed at a terminal end of the discharging path is arranged outside of the fluid device unit and is located at an opposite end of the fluid device unit in the width direction.2. The fluid ...

FLUID CONTROL VALVE AND FLUID CONTROL DEVICE

The present invention intends to make it hard to distort a diaphragm at the time of assembling in a fluid control valve structured to screw a screw member to a plunger. The fluid control valve that makes an actuator move a valve body installed movably in a contacting/separating direction with respect to a valve seat includes: the plunger that is interposed between the valve body and the actuator to transfer the power of the actuator to the valve body; and the diaphragm connected to the circumferential surface of the plunger. In addition, the plunger includes: a first division body connected to the diaphragm; and a second division body that is arranged on an actuator side of the first division body and to which the screw member is screwed. Further, the second division body is configured to be rotatable with respect to the first division body in its circumferential direction. 1. A fluid control valve that makes an actuator move a valve body installed movably in a contacting/separating direction with respect to a valve seat , the fluid control valve comprising:a plunger that is interposed between the valve body and the actuator to transfer power of the actuator to the valve body; anda diaphragm connected to a circumferential surface of the plunger, whereinthe plunger comprises:a first division body connected to the diaphragm; anda second division body that is arranged on an actuator side of the first division body and to which a screw member is screwed, whereinthe second division body is configured to be rotatable with respect to the first division body in its circumferential direction.2. The fluid control valve according to claim 1 , further comprisinga position sensor that outputs an output value indicating a position of the valve body with respect to the valve seat.3. The fluid control valve according to claim 2 , whereinthe position sensor comprises:a first sensor part that is fixed so as to prevent a position relative to the valve seat from changing; anda second ...

FLUID CONTROL VALVE

To provide a fluid control valve that enables the internal volume to be reduced and, for example, the falling response performance to be improved without compromising the accuracy in controlling a pressure, a flow rate, and so on of fluid, a fluid control valve includes a valve seat portion, a valve body capable of making or breaking contact with the valve seat portion, a fluid resistance, and a pair of clamping members that clamps the fluid resistance. The fluid resistance and the pair of clamping members form an in-valve space in which the valve body or at least part of an actuation member that moves the valve body is housed. Fluid passes through the fluid resistance from the downstream-side in-valve space and flows out to the outside. 1. A fluid control valve , comprising:a valve seat portion;a valve body capable of making or breaking contact with the valve seat portion;a fluid resistance; anda pair of clamping members that clamps the fluid resistance,wherein the fluid resistance and the pair of clamping members form an in-valve space in which the valve body or at least part of an actuation member that moves the valve body is housed, andwherein fluid passes through the fluid resistance from the in-valve space and flows out to an outside, or the fluid passes through the fluid resistance from the outside and flows into the in-valve space.2. The fluid control valve according to claim 1 , further comprising:a pressure sensor that measures a pressure of the fluid in the in-valve space.3. The fluid control valve according to claim 1 ,wherein the fluid resistance is formed in a planar shape, andwherein the pair of clamping members clamps the fluid resistance with each clamping member being in contact with either one of planar face parts of the fluid resistance.4. The fluid control valve according to claim 1 ,wherein one of the pair of clamping members is a valve seat block that has an inner channel through which the fluid flows, and the valve seat portion is formed ...

Fluid control valve

To provide a fluid control valve that enables the internal volume to be reduced and, for example, the falling response performance to be improved without compromising the accuracy in controlling a pressure, a flow rate, and so on of fluid, a fluid control valve includes a valve seat portion, a valve body capable of making or breaking contact with the valve seat portion, a fluid resistance, and a pair of clamping members that clamps the fluid resistance. The fluid resistance and the pair of clamping members form an in-valve space in which the valve body or at least part of an actuation member that moves the valve body is housed. Fluid passes through the fluid resistance from the downstream-side in-valve space and flows out to the outside.

INSPECTION METHOD OF FLOW SENSOR, INSPECTION SYSTEM AND PROGRAM RECORDING MEDIUM WITH PROGRAM FOR INSPECTION SYSTEM RECORDED THEREON

In order to provide an inspection system of a flow sensor capable of charging an appropriate pressure in a flow path in response to the inspection target flow sensor and significantly reducing a waiting time until a start of an inspection, the inspection system is provided with: fluid resistances respectively provided for a plurality of respective branch flow paths branched in a downstream of an upstream side flow path where the inspection target flow sensor is provided: valves respectively provided for the respective branch flow paths; a fluid sensor having at least a part thereof being provided in an upstream side than each of the fluid resistances for measuring a pressure or a flow rate of the fluid; and a valve opening/closing control part configured to allow a plurality of the valves to be in opened states at the time of inspecting the inspection target flow sensor.

FLOW CONTROLLER, FLOW MEASURING DEVICE TESTING METHOD, FLOW CONTROLLER TESTING SYSTEM, AND SEMICONDUCTOR MANUFACTURING APPARATUS

A testing method for testing a flow controller with high accuracy by shortening as much as possible the time required for the test including the wait time. A testing-subject flow controller and a testing-standard flow controller are arranged in that order in series from the upstream side in a flow channel through which a fluid whose flow is to be controlled flows. In a flow-uncontrolled state in which the valve of the testing-subject flow controller is practically in the full-open state, and with the fluid flow controlled to a predetermined flow rate by the testing-standard flow controller, whether the actual flow-rate measurement according to the testing-subject flow controller falls within a predetermined range of actual flow-rate measurements according to the testing-standard flow controller is determined.

Flow controller, flow measuring device testing method, flow controller testing system, and semiconductor manufacturing apparatus

A testing method for testing a flow controller with high accuracy by shortening as much as possible the time required for the test including the wait time. A testing-subject flow controller and a testing-standard flow controller are arranged in that order in series from the upstream side in a flow channel through which a fluid whose flow is to be controlled flows. In a flow-uncontrolled state in which the valve of the testing-subject flow controller is practically in the full-open state, and with the fluid flow controlled to a predetermined flow rate by the testing-standard flow controller, whether the actual flow-rate measurement according to the testing-subject flow controller falls within a predetermined range of actual flow-rate measurements according to the testing-standard flow controller is determined.

Gas supply system

A gas supply system is provided. The system includes a plurality of component gas supply pipes, a plurality of flow rate control mechanisms for controlling flow rates of the component gases flowing in the component gas supply pipes, and a material gas supply pipe connected with downstream ends of the component gas supply pipes, and connected with one of the gas supply ports at a downstream. The flow rate control mechanism includes flow rate control valves, individual pressure sensors, and fluid resistance elements provided to the component gas supply pipes in this order from upstream, respectively, a common pressure sensor, and controllers for calculating the flow rates of the gases flowing in the component gas supply and controlling the flow rate control valves of the corresponding component gas supply pipes so that the calculated component gas flow rate approaches a predetermined gas flow rate, respectively.

Flow rate control apparatus, flow rate control method, and program recording medium

Provided is a flow rate control apparatus that includes a flow restrictor, a downstream side valve, a downstream side pressure sensor, first and second flow rate calculators, and a flow rate controller. The downstream side valve is disposed downstream of the flow restrictor in a flow path. The downstream side pressure sensor measures a pressure between the flow restrictor and the downstream side valve. The first flow rate calculator calculates a first flow rate of fluid flowing through the flow restrictor. The second flow rate calculator calculates a second flow rate of fluid flowing out of the downstream side valve on the basis of the first flow rate and the temporal variation in downstream side pressure measured by the downstream side pressure sensor. The flow rate controller controls the downstream side valve on the basis of a set flow rate and the second flow rate.

PIEZOELECTRIC ACTUATOR AND FLUID CONTROL VALVE

In order to provide a piezoelectric actuator and a fluid control valve that can vaporize a liquid material more effectively than a conventional arrangement, the piezoelectric actuator comprises a piezoelectric stack wherein a piezoelectric ceramic layer and an electrode layer are alternately laminated, a DC voltage application circuit that displaces the piezoelectric stack by applying a DC voltage to at least a part or whole of the piezoelectric stack, and a vibration voltage application circuit that vibrates the piezoelectric stack by applying a voltage having a predetermined frequency or above to at least a part or whole of the piezoelectric stack.

