23-05-2019 дата публикации
Номер: US20190159331A1
A wafer-based charged particle accelerator includes a charged particle source and at least one RF charged particle accelerator wafer sub-assembly and a power supply coupled to the at least one RF charged particle accelerator wafer sub-assembly. The wafer-based charged particle accelerator may further include a beam current-sensor. The wafer-based charged particle accelerator may further include at least a second RF charged particle accelerator wafer sub-assembly and at least one ESQ charged particle focusing wafer. Fabrication methods are disclosed for RF charged particle accelerator wafer sub-assemblies, ESQ charged particle focusing wafers, and the wafer-based charged particle accelerator. 1. A wafer-based charged particle accelerator , comprising:a charged particle source; 'a wafer having electrical isolation between at least a first and a second electrically conductive electrode,', 'at least one RF charged particle accelerator wafer sub-assembly comprisingwherein at least the first and the second electrode are disposed on respective and opposing first and second sides of the wafer, and create an electric field,further wherein the wafer has one or more orifices through which a charged particle beam can travel, encountering the electric field generated by the at least first and second electrode, a) a thin film inductor in series with an air gap capacitor, or', 'b) a coplanar waveguide resonator,, 'further wherein the second electrode is in the form of an RF resonator configured as either'} 'RF voltage-generating electronics disposed on the substrate; and', 'so as to transform a low voltage on the substrate to a high voltage on the second side of the substrate; and'}a power supply operatively coupled to the at least one RF charged particle accelerator wafer sub-assembly.2. The wafer-based charged particle accelerator of claim 1 , further comprising a beam current-sensor disposed in eithera) a single RF wafer, orb) a separate wafer disposed in the drift space.3. The ...
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