24-11-2022 дата публикации
Номер: US20220375901A1
Принадлежит:
According to one embodiment, a method of manufacturing a semiconductor device includes forming a plurality of stacked bodies on a substrate, each of the stacked bodies includes a plurality of semiconductor chips. The method further includes forming a plurality of first wires on the stacked bodies. The first wires connecting the stacked bodies to each other. The method further includes forming a resin layer on the stacked bodies and the first wires, then thinning he resin layer until the first wires are exposed. 1. A method of manufacturing a semiconductor device , the method comprising:forming a plurality of stacked bodies on a substrate, the stacked bodies includes a plurality of semiconductor chips;forming a plurality of first wires to connect the stacked bodies to each other;forming a resin layer on the stacked bodies and the first wires; andremoving portions of the resin layer until the first wires are exposed at an upper surface of the resin layer.2. The method of manufacturing a semiconductor device according to claim 1 , further comprising:forming a plurality of second wires on the stacked bodies, the second wires extending in a stacking direction of the semiconductor chips, whereinthe resin layer is formed on the stacked bodies, the first wires, and the second wires.3. The method of manufacturing a semiconductor device according to claim 1 , whereinat least one of the stacked bodies includes a metal plate on a semiconductor chip of the stacked body, anda first wire of the plurality of first wires is connected to the metal plate.4. The method of manufacturing a semiconductor device according to claim 3 , whereinat least one of the stacked bodies includes a first semiconductor chip and a second semiconductor chip,the second semiconductor chip has a planar area that is less than a planar area of the first semiconductor chip, andthe metal plate is on the first semiconductor chip.5. The method of manufacturing a semiconductor device according to claim 4 , wherein ...
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