Flow rate measuring device and flow rate controller

A flow rate measuring device includes a fluid resistance member through which measurement target fluid flows; an upstream side pressure sensor configured to measure pressure on an upstream side of the fluid resistance member from a change of electrical resistance of a resistive element attached to a pressure sensitive surface onto which the target fluid is introduced, and also to measure a temperature of the pressure sensitive surface from a temperature-dependent change of the electrical resistance of the resistive element; a temperature sensor to measure a temperature of the target fluid flowing through the fluid resistance member; and a flow rate calculation part that calculates a flow rate of the target fluid based on the pressure measured by the upstream side pressure sensor, pressure-flow rate characteristics of the fluid resistance member, the upstream side pressure sensor temperature, and the target fluid temperature in the fluid resistance member.

Fluid controller

A fluid controller is disclosed, having a body unit, a fluid controlling valve, pressure sensors, and a casing. The fluid controlling valve is attached to a component part attachment face of the body unit. The pressure sensors are attached to the component part attachment face so that the pressure sensing surfaces thereof are positioned substantially perpendicular to the component part attachment face and substantially parallel to the longitudinal direction. On the lateral walls of the casing, the inner surfaces thereof are arranged to be uneven, so that such sections facing the fluid controlling valve and the pressure sensors are arranged to be thin sections, whereas at least a part of such a section that does not face the fluid controlling valve and the pressure sensors is arranged to be a thick section that is thicker than the thin sections.

GAS SUPPLY SYSTEM

A gas supply system is provided. The system includes a plurality of component gas supply pipes, a plurality of flow rate control mechanisms for controlling flow rates of the component gases flowing in the component gas supply pipes, and a material gas supply pipe connected with downstream ends of the component gas supply pipes, and connected with one of the gas supply ports at a downstream. The flow rate control mechanism includes flow rate control valves, individual pressure sensors, and fluid resistance elements provided to the component gas supply pipes in this order from upstream, respectively, a common pressure sensor, and controllers for calculating the flow rates of the gases flowing in the component gas supply and controlling the flow rate control valves of the corresponding component gas supply pipes so that the calculated component gas flow rate approaches a predetermined gas flow rate, respectively.

Flow restrictor

A flow restrictor with a first disk having at least one inlet and at least one outlet and a flow path and a second disk having no flow path. The first disk and the second disk being stacked together. A mass flow controller comprising with an input, an output, a flow path, a pressure transducer and the above flow restrictor.

FLOW RATE CONTROL DEVICE, AND DIAGNOSTIC DEVICE AND RECORDING MEDIUM RECORDED WITH DIAGNOSTIC PROGRAM USED FOR FLOW RATE CONTROL DEVICE

In order to be able to diagnose an abnormality occurring in a flow rate control valve with high reliability, and for example, if an abnormality occurs in the flow rate control valve, quickly perform appropriate maintenance or the like, a first measured flow rate diagnostic part that, on the basis of a second measured flow rate value or a measured pressure value, diagnoses an abnormality of a first measured flow rate value, and a valve diagnostic part that, when the first measured flow rate diagnostic part diagnoses that the first measured flow rate value has no abnormality, diagnoses an abnormality of the flow rate control valve are provided. 1. A flow rate control device comprising:a first flow rate measuring mechanism configured to measure a flow rate of fluid flowing through a flow channel;a flow rate control valve provided on the flow channel;a valve control part configured to control an opening degree of the flow rate control valve so as to reduce an error between a target flow rate value and a first measured flow rate value measured by the first flow rate measuring mechanism;a fluid measuring mechanism configured to measure a flow rate or a pressure of the fluid flowing through the flow channel;a first measured flow rate diagnostic part configured to diagnose an abnormality of the first measured flow rate value, based on a second measured flow rate value or a measured pressure value measured by the fluid measuring mechanism; anda valve diagnostic part configured to diagnose an abnormality of the flow rate control valve, based on an opening level control parameter that is inputted to the flow rate control valve by the valve control part, a supply pressure value that is a pressure measured on an upstream side of the flow rate control valve, and at least one of the first measured flow rate value, the second measured flow rate value, and the measured pressure value, when the first measured flow rate diagnostic part diagnoses that the first measured flow rate value ...

Valve element and fluid control valve

The present invention is directed a valve element which is intended to improve a sealing property at a time of closing a fluid control valve and to improve stability while maintaining durability for a long time period, wherein the valve element constitutes one of a valve seat surface or a seating surface and the valve element includes a concave portion formed in an opposing surface facing the valve seat surface and a resin coating film which is formed in the concave portion and contacts the valve seat surface.

Flow restrictor

A flow restrictor with a first disk having at least one inlet and at least one outlet and a flow path and a second disk having no flow path. The first disk and the second disk being stacked together. A mass flow controller comprising with an input, an output, a flow path, a pressure transducer and the above flow restrictor.

FLUID CONTROL DEVICE

There is provided a fluid control device that enables accurate control of a fluid flowing through a flow path. This fluid control device includes a block body having an internal flow path, a resistor provided within the flow path, a first pressure sensor upstream of the resistor, a second pressure sensor downstream of the resistor, and fluid control valves that control the fluid based on detection values from the pressure sensors. The block body further has an internal housing portion forming a portion of the flow path and housing the resistor. Additionally, a downstream-side flow path downstream of the housing portion has a base end connected to a downstream-side area through which flows the fluid that has already passed through the resistor. Moreover, the second pressure sensor is connected to the downstream-side area or to a vicinity of the base end. 1. A fluid control device comprising:a block body having an internal flow path through which a fluid flows;a resistor that is provided within the flow path and through which the fluid passes;a first pressure sensor that detects a pressure on an upstream side of the resistor;a second pressure sensor that detects a pressure on a downstream side of the resistor; anda fluid control valve that controls the fluid based on detection values from the first pressure sensor and the second pressure sensor, whereinthe block body further comprises an internal housing portion that forms a portion of the flow path and that houses the resistor, anda downstream-side flow path which forms the downstream side of the flow path from the housing portion has a base end that is connected to a downstream-side area through which flows the fluid that has already passed through the resistor in the housing portion, andthe second pressure sensor is connected to the downstream-side area of the housing portion or to a vicinity of the base end of the downstream-side flow path.2. The fluid control device according to claim 1 , wherein the block body ...

Fluid mechanism, support member constituting fluid mechanism and fluid control system

This invention provides a fluid mechanism that can arrange a plurality of fluid device units and external fluid devices mounted as a set on the fluid device units effectively and compactly. Each of the fluid device units is arranged with respective side surfaces in a longitudinal direction of the fluid device unit tightly attached, and the external fluid devices are arranged side-by-side external to and outside of the fluid device unit in the width direction. Furthermore, as for an introducing path and a discharging path that connect the external fluid devices and the fluid device unit, the introducing path, which is short, is connected to the discharging path, which is long.

Diagnostic mechanism in differential pressure type mass flow controller

This invention provides a diagnostic mechanism of a differential pressure type mass flow controller comprising a diagnostic parameter calculating section that obtains a mass flow rate integrated value by means of an integrating calculation from the lowering pressure value of an inlet side sensor among the inlet side sensor and an outlet side sensor arranged in communication respectively at the inlet side and the outlet side of a differential pressure generating resistive element that generates a differential pressure between the inlet and the outlet by changing a flow rate control valve arranged on the channel where a fluid flows from a flow rate control state to a closed state, and further obtains a diagnostic volume value from the obtained mass flow rate integrated value, and a comparing section that compares the diagnostic volume value obtained at the diagnostic parameter calculating section with a specified volume value.

Flow rate characteristic function identification method, flow rate characteristic function identification device, storage medium storing flow rate characteristic function identification program, and flow rate sensor or flow rate control device using them

To provide a flow rate characteristic function identification method, flow rate sensor, and flow rate characteristic function identification program that can set a flow rate characteristic function reflecting not only the type or shape of a fluid resistance but also the effects of states such as an attachment state of the fluid resistance, and calculate a flow rate with higher accuracy. An actual flow rate characteristic function, which is a flow rate characteristic function when an actual fluid resistance is provided in a flow path, is identified on the basis of multiple flow rate characteristic functions including a first reference flow rate characteristic function and a second reference flow rate characteristic function, and predetermined weighting.

