Настройки

Укажите год
-

Небесная энциклопедия

Космические корабли и станции, автоматические КА и методы их проектирования, бортовые комплексы управления, системы и средства жизнеобеспечения, особенности технологии производства ракетно-космических систем

Подробнее
-

Мониторинг СМИ

Мониторинг СМИ и социальных сетей. Сканирование интернета, новостных сайтов, специализированных контентных площадок на базе мессенджеров. Гибкие настройки фильтров и первоначальных источников.

Подробнее

Форма поиска

Поддерживает ввод нескольких поисковых фраз (по одной на строку). При поиске обеспечивает поддержку морфологии русского и английского языка
Ведите корректный номера.
Ведите корректный номера.
Ведите корректный номера.
Ведите корректный номера.
Укажите год
Укажите год
Применить Всего найдено 5. Отображено 3.
03-04-2018 дата публикации

Physical vapor deposition system using backside gas cooling of workpieces

Номер: US0009932668B2
Автор: Ravi Mullapudi, Harish Varma Penmethsa, Harshal T. Vasa, Srikanth Dasaradhi, Lee LeBlanc, MULLAPUDI RAVI, PENMETHSA HARISH VARMA, VASA HARSHAL T, DASARADHI SRIKANTH, LEBLANC LEE, Mullapudi Ravi, Penmethsa Harish Varma, Vasa Harshal T., Dasaradhi Srikanth, LeBlanc Lee
Принадлежит: Tango Systems Inc., TANGO SYSTEMS INC, Tango Systems, Inc.

A circular PVD chamber has a plurality of sputtering targets mounted on a top wall of the chamber. A pallet in the chamber is coupled to a motor for rotating the pallet about its center axis. The pallet has a diameter less than the diameter of the circular chamber. The pallet is also shiftable in an XY direction to move the center of the pallet beneath any of the targets so all areas of a workpiece supported by the pallet can be positioned directly below any one of the targets. A scanning magnet is in back of each target and is moved, via a programmed controller, to only be above portions of the workpiece so that no sputtered material is wasted. For depositing a material onto small workpieces, a cooling backside gas volume is created between the pallet and the underside of sticky tape supporting the workpieces.

Подробнее
Номер записи: 1
27-04-2017 дата публикации

PHYSICAL VAPOR DEPOSITION SYSTEM USING BACKSIDE GAS COOLING OF WORKPIECES

Номер: US20170114448A1
Автор: Ravi Mullapudi, Harish Varma Penmethsa, Harshal T. Vasa, Srikanth Dasaradhi, Lee LaBlanc, MULLAPUDI RAVI, PENMETHSA HARISH VARMA, VASA HARSHAL T, DASARADHI SRIKANTH, LABLANC LEE, Mullapudi Ravi, Penmethsa Harish Varma, Vasa Harshal T., Dasaradhi Srikanth, LaBlanc Lee
Принадлежит: Tango Systems Inc

A circular PVD chamber has a plurality of sputtering targets mounted on a top wall of the chamber. A pallet in the chamber is coupled to a motor for rotating the pallet about its center axis. The pallet has a diameter less than the diameter of the circular chamber. The pallet is also shiftable in an XY direction to move the center of the pallet beneath any of the targets so all areas of a workpiece supported by the pallet can be positioned directly below any one of the targets. A scanning magnet is in back of each target and is moved, via a programmed controller, to only be above portions of the workpiece so that no sputtered material is wasted. For depositing a material onto small workpieces, a cooling backside gas volume is created between the pallet and the underside of sticky tape supporting the workpieces.

Подробнее
Номер записи: 2
19-07-2018 дата публикации

Physical vapor deposition method using backside gas cooling of workpieces

Номер: US20180202040A1
Автор: Harish Varma Penmethsa, Harshal T. Vasa, Lee LaBlanc, Ravi Mullapudi, Srikanth Dasaradhi
Принадлежит: Tango Systems Inc

A circular PVD chamber has a plurality of sputtering targets mounted on a top wall of the chamber. A pallet in the chamber is coupled to a motor for rotating the pallet about its center axis. The pallet has a diameter less than the diameter of the circular chamber. The pallet is also shiftable in an XY direction to move the center of the pallet beneath any of the targets so all areas of a workpiece supported by the pallet can be positioned directly below any one of the targets. A scanning magnet is in back of each target and is moved, via a programmed controller, to only be above portions of the workpiece so that no sputtered material is wasted. For depositing a material onto small workpieces, a cooling backside gas volume is created between the pallet and the underside of sticky tape supporting the workpieces.

Подробнее
Номер записи: 3