Fluid control valve and fluid control device

The present invention intends to make it hard to distort a diaphragm at the time of assembling in a fluid control valve structured to screw a screw member to a plunger. The fluid control valve that makes an actuator move a valve body installed movably in a contacting/separating direction with respect to a valve seat includes: the plunger that is interposed between the valve body and the actuator to transfer the power of the actuator to the valve body; and the diaphragm connected to the circumferential surface of the plunger. In addition, the plunger includes: a first division body connected to the diaphragm; and a second division body that is arranged on an actuator side of the first division body and to which the screw member is screwed. Further, the second division body is configured to be rotatable with respect to the first division body in its circumferential direction.

Fluid mixing element

The fluid mixing element in accordance with this invention forms a first internal flow channel whose starting end opens on an end surface of one end part and whose terminal end opens on an end surface of the other end part and a second internal flow channel whose starting end opens on a side peripheral surface of a middle part and whose terminal end opens on an end surface of the other end part. It is possible for the fluid mixing element to securely mix a first fluid flowing in a main flow channel with a second fluid flowing in a sub-flow channel by the use of a pipe with a short length with a simple arrangement.

Valve Element and Fluid Control Valve

The present invention is directed a valve element which is intended to improve a sealing property at a time of closing a fluid control valve and to improve stability while maintaining durability for a long time period, wherein the valve element constitutes one of a valve seat surface or a seating surface and the valve element includes a concave portion formed in an opposing surface facing the valve seat surface and a resin coating film which is formed in the concave portion and contacts the valve seat surface. 1. A valve element constituting one of a valve seat surface or a seating surface seating on the valve seat surface , the valve element comprising:a concave portion formed in an opposing surface facing the other of the valve seat surface or the seating surface; anda resin coating film which is formed in the concave portion and contacts the other of the valve seat surface or the seating surface.2. The valve element according to claim 1 , wherein a peripheral portion of the concave portion in the opposing surface is a polish limiting guide portion in the case of polishing the surface of the resin coating film.3. The valve element according to claim 1 , wherein the opposing surface includes a driving force acting surface that contacts a drive mechanism for driving the valve element claim 1 , andwherein no resin coating film is formed on the driving force acting surface.4. A fluid control valve claim 1 , comprising: a valve element constituting one of a valve seat surface or a seating surface seating on the valve seat surface claim 1 , the valve element including:a concave portion formed in an opposing surface facing the other of the valve seat surface or the seating surface; anda resin coating film which is formed in the concave portion and contacts the other of the valve seat surface or the seating surface. The present invention relates to a fluid control valve for use in, for example, a mass flow controller and the like for controlling a flow rate of gas, and in ...

Fluid control device, recording medium recorded with control program, and control method

Provided is a fluid control device that achieves high sealing performance at full closure, and can suppress damage to a valve body or a valve seat surface even without mechanical accuracy improvements. The fluid control device includes: a fluid control valve provided in a flow path through which fluid flows: and a control mechanism that controls the fluid control valve. The fluid control valve includes: a valve seat surface; a valve body that contacts and separates from the valve seat surface; and an actuator that drives the valve body. Further, the control mechanism includes a speed adjustment part that when the valve body is brought close to the valve seat surface in order to fully close the fluid control valve, and the valve seat surface and the valve body reach a predetermined distance apart, reduces the moving speed of the valve body more than before reaching the predetermined distance.

FLOW RATE CONTROL DEVICE, DIAGNOSTIC DEVICE FOR USE IN FLOW RATE MEASURING MECHANISM OR FOR USE IN FLOW RATE CONTROL DEVICE INCLUDING THE FLOW RATE MEASURING MECHANISM AND RECORDING MEDIUM HAVING DIAGNOSTIC PROGRAM RECORDED THEREON FOR USE IN THE SAME

The flow rate control device is provided with: a fluid resistor provided on the flow channel; a pressure sensor provided in any one of an upstream side or a downstream side of the fluid resistor; a stable state judging part configured to judge, based on the measurement flow rate value or a measurement pressure value measured by the pressure sensor, whether or not a state of the fluid flowing through the flow channel is in a stable state; and an abnormality diagnosing part configured to diagnose an abnormality of the measurement flow rate value based on a variation amount of the measurement pressure value in the case where the stable state judging part judges that the state of the fluid is in a stable state. 1. A flow rate control device including a flow rate measuring mechanism configured to measure a flow rate of fluid flowing through a flow channel , a flow rate control valve provided on the flow channel , and a valve control part configured to control an opening degree of the flow rate control valve so as to reduce an error between a target flow rate value and a measurement flow rate value measured by the flow rate measuring mechanism , the flow rate control device comprising:a fluid resistor provided on the flow channel;a pressure sensor provided in any one of an upstream side or a downstream side of the fluid resistor;a stable state judging part configured to judge whether or not a state of the fluid flowing through the flow channel is in a stable state, based on the measurement flow rate value or a measurement pressure value measured by the pressure sensor; andan abnormality diagnosing part configured to diagnose an abnormality of the measurement flow rate value, based on a variation amount of the measurement pressure value, when the stable state judging part judges that the state of the fluid is in the stable state.2. The flow rate control device according to claim 1 , wherein the abnormality diagnosing part includes:a pressure variation amount calculating ...

FLOW RATE CONTROL DEVICE, DIAGNOSTIC DEVICE FOR USE IN FLOW RATE MEASURING MECHANISM OR FOR USE IN FLOW RATE CONTROL DEVICE INCLUDING THE FLOW RATE MEASURING MECHANISM AND RECORDING MEDIUM HAVING DIAGNOSTIC PROGRAM RECORDED THEREON FOR USE IN THE SAME

The flow rate control device is provided with: a fluid resistor provided on the flow channel; a pressure sensor provided in any one of an upstream side or a downstream side of the fluid resistor; a pressure calculating part configured to calculate a pressure in a side with respect to the fluid resistor where the pressure sensor is not provided; a flow rate calculating part configured to calculate a flow rate based on the measurement pressure value and a calculation pressure value calculated by the pressure calculating part; and an abnormality diagnosing part configured to diagnose an abnormality of the measurement flow rate value based on the measurement flow rate value and a calculation flow rate value. 1. A flow rate control device including a flow rate measuring mechanism configured to measure a flow rate of fluid flowing through a flow channel , a flow rate control valve provided on the flow channel , and a valve control part configured to control an opening degree of the flow rate control valve so as to reduce an error between a target flow rate value and a measurement flow rate value measured by the flow rate measuring mechanism , the flow rate control device comprising:a fluid resistor provided on the flow channel;a pressure sensor provided in any one of an upstream side or a downstream side of the fluid resistor;a pressure calculating part configured to calculate a pressure in a side where the pressure sensor is not provided with respect to the fluid resistor based on a measurement flow rate value measured by the flow rate measuring mechanism and a measurement pressure value measured by the pressure sensor;a flow rate calculating part configured to calculate a flow rate of the fluid flowing through the flow channel based on the measurement pressure value and a calculation pressure value calculated by the pressure calculating part; andan abnormality diagnosing part configured to diagnose an abnormality of the measurement flow rate value based on the ...

FLUID CONTROL VALVE AND FLUID CONTROL DEVICE

The fluid control valve comprises: a valve seat constituting a part of a valve chamber; a valve body that is installed in the valve chamber and moves in a contacting/separating direction with respect to the valve seat; an actuator configured to move the valve body; and a plunger that transfers power of the actuator to the valve body. The valve body and the plunger are in contact with each other via an inclination suppressing protrusion configured to suppress an inclination of the plunger, the inclination being caused by contact between the valve body and the valve seat. 1. A fluid control valve comprising:a valve seat constituting a part of a valve chamber;a valve body that is installed in the valve chamber and moves in a contacting/separating direction with respect to the valve seat;an actuator configured to move the valve body; anda plunger that transfers power of the actuator to the valve body, whereinthe valve body and the plunger are in contact with each other via an inclination suppressing protrusion configured to suppress an inclination of the plunger, the inclination being caused by contact between the valve body and the valve seat.2. The fluid control valve according to claim 1 , whereinany one of the valve body and the plunger is provided with the inclination suppressing protrusion, or both of the valve body and the plunger are respectively provided with inclination suppressing protrusions.3. The fluid control valve according to claim 1 , whereinthe inclination suppressing protrusion is of a curved surface shape.4. The fluid control valve according to claim 1 , whereinan apex of the inclination suppressing protrusion is positioned on an axis of the valve body and on an axis of the plunger.5. The fluid control valve according to claim 1 , further comprisinga diaphragm that constitutes at least a part of the valve chamber accommodating the valve body and is connected to a circumferential surface of the plunger, whereinthe diaphragm includes a first plane ...

FLOW RATE RATIO CONTROLLING APPARATUS

An object of this invention is to provide a flow rate ratio controlling apparatus that does not need devices of a plurality of types and that enables reduction of the number of types of components and the manufacturing cost. The flow rate ratio controlling apparatus comprises differential pressure flow rate controllers (MFC1, MFC2) of the same type and a control processing mechanism (C) for giving commands to the flow rate controllers (MFC1, MFC2) to control them. The flow rate controllers (MFC1, MFC2) are provided with respective branched flow channels (BL1, BL2) branched from a terminal of a main flow channel (ML) in opposite directions. The flow rate controller (MFC1) arranged in the branched flow channel (BL1) is operated so that a detected pressure achieves a predetermined target pressure; a target flow rate for the flow rate controller (MFC2) arranged in the branched flow channel (BL2) is determined from the total measured flow rate and the predetermined flow rate ratio, and the flow ...

Mass flow controller verifying system, verifying method and verifying program

In a mass flow controller verifying system, there are provided a verifying gas line arranged in parallel to influent flow gas lines and joined into a post-confluent flow gas line, a reference volume calculating portion adapted to calculate a reference volume determined for a specified piping of a gas piping system, a verifying parameter calculating portion adapted to calculate a verifying parameter based on time series data of a measurement pressure measured by a pressure measurement unit during a control of a flow rate by a mass flow controller to be verified, and a comparing portion adapted to compare a reference parameter set based on the reference volume and the verifying parameter, whereby the verifying system can be introduced into an existing gas piping system used in a semiconductor manufacturing process and so forth at a low cost and is capable of verifying a mass flow controller quickly and accurately.

FLUID CONTROLLER

A fluid controller is disclosed, having a body unit, a fluid controlling valve, pressure sensors, and a casing. The fluid controlling valve is attached to a component part attachment face of the body unit. The pressure sensors are attached to the component part attachment face so that the pressure sensing surfaces thereof are positioned substantially perpendicular to the component part attachment face and substantially parallel to the longitudinal direction. On the lateral walls of the casing, the inner surfaces thereof are arranged to be uneven, so that such sections facing the fluid controlling valve and the pressure sensors are arranged to be thin sections, whereas at least a part of such a section that does not face the fluid controlling valve and the pressure sensors is arranged to be a thick section that is thicker than the thin sections.

CALIBRATION DATA GENERATION APPARATUS, CALIBRATION DATA GENERATION METHOD, AND FLOW RATE CONTROL DEVICE

A calibration data generation apparatus includes a flow rate sensor that measures the flow rate of a fluid flowing through a fluid control valve; a differential pressure control mechanism; a temperature control mechanism; and a control unit that when the fluid passing has sound velocity, uses the temperature control mechanism to change the temperature from a reference temperature to comparative temperature. In addition, the control unit includes a valve opening control part that controls the fluid control valve so that at the comparative temperature, an output value outputted from one of the position sensor and the flow rate sensor becomes equal to the reference output value of the one; and a calibration data generation part that generates the calibration data on the basis of a calibration data generation output value outputted from the other one of the position sensor and the flow rate sensor. 1. A calibration data generation apparatus that generates calibration data for a position sensor that is installed in a fluid control valve for controlling fluid and outputs an output value corresponding to a position of a valve closure member moving in a contacting/separating direction with respect to a valve seat , the calibration data generation apparatus comprising:a flow rate sensor that measures a flow rate of the fluid flowing through the fluid control valve;a differential pressure control mechanism that controls differential pressure between an upstream side and a downstream side of the fluid control valve;a temperature control mechanism that controls temperature of the fluid control valve; anda control unit that makes the differential pressure control mechanism control the differential pressure so that the fluid passing through the fluid control valve has sound velocity, and makes the temperature control mechanism change the temperature from a reference temperature to comparative temperature different from the reference temperature, wherein an output value ...

Calibration data generation apparatus, calibration data generation method, and flow rate control device

A calibration data generation apparatus includes a flow rate sensor that measures the flow rate of a fluid flowing through a fluid control valve; a differential pressure control mechanism; a temperature control mechanism; and a control unit that when the fluid passing has sound velocity, uses the temperature control mechanism to change the temperature from a reference temperature to comparative temperature. In addition, the control unit includes a valve opening control part that controls the fluid control valve so that at the comparative temperature, an output value outputted from one of the position sensor and the flow rate sensor becomes equal to the reference output value of the one; and a calibration data generation part that generates the calibration data on the basis of a calibration data generation output value outputted from the other one of the position sensor and the flow rate sensor.

Fluid control apparatus, fluid control system, fluid control method, and program recording medium

Provided is a fluid control apparatus that without enhancing temporal control performance, every time, can stabilize a fluid flow rate achieved by, for example, pulse control, and eliminate fluid wasted at the time of supplying the fluid by including one flow path. A control mechanism includes a first feedback controller adapted to control a first valve on the basis of first pressure measured by a first pressure sensor. In addition, when a second valve is closed, the first pressure feedback controller controls the first valve so that the first pressure measured by the first pressure sensor reaches target burst pressure, and when and after the first pressure reaches the target burst pressure and the second valve is opened, the control mechanism is configured to control the first valve so that the flow rate of the fluid flowing through the flow path reaches a target constant flow rate.

Flow restrictor

A flow restrictor with a first disk having at least one inlet and at least one outlet and a flow path and a second disk having no flow path. The first disk and the second disk being stacked together. A mass flow controller comprising with an input, an output, a flow path, a pressure transducer and the above flow restrictor.

Sealing member and method of manufacturing the same

The present invention is mainly intended to provide a sealing member which can be easily manufactured and which is capable of sealing with high accuracy and a method of manufacturing the sealing member, wherein the sealing member is a metallic sealing member that is arranged so as to be interposed between a first surface and a second surface which are facing each other. The sealing member is provided with a first protrusion protruded toward the first surface and a pair of second protrusions protruded toward the second surface, wherein the first protrusion is arranged between the paired second protrusions and distal end portions of the first protrusion and second protrusions are mutually parallel flat surfaces.

Fluid control valve

In order to make it possible to increase a diameter and output thereof, a diaphragm structure is provided that has low repulsiveness, can be largely deformed to increase a stroke even without being applied with a large force from an actuator, and is unlikely to give rise to a defect or fault even when formed thin, and a fluid control valve is provided with the diaphragm structure and the actuator that presses the diaphragm structure, wherein the diaphragm structure is provided with: a protruding part that is formed in a tubular shape and pressed by the actuator; a brim part that spreads from a base end of the protruding part outward with respect to the protruding part; and a support part that is formed on an outer circumference of the brim part and attached to another member, and the brim part is formed in a film shape.

FLUID MIXING ELEMENT

The fluid mixing element in accordance with this invention forms a first internal flow channel whose starting end opens on an end surface of one end part and whose terminal end opens on an end surface of the other end part and a second internal flow channel whose starting end opens on a side peripheral surface of a middle part and whose terminal end opens on an end surface of the other end part. It is possible for the fluid mixing element to securely mix a first fluid flowing in a main flow channel with a second fluid flowing in a sub-flow channel by the use of a pipe with a short length with a simple arrangement. 1. A fluid mixing element that is arranged in a pipe member where a sub-flow channel where a second fluid flows is connected to a main flow channel where a first fluid flows so as to mix the first fluid and the second fluid , whereina first internal flow channel whose starting end opens on an end surface of one end part of the fluid mixing element and whose terminal end opens on an end surface of the other end part of the fluid mixing element and a second internal flow channel whose starting end opens in a side peripheral surface of a middle part between the one end part and another end part and whose terminal end opens in the end surface of the other end part are formed, andthe above-mentioned one end part fits into the main flow channel at an upstream side of a portion where the main flow channel is connected with the sub-flow channel and the above-mentioned other end part fits into the main flow channel at a downstream side of the portion where the main flow channel is connected with the sub-flow channel so that a terminal end opening of the second internal flow channel is arranged to face a starting end opening of the sub-flow channel.2. The fluid mixing element described in claim 1 , whereinan elongate direction of the terminal end part of at least one of the first internal flow channel and the second internal flow channel is extended in a diagonal ...

Flow rate control device

The flow rate control device comprises a basal plate block wherein a single input port into which a fluid flows, a single output port from which the fluid flows out, two inflow channels whose proximal ends are connected to the input port and two outflow channels whose terminal ends are connected to the output port are formed, and two flow rate control units arranged on the basal plate block, and one of the flow rate control units is arranged between one of the inflow channels and one of the outflow channels, the other flow rate control unit is arranged between the other inflow channel and the other outflow channel, and each of the flow rate control units is configured to be capable of operating independently.

Flow Rate Control Device

The flow rate control device comprises a basal plate block wherein a single input port into which a fluid flows, a single output port from which the fluid flows out, two inflow channels whose proximal ends are connected to the input port and two outflow channels whose terminal ends are connected to the output port are formed, and two flow rate control units arranged on the basal plate block, and one of the flow rate control units is arranged between one of the inflow channels and one of the outflow channels, the other flow rate control unit is arranged between the other inflow channel and the other outflow channel, and each of the flow rate control units is configured to be capable of operating independently. 1. A flow rate control device comprisinga basal plate block wherein a single input port into which a fluid flows, a single output port from which the fluid flows out, two inflow channels whose proximal ends are connected to the input port, and two outflow channels whose terminal ends are connected to the output port are formed, andtwo flow rate control units arranged on the basal plate block, whereinone of the flow rate control units is arranged between one of the inflow channels and one of the outflow channels, the other flow rate control unit is arranged between the other inflow channel and the other outflow channel, and each of the flow rate control units is configured to be capable of operating independently.2. The flow rate control device described in claim 1 , whereinin a case where a flow rate of the fluid is controlled by one of the flow rate control units, the basal plate block and two flow rate control units are configured so that the fluid does not flow to the output port from the input port through the other flow rate control unit.3. The flow rate control device described in claim 1 , whereina flow rate control characteristic of each flow rate control unit differs, and further comprisingan operation unit decision part that determines which flow rate ...

Flow rate ratio control device with flow velocity control mode

A flow rate ratio control device is provided with a main flow path, a plurality of branch flow paths that branch off from a terminus of the main flow path, a plurality of fluid control devices that are provided respectively on each branch flow path, and that are each equipped with a valve and a pressure-based flow rate sensor that is disposed downstream of the valve, and an operation setting unit that establishes settings such that, based on the target flow rate ratio, any one fluid control device from among the plurality of fluid control devices is made to operate in a flow velocity control mode in which the flow velocity of a fluid is controlled upstream of each valve, and the remaining fluid control devices are made to operate in a flow rate control mode in which the flow rate is controlled based on the target flow rates.

FLUID CONTROL APPARATUS, FLUID CONTROL SYSTEM, FLUID CONTROL METHOD, AND PROGRAM RECORDING MEDIUM

In order to provide a fluid control apparatus that without enhancing temporal control performance, every time, can stabilize a fluid flow rate achieved by, for example, pulse control, and eliminate fluid wasted at the time of supplying the fluid by including one flow path, a control mechanism includes a first feedback controller adapted to control a first valve on the basis of first pressure measured by a first pressure sensor. In addition, when a second valve is closed, the first pressure feedback controller controls the first valve so that the first pressure measured by the first pressure sensor reaches target burst pressure, and when and after the first pressure reaches the target burst pressure and the second valve is opened, the control mechanism is configured to control the first valve so that the flow rate of the fluid flowing through the flow path reaches a target constant flow rate. 1. A fluid control apparatus comprising: a fluid device module provided on an upper stream side than a second valve provided in a flow path; and a control mechanism adapted to control at least a part of the fluid device module , wherein a fluid resistor provided on the upper stream side than the second valve;', 'a first pressure sensor provided on an upper stream side than the fluid resistor; and', 'a first valve provided on an upper stream side than the first pressure sensor,, 'the fluid device module comprises a first feedback controller adapted to control the first valve on a basis of first pressure measured by the first pressure sensor,', 'when the second valve is closed, the first pressure feedback controller controls the first valve so that the first pressure measured by the first pressure sensor reaches target burst pressure, and', 'when and after the first pressure reaches the target burst pressure and the second valve is opened, the control mechanism is configured to control the first valve so that a flow rate of fluid flowing through the flow path reaches a target ...

FLOW RATE CHARACTERISTIC FUNCTION IDENTIFICATION METHOD, FLOW RATE CHARACTERISTIC FUNCTION IDENTIFICATION DEVICE, STORAGE MEDIUM STORING FLOW RATE CHARACTERISTIC FUNCTION IDENTIFICATION PROGRAM, AND FLOW RATE SENSOR OR FLOW RATE CONTROL DEVICE USING THEM

To provide a flow rate characteristic function identification method, flow rate sensor, and flow rate characteristic function identification program that can set a flow rate characteristic function reflecting not only the type or shape of a fluid resistance but also the effects of states such as an attachment state of the fluid resistance, and calculate a flow rate with higher accuracy. An actual flow rate characteristic function, which is a flow rate characteristic function when an actual fluid resistance is provided in a flow path, is identified on the basis of multiple flow rate characteristic functions including a first reference flow rate characteristic function and a second reference flow rate characteristic function, and predetermined weighting.

Mass flow controller verifying system, verifying method and verifying program

In a mass flow controller verifying system, there are provided a verifying gas line arranged in parallel to influent flow gas lines and joined into a post-confluent flow gas line, a reference volume calculating portion adapted to calculate a reference volume determined for a specified piping of a gas piping system, a verifying parameter calculating portion adapted to calculate a verifying parameter based on time series data of a measurement pressure measured by a pressure measurement unit during a control of a flow rate by a mass flow controller to be verified, and a comparing portion adapted to compare a reference parameter set based on the reference volume and the verifying parameter, whereby the verifying system can be introduced into an existing gas piping system used in a semiconductor manufacturing process and so forth at a low cost and is capable of verifying a mass flow controller quickly and accurately.

FLOW RATE CONTROL APPARATUS, FLOW RATE CONTROL METHOD, AND PROGRAM RECORDING MEDIUM

Provided is a flow rate control apparatus that includes a flow restrictor, a downstream side valve, a downstream side pressure sensor, first and second flow rate calculators, and a flow rate controller. The downstream side valve is disposed downstream of the flow restrictor in a flow path. The downstream side pressure sensor measures a pressure between the flow restrictor and the downstream side valve. The first flow rate calculator calculates a first flow rate of fluid flowing through the flow restrictor. The second flow rate calculator calculates a second flow rate of fluid flowing out of the downstream side valve on the basis of the first flow rate and the temporal variation in downstream side pressure measured by the downstream side pressure sensor. The flow rate controller controls the downstream side valve on the basis of a set flow rate and the second flow rate. 1. A flow rate control apparatus comprising:a flow restrictor disposed in a flow path;a downstream side valve disposed downstream of the flow restrictor;a downstream side pressure sensor to measure a pressure in a volume of the flow path between the flow restrictor and the downstream side valve;a first flow rate calculator to calculate a first flow rate of fluid flowing through the flow restrictor;a second flow rate calculator to calculate a second flow rate of fluid flowing out of the downstream side valve on a basis of the first flow rate and a temporal variation in a downstream side pressure measured by the downstream side pressure sensor; anda flow rate controller to control the downstream side valve on a basis of a set flow rate and the second flow rate.2. The flow rate control apparatus according to claim 1 , wherein the second flow rate calculator comprises:a variation calculation section to calculate the temporal variation in downstream side pressure, anda flow rate computing section to calculate the second flow rate on a basis of a difference between the first flow rate and a converted flow ...

Pressure type flowmeter and fluid control device

A pressure type flowmeter includes a fluid resistance element provided in a flow path through which fluid flows, and in which a resistance flow path communicating with the flow path is formed, an upstream-side pressure sensor that detects upstream-side pressure of the fluid resistance element, and a downstream-side pressure sensor that detects downstream-side pressure of the fluid resistance element, in which the fluid resistance element is sandwiched and fixed by a pair of sandwiching components sealing components having a sheet-like shape are provided between the fluid resistance element and the sandwiching components and protrusions that partially press the sealing components are formed on at least one of the fluid resistance element and the sandwiching components.

Fluid measurement system

This invention is to improve procedures of maintenance of a fluid measurement system having a fluid measurement device and a control device. The fluid measurement system has a fluid measurement device and a control device to control the fluid measurement device, and the fluid measurement device comprises a fluid sensor and a related data store part configured to store fluid calculation related data for calculation of one or more fluid parameters with measurement data obtained by the fluid sensor, and the control device obtains the fluid calculation related data from the related data store part and calculates the one or more fluid parameters with the measurement data of the fluid sensor and the fluid calculation related data.

FLUID CONTROL DEVICE, RECORDING MEDIUM RECORDED WITH CONTROL PROGRAM, AND CONTROL METHOD

Provided is a fluid control device that achieves high sealing performance at full closure, and can suppress damage to a valve body or a valve seat surface even without mechanical accuracy improvements. The fluid control device includes: a fluid control valve provided in a flow path through which fluid flows: and a control mechanism that controls the fluid control valve. The fluid control valve includes: a valve seat surface; a valve body that contacts and separates from the valve seat surface; and an actuator that drives the valve body. Further, the control mechanism includes a speed adjustment part that when the valve body is brought close to the valve seat surface in order to fully close the fluid control valve, and the valve seat surface and the valve body reach a predetermined distance apart, reduces the moving speed of the valve body more than before reaching the predetermined distance. 1. A fluid control device comprising:a fluid control valve provided in a flow path through which fluid flows: anda control mechanism adapted to control the fluid control valve, whereinthe fluid control valve comprises:a valve seat surface;a valve body adapted to contact with and separate from the valve seat surface; andan actuator adapted to drive the valve body, andthe control mechanism comprisesa speed adjustment part that when the valve body is brought close to the valve seat surface in order to fully close the fluid control valve, and a distance between the valve seat surface and the valve body reaches a predetermined distance, more reduces a moving speed of the valve body than before reaching the predetermined distance.2. The fluid control device according to claim 1 , whereinthe fluid control valve further comprisesa displacement sensor adapted to detect the distance between the valve seat surface and the valve body, andthe speed adjustment part is configured to, when the distance detected by the displacement sensor is equal to or less than the predetermined distance, more ...

FLOW RESTRICTOR

A flow restrictor with a first disk having at least one inlet and at least one outlet and a flow path and a second disk having no flow path. The first disk and the second disk being stacked together. A mass flow controller comprising with an input, an output, a flow path, a pressure transducer and the above flow restrictor.

SEALING MEMBER AND METHOD OF MANUFACTURING THE SAME

The present invention is mainly intended to provide a sealing member which can be easily manufactured and which is capable of sealing with high accuracy and a method of manufacturing the sealing member, wherein the sealing member is a metallic sealing member that is arranged so as to be interposed between a first surface and a second surface which are facing each other. The sealing member is provided with a first protrusion protruded toward the first surface and a pair of second protrusions protruded toward the second surface, wherein the first protrusion is arranged between the paired second protrusions and distal end portions of the first protrusion and second protrusions are mutually parallel flat surfaces. 1. A sealing member which is a metallic sealing member arranged so as to be interposed between a first surface and a second surface which are facing each other , comprising:a first protrusion protruding toward the first surface; anda pair of second protrusions protruding toward the second surface, whereinthe first protrusion is arranged between the paired second protrusions, anddistal end portions of the first protrusion and second protrusions are mutually parallel flat surfaces.2. The sealing member according to claim 1 , wherein the distal end portion of the first protrusion is a flat surface which is parallel to the first surface claim 1 , andthe distal end portions of the second protrusions are flat surfaces which are parallel to the second surface.3. The sealing member according to claim 1 , wherein claim 1 , in a transverse section perpendicular to an extending direction of the sealing member claim 1 ,a side surface of the first protrusion is curved so that a width of the first protrusion is widened toward the second surface from the first surface, anda side surface of each of the second protrusions is curved so that a width of each of the second protrusions is widened toward the first surface from the second surface.4. The sealing member according to ...

MASS FLOW CONTROLLER VERIFYING SYSTEM, VERIFYING METHOD AND VERIFYING PROGRAM

In a mass flow controller verifying system, there are provided a verifying gas line arranged in parallel to influent flow gas lines and joined into a post-confluent flow gas line, a reference volume calculating portion adapted to calculate a reference volume determined for a specified piping of a gas piping system, a verifying parameter calculating portion adapted to calculate a verifying parameter based on time series data of a measurement pressure measured by a pressure measurement unit during a control of a flow rate by a mass flow controller to be verified, and a comparing portion adapted to compare a reference parameter set based on the reference volume and the verifying parameter, whereby the verifying system can be introduced into an existing gas piping system used in a semiconductor manufacturing process and so forth at a low cost and is capable of verifying a mass flow controller quickly and accurately.

Fluid control valve and fluid control device

The fluid control valve comprises: a valve seat constituting a part of a valve chamber; a valve body that is installed in the valve chamber and moves in a contacting/separating direction with respect to the valve seat; an actuator configured to move the valve body; and a plunger that transfers power of the actuator to the valve body. The valve body and the plunger are in contact with each other via an inclination suppressing protrusion configured to suppress an inclination of the plunger, the inclination being caused by contact between the valve body and the valve seat.

FLUID MEASUREMENT SYSTEM

This invention is to improve procedures of maintenance of a fluid measurement system having a fluid measurement device and a control device. The fluid measurement system has a fluid measurement device and a control device to control the fluid measurement device, and the fluid measurement device comprises a fluid sensor and a related data store part configured to store fluid calculation related data for calculation of one or more fluid parameters with measurement data obtained by the fluid sensor, and the control device obtains the fluid calculation related data from the related data store part and calculates the one or more fluid parameters with the measurement data of the fluid sensor and the fluid calculation related data. 1. A fluid measurement system comprising:a fluid measurement device comprising a fluid sensor and a related data store part configured to store fluid calculation related data for calculation of one or more fluid parameters with measurement data obtained by the fluid sensor; anda control device configured to control the fluid measurement device, whereinthe control device obtains the fluid calculation related data from the related data store part and calculates the one or more fluid parameters with the measurement data of the fluid sensor and the fluid calculation related data.2. The fluid measurement system described in claim 1 , further comprising a plurality of fluid measurement devices.3. The fluid measurement system described in claim 1 , whereinthe fluid measurement device has an AD convertor configured to convert an analog signal output from the fluid sensor into a digital signal which comprises the measurement data; andthe fluid calculation related data includes AD conversion characteristic data showing an AD conversion characteristic of the AD convertor.4. The fluid measurement system described in claim 3 , whereinthe fluid measurement device has a processor configured to obtain the digital signal from the AD convertor and configured to ...

Fluid resistance device

In order to be able to stably manufacture a fluid resistance device having the same resistance characteristics while preventing fluid such as gas from leaking, a fluid resistance device is provided with a fluid resistance element having a resistance flow passage, a base member and a fixing member for holding the fluid resistance element to be fixed between the base member and the fixing member, and a thin plate-shaped seal member interposed between the fixing member and the fluid resistance element.

FLOW RATE RATIO CONTROLLING APPARATUS

The flow rate ratio controlling apparatus comprises differential pressure flow rate controllers (MFC, MFC) of the same type and a control processing mechanism (C) for giving commands to the flow rate controllers (MFC, MFC) to control them. The flow rate controllers (MFC, MFC) are provided with respective branched flow channels (BL, BL) branched from a terminal of a main flow channel (ML) in opposite directions. The flow rate controller (MFC) arranged in the branched flow channel (BL) is operated so that a detected pressure achieves a predetermined target pressure; a target flow rate for the flow rate controller (MFC) arranged in the branched flow channel (BL) is determined from the total measured flow rate and the predetermined flow rate ratio, and the flow rate controller (MFC) is operated so as to achieve the target flow rate. 1a differential pressure flow rate controller wherein a flow rate control valve to control a flow rate of a fluid flowing in an internal flow channel, a first pressure sensor, a fluid resistance, and a second pressure sensor are arranged serially in this order in the internal flow channel and that can measure the flow rate of the fluid based on the detected pressures detected by the first pressure sensor and the second pressure sensor, and a control processing mechanism that is arranged in the internal flow channel to give commands to the differential pressure flow rate controller to control it, whereinthe differential pressure flow rate controller is arranged respectively in each of the multiple branched flow channels branched from a terminal of a main flow channel,for the differential pressure flow rate controller arranged in one branched flow channel, the second pressure sensor is arranged to locate at an upstream side of the flow rate control valve, the first pressure sensor and the fluid resistance, and the differential pressure flow rate controller is operated so that a detected pressure detected by the second pressure sensor achieves ...

Pressure type flowmeter and fluid control device

A pressure type flowmeter includes a fluid resistance element provided in a flow path through which fluid flows, and in which a resistance flow path communicating with the flow path is formed, an upstream-side pressure sensor that detects upstream-side pressure of the fluid resistance element, and a downstream-side pressure sensor that detects downstream-side pressure of the fluid resistance element, in which the fluid resistance element is sandwiched and fixed by a pair of sandwiching components sealing components having a sheet-like shape are provided between the fluid resistance element and the sandwiching components and protrusions that partially press the sealing components are formed on at least one of the fluid resistance element and the sandwiching components.

Fluid control valve

In order to make it possible to increase a diameter and output thereof, a diaphragm structure is provided that has low repulsiveness, can be largely deformed to increase a stroke even without being applied with a large force from an actuator, and is unlikely to give rise to a defect or fault even when formed thin, and a fluid control valve is provided with the diaphragm structure and the actuator that presses the diaphragm structure, wherein the diaphragm structure is provided with: a protruding part that is formed in a tubular shape and pressed by the actuator; a brim part that spreads from a base end of the protruding part outward with respect to the protruding part; and a support part that is formed on an outer circumference of the brim part and attached to another member, and the brim part is formed in a film shape.

FLOW RATE RATIO CONTROL DEVICE, PROGRAM FOR FLOW RATE RATIO CONTROL DEVICE, AND FLOW RATE RATIO CONTROL METHOD

A flow rate ratio control device is provided with a main flow path, a plurality of branch flow paths that branch off from a terminus of the main flow path, a plurality of fluid control devices that are provided respectively on each branch flow path, and that are each equipped with a valve and a pressure-based flow rate sensor that is disposed downstream of the valve, and an operation setting unit that establishes settings such that, based on the target flow rate ratio, any one fluid control device from among the plurality of fluid control devices is made to operate in a flow velocity control mode in which the flow velocity of a fluid is controlled upstream of each valve, and the remaining fluid control devices are made to operate in a flow rate control mode in which the flow rate is controlled based on the target flow rates. 1. A flow rate ratio control device comprising:a main flow path;a plurality of branch flow paths that branch off from a terminus of the main flow path;a plurality of fluid control devices that are provided respectively on each branch flow path, and that are each equipped with a valve and a pressure-based flow rate sensor that is disposed on a downstream side of the valve;a target receiving unit that receives target a flow rate ratio which is a flow rate distribution ratio for a fluid flowing through each branch flow path;a target flow rate calculating unit that, based on a sum total of measured flow rates of the fluid flowing through each branch flow path as measured by the respective flow rate sensors, and on the target flow rate ratio, calculates a target flow rate for each branch flow path; andan operation setting unit that establishes settings such that, based on the target flow rate ratio, any one fluid control device from among the plurality of fluid control devices is made to operate in a flow velocity control mode in which the flow velocity of a fluid is controlled on an upstream side of each valve, and the remaining fluid control ...

Fluid mechanism, support member constituting fluid mechanism and fluid control system

This invention provides a fluid mechanism that can arrange a plurality of fluid device units and external fluid devices mounted as a set on the fluid device units effectively and compactly. Each of the fluid device units is arranged with respective side surfaces in a longitudinal direction of the fluid device unit tightly attached, and the external fluid devices are arranged side-by-side external to and outside of the fluid device unit in the width direction. Furthermore, as for an introducing path and a discharging path that connect the external fluid devices and the fluid device unit, the introducing path, which is short, is connected to the discharging path, which is long.

Preparation of light electroconductive screen

Flow rate ratio controlling apparatus

A flow rate ratio controlling apparatus not needing devices of a plurality of types and enabling reduction of the number of types of parts and the manufacturing cost. The apparatus comprises differential pressure flow rate controllers (MFC1, MFC2) of the same type and a controlling mechanism (C) for giving commands to the flow rate controllers (MFC1, MFC2) to control them. The flow rate controllers (MFC1, MFC2) are provided to respective branch passages (BL1, BL2) branched from the terminal of a main passage (ML) in opposite directions. The flow rate controller (MFC1) disposed in the branch passage (BL1) is operated so that the detected pressure reaches a predetermined target pressure; the target flow rate for the flow rate controller (MFC2) disposed in the branch passage (BL2) is determined from the measured total flow rate and the predetermined flow rate ratio, and the flow rate controller (MFC2) is operated so as to achieve the target flow rate.

Electrophotographic device

Transcription device of electrophotographic copier

Electrophotographic photosensitive screen

Flow control device, flow measurement mechanism, and diagnosis device and diagnosis program used for flow control device including flow measurement mechanism

【課題】流量制御装置に用いられるセンサ等の部品点数を低減しつつ、流量装置内で生じる詰まりなどの不具合や測定流量値に生じている異常を精度よく診断することができる流量制御装置、流量制御装置に用いられる診断装置及び診断用プログラムを提供する。 【解決手段】流量制御装置１００に、前記流路ＭＬ上に設けられた流体抵抗４と、流体抵抗の上流側又は下流側のいずれか一方に設けられた圧力センサ３と、前記測定流量値又は前記圧力センサで測定される測定圧力値に基づいて、前記流路ＭＬを流れる流体の状態が安定状態であるかどうかを判定する安定状態判定部５と、前記安定状態判定部５が流体の状態が安定状態であると判定している場合に、前記測定圧力値の変化量に基づいて前記測定流量値の異常を診断する異常診断部６と、を備えた。 【選択図】図1

Pressure type flowmeter and fluid control device

【課題】流体抵抗素子の流量特性に悪影響を与えることなく、シート状のシール部材を用いたシール性を向上させる。【解決手段】流体が流れる流路Ｌに設けられ、流路Ｌに連通する抵抗流路ＲＬが形成された流体抵抗素子ＦＲと、流体抵抗素子ＦＲの上流側圧力を検出する上流側圧力センサＰＳ１と、流体抵抗素子ＦＲの下流側圧力を検出する下流側圧力センサＰＳ２とを具備し、流体抵抗素子ＦＲが一対の挟持部材４１、４２により挟持して固定されており、流体抵抗素子ＦＲと挟持部材４１、４２との間にはシート状のシール部材５１、５２が設けられており、流体抵抗素子ＦＲ又は挟持部材４１、４２の少なくとも一方には、シール部材５１、５２を部分的に押圧する突起部６１、６２が形成されている。【選択図】図２

Electrostatic chuck device, pressure calculation method and program

An electrostatic chuck device for adsorbing an object by electrostatic force comprises an adsorption plate that has an adsorption surface to adsorb the object, a gas supplying line that supplies a thermally conductive gas to a gap between the adsorption surface and an adsorbed surface of the object and a pressure calculation section that calculates the pressure of the thermally conductive gas in the gap. The gas supplying line is provided with a flow rate resistive element that serves as a resistance when the thermally conductive gas flows. The pressure calculation section calculates the pressure of the thermally conductive gas in the gap based on the primary side pressure of the flow rate resistive element, the flow rate of the thermally conductive gas passing through the flow rate resistive element and the flow characteristic of the flow rate resistive element.

流体制御弁

【課題】流体制御弁としての健全性について常に正確に診断する事が可能な流体制御弁を提供する。 【解決手段】弁座６３と、前記弁座６３に対して接離可能に設けられた弁体７と、印加されている電流又は電圧に基づいて、自身が出力している力又は自身の変位が推定可能なアクチュエータ３と、前記アクチュエータ３と前記弁体７との間に設けられ、前記アクチュエータ３の変位を前記弁体７へと伝達するプランジャ５と、前記アクチュエータ３から出力されている力、又は、前記アクチュエータ３、前記プランジャ５、もしくは、前記弁体７の変位を測定するモニタリングセンサと、を備えた。 【選択図】図２

Fluid resistance element, fluid controller, and method of manufacturing fluid resistance element

In order to allow a fluid resistance element to be fixed to the channel while enjoying various benefits of a channel delineating member made from a ceramic, the fluid resistance element includes: a channel delineating member made from a ceramic and having one or a plurality of resistance channels; and a covering member made from a metal and covering an outer peripheral surface of the channel delineating member. The covering member has a bulged portion on an inner peripheral surface of the covering member, the bulged portion bulging toward the outer peripheral surface of the channel delineating member.

ピエゾアクチュエータ、及び、流体制御弁

【課題】例えば液体材料を従来よりも効率よく気化させることができるピエゾアクチュエータ、及び、流体制御弁を提供する。【解決手段】圧電セラミックス層と電極層が交互に積層されたピエゾスタックと、前記ピエゾスタックの少なくとも一部に直流電圧を印加して変位させる直流電圧印加回路と、前記ピエゾスタックの少なくとも一部に所定周波数以上の電圧を印加して振動させる振動電圧印加回路と、を備えた。【選択図】図1

流量制御装置の検査方法、流量制御装置の検査システム、及び、流量制御装置の検査システム用プログラム

【課題】待ち時間及び実際に検査にかかる時間を短くしながら、低流量域における検査精度をさらに向上させることができる流量制御装置の検査方法を提供する。【解決手段】流路を流れる流体の流量が所定流量となった、又は、前記流路を流れる流体の圧力が所定圧力となった以降は、検査対象となる流量制御装置４を流量制御状態とするとともに、基準となる流量制御装置５の前記第２バルブ制御部５１には前記第２バルブの開度を一定で保たせて、前記基準となる流量制御装置を流量非制御状態とするように切り替えるようにした。【選択図】図２

流体機構及び該流体機構を構成する支持部材

【課題】複数の流体機器ユニットとそれらにセットで取り付けられる外部流体機器とを効率よくコンパクトに配置可能な流体機構を提供する。 【解決手段】各流体機器ユニットの長手方向側面同士を密着させて配置するとともに、外部流体機器Ｖ１、Ｖ２を、流体機器ユニットの幅方向外側に並べて配置するようにした。さらに、外部流体機器Ｖ１、Ｖ２と流体機器ユニットとを接続する流入経路９ｃ及び流出経路９ｄにおいて、短い流入経路９ｃは長い流出経路９ｄに接続するようにした。 【選択図】図８

Flow calculation system, accumulated type gas panel device and base plate

流量比率制御、流量または圧力制御、およびオーバーフロー制御用の流路を備えたハイブリッド流量比率制御システム

【課題】流体流量を反復的かつ再現性良く供給できる流量比率制御システムを提供する。【解決手段】総入口流量が導入される入口と、前記入口の下流の分岐流路に並列に配置され、それぞれが可変流量制御バルブを備え、総入口流量のうちそれぞれの分配分を流す３つ以上の分配流路と、各前記可変流量制御バルブをフィードバックループで制御するために、３つ以上の分配流路の前記各可変流量制御バルブに接続された制御装置と、を備え、前記３つ以上の分配流路のうちの少なくとも第１の分配流路の流量を、流量比率制御モードに従って、前記総入口流量の所定の流量比率に応じて制御するように構成され、前記３つ以上の分配流路のうちの少なくとも第２の分配流路の流量を、流量制御モードまたは圧力制御モードのいずれかで制御するように構成され、前記３つ以上の分配流路のうちの第３の分配流路をオーバーフローモードで制御するように構成した。【選択図】図１

流体制御弁及び流体制御装置

【課題】プランジャに対してネジ部材をネジ止めする構造の流体制御弁において、組立時にダイアフラムに歪みが生じ難くする。【解決手段】弁座１０に対して接離方向へ移動できるように設置された弁体２０をアクチュエータ３０によって移動させる流体制御弁であって、前記弁体と前記アクチュエータとの間に介在し、前記アクチュエータの動力を前記弁体に伝達するプランジャ４０と、前記プランジャの周面に接続されたダイアフラム６０とを具備し、前記プランジャが、前記ダイアフラムに接続された第１分割体４１と、前記第１分割体よりも前記アクチュエータ側に配置されると共に、前記ネジ部材５１がネジ止めされる第２分割体４２とを備え、前記第２分割体を、前記第１分割体に対し、その周方向へ回転できるように構成する。【選択図】図２

流体供給装置及びガス供給方法

【課題】静電チャック装置の吸着面に熱伝導性ガスを供給するガス供給システムにおいて、複数の流路及びガス制御機器を効率よく配置し、省スペース化できるようにする。 【解決手段】静電チャック装置の吸着面に熱伝導性ガスを供給するためのものであり、ガス制御機器が途上に設けられて内部を流れる前記熱伝導性ガスを制御できるように構成された複数の流路が形成されたブロック体を備える流体供給装置であって、前記複数の流路が前記ブロック体の内部で二層構造を成すように形成されており、当該複数の流路のうち、前記吸着面に熱伝導性ガスを供給する複数のガス供給流路が、前記二層構造における一方の層を構成するように形成され、前記複数のガス供給流路内の熱伝導性ガスを排気する排気流路が、前記二層構造における他方の層を構成するように形成されている流体供給装置。 【選択図】図１

位置検索システム

(57)【要約】 【課題】 従来よりも高い精度で移動通信端末所持者の 現在位置の測定及び近未来の位置の推測をすることがで きる位置検索システムを提供することを課題とする。 【解決手段】 移動通信網を利用して移動通信端末所持 者の位置を検索し、その位置を推測して検索依頼者に通 知する位置検索システムにおいて、移動通信網を利用し て得られた前記移動通信端末所持者の位置データと、予 め用意したデータベース６〜７とを用いて処理し、移動 通信端末所持者の位置を推定することを特徴とする。

Flow restrictor

A flow restrictor with a first disk having at least one inlet and at least one outlet and a flow path and a second disk having no flow path. The first disk and the second disk being stacked together. A mass flow controller comprising with an input, an output, a flow path, a pressure transducer and the above flow restrictor.

流体制御装置

【課題】 流路を流れる流体を精度良く制御できる流体制御装置を提供する。【解決手段】内部に流体が流れる流路を有するブロック体と、前記流路内に設けられ、前記流体が通過する抵抗体と、前記抵抗体の上流側の圧力を検出する第１圧力センサと、前記抵抗体の下流側の圧力を検出する第２圧力センサと、前記第１圧力センサ及び前記第２圧力センサの検出値に基づき前記流体を制御する流体制御弁とを具備し、前記ブロック体が、内部に前記流路の一部を構成すると共に前記抵抗体が収容されている収容部をさらに有しており、前記流路の前記収容部よりも下流側を構成する下流側流路は、基端が前記収容部における前記抵抗体を通過した後の流体が流れる下流側領域に接続されており、前記第２圧力センサが、前記収容部の下流側領域又は前記下流側流路の基端近傍に接続する。【選択図】図１

ガス供給システム

【課題】半導体製造チャンバーにおける複数のガス供給口に対し、等しい濃度比の成分ガスからなる材料ガスを、それぞれ異なる流量に制御して供給する。 【解決手段】各ガス供給口Ｃにそれぞれ接続される複数のガス供給装置１０を具備し、前記各ガス供給装置１０が、各種のガスが個別に流れる複数の成分ガス供給管１と、各成分ガス供給管１を流れるガスの流量をそれぞれ制御する流量制御機構４と、各成分ガス供給管１を束ねる材料ガス供給管２とを具備しており、前記流量制御機構４が、各成分ガス供給管１にそれぞれ上流側から順に設けられた流量制御弁Ｖ、個別圧力センサＰ及び流体抵抗素子Ｒと、前記材料ガス供給管２に設けられた共通圧力センサＰＣと、各成分ガス供給管１を流れるガス流量を、個別圧力センサＰで測定した圧力及び前記共通圧力センサＰＣで測定した圧力から算出し、この算出ガス流量に基づいて流量制御弁Ｖを制御する制御部４１とを具備する。 【選択図】図２